STUDYING THE TRANSPARENT AND ELECTRICAL PROPERTIES OF ZnO:Ti THIN FILM WHICH IS PREPARED BY DC MAGNETRON SPUTTERINGSPUTTERING
2009 ◽
Vol 12
(12)
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pp. 59-64
Keyword(s):
The Ti-doped Zno films were deposited onto glass substrates from ceramic targets ZnO with various Ti concentrations using a DC magnetron sputtering. The experimental results show that all thin films are transparent and conductive oxide films, with the appropriate Ti concentration (⁓1.5% Ti), the conductance of films can be improved. Optical characteristics of thin films was determined by UV-V is spectroscopy. The thickness of thin films was measured by Stylus method. The electrical resistivity was measured by four-point probe, and the roughness of films was determined by AFM.
2009 ◽
Vol 24
(2)
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pp. 441-447
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Keyword(s):
2013 ◽
Vol 2013
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pp. 1-9
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Keyword(s):
2015 ◽
Vol 773-774
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pp. 739-743
Keyword(s):
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Keyword(s):
2011 ◽
2013 ◽
Vol 91
(8)
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pp. 658-661
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