Hydrodynamic Performance of Meso Scale Gas Journal Bearings
Recent advancement of micro machining technology enabled a fabrication of micro scale gas bearings for high performance miniature scale rotating machinery. This paper presents recent development of micro gas bearings fabricated through X-ray lithography, and suggests fabrication method of various meso scale (~mm) gas journal bearings, which include Rayleigh step gas journal bearings, pressure dam bearings, grooved pressure dam bearings. Also presented are simulations performed using orbit method for the suggested meso scale gas bearings with diameter of 2mm, length of 2mm, and clearance of 1~2 micron. Pan’s first order slip model was adopted to simulate molecular rarefaction effects. The rotor mass was 0.3g, simulating very small Laser scanner unit. From the simulations, Rayleigh step journal bearing had highest threshold speed reaching 300,000 rpm. Effects of molecular rarefaction in sub micron bearing clearance on the dynamic performance at very high bearing numbers, were also investigated.