Impact of oxygen flow rate on performance of indium-tin-oxide-based RRAMs

2021 ◽  
Author(s):  
Tsung-Ming Tsai ◽  
Yung-Fang Tan ◽  
Cheng-Hsien Wu ◽  
Chih-Cheng Yang ◽  
Wen-Chung Chen ◽  
...  
Keyword(s):  
Flow Rate ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Flow Rate ◽  
Oxygen Flow

scholarly journals Effect of Oxygen Flow Rate on Properties of Aluminum-Doped Indium-Saving Indium Tin Oxide (ITO) Thin Films Sputtered on Preheated Glass Substrates

Metals ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1604
Author(s):  
Svitlana Petrovska ◽  
Ruslan Sergiienko ◽  
Bogdan Ilkiv ◽  
Takashi Nakamura ◽  
Makoto Ohtsuka
Keyword(s):  
Thin Films ◽  
Flow Rate ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Flow Rate ◽  
Oxygen Flow ◽  
Visible Range ◽  
Oxide Content ◽  
Glass Substrates ◽  
Ito Thin Films

Amorphous aluminum-doped indium tin oxide (ITO) thin films with a reduced indium oxide content of 50 mass% were manufactured by co-sputtering of ITO and Al2O3 targets in a mixed argon–oxygen atmosphere onto glass substrates preheated at 523 K. The oxygen gas flow rate and heat treatment temperature effects on the electrical, optical and structural properties of the films were studied. Thin films were characterized by means of a four-point probe, ultraviolet–visible-infrared (UV–Vis-IR) spectroscopy and X-ray diffraction. Transmittance of films and crystallization temperature increased as a result of doping of the ITO thin films by aluminum. The increase in oxygen flow rate led to an increase in transmittance and hindering of the crystallization of the aluminum-doped indium saving ITO thin films. It has been found that the film sputtered under optimal conditions showed a volume resistivity of 713 µΩcm, mobility of 30.8 cm2/V·s, carrier concentration of 2.9 × 1020 cm−3 and transmittance of over 90% in the visible range.

Indium Tin Oxide Thin Films Deposited at Low Temperature Using Dual Ion Beam Sputtering

2014 ◽  
Vol 1699 ◽  
Author(s):  
Wilhelmus J. Geerts ◽  
Nelson A. Simpson ◽  
Alan D. Woodall ◽  
Maclyn Stuart Compton
Keyword(s):  
Flow Rate ◽  
Indium Tin Oxide ◽  
Atomic Oxygen ◽  
Ion Beam ◽  
Oxygen Flow Rate ◽  
Oxygen Flow ◽  
Visible Range ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

ABSTRACTITO samples were sputtered at room temperature by ion assisted dual ion beam sputtering using atomic or molecular oxygen. The electrical properties appear to depend on the oxygen flow rate during deposition and the resistivity decreases for samples sputtered at a higher oxygen flow rate (1-5 sccm). The resistivity is lowest at an oxygen flow rate of 4 sccm. The average absorption in the visible part of the spectrum also decreases as a function of the oxygen flow rate and is lower for samples sputtered with atomic oxygen. The figure of merit, i.e. the ratio of the conductivity versus the average absorption in the visible range, increases for higher oxygen flow rates and is typically 20-60% higher for samples sputtered using an atomic oxygen assist beam.

Fabrication and Characterization of Tin Oxide Nanorods Prepared by Glancing Angle DC Reactive Magnetron Sputtering

2013 ◽  
Vol 770 ◽  
pp. 189-192
Author(s):  
Chaiyan Oros ◽  
Anurat Wisitsoraat ◽  
Mati Horprathum
Keyword(s):  
Magnetron Sputtering ◽  
Flow Rate ◽  
Tin Oxide ◽  
Morphological Characterization ◽  
Oxygen Flow Rate ◽  
Oxygen Flow ◽  
Degree Of Crystallinity ◽  
Glancing Angle ◽  
Glad Technique ◽  
Effect Of Oxygen

In this work, we report the fabrication of tin oxide (SnO2) nanorods on (100) silicon substrate by glancing angle deposition (GLAD) technique with DC magnetron sputtering system and study the effect of oxygen flow rate on SnO2 nanorod growth. The crystal structure and morphology of SnO2 nanorod were characterized by x-ray diffraction and field-emission scanning electron microscopy. It was found that the structure of SnO2 nanorods changes from amorphous to crystalline as the oxygen flow rate increases from 12 to 24 sccm and the degree of crystallinity tends to improve as the oxygen flow rate increases further. From morphological characterization, all SnO2 films prepared with different oxygen flow rates comprise isolated columnar nanorod structures and the nanorod size tends to decrease as the oxygen flow rate increases. In addition, the deposition rate is found to decrease from 0.28 to 0.10 nm/s as the oxygen flow rate increases from 12 to 48 sccm.

Effects of Reaction Conditions on Deposition of Ferrites from Alkaline Metal Hydroxide Gels

1997 ◽  
Vol 495 ◽  
Author(s):  
Karl F. Schoch ◽  
Theodore R. Vasilow
Keyword(s):  
Flow Rate ◽  
Oxygen Flow Rate ◽  
Oxygen Flow ◽  
X Ray Diffraction ◽  
Reaction Conditions ◽  
Metal Hydroxides ◽  
X Ray ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Mg Content

ABSTRACTFormation of ferrites from aqueous solution of metal salts is a well known process involving precipitation of metal hydroxides followed by oxidation of the resulting gel. The purpose of the present work was to determine the effects oxygen flow rate on the progress of the reaction and on the structure and properties of the resulting precipitate. The reaction was carried out at 70°C with pH of 10.5 and oxygen flow rate of 2,4, or 8 standard liters per hour. The progress of the reaction was monitored by following the oxidation-reduction potential of the solution, which changes dramatically after the Fe(II) is consumed. The reaction rate increased with increasing oxygen flow rate. The Mg content of the precipitate was lower than that of the reaction mixture, possibly because of the pH of the reaction mixture. X-ray diffraction and infrared spectroscopy confirmed formation of a ferrite under these conditions.

Novel Liquid Fuel HVOF Torches Fueled with Ethanol: Optimization and Erosion Wear Response of Cr3C2-NiCr Coatings

2021 ◽  
Author(s):  
Shaowu Liu ◽  
Michel Moliere ◽  
Hanlin Liao
Keyword(s):  
Flow Rate ◽  
Feed Rate ◽  
Impact Angle ◽  
Oxygen Flow Rate ◽  
Oxygen Flow ◽  
Standoff Distance ◽  
Wear Loss ◽  
Erosion Wear ◽  
Powder Feed Rate ◽  
Powder Feed

Abstract In this work; a novel liquid fuel HVOF process fueled with ethanol was used to prepare 75wt%Cr3C2–25wt%NiCr coatings on AISI304 stainless steel substrate. Taguchi method was employed to optimize the spray parameters (ethanol flow rate; oxygen flow rate; powder feed rate and standoff distance) to achieve better erosion resistance at 90° impact angle. The results indicated that ethanol flow rate and oxygen flow rate were identified as the highly contributing parameters on the erosion wear loss. The important sequence of the spray parameter is ethanol flow rate > oxygen flow rate > standoff distance > powder feed rate. The optimal spray parameter (OSP) for minimum erosion wear loss was obtained under ethanol flow rate of 28slph; oxygen flow rate of 420slpm; powder feed rate of 76.7 g/min and standoff distance of 300mm. The phase composition; microstructure; hardness; porosities; and the erosion wear behaviors of the coatings have been studied in detail. Besides; erosion wear testing of the optimized coating was conducted at 30°; 60° and 90° impact angle using air jet erosion testing machine. The SEM images of the erodent samples were taken to analyze the erosion mechanism.

An Influence of Oxygen Flow Rate on Structural, Optical and Tribological Properties of Molybdenum Oxide Thin Films

2021 ◽  
Vol 39 ◽  
pp. 43-53
Author(s):  
Divyeshkumar P. Dave ◽  
Akshay M. Patel ◽  
Kamlesh V. Chauhan ◽  
Sushant K. Rawal
Keyword(s):  
Wear Rate ◽  
Molybdenum Oxide ◽  
Tribological Properties ◽  
Flow Rate ◽  
Gas Flow ◽  
Visible Region ◽  
Contact Angle Measurement ◽  
Angle Measurement ◽  
Oxygen Flow Rate ◽  
Oxygen Flow

The influence of oxygen flow rate is examined on structural, optical and tribological properties of molybdenum oxide films deposited by reactive magnetron sputtering. The films were characterized by X-ray diffraction, scanning electron microscope (SEM), and contact angle measurement system. The optical properties of the films were measured by UV-Vis-NIR spectrophotometer and transmittance of ∼73% in the visible region of the spectrum was achieved. The band gap increases with increases in oxygen gas flow rate. AFM figure illustrates that the roughness of surface increases as oxygen flow rate increases. As oxygen increases wear rate and COF decreases while at the 18 sccm the lowest wear rate found.

Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering

2022 ◽  
Vol 40 (1) ◽  
pp. 013405
Author(s):  
Nilton Francelosi A. Neto ◽  
Cristiane Stegemann ◽  
Lucas J. Affonço ◽  
Douglas M. G. Leite ◽  
José H. D. da Silva
Keyword(s):  
Cobalt Oxide ◽  
Flow Rate ◽  
Oxide Films ◽  
Reactive Sputtering ◽  
Oxygen Flow Rate ◽  
Oxygen Flow
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