HOMO-EPITAXIAL GROWTH ON ZnO SUBSTRATE BY MO-CVD USING (C5H7O2)2

2007 ◽  
Vol 14 (04) ◽  
pp. 783-787 ◽  
Author(s):  
KOICH HAGA ◽  
TOETSU SHISHIDO ◽  
KAZUO NAKAJIMA ◽  
TAKAHIRO MATSUNAGA
Keyword(s):  
High Temperature ◽  
Photoelectron Spectroscopy ◽  
High Energy ◽  
Zno Films ◽  
High Temperature Annealing ◽  
High Quality ◽  
Ion Etching ◽  
Atomic Force ◽  
Good Crystallinity ◽  
Atomically Flat

High quality homo-epitaxial ZnO films were grown on Zn -terminated surfaces of ZnO (0001) single-crystal substrates with high-temperature annealing and Ar + ion etching. These films were prepared by low-pressure MO-CVD using zinc acetylacetonate ( C 5 H 7 O 2)2 and oxygen as source materials. High quality ZnO (0001) substrate was synthesized by the hydrothermal technique. The atomically flat surface without scratches was obtained by high temperature annealing at 800°C–1300°C in oxygen atmosphere. Ar + ion etching for the surface of ZnO substrates was critically important to the growth of ZnO films with good crystallinity. The epitaxial film and the ZnO substrate were characterized using reflection high-energy electron diffraction, atomic force microscope, and X-ray photoelectron spectroscopy.

Comparative Growth of AIN on Singular and Off-Axis 6H and 4H-SiC by MOCVD

1998 ◽  
Vol 537 ◽  
Author(s):  
S. Wilson ◽  
C. S. Dickens ◽  
J. Griffin ◽  
M. G. Spencer
Keyword(s):  
High Energy ◽  
Two Dimensional ◽  
Comparison Study ◽  
High Energy Electron ◽  
High Quality ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Dimensional Growth ◽  
Atomically Flat

AbstractA comparison study of the growth of aluminum nitride (AIN) single crystal epitaxy on 6H-SiC and 4H-SiC substrates has been performed. The material has been characterized using atomic force microscopy (AFM) and reflective high energy electron diffraction (RHEED). AIN crystals were deposited on the following 6H-SiC substrates: singular with and without an initial SiC epilayer, and 3.5° off-axis with and without an initial SIC epilayer. AIN crystals were deposited on 8.0° off-axis 4H-SiC with and without initial SIC epilayers. AFM shows that the deposition of AIN on 6H-SiC and 4H-SIC with an initial SiC epilayer displays high quality quasi-two dimensional growth as atomically flat or step flow epitaxy.

scholarly journals Comparative Growth of AlN on Singular and Off-Axis 6H and 4H-SiC by MOCVD

1999 ◽  
Vol 4 (S1) ◽  
pp. 344-350
Author(s):  
S. Wilson ◽  
C. S. Dickens ◽  
J. Griffin ◽  
M. G. Spencer
Keyword(s):  
High Energy ◽  
Two Dimensional ◽  
Comparison Study ◽  
High Energy Electron ◽  
High Quality ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Dimensional Growth ◽  
Atomically Flat

A comparison study of the growth of aluminum nitride (AlN) single crystal epitaxy on 6H-SiC and 4H-SiC substrates has been performed. The material has been characterized using atomic force microscopy (AFM) and reflective high energy electron diffraction (RHEED). AlN crystals were deposited on the following 6H-SiC substrates: singular with and without an initial SiC epilayer, and 3.5° off-axis with and without an initial SiC epilayer. AlN crystals were deposited on 8.0° off-axis 4H-SiC with and without initial SiC epilayers. AFM shows that the deposition of AlN on 6H-SiC and 4H-SiC with an initial SiC epilayer displays high quality quasi-two dimensional growth as atomically flat or step flow epitaxy.

High Temperature Annealing Behaviors of Luminescent Siox:H Films

1999 ◽  
Vol 560 ◽  
Author(s):  
Zhixun Ma ◽  
Xianbi Xiang ◽  
Shuran Sheng ◽  
Xianbo Liao ◽  
Chunlin Shao ◽  
...  
Keyword(s):  
High Temperature ◽  
Absorption Edge ◽  
Optical Transition ◽  
Stokes Shift ◽  
Transition Process ◽  
Ir Absorption ◽  
High Temperature Annealing ◽  
Force Microscopy ◽  
Atomic Force ◽  
Si Nanocrystals

ABSTRACTThe effects of high temperature annealing on the microstructure and optical properties of luminescent SiOx:H films have been investigated. Micro-Raman scattering and IR absorption, in combination with atomic force microscopy (AFM), provide evidence for the existence of both a-Si clusters in the as-grown a-SiOx:H and Si nanocrystals in the 1170°C annealed films. The dependence of optical coefficients (μ) on photon energy (hv) near the absorption edge (Eg) is found to follow the square root law: (μhv)½ μ (Eg – hv), indicating that nano-Si embedded in Si02 is still an indirect material. A comparison of the deduced absorption edge with the PL spectra shows an obvious Stokes shift, suggesting that phonons should be involved in the optical transition process.

Characterization of X-ray irradiated graphene oxide coatings using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy

2013 ◽  
Vol 28 (2) ◽  
pp. 68-71 ◽  
Author(s):  
Thomas N. Blanton ◽  
Debasis Majumdar
Keyword(s):  
Atomic Force Microscopy ◽  
Graphene Oxide ◽  
Photoelectron Spectroscopy ◽  
High Energy ◽  
X Ray Diffraction ◽  
Carbon Phase ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Before And After

In an effort to study an alternative approach to make graphene from graphene oxide (GO), exposure of GO to high-energy X-ray radiation has been performed. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM) have been used to characterize GO before and after irradiation. Results indicate that GO exposed to high-energy radiation is converted to an amorphous carbon phase that is conductive.

Four-inch high quality crack-free AlN layer grown on a high-temperature annealed AlN template by MOCVD

2021 ◽  
Vol 42 (12) ◽  
pp. 122804
Author(s):  
Shangfeng Liu ◽  
Ye Yuan ◽  
Shanshan Sheng ◽  
Tao Wang ◽  
Jin Zhang ◽  
...  
Keyword(s):  
High Temperature ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Flat Surface ◽  
Epitaxial Lateral Overgrowth ◽  
High Temperature Annealing ◽  
High Quality ◽  
High Crystalline Quality ◽  
X Ray ◽  
Lateral Overgrowth

Abstract In this work, based on physical vapor deposition and high-temperature annealing (HTA), the 4-inch crack-free high-quality AlN template is initialized. Benefiting from the crystal recrystallization during the HTA process, the FWHMs of X-ray rocking curves for (002) and (102) planes are encouragingly decreased to 62 and 282 arcsec, respectively. On such an AlN template, an ultra-thin AlN with a thickness of ~700 nm grown by MOCVD shows good quality, thus avoiding the epitaxial lateral overgrowth (ELOG) process in which 3–4 μm AlN is essential to obtain the flat surface and high crystalline quality. The 4-inch scaled wafer provides an avenue to match UVC-LED with the fabrication process of traditional GaN-based blue LED, therefore significantly improving yields and decreasing cost.

scholarly journals Comparative Study of ZnO Thin Films Grown on Quartz Glass and Sapphire (001) Substrates by Means of Magnetron Sputtering and High-Temperature Annealing

2019 ◽  
Vol 9 (21) ◽  
pp. 4509
Author(s):  
Weijia Yang ◽  
Fengming Wang ◽  
Zeyi Guan ◽  
Pengyu He ◽  
Zhihao Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Quartz Glass ◽  
Photoelectron Spectroscopy ◽  
Zno Thin Films ◽  
High Temperature Annealing ◽  
X Ray ◽  
Glass Substrates

In this work, we reported a comparative study of ZnO thin films grown on quartz glass and sapphire (001) substrates through magnetron sputtering and high-temperature annealing. Firstly, the ZnO thin films were deposited on the quartz glass and sapphire (001) substrates in the same conditions by magnetron sputtering. Afterwards, the sputtered ZnO thin films underwent an annealing process at 600 °C for 1 h in an air atmosphere to improve the quality of the films. X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), ultraviolet-visible spectra, photoluminescence spectra, and Raman spectra were used to investigate the structural, morphological, electrical, and optical properties of the both as-received ZnO thin films. The ZnO thin films grown on the quartz glass substrates possess a full width of half maximum value of 0.271° for the (002) plane, a surface root mean square value of 0.50 nm and O vacancies/defects of 4.40% in the total XPS O 1s peak. The comparative investigation reveals that the whole properties of the ZnO thin films grown on the quartz glass substrates are comparable to those grown on the sapphire (001) substrates. Consequently, ZnO thin films with high quality grown on the quartz glass substrates can be achieved by means of magnetron sputtering and high-temperature annealing at 600 °C.

Preparation of Ge (100) Substrates for High-Quality Epitaxial Growth of Group IV Materials

2003 ◽  
Vol 794 ◽  
Author(s):  
Mark Nowakowski ◽  
Jordana Bandaru ◽  
L.D. Bell ◽  
Shouleh Nikzad
Keyword(s):  
Epitaxial Growth ◽  
Chemical Treatment ◽  
Photoelectron Spectroscopy ◽  
High Energy ◽  
Ozone Treatment ◽  
High Quality ◽  
Surface Evolution ◽  
Chemical Treatments ◽  
Before And After ◽  
Uv Ozone

ABSTRACTWe compare various wet chemical treatments, in preparing high-quality Ge (100) surfaces suitable for molecular beam epitaxy (MBE). Various surface treatments are explored such as UV-ozone treatment followed by exposure to chemical solutions such as de-ionized (DI) water, hydrofluoric acid (HF), or hydrochloric acid (HCl). Chemical treatments to remove the oxide are performed in a nitrogen environment to prevent further formation of surface oxide prior to surface analysis. Following chemical treatments, in situ reflection high-energy electron diffraction (RHEED) analysis is performed to observe the surface evolution as a function of temperature. In a separate chamber, we analyze each sample, before and after chemical treatment by x-ray photoelectron spectroscopy (XPS) to directly determine the oxide desorption following each chemical treatment. Our results of this comparative study, the effectiveness of each chemical treatment, and the stability of the passivated surface suggest that UV ozone cleaning, followed by 10% HCl is the best choice for removing most of the oxide. Furthermore, we present evidence of high quality epitaxial growth of SnxGe1−x on wafers prepared by our method.

scholarly journals All chemical YBa2Cu3O7 superconducting multilayers: Critical role of CeO2 cap layer flatness

2009 ◽  
Vol 24 (4) ◽  
pp. 1446-1455 ◽  
Author(s):  
M. Coll ◽  
J. Gàzquez ◽  
R. Huhne ◽  
B. Holzapfel ◽  
Y. Morilla ◽  
...  
Keyword(s):  
Critical Role ◽  
High Energy ◽  
Buffer Layers ◽  
Solution Deposition ◽  
Ybco Films ◽  
Force Microscopy ◽  
Atomic Force ◽  
Current Densities ◽  
Atomically Flat

New advances toward microstructural improvement of epitaxial CeO2 films grown by chemical solution deposition and their use as buffer layers for YBa2Cu3O7 (YBCO) films are presented. We demonstrate that the degree of epitaxy and the fraction of (001) atomically flat surface area are controlled by the incorporation of tetravalent (Zr4+) or trivalent (Gd3+) cations into the ceria lattice. The degree of epitaxy has been investigated by means of Rutherford backscattering spectroscopy-channeling and reflection high-energy electron diffraction, and a new methodology is also presented to quantify the fraction of (001) atomically flat area from atomic force microscopy images. Results are further correlated with the superconducting properties, microstructure, and texture of YBCO films grown by the trifluoroacetate route. A comparison with pulsed laser deposition and YBCO films grown on the same ceria layers is also presented. This growth procedure has allowed us to obtain all chemical multilayer films with controlled microstructure and critical current densities above 4 MA cm−2 at 77 K.

scholarly journals Hexagonal Boron Nitride Tunnel Barriers Grown on Graphite by High Temperature Molecular Beam Epitaxy

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Yong-Jin Cho ◽  
Alex Summerfield ◽  
Andrew Davies ◽  
Tin S. Cheng ◽  
Emily F. Smith ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
High Temperature ◽  
Molecular Beam Epitaxy ◽  
Boron Nitride ◽  
Photoelectron Spectroscopy ◽  
Molecular Beam ◽  
Hexagonal Boron Nitride ◽  
Graphite Substrate ◽  
Force Microscopy ◽  
Atomic Force

Abstract We demonstrate direct epitaxial growth of high-quality hexagonal boron nitride (hBN) layers on graphite using high-temperature plasma-assisted molecular beam epitaxy. Atomic force microscopy reveals mono- and few-layer island growth, while conducting atomic force microscopy shows that the grown hBN has a resistance which increases exponentially with the number of layers, and has electrical properties comparable to exfoliated hBN. X-ray photoelectron spectroscopy, Raman microscopy and spectroscopic ellipsometry measurements on hBN confirm the formation of sp2-bonded hBN and a band gap of 5.9 ± 0.1 eV with no chemical intermixing with graphite. We also observe hexagonal moiré patterns with a period of 15 nm, consistent with the alignment of the hBN lattice and the graphite substrate.

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