Precise voltage contrast image assisted positioning forin situelectron beam nanolithography for nanodevice fabrication with suspended nanowire structures

2009 ◽  
Vol 20 (28) ◽  
pp. 285306 ◽  
Author(s):  
Renhai Long ◽  
Jiajun Chen ◽  
Jin-Hee Lim ◽  
John B Wiley ◽  
Weilie Zhou
1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4525-4530 ◽  
Author(s):  
Kiyoshi Nikawa ◽  
Toyokazu Nakamura ◽  
Yasuko Hanagama ◽  
Tohru Tsujide ◽  
Kenji Morohashi ◽  
...  

2007 ◽  
Author(s):  
Takeshi Koshiba ◽  
Takumi Ota ◽  
Tetsuro Nakasugi ◽  
Fumihiko Nakamura ◽  
Katsuhide Watanabe ◽  
...  

Author(s):  
C.H. Chen ◽  
C.M. Shen ◽  
C.M. Huang ◽  
Y.F. Hsia

Abstract The passive voltage contrast (PVC) in this experiment was widely used to detect open/short issues for most failure analyses. However, most of back-end particles were visible, but front-end particles were not. And sometimes only used PVC image, the failure mechanism was un-imaginable. As a result, we needed to collect some electrical data to explain complex PVC image, before physical failure analysis (PFA) was started. This paper shows how to use the scanning probe microscope (SPM) tool to make up PVC method and overcome the physical failure analysis challenge. From our experiment, the C-AFM could provide more information of the defect type and give faster feedback to production lines.


1994 ◽  
Author(s):  
Hiroyuki Hamada ◽  
Tohru Tsujide ◽  
Kazuo Nakaizumi

Author(s):  
William Krakow ◽  
Benjamin Siegel

Unwin has used a metallized non-conducting thread in the back focal plane of the objective lens that stops out a portion of the unscattered beam, takes on a localized positive charge and thus produces an additional phase shift to give a different transfer function of the lens. Under the particular conditions Unwin used, the phase contrast image was shifted to bright phase contrast for optimum focus.We have investigated the characteristics of this type of electrostatic phase plate, both analytically and experimentally, as functions of the magnitude of charge and defocus. Phase plates have been constructed by using Wollaston wire to mount 0.25μ diameter platinum wires across apertures ranging from 50 to 200μ diameter and vapor depositing SiO and gold on the mounted wires to give them the desired charging characteristics. The net charge was varied by adjusting only the bias on the Wehnelt shield of the gun, and hence the beam currents and effective size of the source.


Author(s):  
T. Oikawa ◽  
H. Kosugi ◽  
F. Hosokawa ◽  
D. Shindo ◽  
M. Kersker

Evaluation of the resolution of the Imaging Plate (IP) has been attempted by some methods. An evaluation method for IP resolution, which is not influenced by hard X-rays at higher accelerating voltages, was proposed previously by the present authors. This method, however, requires truoblesome experimental preperations partly because specially synthesized hematite was used as a specimen, and partly because a special shape of the specimen was used as a standard image. In this paper, a convenient evaluation method which is not infuenced by the specimen shape and image direction, is newly proposed. In this method, phase contrast images of thin amorphous film are used.Several diffraction rings are obtained by the Fourier transformation of a phase contrast image of thin amorphous film, taken at a large under focus. The rings show the spatial-frequency spectrum corresponding to the phase contrast transfer function (PCTF). The envelope function is obtained by connecting the peak intensities of the rings. The evelope function is offten used for evaluation of the instrument, because the function shows the performance of the electron microscope (EM).


Author(s):  
William H. Massover

Each molecule of ferritin (d = 130Å) contains a core of iron surrounded by a 24-subunit protein shell. The amount of iron stored is variable and is present within the central cavity (d = 80Å) as a hydrated ferric oxide equivalent to the mineral, ferrihydrite. Many early ultrastructural studies of ferritin detected regular patterns of a multiparticulate substructure in the iron-rich core [e.g., 3,4], Each small particle was termed a “micelle“; a theory became widely accepted that a core consisted of up to six micelles positioned at the vertices of an octahedron. Other workers recognized that the apparent micelles were smaller or even disappeared if images were recorded closer to exact focus [e.g., 5]. In 1969, Haydon clearly established that the observed substructure was really an imaging artifact; each apparent micelle was only a dot in the underfocused phase contrast image of the supporting film superimposed on the amplitude image of the strongly scattering metal.


Author(s):  
T.C. Sheu ◽  
S. Myhajlenko ◽  
D. Davito ◽  
J.L. Edwards ◽  
R. Roedel ◽  
...  

Liquid encapsulated Czochralski (LEC) semi-insulating (SI) GaAs has applications in integrated optics and integrated circuits. Yield and device performance is dependent on the homogeniety of the wafers. Therefore, it is important to characterise the uniformity of the GaAs substrates. In this respect, cathodoluminescence (CL) has been used to detect the presence of crystal defects and growth striations. However, when SI GaAs is examined in a scanning electron microscope (SEM), there will be a tendency for the surface to charge up. The surface charging affects the backscattered and secondary electron (SE) yield. Local variations in the surface charge will give rise to contrast (effectively voltage contrast) in the SE image. This may be associated with non-uniformities in the spatial distribution of resistivity. Wakefield et al have made use of “charging microscopy” to reveal resistivity variations across a SI GaAs wafer. In this work we report on CL imaging, the conditions used to obtain “charged” SE images and some aspects of the contrast behaviour.


Author(s):  
S. J. Pennycook ◽  
P. D. Nellist ◽  
N. D. Browning ◽  
P. A. Langjahr ◽  
M. Rühle

The simultaneous use of Z-contrast imaging with parallel detection EELS in the STEM provides a powerful means for determining the atomic structure of grain boundaries. The incoherent Z-contrast image of the high atomic number columns can be directly inverted to their real space arrangement, without the use of preconceived structure models. Positions and intensities may be accurately quantified through a maximum entropy analysis. Light elements that are not visible in the Z-contrast image can be studied through EELS; their coordination polyhedra determined from the spectral fine structure. It even appears feasible to contemplate 3D structure refinement through multiple scattering calculations.The power of this approach is illustrated by the recent study of a series of SrTiC>3 bicrystals, which has provided significant insight into some of the basic issues of grain boundaries in ceramics. Figure 1 shows the structural units deduced from a set of 24°, 36° and 65° symmetric boundaries, and 24° and 45° asymmetric boundaries. It can be seen that apart from unit cells and fragments from the perfect crystal, only three units are needed to construct any arbitrary tilt boundary. For symmetric boundaries, only two units are required, each having the same Burgers, vector of a<100>. Both units are pentagons, on either the Sr or Ti sublattice, and both contain two columns of the other sublattice, imaging in positions too close for the atoms in each column to be coplanar. Each column was therefore assumed to be half full, with the pair forming a single zig-zag column. For asymmetric boundaries, crystal geometry requires two types of dislocations; the additional unit was found to have a Burgers’ vector of a<110>. Such a unit is a larger source of strain, and is especially important to the transport characteristics of cuprate superconductors. These zig-zag columns avoid the problem of like-ion repulsion; they have also been seen in TiO2 and YBa2Cu3O7-x and may be a general feature of ionic materials.


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