Novel Low VON Poly-Si/4H-SiC Heterojunction Diode Using Energy Barrier Height Control
2012 ◽
Vol 717-720
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pp. 1005-1008
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Keyword(s):
We experimentally investigated a method of controlling the energy barrier height (ΦB) of polycrystalline silicon (poly-Si)/4H-SiC heterojunction diodes (HJDs) and conducted a numerical simulation of a novel low Von and low reverse recovery current diode using ΦB control. The ΦB of the HJD with arsenic-doped n+-poly-Si was 0.79 eV and that of the HJD with boron-doped p+-poly-Si was 1.59 eV. The ΦB can be controlled over a wide range by varying the dopant and ion implantation dose of poly-Si. A novel merged HJD (M-HJD) with two different ΦB values obtained by using ΦB control is also presented. The numerical simulation results show that the M-HJD reduces Von without increasing reverse leakage current at high reverse voltage.
2015 ◽
Vol 821-823
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pp. 1015-1018
Keyword(s):
2001 ◽
2013 ◽
Vol 740-742
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pp. 733-736
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2005 ◽
Vol 85
(1)
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pp. 41-49
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