Particle Production in High Density Silane Plasma

2002 ◽  
Vol 737 ◽  
Author(s):  
Z. Shen ◽  
T. Kim ◽  
U. Kortshagen ◽  
P. H. McMurry ◽  
S. A. Campbell

ABSTRACTTo understand the mechanisms of nanoparticle formation and its potential applications, we have investigated silicon particles formed in various gasses in an inductive coupled plasma (ICP) system and have measured their structural properties by electron microscopy. Particle generation in pure SiH4 and SiH4/H2 are reported. ICP silane plasmas are shown to be an interesting and versatile source of nanoparticles. Three regimes are mapped out: a regime of no observable particle growth at the lowest pressures, a regime of polydisperse and agglomerated particles at the highest pressures, and a regime yielding highly monodisperse particles at intermediate pressures. Conditions that generate these nonagglomerated, extremely monodisperse silicon particles are emphasized. For H2 dilutions less than 92%, the growth rate is almost independent of H2 partial pressure. Particle growth decreases steadily when the H2 dilution is increased further. TEM images, however, indicate that the addition of hydrogen decreases the particle density. At higher dilution ratios, polycrystalline particles are obtained. Under all other conditions the particles are amorphous. Reasons for this behavior are explored.

1999 ◽  
Vol 557 ◽  
Author(s):  
Alan Gallagher

AbstractParticle growth in silane RF discharges, and the incorporation of particles into hydrogenated-amorphous-silicon (a-Si:H) devices is described. These particles have a structure similar to a-Si:H, but their incorporation into the device is believed to yield harmful voids and interfaces. Measurements of particle density and growth in a silane RF plasma, for particle diameters of 8-50 nm, are described. This particle growth rate is very rapid, and decreases in density during the growth indicate a major flux of these size particles to the substrate. Particle densities are a very strong function of pressure, film growth rate and electrode gap, increasing orders of magnitude for small increases in each parameter. A full plasma- chemistry model for particle growth from SiHm radicals and ions has been developed, and is outlined. It yields particle densities and growth rates, as a function of plasma parameters, which are in qualitative agreement with the data. It also indicates that, in addition to the diameter >2 nm particles that have been observed in films, a very large flux of SixH,, molecular radicals with × >1 also incorporate into the film. It appears that these large radicals yield more than 1% of the film for typical device-deposition conditions, so this may have a serious effect on device properties.


Author(s):  
D. L. Callahan ◽  
Z. Ball ◽  
H. M. Phillips ◽  
R. Sauerbrey

Ultraviolet laser-irradiation can be used to induce an insulator-to-conductor phase transition on the surface of Kapton polyimide. Such structures have potential applications as resistors or conductors for VLSI applications as well as general utility electrodes. Although the percolative nature of the phase transformation has been well-established, there has been little definitive work on the mechanism or extent of transformation. In particular, there has been considerable debate about whether or not the transition is primarily photothermal in nature, as we propose, or photochemical. In this study, cross-sectional optical microscopy and transmission electron microscopy are utilized to characterize the nature of microstructural changes associated with the laser-induced pyrolysis of polyimide.Laser-modified polyimide samples initially 12 μm thick were prepared in cross-section by standard ultramicrotomy. Resulting contraction in parallel to the film surface has led to distortions in apparent magnification. The scale bars shown are calibrated for the direction normal to the film surface only.


Author(s):  
Amanda K. Petford-Long ◽  
A. Cerezo ◽  
M.G. Hetherington

The fabrication of multilayer films (MLF) with layer thicknesses down to one monolayer has led to the development of materials with unique properties not found in bulk materials. The properties of interest depend critically on the structure and composition of the films, with the interfacial regions between the layers being of particular importance. There are a number of magnetic MLF systems based on Co, several of which have potential applications as perpendicular magnetic (e.g Co/Cr) or magneto-optic (e.g. Co/Pt) recording media. Of particular concern are the effects of parameters such as crystallographic texture and interface roughness, which are determined by the fabrication conditions, on magnetic properties and structure.In this study we have fabricated Co-based MLF by UHV thermal evaporation in the prechamber of an atom probe field-ion microscope (AP). The multilayers were deposited simultaneously onto cobalt field-ion specimens (for AP and position-sensitive atom probe (POSAP) microanalysis without exposure to atmosphere) and onto the flat (001) surface of oxidised silicon wafers (for subsequent study in cross-section using high-resolution electron microscopy (HREM) in a JEOL 4000EX. Deposi-tion was from W filaments loaded with material in the form of wire (Co, Fe, Ni, Pt and Au) or flakes (Cr). The base pressure in the chamber was around 8×10−8 torr during deposition with a typical deposition rate of 0.05 - 0.2nm/s.


1998 ◽  
Vol 510 ◽  
Author(s):  
R. Jothilingam ◽  
T. Farrell ◽  
T.B. Joyce ◽  
P.J. Goodhew

AbstractWe report the photo modified growth of GaAs by chemical beam epitaxy at substrate temperatures in the range 335 to 670°C using triethygallium (TEG) and arsine. A mercury-xenon lamp (electrical power 200 W) provided the irradiation for the photoassisted growth. The growth was monitored in real time by laser reflectometry (LR) using a 670 nm semiconductor laser, and the optically determined growth rate agreed with that obtained from the layer thickness measured by cross sectional transmission electron microscopy. The observed photo-enhancement of the growth rate at low substrate temperatures and inhibition at high substrate temperatures is thermal in origin, consistent with raising the substrate temperature by 10±3°C. Cross sectional transmission electron microscopy showed that the photoassisted layers are essentially free from dislocations


2015 ◽  
Vol 2015 ◽  
pp. 1-6 ◽  
Author(s):  
Yan Ye ◽  
Da Yin ◽  
Bin Wang ◽  
Qingwen Zhang

We report the synthesis of three-dimensional Fe3O4/graphene aerogels (GAs) and their application for the removal of arsenic (As) ions from water. The morphology and properties of Fe3O4/GAs have been characterized by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and superconducting quantum inference device. The 3D nanostructure shows that iron oxide nanoparticles are decorated on graphene with an interconnected network structure. It is found that Fe3O4/GAs own a capacity of As(V) ions adsorption up to 40.048 mg/g due to their remarkable 3D structure and existence of magnetic Fe3O4nanoparticles for separation. The adsorption isotherm matches well with the Langmuir model and kinetic analysis suggests that the adsorption process is pseudo-second-ordered. In addition to the excellent adsorption capability, Fe3O4/GAs can be easily and effectively separated from water, indicating potential applications in water treatment.


2018 ◽  
Vol 294 (5) ◽  
pp. 1602-1608 ◽  
Author(s):  
Xiunan Yi ◽  
Eric J. Verbeke ◽  
Yiran Chang ◽  
Daniel J. Dickinson ◽  
David W. Taylor

Cryo-electron microscopy (cryo-EM) has become an indispensable tool for structural studies of biological macromolecules. Two additional predominant methods are available for studying the architectures of multiprotein complexes: 1) single-particle analysis of purified samples and 2) tomography of whole cells or cell sections. The former can produce high-resolution structures but is limited to highly purified samples, whereas the latter can capture proteins in their native state but has a low signal-to-noise ratio and yields lower-resolution structures. Here, we present a simple, adaptable method combining microfluidic single-cell extraction with single-particle analysis by EM to characterize protein complexes from individual Caenorhabditis elegans embryos. Using this approach, we uncover 3D structures of ribosomes directly from single embryo extracts. Moreover, we investigated structural dynamics during development by counting the number of ribosomes per polysome in early and late embryos. This approach has significant potential applications for counting protein complexes and studying protein architectures from single cells in developmental, evolutionary, and disease contexts.


2013 ◽  
Vol 320 ◽  
pp. 483-487 ◽  
Author(s):  
Ming Li ◽  
Deng Bing Li ◽  
Jing Pan ◽  
Guang Hai Li

W-doped VO2 (B) nanoneedles were successfully synthesized by solgel combing with hydrothermal treatment, in which the polyethylene glycol (PEG) was used as both surfactant and reducing. The metastable VO2 (B) was completely transformed to thermochromic VO2 (M) after annealing at high purity N2 atmosphere. The DSC results exhibit a strong crystallographic transition, and the phase transition temperature of VO2 (M) can be reduced to about 38 °C by W-doping. Field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HR-TEM) were used to characterize the morphology and crystalline structure of the samples. The variable-temperature infrared transmittance spectra of VO2 (M) demonstrate their potential applications in energy saving field.


Author(s):  
Tvisha Singh

Abstract There has recently been a significant increase in interest regarding the prevalence of microplastics in bottled water. Previous studies have shown that the composition of many of the microplastics in bottled water is consistent with the materials of the bottle and bottle cap. The focus of this study is to quantify microplastic particle generation from the cap and bottle interaction during open and close cycles. Nile Red dye was used for the detection of microplastics >4.7 μm in size. Microplastic contamination levels in the water were found to increase as the bottle cap is opened and closed repeatedly. The rate of generation of particles with bottle opening and closing cycles (553 ± 202 microplastics/L/cycle) is adequate to account for the total particle density in the water. This clearly demonstrates that the abrasion between the bottle cap and bottleneck is the dominant mechanism for the generation of microplastic contamination detected in bottled water. A large spread between the maximum and minimum levels of microplastic contamination for bottles from the same lot, regardless of the number of times the cap is opened and closed, suggests that mechanical tolerances in the manufacturing of bottles and caps might play an important role in microplastic generation.


2020 ◽  
Vol 29 (09) ◽  
pp. 2050074
Author(s):  
E. Shokr ◽  
A. H. El-Farrash ◽  
A. De Roeck ◽  
M. A. Mahmoud

Proton–Proton ([Formula: see text]) collisions at the Large Hadron Collider (LHC) are simulated in order to study events with a high local density of charged particles produced in narrow pseudorapidty windows of [Formula: see text] = 0.1, 0.2, and 0.5. The [Formula: see text] collisions are generated at center of mass energies of [Formula: see text], [Formula: see text], [Formula: see text], and [Formula: see text] TeV, i.e., the energies at which the LHC has operated so far, using PYTHIA and HERWIG event generators. We have also studied the average of the maximum charged-particle density versus the event multiplicity for all events, using the different pseudorapidity windows. This study prepares for the multi-particle production background expected in a future search for anomalous high-density multiplicity fluctuations using the LHC data.


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