scholarly journals Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process

2021 ◽  
Vol 11 (22) ◽  
pp. 10748
Author(s):  
Donghyeok Choi ◽  
Joonghan Shin
Keyword(s):  
Temperature Distribution ◽  
Maximum Temperature ◽  
Transfer Model ◽  
Activation Process ◽  
Dopant Diffusion ◽  
Uniform Heating ◽  
Beam Scanning ◽  
Dopant Activation ◽  
Scanning Pattern ◽  
Overlap Ratio

Laser thermal annealing (LTA) has played an important role in the fabrication of scaled semiconductor devices by reducing the heat budget of the dopant activation process. During the laser annealing of entire wafer areas, the beam scanning pattern and overlap ratio have significant effects on uniform heating during the process. In this study, a numerical simulation of the LTA process was carried out using a three-dimensional transient heat transfer model. The temperature distribution produced by different laser scan paths and beam overlap ratios was analyzed. Additionally, the behavior of the dopant (phosphorus) diffusion induced under the multipath and beam overlapping conditions was numerically investigated. According to the simulation result, a zig-zag pattern generated hot spots around the corner areas of the beam path due to the greater heat accumulation per unit area; however, a bidirectional pattern induced cold spots due to the absence of laser heating around the corner areas. It was also found that the maximum temperature reachable in the beam overlapped region was much lower than that obtained along the beam scanning path, and the most uniform heating could be obtained when the zig-zag pattern and a 50% overlap ratio were used. According to the dopant diffusion and concentration distribution predicted for the case of the zig-zag pattern and 50% overlap ratio, the difference in the dopant diffusion length was approximately thirty times within the scanned area.

scholarly journals Numerical Simulation and Experimental Study on Temperature Distribution of Self-Lubricating Packing Rings in Reciprocating Compressors

2016 ◽  
Vol 2016 ◽  
pp. 1-14 ◽  
Author(s):  
Jia Xiaohan ◽  
Zhang Qingqing ◽  
Feng Jianmei ◽  
Peng Xueyuan
Keyword(s):  
Temperature Distribution ◽  
Pressure Ratio ◽  
Three Dimensional ◽  
Maximum Temperature ◽  
Transfer Model ◽  
Radial Temperature ◽  
Operational Conditions ◽  
External Cooling ◽  
Packing Rings ◽  
Compressor Reliability

The nonuniform abrasion failure and high-temperature thermal failure of packing rings have a significant influence on compressor reliability, particularly that of oil-free compressors. In this study, a test rig was constructed to measure the dynamic temperature of packing rings under different operational conditions in an oil-free reciprocating compressor. The dynamic axial and radial temperature distributions of the packing rings were obtained using an innovative internal temperature testing device that kept the thermocouples and packing box relatively static during compressor operation. A three-dimensional heat transfer model was also developed to analyze the temperature distribution of the packing boxes, piston rod, and cylinder during such operation. Good agreement was observed between the simulation results and experimental data, which showed an average relative error of less than 2.35%. The results indicate that the pressure ratio exerts a significant effect on the axial temperature distribution and determines which packing ring reaches the maximum temperature. They also show the average temperature to rise with an increase in the rotational speed and to fall with an improvement in the external cooling conditions. Finally, the material of the packing rings was found to affect the temperature gradient from their inner to outer surface.

scholarly journals An analytical method to estimate temperature distribution of typical radiant floor cooling systems with internal heat radiation

2021 ◽  
pp. 014459872199800
Author(s):  
Xiaolong Wang ◽  
Wenke Zhang ◽  
Qingqing Li ◽  
Zhenqiang Wei ◽  
Wenjun Lei ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Temperature Distribution ◽  
Internal Heat ◽  
Single Layer ◽  
Heat Radiation ◽  
Transfer Model ◽  
Cooling Systems ◽  
Average Temperature ◽  
Floor Surface ◽  
Floor Structure

Radiant floor cooling systems are increasingly used in practice. The temperature distribution on the floor surface and inside the floor structure, especially the minimum and average temperature of floor surface, determines the thermal performance of radiant floor systems. A good temperature distribution of the floor structure is very important to prevent occupant discomfort and avoid possible condensation in summer cooling. In this study, based on the heat transfer model of the single-layer homogeneous floor structure when there is no internal heat radiation in the room, this paper proposes a heat transfer model of single-layer floor radiant cooling systems when the room has internal heat radiation. Using separation variable methods, an analytical solution was developed to estimate temperature distribution of typical radiant floor cooling systems with internal heat radiation, which can be used to calculate the minimum temperature and the average temperature of typical composite floor structure. The analytical solution was validated by experiments. The values of the measured experiments are in a good agreement with the calculations. The absolute error between the calculated and the measured floor surface temperatures was within 0.45°C. The maximum relative error was within 2.31%. Prove that this model can be accepted. The proposed method can be utilized to calculate the cooling capacity of a typical multi-layer composite floor and will be developed in the future study for design of a typical radiant floor cooling system.

Electromagnetic performance and thermal analysis of a novel permanent magnet fluxed-switching coupler

2021 ◽  
pp. 1-18
Author(s):  
Lezhi Ye ◽  
Yulong Zhang ◽  
Mingguang Cao
Keyword(s):  
Temperature Distribution ◽  
Permanent Magnet ◽  
Permanent Magnets ◽  
Three Dimensional ◽  
Load Condition ◽  
Maximum Load ◽  
Maximum Temperature ◽  
The Novel ◽  
Transient Field ◽  
Three Dimensional Finite Element

To solve the problem of complex operating device and permanent magnets (PMs) demagnetization at high temperature, a new type of permanent magnet fluxed-switching coupler (PMC) with synchronous rotating adjuster is proposed. Its torque can be adjusted by rotating a switched flux angle between the adjuster and PMs along the circumferential direction. The structural feature and working principle of the PMC are introduced. The analytical model of the novel PMC was established. The torque curves are calculated in transient field by using the three-dimensional finite element method (3-D FEM). The temperature distribution of the novel PMC under rated condition is calculated by 3-D FEM, and the temperature distribution of the PM is compared with that of the conventional PMC. The simulation and test results show that the maximum temperature of copper disc and PM of the novel PMC are 100 °C and 48 °C respectively. The novel PMC can work stably for a long time under the maximum load condition.

scholarly journals Research on Influence of Different Simulation Methods of Bypass Flow in Thermal Hydraulic Analysis on Temperature Distribution in HTR-10

2020 ◽  
Vol 2020 ◽  
pp. 1-8
Author(s):  
Shiyan Sun ◽  
Youjie Zhang ◽  
Yanhua Zheng
Keyword(s):  
Temperature Distribution ◽  
Reactor Core ◽  
Flow Distribution ◽  
Maximum Temperature ◽  
Flow Ratio ◽  
Hydraulic Analysis ◽  
Bypass Flow ◽  
Pebble Bed ◽  
The Core ◽  
Thermal Hydraulic Analysis

In pebble-bed high temperature gas-cooled reactor, gaps widely exist between graphite blocks and carbon bricks in the reactor core vessel. The bypass helium flowing through the gaps affects the flow distribution of the core and weakens the effective cooling of the core by helium, which in turn affects the temperature distribution and the safety features of the reactor. In this paper, the thermal hydraulic analysis models of HTR-10 with bypass flow channels simulated at different positions are designed based on the flow distribution scheme of the original core models and combined with the actual position of the core bypass flow. The results show that the bypass coolant flowing through the reflectors enhances the heat transfer of the nearby components efficiently. The temperature of the side reflectors and the carbon bricks is much lower with more side bypass coolant. The temperature distribution of the central region in the pebble bed is affected by the bypass flow positions slightly, while that of the peripheral area is affected significantly. The maximum temperature of the helium, the surface, and center of the fuel elements rises as the bypass flow ratio becomes larger, while the temperature difference between them almost keeps constant. When the flow ratio of each part keeps constant, the maximum temperature almost does not change with different bypass flow positions.

Study on Effective Radial Thermal Conductivity of Gas Flow through a Methanol Reactor

2015 ◽  
Vol 13 (1) ◽  
pp. 103-112 ◽  
Author(s):  
Kun Lei ◽  
Hongfang Ma ◽  
Haitao Zhang ◽  
Weiyong Ying ◽  
Dingye Fang
Keyword(s):  
Heat Transfer ◽  
Thermal Conductivity ◽  
Reynolds Number ◽  
Temperature Distribution ◽  
Large Scale ◽  
Gas Flow ◽  
Fixed Bed ◽  
Heat Transfer Model ◽  
Transfer Model ◽  
Particle Reynolds Number

Abstract The heat conduction performance of the methanol synthesis reactor is significant for the development of large-scale methanol production. The present work has measured the temperature distribution in the fixed bed at air volumetric flow rate 2.4–7 m3 · h−1, inlet air temperature 160–200°C and heating tube temperature 210–270°C. The effective radial thermal conductivity and effective wall heat transfer coefficient were derived based on the steady-state measurements and the two-dimensional heat transfer model. A correlation was proposed based on the experimental data, which related well the Nusselt number and the effective radial thermal conductivity to the particle Reynolds number ranging from 59.2 to 175.8. The heat transfer model combined with the correlation was used to calculate the temperature profiles. A comparison with the predicated temperature and the measurements was illustrated and the results showed that the predication agreed very well with the experimental results. All the absolute values of the relative errors were less than 10%, and the model was verified by experiments. Comparing the correlations of both this work with previously published showed that there are considerable discrepancies among them due to different experimental conditions. The influence of the particle Reynolds number on the temperature distribution inside the bed was also discussed and it was shown that improving particle Reynolds number contributed to enhance heat transfer in the fixed bed.

A Two-Dimensional Conjugate Heat Transfer Model for Forced Air Cooling of an Electronic Device

1989 ◽  
Vol 111 (1) ◽  
pp. 41-45 ◽  
Author(s):  
A. Zebib ◽  
Y. K. Wo
Keyword(s):  
Heat Transfer ◽  
Conjugate Heat Transfer ◽  
Electronic Device ◽  
Transfer Problem ◽  
Maximum Temperature ◽  
Transfer Model ◽  
Air Cooling ◽  
Two Dimensional ◽  
Component Design ◽  
Forced Air

Thermal analysis of forced air cooling of an electronic component is modeled as a two-dimensional conjugate heat transfer problem. The velocity field in a constricted channel is first computed. Then, for a typical electronic module, the energy equation is solved with allowance for discontinuities in the thermal conductivity. Variation of the maximum temperature with the average air velocity is presented. The importance of our approach in evaluating possible benefits due to changes in component design and the limitations of the two-dimensional model are discussed.

Combined Conduction and Radiation Heat Transfer in Porous Materials Heated by Intense Solar Radiation

1985 ◽  
Vol 107 (1) ◽  
pp. 29-34 ◽  
Author(s):  
L. K. Matthews ◽  
R. Viskanta ◽  
F. P. Incropera
Keyword(s):  
Heat Transfer ◽  
Radiation Heat Transfer ◽  
Plane Layer ◽  
Single Scattering ◽  
Dominant Mode ◽  
Radiative Properties ◽  
Maximum Temperature ◽  
Transfer Model ◽  
Radiation Heat ◽  
Flux Approximation

An analysis is presented to predict the heat transfer characteristics of a plane layer of a semitransparent, high-temperature, porous material which is irradiated by an intense solar flux. A transient, combined conduction and radiation heat transfer model, which is based on a two-flux approximation for the radiation, is used to predict the temperature distribution and heat transfer in the material. Numerical results have been obtained using thermophysical and radiative properties of zirconia as a typical material. The results show that radiation is an important mode of heat transfer, even when the opacity of the material is large (τL > 100). Radiation is the dominant mode of heat transfer in the front third of the material and comparable to conduction toward the back. The semitransparency and high single scattering albedo of the zirconia combine to produce a maximum temperature in the interior of the material.

The Effect of Curvature and Torsion on the Temperature Distribution in a Helix

1985 ◽  
Vol 52 (3) ◽  
pp. 529-532 ◽  
Author(s):  
D. D. Sayers ◽  
M. C. Potter
Keyword(s):  
Differential Equation ◽  
Finite Element Method ◽  
Partial Differential Equation ◽  
Temperature Distribution ◽  
Strong Dependence ◽  
Maximum Temperature ◽  
Nonuniform Heating ◽  
The Finite Element Method ◽  
Curvature Parameter ◽  
Curvature And Torsion

Traditional analysis treats the helix as a straight wire with the effects of nonuniform heating, torsion, and large curvature ignored. Using a helical coordinate system the governing partial differential equation including these effects is derived. The equation is then solved numerically using the finite element method. The results indicate a strong dependence of the temperature on the torsion parameter when the curvature parameter is significant. As the curvature parameter increases, the temperature distribution becomes skew-symmetric and the maximum temperature in the helix increases. Nonuniform heating influences the temperature distribution independent of the curvature and torsion.

Characterization of Low Temperature Polysilicon TFTs with Self-Aligned Graded LDD Structure

2001 ◽  
Vol 685 ◽  
Author(s):  
Ching-Wei Lin ◽  
Li-Jing Cheng ◽  
Yin-Lung Lu ◽  
Huang-Chung Cheng
Keyword(s):  
Low Temperature ◽  
Leakage Current ◽  
High Speed ◽  
High Reliability ◽  
Activation Process ◽  
Active Matrix ◽  
Dopant Activation ◽  
Low Leakage ◽  
Low Leakage Current ◽  
Excimer Laser Irradiation

AbstractA simple process sequence for fabrication of low temperature polysilicon (LTPS) TFTs with self-aligned graded LDD structure was demonstrated. The graded LDD structure was self-aligned by side-etch of Al under the photo-resist followed by excimer laser irradiation for dopant activation and laterally diffusion. The graded LDD polysilicon TFTs were suitable for high-speed operation and active matrix switches applications because they possessed low-leakage-current characteristic without sacrificing driving capability significantly and increasing overlap capacitance. The leakage current of graded LDD polysilicon TFTs at Vd = 5V and Vg = −10V could attain to below 1pA/μm without any hygrogenation process, when proper LDD length and laser activation process were applied. The on/off current ratios of these devices were also above 108. Furthermore, due to graded dopant distribution in LDD regions, the drain electric field could be reduced further, and as a result, graded LDD polysilicon TFTs provided high reliability for high voltage operation.

Cooling of Concentrator Photovoltaic Cells Using Mini-Scale Jet Impingement Heat Sinks

2018 ◽  
Author(s):  
Ali Radwan ◽  
Meshack Hawi ◽  
Mahmoud Ahmed
Keyword(s):  
Heat Transfer ◽  
Flow Model ◽  
Three Dimensional ◽  
Jet Impingement ◽  
Heat Sinks ◽  
Maximum Temperature ◽  
Transfer Model ◽  
Cell Temperature ◽  
Maximum Cell ◽  
T System

In this study, an efficient cooling technique for concentrator photovoltaic (CPV) cells is proposed to enhance the system electrical efficiency and extend its lifetime. To do this, a comprehensive three-dimensional conjugate heat transfer model of CPV cells layers coupled with the heat transfer and fluid flow model inside jet impingement heat sink is developed. Four different jet impingement designs are compared. The investigated designs are (A) central inlet jet, (B) Hypotenuse inlet jet, (C) staggered inlet jet, and (D) conventional jet impingement design with side drainage. The effect of coolant flowrate on the CPV/T system performance is investigated. The model is numerically simulated and validated using the available experiments. The performance of CPV system is investigated at solar concentration ratios of 20 and coolant flowrate up to 6000g/min. It is found that increasing the flowrate from 60 g/min to 600 g/min decrease the maximum cell temperature by 31°C for the configuration D while increasing the flowrate from 600 g/min to 6000 g/min reduce the cell temperature by 20.2°C. It is also concluded that at a higher flowrate of 6000g/min, all the investigated configurations relatively achieve better temperature uniformity with maximum temperature differences of 0.9 °C, 2.1 °C, 3.6 °C, and 3.9 °C for configurations A, B, C, and D respectively.

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