Electroosmotic Flow Pump on Transparent Polyimide Substrate Fabricated Using Hot Embossing

2013 ◽  
Vol 300-301 ◽  
pp. 1356-1359 ◽  
Author(s):  
Hirofumi Saito ◽  
Hiroki Komatsuzaki ◽  
Ryuta Ikoma ◽  
Takayuki Komori ◽  
Keigo Kuroda ◽  
...  

Improved fabrication processes of an all-polyimide micro electroosmotic flow pump using hot embossing are described. Microchannels in the micropump were fabricated by hot embossing on a transparent polyimide substrate. A silicon micromachined mold was pressed into the transparent polyimide substrate at a temperature of 300 oC to form microchannel patterns on the substrate. The depth and width of the microchannels were 25 μm and 50 μm, respectively. A UV ozone treatment was performed to improve adhesion between the transparent polyimide substrate and film capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 100 oC, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.7 μl/min when a voltage of 50 V was given between the electrodes separated 20 mm each other.

2013 ◽  
Vol 538 ◽  
pp. 125-128 ◽  
Author(s):  
Hirofumi Saito ◽  
Hiroki Komatsuzaki ◽  
Ryuta Ikoma ◽  
Takayuki Komori ◽  
Keigo Kuroda ◽  
...  

Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was pressed into the PMMA substrate at a temperature of 145 °C to form microchannel patterns on the substrate. The depth and width of the microchannels were 50 μm and 100 μm, respectively. Aluminum electrodes were deposited using thermal vacuum deposition. A UV ozone treatment was performed to improve adhesion between the PMMA substrate and a PMMA capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 70 °C, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.5 μl/min when a voltage of 50 V was given between the electrodes separated 8 mm each other.


Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 112 ◽  
Author(s):  
Zi Ye ◽  
Renchang Zhang ◽  
Meng Gao ◽  
Zhongshan Deng ◽  
Lin Gui

A low voltage 3D parallel electroosmotic flow (EOF) pump composed of two electrode layers and a fluid layer is proposed in this work. The fluid layer contains twenty parallel fluid channels and is set at the middle of the two electrode layers. The distance between fluid and electrode channels was controlled to be under 45 μm, to reduce the driving voltage. Room temperature liquid metal was directly injected into the electrode channels by syringe to form non-contact electrodes. Deionized (DI) water with fluorescent particles was used to test the pumping performance of this EOF pump. According to the experimental results, a flow rate of 5.69 nL/min was reached at a driving voltage of 2 V. The size of this pump is small, and it shows a great potential for implanted applications. This structure could be easily expanded for more parallel fluid channels and larger flow rate.


2020 ◽  
Vol 64 (1-4) ◽  
pp. 1261-1268
Author(s):  
Shu Otani ◽  
Dang-Trang Nguyen ◽  
Kozo Taguchi

In this study, a portable and disposable paper-based microbial fuel cell (MFC) was fabricated. The MFC was powered by Rhodopseudomonas palustris bacteria (R. palustris). An activated carbon sheet-based anode pre-loaded organic matter (starch) and R. palustris was used. By using starch in the anode, R. palustris-loaded on the anode could be preserved for a long time in dry conditions. The MFC could generate electricity on-demand activated by adding water to the anode. The activated carbon sheet anode was treated by UV-ozone treatment to remove impurities and to improve its hydrophilicity before being loaded with R. palustris. The developed MFC could generate the maximum power density of 0.9 μW/cm2 and could be preserved for long-term usage with little performance degradation (10% after four weeks).


2009 ◽  
Vol 53 (6) ◽  
pp. 621-625 ◽  
Author(s):  
Jae Bon Koo ◽  
Seong Yeol Kang ◽  
In Kyu You ◽  
Kyung Soo Suh

2011 ◽  
Vol 12 (2) ◽  
pp. 279-284 ◽  
Author(s):  
Takahiro Nagata ◽  
Seungjun Oh ◽  
Toyohiro Chikyow ◽  
Yutaka Wakayama

2014 ◽  
Vol 290 ◽  
pp. 381-387 ◽  
Author(s):  
R.O.F. Verkuijlen ◽  
M.H.A. van Dongen ◽  
A.A.E. Stevens ◽  
J. van Geldrop ◽  
J.P.C. Bernards

2013 ◽  
Vol 60 (5) ◽  
pp. 1763-1768 ◽  
Author(s):  
Prajwal Adhikary ◽  
Swaminathan Venkatesan ◽  
Purna P. Maharjan ◽  
David Galipeau ◽  
Qiquan Qiao

2015 ◽  
Vol 138 (3) ◽  
Author(s):  
Morteza Sadeghi ◽  
Arman Sadeghi ◽  
Mohammad Hassan Saidi

Adopting the Navier slip conditions, we analyze the fully developed electroosmotic flow in hydrophobic microducts of general cross section under the Debye–Hückel approximation. The method of analysis includes series solutions which their coefficients are obtained by applying the wall boundary conditions using the least-squares matching method. Although the procedure is general enough to be applied to almost any arbitrary cross section, eight microgeometries including trapezoidal, double-trapezoidal, isosceles triangular, rhombic, elliptical, semi-elliptical, rectangular, and isotropically etched profiles are selected for presentation. We find that the flow rate is a linear increasing function of the slip length with thinner electric double layers (EDLs) providing higher slip effects. We also discover that, unlike the no-slip conditions, there is not a limit for the electroosmotic velocity when EDL extent is reduced. In fact, utilizing an analysis valid for very thin EDLs, it is shown that the maximum electroosmotic velocity in the presence of surface hydrophobicity is by a factor of slip length to Debye length higher than the Helmholtz–Smoluchowski velocity. This approximate procedure also provides an expression for the flow rate which is almost exact when the ratio of the channel hydraulic diameter to the Debye length is equal to or higher than 50.


Author(s):  
Desheng Zhang ◽  
Weidong Shi ◽  
Suqing Wu ◽  
Dazhi Pan ◽  
Peipei Shao ◽  
...  

In this paper, the tip leakage vortex (TLV) structures in an axial flow pump were investigated by numerical and experimental methods. Based on the comparisons of different blade tip clearance size (i.e., 0.5 mm, 1mm and 1.5mm) and different flow rate conditions, TLV trajectories were obtained by Swirling Strength method, and simulated by modified SST k-ω turbulence model with refined high-quality structured grids. A high-speed photography test was carried out to capture the tip leakage vortex cavitation in an axial flow pump with transparent casing. Numerical results were compared with the experimental leakage vortex trajectories, and a good agreement is presented. The detailed trajectories show that the start point of tip leakage vortex appears near the leading edge at small flow rate, and it moves from trailing edge to about 30% chord span at rated flow rate. At the larger flow rate condition, the starting point of TLV shifts to the middle of chord, and the direction of TLV moves parallel to the blade hydrofoil. As the increasing of the tip size, the start point of TLV trajectories moves to the central of chord and the minimum pressure in vortex core is gradually reduced.


2021 ◽  
Vol 21 (8) ◽  
pp. 4418-4422
Author(s):  
Seongwan Kim ◽  
Yunsook Yang ◽  
Sheik Abdur Rahman ◽  
Woo Young Kim

Ag-paste is used as an electrode material in various fields as a manufacturing advantage that enables solution processing. However, when a subsequent thin film is formed on the solidified Ag-paste electrode, there is a fear that the bonding force between the Ag-paste electrode and the subsequent thin film is weakened and peeled off due to the low surface energy of the Agpaste electrode. It is necessary to increase the surface energy of the Ag-paste electrode surface since it ultimately directly affects the yield of the device or product. In this study, the UV/ozone treatment process was introduced to increase the Ag-paste surface energy, thereby making the surface hydrophilic. Additionally, it was confirmed that the UV/ozone treatment process affected only the surface of the Ag-paste electrode by extracting the contact resistance.


Sign in / Sign up

Export Citation Format

Share Document