Ge Epitaxy on (100) Ge: High Growth Rates at Low Temperature from GeH4 using N2 as a Carrier Gas
2010 ◽
Vol 23
(2)
◽
pp. 328-339
Keyword(s):
1965 ◽
Vol 16
(6)
◽
pp. 903
◽
Keyword(s):
2002 ◽
Vol 16
(28n29)
◽
pp. 4259-4262
◽
Keyword(s):
Keyword(s):