FABRICATION OF MICRO PROBE-TYPE ELECTRODES FOR MICROELECTRO-CHEMICAL MACHINING USING MICROFABRICATION

2010 ◽  
Vol 24 (15n16) ◽  
pp. 2639-2644 ◽  
Author(s):  
W. B. PARK ◽  
J. H. CHOI ◽  
C. W. PARK ◽  
G. M. KIM ◽  
H. S. SHIN ◽  
...  

In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.

Author(s):  
Yang Liu ◽  
Lai Wang ◽  
Yuantao Zhang ◽  
Xin Dong ◽  
Zhibiao Hao ◽  
...  
Keyword(s):  

2013 ◽  
Vol 2013 (1) ◽  
pp. 000414-000414 ◽  
Author(s):  
Noriyoshi Shimizu ◽  
Wataru Kaneda ◽  
Hiromu Arisaka ◽  
Naoyuki Koizumi ◽  
Satoshi Sunohara ◽  
...  

In recent years, it has become apparent that the conventional FC-BGA (Flip Chip Ball Grid Array) substrate manufacturing method (Electroless Cu plating, Desmear, Laser Drilling processing) is reaching its limits for finer wiring dimensions and narrower pitches of the flip chip pad. On the other hand, the demand for miniaturization and higher density continues to increase. Our solution is the Organic Multi Chip Package, a combined organic interposer and organic substrate. Unlike a conventional 2.5D interposer that is separately manufactured and then attached to a substrate PWB (Printed Wire Board), the interposer of our Organic Multi Chip Package is built directly onto an organic substrate. First normal build-up layers are laminated on both sides of the PWB core and metal traces formed by conventional semi-additive techniques. After the back side is coated with a typical SR layer for FC-BGA, the top surface and its laser-drilled vias are smoothed by CMP (Chemical Mechanical Polishing). A thin-film process is used to deposit the interposer's insulating resin layers. Then normal processes are applied to open small diameter vias and a metal seed layer is sputtered on. The wiring is patterned, and the metal traces are fully formed by plating. Finally, the Cu pads on the top layer are treated by OSP (Organic Solderability Preservative). In this paper we discuss results using a prototype 40 mm × 40 mm Organic Multi Chip Package. The prototype's organic substrate has a two-metal layer core with 100 μm diameter through-holes, two build-up layers on the chip side, and three plus a solder resist layer on the BGA side. The interposer has four wiring layers. Thus the structure of the prototype is 4+(2/2/3). For evaluation purposes, there are four patterns of lines and spaces on the interposer: 2 μm/2 μm, 3 μm/3 μm, 4 μm/4 μm, and 5 μm/5 μm. The metal trace thicknesses are 2.5 μm, via diameters are 10 μm, pad pitches are 40 μm, and the Cu pad diameters are 25 μm. These dimensions allow the Organic Multi Chip Package to easily make the pitch conversions of the IC to the PCB. With a 4+(2/2/3) structure, the Organic Multi Chip Package is asymmetric, raising concerns about package warping. However, the warping can be reduced by the optimization of structure and materials. In this way, we were able to connect a high pin-count logic chip to standard Wide I/O memory chips. We think that there are at least two obvious advantages of the Organic Multi Chip Package. The first is a total height reduction compared to a structure with a separate silicon interposer attached to a PWB substrate. The Organic Multi Chip Package, with its built-on interposer, eliminates the need for solder joints between the interposer and substrate. In addition, the fine resin layers make our interposer much thinner than a silicon interposer. The second advantage is simpler assembly. Our structure does not require the separate step of assembling an interposer to the substrate. Assembly costs should be lower and yields higher. In this paper we demonstrate the successful attainment of fine lines and spaces on the Organic Multi Chip Package. We also show and discuss reliability test results.


Author(s):  
Dara W. Childs ◽  
David Klooster ◽  
Henry Borchard ◽  
Dustin Pavelek ◽  
Stephen Phillips

Start-transient testing of a hybrid (combined hydrostatic and hydrodynamic action) bearing supplied with air was completed, providing an indication of its performance while operating in a compressible fluid medium. The test start transients were modeled after Rocket Engine Transient Simulation Software (ROCETS) predictions for start-transient behavior of running speed ω(t) and bearing supply pressure Ps(t). The top test speed was 15 krpm. The ramp rate, supply pressure Ps values at 15 krpm, constant bearing unit load magnitude w0, and load orientation (load-on-recess LOR or load-on-land LOL) were varied. Five different load-case combinations were carried out (separately) for LOR and LOL load configurations with ramp rates varying from 2206 rpm/s to 8824 rpm/s. The target pressures at 15 krpm varied from 5.32 bars to 18.25 bars. The tested bearing dimensions were: L = D = 38.1 mm, and Cr =.0635 mm. Lift-off occurs due to the increase in Ps (ω dependent) and was defined as the point of departure towards the center of the bearing with increasing ω while the rotor remained 0.00254 mm (0.1 mils) above the bearing surface. This method is limited by the inability to accurately measure an established operating bearing clearance. Evaluation of the lift-off Ps versus applied unit load w0 supports the following conclusions: (1) Lift-off Ps is approximately a linear function of w0, (2) Changing the ramp rate while keeping constant the specified Ps at 15 krpm has no significant impact, (3) Lowering the limit Ps at 15 krpm may reduce the lift-off Ps value, and (4) The LOR start-transient cases required a higher lift-off speed and lift-off Ps values than the corresponding LOL start-transient cases.


2003 ◽  
Vol 785 ◽  
Author(s):  
Lijun Jiang ◽  
William N. Carr

ABSTRACTVanadium dioxide (VO2) thin films were fabricated by e-beam evaporation of vanadium thin films followed by thermal oxidation in oxygen ambient. The properties of the VO2 films were investigated for thermo-optical switching applications. Synthesized VO2 film displays a phase transition at 65 – 68 °C. It exhibits an abrupt change in optical reflectivity over the phase transition temperature range. Results for VO2 on a highly reflective metal layer are strongly dependent on the VO2 thickness. The optical switching has a major hysteresis of about 15 °C between the heating and cooling branches. The evolution of the surface morphology with the oxidation time was studied with a SEM. The VO2 film was patterned on microplatforms by metal lift-off technique. We conclude that the evaporation followed by oxidation is an effective method to produce active VO2 film for thermo-optical switching devices.


2007 ◽  
Vol 556-557 ◽  
pp. 949-952
Author(s):  
Marcel Placidi ◽  
Phillippe Godignon ◽  
Jaume Esteve ◽  
Narcis Mestres ◽  
Gabriel Abadal

Silicon Carbide has proven its relevance for various MEMS and sensors devices applications. This paper presents the fabrication and the first test results of 3C-SiC electrostatic resonators actuated by applying a combination of AC and DC voltages. The recipe used for the fabrication has taken the advantage of the starting material, 3C-SiC grown on Si, which allows us to use the Si substrate as sacrificial layer to release the structures. Resonators have been fabricated by a two-step process, combining RIE ICP etching with HF wet etching. Resonators have been successfully electrostatically actuated in air-ambient condition. The resonance frequencies were clearly identified, although capacitive current created by actuation was not detected.


2012 ◽  
Vol 503 ◽  
pp. 447-450
Author(s):  
Jin Yang Feng ◽  
Feng Chen ◽  
Yuan Fang Shang ◽  
Xiong Ying Ye

In this Paper, we Propose an Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates without an Extra Mask. An Assistant Metal Layer Was Deposited on the Glass Substrate with Grooves to Increase the Reflectance, and then a Layer of Photoresist for Lift-Off Process Was Coated and Patterned Aligning with the Shallow Grooves. We Compared the Effect of Aluminum and Chromium Films with Different Thickness as Reflecting Layers. an Aluminum or Chromium Film with the Thickness Larger than 10nm Provides High Enough Image Contrast of Profile of the Alignment Marks Beneath the Photoresist. the Image Contrast of Contour Profile of the Marks Was Enhanced as the Thickness Increased. Lift-Off Process Was then Implemented on the Assistant Reflecting Layer. With a 20nm Cr Layer, we Successfully Did Lithography and Finished the Lift-Off Process to Pattern a Cr/Au Layer on Shallow Grooves in a Glass Wafer. Finally, the Assistant Cr Layer Was Removed Using Dry Etching. the Assistant Metal Layer Has No Undesirable Influence on the Following Process and the Device Property.


2005 ◽  
Vol 475-479 ◽  
pp. 3605-3610 ◽  
Author(s):  
S.G. Wang ◽  
P.J. Sellin ◽  
Q. Zhang ◽  
Fan Xiu Lu ◽  
Wei Zhong Tang ◽  
...  

In this study, X-ray detectors with coplanar metal-semiconductor-metal structure, were fabricated employing high quality chemical vapour deposited (CVD) diamond film grown by a direct current arc jet plasma system. In which the electrical contacts with dimension of 25 µm in width with a 25 µm inter-electrode spacing, were patterned on the growth side of the diamond film using lift-off technology. The performance of the fabricated detectors was evaluated by steady-state X-ray illumination. The photoconductivity of the diamond detectors was found to linearly increase with increase in the X-ray photon flux. This demonstrates that high quality CVD diamond can be used for X-ray detectors.


2006 ◽  
Vol 128 (3) ◽  
pp. 626-633 ◽  
Author(s):  
Deborah A. Osborne ◽  
Luis San Andre´s

Gas film bearings offer unique advantages enabling successful deployment of high-speed microturbomachinery (<0.4 MW). Current applications encompass micropower generators, air cycle machines and turbo expanders. Mechanically complex gas foil bearings are in use; however, their excessive cost and lack of calibrated predictive tools deters their application to mass-produced systems. The present investigation provides experimental results for the rotordynamic performance of a small rotor supported on simple and inexpensive hybrid gas bearings with static and dynamic force characteristics desirable in high-speed turbomachinery. These characteristics are adequate load support, stiffness and damping coefficients, low friction and wear during rotor startup and shutdown, and most importantly, enhanced rotordynamic stability. The test results evidence the paramount effect of feed pressure on early rotor lift-off and substantially higher threshold speeds of rotordynamic instability. Higher supply pressures also determine larger bearing direct stiffnesses, and thus bring an increase in the rotor-bearing system critical speed albeit with a reduction in damping ratio.


2017 ◽  
Vol 254 (8) ◽  
pp. 1770241 ◽  
Author(s):  
Chris Youtsey ◽  
Robert McCarthy ◽  
Rekha Reddy ◽  
Kamran Forghani ◽  
Andy Xie ◽  
...  
Keyword(s):  

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