The Microstructure Evolution of Corrosion Phenomenon on Aluminum Bond Pads

2005 ◽  
Author(s):  
Jian-Shing Luo ◽  
Hui-Min Lo ◽  
Jeremy D. Russell
Keyword(s):  
Electron Microscopy ◽  
Microstructure Evolution ◽  
Photoelectron Spectroscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
X Ray ◽  
Nano Crystalline ◽  
Transmission Electron ◽  
Layer Structures ◽  
Bond Pads

Abstract X-ray photoelectron spectroscopy (XPS) is a very popular tool for identification of the chemical state of fluorine contamination on aluminum (Al) bond pads. To date, as far as the authors are aware the detailed microstructures of fluorine corrosion on bond pads have not been reported. This paper reports the microstructure evolution of fluorine corrosion on bond pads in a plastic box under specific environment conditions by using transmission electron microscopy (TEM), optical microscopy, focused ion beam and scanning electron microscopy (SEM). The elemental distributions and chemical bonding were performed by using Gatan Image Filter/TEM, energy dispersive X-ray/Scanning TEM (STEM), Auger electron spectroscopy and XPS, respectively. On Al pads with 35 atomic %, fluorine residual, corrosion was observed after around 10 days of storage and became more severe with time. The corrosion layers consist of nano-crystalline and amorphous for both single and double-layer structures.

scholarly journals Focused Ion Beam in the Study of Biomaterials and Biological Matter

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Kathryn Grandfield ◽  
Håkan Engqvist
Keyword(s):  
Electron Microscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Life Sciences ◽  
X Ray ◽  
The Past ◽  
Biological Matter ◽  
Dual Beam ◽  
Transmission Electron ◽  
Environmental Sem

The application of focused ion beam (FIB) techniques in the life sciences has progressed by leaps and bounds over the past decade. A once dedicated ion beam instrument, the focused ion beam today is generally coupled with a plethora of complementary tools such as dual-beam scanning electron microscopy (SEM), environmental SEM, energy dispersive X-ray spectroscopy (EDX), or cryogenic possibilities. All of these additions have contributed to the advancement of focused ion beam use in the study of biomaterials and biological matter. Biomaterials, cells, and their interfaces can be routinely imaged, analyzed, or prepared for techniques such as transmission electron microscopy (TEM) with this comprehensive tool. Herein, we review the uses, advances, and challenges associated with the application of FIB techniques to the life sciences, with particular emphasis on TEM preparation of biomaterials, biological matter, and their interfaces using FIB.

Effect of engine oil additives reduction on the tribofilm structure of a cylinder liner model surface

2019 ◽  
Vol 72 (4) ◽  
pp. 515-523
Author(s):  
Maria de Lourdes Miranda-Medina ◽  
Christian Tomastik ◽  
Tia Truglas ◽  
Heiko Groiss ◽  
Martin Jech
Keyword(s):  
Electron Microscopy ◽  
Photoelectron Spectroscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cylinder Liner ◽  
Engine Oil ◽  
Antiwear Additives ◽  
Content Type ◽  
X Ray ◽  
Underlying Mechanisms

Purpose The purpose of this paper is to provide a general picture for describing the formed tribofilm, including chemical and physical aspects in the micro-scale and the nano-scale. In a previous study, the durability of zinc dialkyl dithiophosphate (ZDDP) tribofilms on cylinder liner samples has been investigated in a tribometer model system by using fresh and aged fully formulated oils and replacing them with PAO8 without additives. Analyses of the derived tribofilms by means of X-ray photoelectron spectroscopy and scanning electron microscopy could give some hints about the underlying mechanisms of the tribofilm build-up and wear performance, but a final model has not been achieved. Design/methodology/approach Thus, characterisation of these tribofilms by means of focused ion beam-transmission electron microscopy (FIB-TEM) and energy dispersive X-ray spectroscopy is presented and a concluding model of the underlying mechanisms of tribofilm build-up is discussed in this paper. Findings For tribotests running first with fresh fully formulated engine oil, a rather homogeneous ZDDP-like tribofilm is found underneath a carbon rich tribofilm after changing to non-additivated PAO8. However, when the tests run first with aged fully formulated engine oil, no ZDDP-like tribofilm has been found after changing to non-additivated PAO8, but a wear protective carbon rich tribofilm. Originality/value The obtained results provide insights into the structure and durability of tribofilms. Carbon-based tribofilms are built up on the basis of non-additivated PAO8 because of the previously present ZDDP tribofilms, which suggests an alternative way to reducing the consumption of antiwear additives.

FIB Preparation of a NiO Wedge-Lamella and STEM X-Ray Microanalysis for the Determination of the Experimental k(O-Ni) Cliff-Lorimer Coefficient

2013 ◽  
Vol 19 (1) ◽  
pp. 79-84 ◽  
Author(s):  
Aldo Armigliato ◽  
Stefano Frabboni ◽  
Gian Carlo Gazzadi ◽  
Rodolfo Rosa
Keyword(s):  
Electron Microscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Analytical Electron Microscopy ◽  
X Ray ◽  
Transmission Electron ◽  
The Monte Carlo Method ◽  
Scanning Transmission ◽  
Reliable Quantification ◽  
Experimental Values

AbstractA method for the fabrication of a wedge-shaped thin NiO lamella by focused ion beam is reported. The starting sample is an oxidized bulk single crystalline, ⟨100⟩ oriented, Ni commercial standard. The lamella is employed for the determination, by analytical electron microscopy at 200 kV of the experimental k(O-Ni) Cliff-Lorimer (G. Cliff & G.W. Lorimer, J Microsc103, 203–207, 1975) coefficient, according to the extrapolation method by Van Cappellen (E. Van Cappellen, Microsc Microstruct Microanal1, 1–22, 1990). The result thus obtained is compared to the theoretical k(O-Ni) values either implemented into the commercial software for X-ray microanalysis quantification of the scanning transmission electron microscopy/energy dispersive spectrometry equipment or calculated by the Monte Carlo method. Significant differences among the three values are found. This confirms that for a reliable quantification of binary alloys containing light elements, the choice of the Cliff-Lorimer coefficients is crucial and experimental values are recommended.

Spatially Resolved Characterization of Plastic Deformation Induced by Focused-Ion Beam Processing in Structured InGaN/GaN Layers

2007 ◽  
Vol 1020 ◽  
Author(s):  
R. Barabash ◽  
G. Ice ◽  
R. Kroger ◽  
H. Lohmeyer ◽  
K. Sebald ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Structural Changes ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
X Ray ◽  
Spatially Resolved ◽  
Transmission Electron ◽  
Impact Area ◽  
Scanning Electron

AbstractIn this study the results of polychromatic X-ray microbeam analysis (PXM) of the structural changes caused by FIB in nitride heterostructures are presented and discussed in connection with micro-photoluminescence (μ-PL), fluorescent analysis, scanning electron (SEM) and transmission electron microscopy (TEM) data. It is shown that FIB processing distorts the lattice in the InGaN/GaN layer not only in the immediate vicinity of the processed area but also in the surroundings. A narrow amorphidized top layer is formed in the direct ion beam impact area.

Studies of Cn1 Films Deposited by Ion-Beam-Assisted Laser Ablation of Graphite

1994 ◽  
Vol 354 ◽  
Author(s):  
Zhong-Min Ren ◽  
Yuan-Cheng Du ◽  
Xia-Xing Xiong ◽  
Jia-Da Wu ◽  
Zhi-Feng Ying ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Laser Ablation ◽  
Photoelectron Spectroscopy ◽  
Amorphous Matrix ◽  
Ion Beam ◽  
High Energy ◽  
X Ray ◽  
Transmission Electron ◽  
Nitrogen Bonds

AbstractCN1 thin films have been synthesized by ion-beam-assisted laser ablation of graphite. Films with N-concentration of 45% are obtained, indicated by high energy backseattering spectrum (HEBS). Raman and X-ray photoelectron spectroscopy (XPS) data confirm the existence of carbon-nitrogen bonds. Polycrystallites beta-CjNi structure has been detected in the amorphous matrix of the films, as indicated by transmission electron microscopy (TEM) and electron diffraction. Qualitative tests indicate that the films are relatively hard and adhesive.

TEM Sample Preparation Tricks for Advanced DRAMs

2015 ◽  
Author(s):  
Ching Shan Sung ◽  
Hsiu Ting Lee ◽  
Jian Shing Luo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Characterization Of Materials

Abstract Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for process evaluation and failure analysis in the integrated circuit (IC) industry as device shrinkage continues. It is well known that a high quality TEM sample is one of the keys which enables to facilitate successful TEM analysis. This paper demonstrates a few examples to show the tricks on positioning, protection deposition, sample dicing, and focused ion beam milling of the TEM sample preparation for advanced DRAMs. The micro-structures of the devices and samples architectures were observed by using cross sectional transmission electron microscopy, scanning electron microscopy, and optical microscopy. Following these tricks can help readers to prepare TEM samples with higher quality and efficiency.

Fin Level Defect Isolation Inside a FinFET Using Electron Beam Alteration of Current Flow

2017 ◽  
Author(s):  
H.J. Ryu ◽  
A.B. Shah ◽  
Y. Wang ◽  
W.-H. Chuang ◽  
T. Tong
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Focused Ion Beam ◽  
Current Flow ◽  
Ion Beam ◽  
The Body ◽  
Complete Understanding ◽  
Root Cause ◽  
Transmission Electron ◽  
Defect Isolation

Abstract When failure analysis is performed on a circuit composed of FinFETs, the degree of defect isolation, in some cases, requires isolation to the fin level inside the problematic FinFET for complete understanding of root cause. This work shows successful application of electron beam alteration of current flow combined with nanoprobing for precise isolation of a defect down to fin level. To understand the mechanism of the leakage, transmission electron microscopy (TEM) slice was made along the leaky drain contact (perpendicular to fin direction) by focused ion beam thinning and lift-out. TEM image shows contact and fin. Stacking fault was found in the body of the silicon fin highlighted by the technique described in this paper.

Transmission Electron Microscopy (TEM) Specimen Preparation Technique using Focused Ion Beam (FIB): Application to Material Characterization of Chemical Vapor Deposition of Tungsten (W) and Tungsten Silicides (WSix)

1997 ◽  
Author(s):  
K. Doong ◽  
J.-M. Fu ◽  
Y.-C. Huang
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Transmission Electron

Abstract The specimen preparation technique using focused ion beam (FIB) to generate cross-sectional transmission electron microscopy (XTEM) samples of chemical vapor deposition (CVD) of Tungsten-plug (W-plug) and Tungsten Silicides (WSix) was studied. Using the combination method including two axes tilting[l], gas enhanced focused ion beam milling[2] and sacrificial metal coating on both sides of electron transmission membrane[3], it was possible to prepare a sample with minimal thickness (less than 1000 A) to get high spatial resolution in TEM observation. Based on this novel thinning technique, some applications such as XTEM observation of W-plug with different aspect ratio (I - 6), and the grain structure of CVD W-plug and CVD WSix were done. Also the problems and artifacts of XTEM sample preparation of high Z-factor material such as CVD W-plug and CVD WSix were given and the ways to avoid or minimize them were suggested.

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