Characterization Complex Voltage Contrast Image Using Atomic Force Microscopy

2004 ◽  
Author(s):  
C.H. Chen ◽  
C.M. Shen ◽  
C.M. Huang ◽  
Y.F. Hsia
Keyword(s):  
Failure Analysis ◽  
Scanning Probe ◽  
Production Lines ◽  
Force Microscopy ◽  
Atomic Force ◽  
Front End ◽  
Probe Microscope ◽  
Voltage Contrast ◽  
Contrast Image ◽  
Electrical Data

Abstract The passive voltage contrast (PVC) in this experiment was widely used to detect open/short issues for most failure analyses. However, most of back-end particles were visible, but front-end particles were not. And sometimes only used PVC image, the failure mechanism was un-imaginable. As a result, we needed to collect some electrical data to explain complex PVC image, before physical failure analysis (PFA) was started. This paper shows how to use the scanning probe microscope (SPM) tool to make up PVC method and overcome the physical failure analysis challenge. From our experiment, the C-AFM could provide more information of the defect type and give faster feedback to production lines.

A Study of the Photoelectric Effect Caused by a Laser Beam Used in a Beam Bounce Technique in a C-AFM System

2008 ◽  
Author(s):  
Hung-Sung Lin ◽  
Mong-Sheng Wu
Keyword(s):  
Laser Beam ◽  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Photoelectric Effect ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Electrical Characteristics ◽  
Atomic Force ◽  
Probe Microscope ◽  
Probe Head

Abstract The use of a scanning probe microscope (SPM), such as a conductive atomic force microscope (C-AFM) has been widely reported as a method of failure analysis in nanometer scale science and technology [1-6]. A beam bounce technique is usually used to enable the probe head to measure extremely small movements of the cantilever as it is moved across the surface of the sample. However, the laser beam used for a beam bounce also gives rise to the photoelectric effect while we are measuring the electrical characteristics of a device, such as a pn junction. In this paper, the photocurrent for a device caused by photon illumination was quantitatively evaluated. In addition, this paper also presents an example of an application of the C-AFM as a tool for the failure analysis of trap defects by taking advantage of the photoelectric effect.

SCANNING PROBE MICROSCOPY BASED NANOSCALE PATTERNING AND FABRICATION

COSMOS ◽  
2007 ◽  
Vol 03 (01) ◽  
pp. 1-21 ◽  
Author(s):  
XIAN NING XIE ◽  
HONG JING CHUNG ◽  
ANDREW THYE SHEN WEE
Keyword(s):  
Integrated Circuits ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Force Microscopy ◽  
Nanoscale Patterning ◽  
Atomic Force ◽  
Probe Microscope ◽  
Molecular Manipulation

Nanotechnology is vital to the fabrication of integrated circuits, memory devices, display units, biochips and biosensors. Scanning probe microscope (SPM) has emerged to be a unique tool for materials structuring and patterning with atomic and molecular resolution. SPM includes scanning tunneling microscopy (STM) and atomic force microscopy (AFM). In this chapter, we selectively discuss the atomic and molecular manipulation capabilities of STM nanolithography. As for AFM nanolithography, we focus on those nanopatterning techniques involving water and/or air when operated in ambient. The typical methods, mechanisms and applications of selected SPM nanolithographic techniques in nanoscale structuring and fabrication are reviewed.

Structural and Magnetic Investigation of Cu, Co Substituted NiFe2O4 Thin Films by Scanning Probe Microscopy (AFM, MFM)

2015 ◽  
Vol 830-831 ◽  
pp. 589-591 ◽  
Author(s):  
Hakikat Sharma ◽  
N.S. Negi
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Microstructural Analysis ◽  
Secondary Phase ◽  
Scanning Probe ◽  
Force Microscopy ◽  
Atomic Force ◽  
Magnetic Investigation ◽  
Probe Microscope ◽  
Xrd Patterns

In the present study we prepared NiFe2O4, Ni0.95Cu0.05Fe2O4and Ni0.94Cu0.05Co0.01Fe2O4thin films by metallo-organic decomposition method (MOD) using spin coating technique. The samples were characterized by XRD. XRD patterns of thin films confirmed the formation of cubic spinel structure without any secondary phase. For microstructural analysis we characterized samples by Scanning Probe Microscope (SPM). From Atomic force microscopy (AFM), we analyzed surface morphology, calculated grain size, roughness and porosity. It has been found that grain size and roughness affected by Cu, Co substitution. After this we carried out magnetic force microscopy (MFM) on the samples. Effect of substitution on magnetic grains was observed from MFM.

Bacteria and viruses in the objective of probe microscopy

2021 ◽  
Vol 3 ◽  
Author(s):  
I.V. Yaminsky ◽  
Keyword(s):  
Atomic Force Microscopy ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Probe Microscope

The article is devoted to the study of viruses and bacteria using a scanning probe microscope in the atomic force microscopy mode, in particular, to the question, what data can be obtained using this method and how to interpret it.

Mapping Nanoscale Switching Behavior of PZT Domain Patterns by Scanning Probe Microscope

2016 ◽  
Vol 680 ◽  
pp. 30-34
Author(s):  
Yan Ping Wei ◽  
Huan Ming Lu ◽  
An Xiang Wei ◽  
Yong Li
Keyword(s):  
Coercive Field ◽  
Compressive Strain ◽  
Scanning Probe ◽  
Switching Behavior ◽  
Conductive Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Probe Microscope ◽  
Bottom To Top ◽  
The Impact

The switching current of the PZT domain patterns was detected by the conductive atomic force microscopy. The impact of the scan rate on the current contrast was studied. Successive current images of domain evolution during the polarization switching process were obtained. The impact of the local force exerted by the tip and the polarization cycles of the patterns were studied. The results suggested that the compressive strain exerted by the tip can decrease the piezoelectric coercive field and the polarization fatigue can increase the piezoelectric coercive field in the polarization inversion process from bottom to top.

The Failure Analysis of Specific Source-to-Drain Dislocation and Case Study

2008 ◽  
Author(s):  
C. H. Wang ◽  
S.W. Lai ◽  
C.Y. Wu ◽  
B.T. Chen ◽  
J.Y. Chiou ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Process Improvement ◽  
Conductive Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Front End ◽  
Electrical Phenomenon ◽  
Specific Source ◽  
Crystalline Defect

Abstract A failure incurred in the front-end is typically a bottleneck to production due the need for physical failure analysis (PFA). Often the challenge is to perform timely localization of the front-end defect, or finding the exact physical defect for process improvement. Many process parameters affect the device behaviour and cause the front-end defect. Simply, the failures are of two types: high-resistance and leakage. A leakage mode defect is the most difficult to inspect. Although conductive atomic force microscopy and six probes nano-probing are popular tools for front-end failure inspection, some specific defects still need more effort. The electrical phenomenon and analysis of a crystalline defect will be demonstrated in this paper. The details will be discussed below.

scholarly journals MILIACINE INFLUENCE ON THE BIOFILM FORMATION OF BACTERIA

2016 ◽  
pp. 3-9
Author(s):  
I. N. Chainikova ◽  
Yu. V. Filippova ◽  
B. A. Frolov ◽  
N. B. Perunova ◽  
E. V. Ivanova ◽  
...  
Keyword(s):  
Biofilm Formation ◽  
Salmonella Enteritidis ◽  
Pathogenic Bacteria ◽  
Scanning Probe ◽  
Immunotropic Activity ◽  
Force Microscopy ◽  
Atomic Force ◽  
Probe Microscope ◽  
Reference Strains ◽  
Growth Of Bacteria

Aim. The comparative estimation of miliacine influence on the biofilm formation of bacteria. Materials and methods. The objects of investigation were the clinical isolates of Salmonella enteritidis (28), Salmonella typhimurium (24), Klebsiella pneumoniae (8), Pseudomonas aeruginosa (8) and reference strains of lactobacilli (5) and bifidobacteria (3). Miliacin was obtained from crystals of millet oil. Antibacterial activity of miliacin was detected by the method of serial dilutions. For investigation of biofilms miliacin in 100 and 50 mkg/ml concentrations was used. Miliacin was diluted in Twin-21. Biofilm formation was studied by method of O'Toole G.A., Kolter R. (1998) using spectrophotometer Elx 808 (BioTek, USA). The morphometry of biofilms was conducted by atomic force microscopy with the use of scanning probe microscope SMM-2000. Results. Miliacin and its solvent did not influence the growth of bacteria. Maximum sensivity of biofilms to miliacin was detected in K. pneumoniae and P. aeruginosa, minimal - in S. enteritidis. Miliacin did not influence the biofilm formation in strains of lactobacilli and bifidobacteria. Conclusion. Miliacin in addition to immunotropic activity, detected earlier, can inhibit the biofilms of opportunistic and pathogenic bacteria without influence on the biofilm formation of representatives of usual flora.

Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope

2008 ◽  
Vol 55-57 ◽  
pp. 609-612 ◽  
Author(s):  
Te Hua Fang ◽  
S.H. Kang
Keyword(s):  
Thin Films ◽  
Mechanical Property ◽  
Scanning Probe ◽  
Zno Thin Films ◽  
X Ray Diffraction ◽  
Surface Geometry ◽  
Force Microscopy ◽  
Atomic Force ◽  
Property Evaluation ◽  
Probe Microscope

The characteristics of morphology, friction and nanotribological properties of ZnO thin films were achieved by means of x-ray diffraction, scanning probe microscopy (SPM), and nanoindentation. The ZnO thin films were deposited by a radio frequency magnetron sputtering system. Surface geometry and friction analysis were derived from atomic force microscopy/friction force microscopy (AFM/FFM). The hardness and Young’s modulus of the ZnO thin films were investigated by nanoindentation measurements with a Berkovich indenter. The films exhibited an increase in the hardness with decreasing load i.e. the indentation size effect (ISE) was found. In addition, the nanoscratched mechanical property of the films was discussed.

The Study and Methodology of Defects Isolation For Contacts of Non-Isolated Active Region on New Logic Designs

2005 ◽  
Author(s):  
C. H. Wang ◽  
C. M. Shen ◽  
C. J. Lin ◽  
Z. H. Lee ◽  
J. H. Chou
Keyword(s):  
Active Region ◽  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Operating Voltage ◽  
Circuit Layout ◽  
Analysis Process ◽  
Atomic Force ◽  
Front End ◽  
Voltage Contrast

Abstract With the advancement in technology and lower operating voltage, new standards have evolved in circuit layout and design. Some of these new standards have increased the difficulties of the physical failure analysis process, especially on the front-end. The phenomenon described in this paper is the unusual voltage contrast (VC) and conductive atomic force microscope (C-AFM) curve on a non-isolated active region. The model and mechanism are demonstrated for front-end failure analysis. Based on this, the solution for analysis is investigated.

Atomi c-force microscopy of viruses and bacteria

2021 ◽  
Vol 2 ◽  
pp. 18-21
Author(s):  
Igor Yaminsky ◽  
◽  
Assel Akhmetova ◽  
Keyword(s):  
Image Processing ◽  
Sample Preparation ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Force Microscopy ◽  
Atomic Force ◽  
Force Mode ◽  
Probe Microscope

The article is devoted to the study of viruses and bacteria using a scanning probe microscope in atomic force mode, in particular, to the features of sample preparation, interpretation of the data obtained, and image processing.

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