Buckling Stabilization and Stress Reduction in SiC on Si by i-FLASiC Processing

2008 ◽  
Vol 600-603 ◽  
pp. 239-242
Author(s):  
Ariadne Andreadou ◽  
Jörg Pezoldt ◽  
Christian Förster ◽  
Efstathios K. Polychroniadis ◽  
M. Voelskow ◽  
...  

One of the main challenging tasks in the prospective technology is the buckling suppression of the 3C-SiC film due to the melting and solidification process and the stress relief as a consequence of the short time Si melting during the Flash Lamp Annealing. To overcome this effect and to stabilize a flat surface morphology an alternative i-FlASiC process was developed. This work refers to the influence of the layer stack modifications by doping and meltstop formation by ion implantation on the wafer buckling. The samples were studied by transmission electron microscopy, high resolution x-ray diffraction and infrared ellipsometry. The aim was to optimize the doping and flash lamp annealing conditions in relation to the i-FLASiC layer stack modification.

1990 ◽  
Vol 189 ◽  
Author(s):  
J. A. Eastman ◽  
K. E. Sickafus ◽  
J. D. Katz ◽  
S. G. Boeke ◽  
R. D. Blake ◽  
...  

ABSTRACTNanocrystalline TiO2 compacts having initial approximate mean grain sizes of 14 nm and approximate green densities of 70% of theoretical were sintered by short-time exposure in a 2.45 GHz microwave cavity to maximum temperatures of 800, 1000 or 1200 ºC. Sample densities were measured before and after exposure to microwaves using Archimede's method. Transmission electron microscopy and x-ray diffraction were utilized to monitor grain growth and phase changes. Rutherford backscattering was used to monitor any changes in oxygen stoichiometry. The results of this study indicate that enhanced densification behavior is obtained for microwavesintered samples relative to samples sintered using conventional pressureless-sintering techniques.


1993 ◽  
Vol 300 ◽  
Author(s):  
Edward Y. Chang ◽  
Yeong-Lin Lai ◽  
Kuen-Chyuan Lin ◽  
Chun-Yen Chang ◽  
F. Y. Juang

ABSTRACTThe first study of the TiW nitrides (TiWNx) as the Schottky contact metals to the n type Ga0.51In0 49P has been made. The Ga0.51 In0.49P epitaxial layer was successfully grown on the GaAs substrate by LP-MOCVD to form a lattice-matched heterostructure. The RF-magnetron sputtering system was utilized for the nitride deposition. The thermal stability of the nitride films were studied using rapid thermal annealing (RTA) method. Both the electrical characteristics and the materials characteristics were investigated. The materials properties of the nitride films were characterized by X-ray diffraction (XRD), Transmission electron microscopy (TEM), and Auger electron spectroscopy (AES). The TiWNx Schottky contacts demonstrate excellent electrical and physical characteristics, even after high temperature annealing. The barrier heights range from 0.81 to 1.05 eV depending on the content of the nitrogen and the annealing conditions. The XRD and AES results show no indication of interaction at the TiWNX/GaInP interface of both as-deposited and annealed samples. The outstanding characteristics of the contact were attributed to the high bandgap nature of the Ga0.51In0.49P and the incorporation of nitrogen into the TiW films.


2007 ◽  
Vol 1023 ◽  
Author(s):  
Ruofeng Wang ◽  
Edward T. Bender ◽  
Mohannad T. Aljarrah ◽  
Edward A. Evans ◽  
Rex D. Ramsier

AbstractErbium(III) doped TiO2 nanofibers (Er2Ti2O7) have been synthesized by electrospinning mixtures of polymers, metal-containing materials, and erbium acetate. These electrospun nanofibers were subsequently annealed at temperatures of 550, 750, 950, and 1150 oC to remove the organics and leave behind the metal oxides. The crystal structure and optical properties of the nanofiber pyrochlores were investigated using X-ray diffraction (XRD), transmission electron microscopy (TEM), and Fourier transformation IR (FTIR) spectroscopy. Different crystal structures were formed by controlling the annealing conditions. XRD data are compared with near-IR spectra to better understand the effects of annealing temperature on the Er (III) thermally-excited selective optical emission process.


2006 ◽  
Vol 527-529 ◽  
pp. 295-298 ◽  
Author(s):  
Jörg Pezoldt ◽  
Francisco M. Morales ◽  
Thomas Stauden ◽  
Christian Förster ◽  
Efstathios K. Polychroniadis ◽  
...  

Flash lamp annealing of multilayer stack of the type SiC/Silicon overlayer(SOL)/SiC reduces the defect densities in the 3C-SiC/Si heteroepitaxial structure. Ge and C additions to the SOL lead to a substantial increase of the mass transfer from the upper layer to the lower SiC layer. If the Ge content of the SOL and the flash lamp annealing conditions are properly chosen a homogeneous layer with a 3C-SiC thickness between 150 and 200 nm can be achieved corresponding to a growth rate between 7.5 and 10.0 +m/s. The thickening of the lower layer depends on the SOL composition. Ge and/or C incorporation into the SOL and therefore into the Si melt enhances the mass transport from the upper SiC layer to the lower one.


2021 ◽  
Vol 9 ◽  
Author(s):  
Haijun Cheng ◽  
Jiangli Wei ◽  
Min Liang ◽  
Suyi Dai ◽  
Xiongmin Liu ◽  
...  

Abstract: The synthesis costs of macrolide musks are higher than those of other commercial musks. To make this process less expensive, eggshell waste was calcined at a low temperature to obtain a catalyst for the cyclopentadecanolide production via reactive distillation using a glycerol entrainer. X-ray diffraction, Fourier-transform infrared spectroscopy, scanning electron microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy analyses of the original and recovered catalysts revealed that the main catalytic ingredient was calcium glycerolate (CaG) and not calcium diglyceroxide (CaDG). The basic strengths of CaG and CaDG obtained by Hammett indicators were 7.2 < H_≤ 15.0 and 9.8 < H_≤15.0, while the corresponding base amounts were 1.9 and 7.3 mmol/ g, respectively. Because CaG was soluble in glycerine, the catalyst was efficiently reused. The reaction product containing over 95.0% cyclopentadecanolide with a yield of 49.8% was obtained at a temperature of 190°C and catalyst amount of 12 wt% after 7 h of reaction. Thus, eggshell waste may be directly placed into the reaction mixture after calcination at 600°C to synthesise a large amount of cyclopentadecanolide within a relatively short time. The results of this work indicate that eggshell waste can serve as a potential eco-friendly and affordable catalyst source for the production of macrolide musks.


2011 ◽  
Vol 10 (01n02) ◽  
pp. 313-317
Author(s):  
SUNITA MOHANTY ◽  
S. RAVI ◽  
H. S. JENA ◽  
V. MANIVANNAN

Nanocrystalline samples of pure and 2 at% Co -doped SnO 2 was prepared by a co-precipitate technique with a crystallite size of the order 10 nm. The homogeneity and single-phase nature of the sample was confirmed by using various characterization techniques, such as X-ray diffraction, transmission electron microscope, and Fourier infrared spectroscopy. Magnetization measurement shows a signature of room temperature ferromagnetism. The reduction in magnetization with decrease in crystalline size has been explained as a result of restriction in the range of bound magnetic polaron interaction. The samples prepared under nitrogen gas environment exhibit improvement in ferromagnetic behavior and enhanced electrical conductivity.


2002 ◽  
Vol 744 ◽  
Author(s):  
A. L. Cai ◽  
J. F. Muth ◽  
M. J. Reed ◽  
H. L. Porter ◽  
C. Jin ◽  
...  

ABSTRACTA series of epitaxial single crystal ZnO samples were grown by Pulsed Laser Deposition (PLD) on c-axis, double-side polished sapphire at temperatures ranging from 600°C to 800°C. A comprehensive optical study, consisting of cathodoluminescence (CL) and transmission spectroscopy measurements, was performed before and after annealing the samples in air and oxygen environments. The structural characteristics of the films were observed by x-ray diffraction and transmission electron microscopy (TEM). Using these measurements, the data revealed that annealing significantly improved the luminescence and exciton line-width of the better material grown at the higher end of the temperature range. In lower quality samples grown at the lower end of the temperature range, the optical quality of the material was degraded. In the samples grown at higher temperatures, annealing improved the optical qualities. An increase in the below band-gap, green band emission was also observed under some annealing conditions.


2013 ◽  
Vol 592-593 ◽  
pp. 517-520
Author(s):  
Ivona Černičková ◽  
Peter Švec ◽  
Emília Illeková ◽  
Dusan Janickovic ◽  
Pavol Priputen ◽  
...  

The U-phase in the Al72Pd12.8Co15.2alloy was studied under non-equilibrium (casting, differential thermal analysis) and near-equilibrium (long-term annealing) conditions to consider its compositional homogeneity. In the investigation, scanning electron microscopy including energy dispersive X-ray spectroscopy, X-ray diffraction, transmission electron microscopy, and differential thermal analysis were used. Contrary to the finding reported for the Al69.8Pd13.8Co16.4alloy, the results obtained for the investigated Al72Pd12.8Co15.2alloy did not confirm the compositional heterogeneity of the near-equilibrium U-phase after annealing at 700°C for 2000 h and at 850°C for 500 h.


2010 ◽  
Vol 667-669 ◽  
pp. 755-759 ◽  
Author(s):  
Yannick Champion ◽  
Jean Philippe Couzine ◽  
S. Tusseau Nenez ◽  
Yves Bréchet ◽  
Rinat K. Islamgaliev ◽  
...  

Copper based materials are still the most attractive low resistivity materials for microelectronics and electrotechnics applications, though, all variants developed to combine strength and conductivity, such as solid solutions and composites, suffer from decay in electric conductivity while strength is increased . In a addition, linear decay was also conjectured for pure copper when grain size is refined below the UFG and nanostructured domains (except when grain boundaries are pure twins). Copper alloys with low content of silver and chromium were prepared by high pressure torsion (HPT) with various annealing conditions. Vickers hardness and electric resistivity in the temperature range of 4K-340K, were measured as well as microstructural characterizations were performed using quantitative X-ray diffraction. Depending on the annealing conditions the alloys exhibit from 25% to 75% of IACS electric conductivity at room temperature and hardness in the range of 200 Hv. Origins of both high strength and high electric conductivity were investigated from microstructures analysis, using transmission electron microscopy and mechanical testing.


2013 ◽  
Vol 2013 ◽  
pp. 1-7 ◽  
Author(s):  
J. L. Aguilar Salinas ◽  
J. R. Pacheco Aguilar ◽  
S. A. Mayén Hernández ◽  
J. Santos Cruz

The photocatalytic activity of semiconductors is increasingly being used to disinfect water, air, soils, and surfaces. Titanium dioxide (TiO2) is widely used as a photocatalyst in thin films, powder, and in mixtures with other semiconductors or metals. This work presents the antibacterial effects of TiO2and light exposure (at 365 nm) onPseudomonas aeruginosaATCC 27853. TiO2powder was prepared from a mixture of titanium isopropoxide, ethanol, and nitric acid using a green and short time sol-gel technique. The obtained gel annealed at 450°C was characterized by X-ray diffraction, Raman spectroscopy, ultraviolet-visible spectroscopy, diffuse reflectance, scanning electron microscopy, and transmission electron microscopy. The nanocomposite effectively catalyzed the inactivation ofPseudomonas aeruginosa. Following 90 minutes exposure to TiO2and UV light, logarithm of cell density was reduced from 6 to 3. These results were confirmed by a factorial design incorporating two experimental replicates and two independent factors.


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