The Optimal Design and Analysis of Piezoelectric Cantilever Beams for Power Generation Devices

2005 ◽  
Vol 888 ◽  
Author(s):  
Dongna Shen ◽  
Jyoti Ajitsaria ◽  
Song-Yul Choe ◽  
Dong-Joo Kim
Keyword(s):  
Power Density ◽  
Cantilever Beam ◽  
Proof Mass ◽  
Rapid Development ◽  
High Stress ◽  
Ambient Vibration ◽  
Cantilever Beams ◽  
High Acceleration ◽  
Piezoelectric Cantilever ◽  
Cantilever Structure

ABSTRACTWith the rapid development of wireless remote sensor systems, battery is becoming the limiting factor in the lifetime of the device and miniaturization. As a way to eliminate battery in the system, the conversion of ambient vibration energy has been addressed. The piezoelectric cantilever beam with a proof mass was exploited for energy conversion since it can generate large strain and power density. The design of cantilever beams was optimized through numerical analysis and FEM simulation at higher acceleration condition. The investigated parameters influencing the output energy of piezoelectric bimorph cantilevers include dimensions of cantilever beam and proof mass. The resonant frequency and robustness of cantilever structure were also considered for enhancing power conversion efficiency and implementing devices at high acceleration condition. The power density generated by the optimized piezoelectric device was high enough (> 1200 μW/cm3) to operate microsensor systems. However, high stress near clamping area of cantilever beam could lead to the fracture at high acceleration condition.

Structural Design and Testing of a Butterfly Piezoelectric Generator with Multilayer Cantilever Beams

2013 ◽  
Vol 655-657 ◽  
pp. 823-829 ◽  
Author(s):  
Zhi Lin Ruan ◽  
Jun Jie Gong ◽  
Meng Chang Cai ◽  
Bing Huang
Keyword(s):  
Resonant Frequency ◽  
Cantilever Beam ◽  
Structural Design ◽  
Output Voltage ◽  
Experimental Setup ◽  
Cantilever Beams ◽  
Material Parameters ◽  
Piezoelectric Cantilever ◽  
Piezoelectric Generator ◽  
Design And Testing

In order to solve the inconsistent problem of multi-layer connection and vibration in each layer, a butterfly piezoelectric generator with multilayer cantilever beams is designed. The generator is mainly constituted by butterfly multilayer cantilever beams and mass subassembly two parts. Physical devices of butterfly generator and typical piezoelectric cantilever are fabricated respectively. The experimental setup is also put up for the testing of resonant frequency and output voltage. It can be found that each layer of multilayer generator has a similar output voltage and resonant frequency to the typical one with same geometric and material parameters. So each layer in butterfly piezoelectric generator can be simplified as a typical cantilever beam for researching and analyzing.

A Curled Piezoelectric Cantilever for Two Dimensional Vibration Energy Harvesting

2013 ◽  
Vol 811 ◽  
pp. 469-473
Author(s):  
Xue Feng He ◽  
Yao Qing Cheng ◽  
Jun Gao ◽  
You Zhu
Keyword(s):  
Energy Harvester ◽  
Proof Mass ◽  
Ambient Vibration ◽  
Vibration Energy ◽  
Two Dimensional ◽  
Vibration Energy Harvesting ◽  
Vibration Direction ◽  
Vibration Energy Harvester ◽  
Piezoelectric Cantilever ◽  
Scavenging Efficiency

To harvest ambient vibration energy of different directions, a micromachined vibration energy harvester which can harvest two-dimensional vibration energy was proposed. The harvester is composed of a curled piezoelectric cantilever, a proof mass and the substrate. One end of the cantilever is fixed onto the substrate and the other end is connected with a proof mass. It is the residual stress of micromachining processes that causes the cantilever to curl. A proof-of-concept prototype of the two-dimensional vibration energy harvester was assembled and tested to evaluate the performance. Experimental results show that the vibration direction with the highest energy scavenging efficiency changed with the frequency of the ambient vibration. The vibration energy of any direction in the neutral plane of the curled cantilever can be harvested by using the first two natural vibration modes of the prototype.

Study on the Energy Harvesting Performance of PE Cantilever Beam

2015 ◽  
Vol 645-646 ◽  
pp. 1189-1194
Author(s):  
Hai Peng Liu ◽  
Shi Qiao Gao ◽  
Lei Jin
Keyword(s):  
Energy Harvesting ◽  
Theoretical Analysis ◽  
Cantilever Beam ◽  
Mechanical Energy ◽  
Experimental System ◽  
Open Circuit ◽  
Ambient Vibration ◽  
Piezoelectric Energy ◽  
Harvesting Technique ◽  
Piezoelectric Cantilever

Harvesting ambient vibration energy through piezoelectric (PE) means is a popular energy harvesting technique. The merit of applying PE means to supply energy for microelectronic devices is that they can reduce the battery weight and possibly make the device self-powered by harvesting mechanical energy. This investigation will examine the energy generating performance of miniature PE cantilever beam through theoretical modeling, simulation and experiment testing. Through the theoretical analysis of the piezoelectric energy harvesting structure, the expression of open circuit voltage output is obtained. Using ANSYS software, the working performance of piezoelectric cantilever beam is analyzed. On the basis of theoretical analysis and simulation optimization, a set of experimental system is established to test the energy harvesting performance of the piezoelectric cantilever beam. The testing result shows that the harvested energy by the piezoelectric cantilever beam could supply electrical power to some micro electrical devices.

scholarly journals A Multi-Parameter Perturbation Solution and Experimental Verification for Bending Problem of Piezoelectric Cantilever Beams

Polymers ◽  
2019 ◽  
Vol 11 (12) ◽  
pp. 1934 ◽  
Author(s):  
Zhi-Xin Yang ◽  
Xiao-Ting He ◽  
Hong-Xia Jing ◽  
Jun-Yi Sun
Keyword(s):  
Cantilever Beam ◽  
Perturbation Solution ◽  
Experimental Results ◽  
Cantilever Beams ◽  
Parameter Perturbation ◽  
Analysis And Design ◽  
Piezoelectric Polymers ◽  
Piezoelectric Cantilever ◽  
Piezoelectric Structure ◽  
Coupling Characteristics

The existing studies indicate that the application of piezoelectric polymers is becoming more and more extensive, especially in the analysis and design of sensors or actuators, but the problems of piezoelectric structure are usually difficult to solve analytically due to the force–electric coupling characteristics. In this study, the bending problem of a piezoelectric cantilever beam was investigated via theoretical and experimental methods. First, the governing equations of the problem were established and non-dimensionalized. Three piezoelectric parameters were selected as perturbation parameters and the perturbation solution of the equations was finally obtained using a multi-parameter perturbation method. In addition, the relevant experiments of the piezoelectric cantilever beam were carried out, and the experimental results were in good agreement with the theoretical solutions. Based on the experimental results, the effect of piezoelectric properties on the bending deformation of piezoelectric cantilever beams was analyzed and discussed. The results indicated that the multi-parameter perturbation solution obtained in this study is effective and it may serve as a theoretical reference for the design of sensors or actuators made of piezoelectric polymers.

System Identification and Observer-Based Control Design of a Piezoelectric Actuated Cantilever Beam

2013 ◽  
Author(s):  
Bei Lu ◽  
Qifu Li
Keyword(s):  
Cantilever Beam ◽  
Structural Damage ◽  
Model Simulation ◽  
Damping Ratio ◽  
Order System ◽  
Cantilever Beams ◽  
Dynamics Model ◽  
Aircraft Wings ◽  
Microelectromechanical Devices ◽  
Piezoelectric Cantilever

Cantilever beams are widely found in many different applications such as aircraft wings and microelectromechanical devices. One of the problems associated with cantilever structures is that uncontrolled tip vibrations can cause serious structural damage. This paper presents one possible solution to control the oscillation of a cantilever beam. The solution involves the use of strain gauges to measure the oscillation and piezoelectric actuators to control the tip deflection. The piezoelectric cantilever beam is modeled as a second-order system with one degree-of-freedom. The system parameters, including the natural frequency, the damping ratio, and the zeros, are identified from measurement of free and sinusoidal responses. An observer-based controller is then designed using the identified dynamics model. Simulation and experimental results demonstrate the accuracy of the model and the performance of the controller.

A Novel Structure for Cantilever-Beam MEMS Power Generator

2007 ◽  
Author(s):  
Jun Wang ◽  
Scott Chang ◽  
Chin An Tan ◽  
Greg Auner
Keyword(s):  
Cantilever Beam ◽  
High Frequency ◽  
Proof Mass ◽  
Mechanical Energy ◽  
Low Frequency ◽  
Electrical Energy ◽  
Cantilever Beams ◽  
Power Generator ◽  
Power Generators ◽  
Beam Type

A novel cantilever-beam type MEMS power generator is proposed for the conversion of vibration mechanical energy to electrical energy through piezoelectric effects. In the various MEMS-based micro power generating schemes, piezoelectric conversion usually achieves a higher efficiency than that of electromagnetic or electrostatic schemes. Currently, most cantilever-beam type MEMS power generators are suitable for harvesting energy in relatively high frequency ranges (500 Hz to 14 kHz), but are not effective in harvesting low frequency (<10 Hz) vibration energy, such as energy from human walking or ocean wave, for which MEMS power generators are most desired. In this paper, a new cantilever-beam MEMS power generator is proposed, which can greatly improve the power conversion for low frequency circumstances. The power generator consists of two sets of cantilever beams: 1. A properly designed mm-size cantilever-beam with metal as the proof mass, and having low resonant frequency matching that of the external low frequency excitation sources. This is to be used to effectively couple the external motion. 2. An array of micro thin film piezoelectric (PZT) cantilever-beams, each with metal as proof mass, and having higher resonant frequencies. The external excitation is coupled to the single cantilever beam with kinetic energy. Through impact between the mm-size cantilever beam (low frequency) and the micro cantilever beam array (high frequency), the coupled mechanical energy is transferred to electrical energy through piezoelectric effect. Simulation results show that energy conversion efficiency can be greatly improved by using such a coupled structure as compared to that of only using MEMS cantilever beams with high frequency or a single mm-size beam structure. This may have a wide range of applications in pervasive computing and biomedical engineering.

Materials and Structures for High Density I/O Interconnection Systems

1987 ◽  
Vol 108 ◽  
Author(s):  
S. Hong ◽  
J. C. Bravman ◽  
T. P. Weihs ◽  
O. K. Kwon
Keyword(s):  
Thin Films ◽  
Yield Strength ◽  
Mechanical Behavior ◽  
Mechanical Testing ◽  
Cantilever Beam ◽  
Cantilever Beams ◽  
Electrical Characteristics ◽  
Beam Structure ◽  
Testing Method ◽  
Cantilever Structure

ABSTRACTIn order to examine the use of a compliant cantilever structure as a contact scheme for a Multi-chip Interconnection System (MIS), multi-layer (metals and SiO2) cantilever beams were fabricated utilizing standard silicon processing and micromachining technologies. The mechanical behavior and electrical characteristics of the beams were investigated in order to establish their optimum dimensions for use in the MIS. During the course of this study, a new mechanical testing method for thin films has also been developed, which makes use of the same cantilever beam structure and a “Nanoindenter.” The Young's modulus and yield strength of thermally grown SiO2 and Au were measured using this technique.

scholarly journals Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 772
Author(s):  
Xianming He ◽  
Dongxiao Li ◽  
Hong Zhou ◽  
Xindan Hui ◽  
Xiaojing Mu
Keyword(s):  
Power Density ◽  
Cantilever Beam ◽  
Cross Section ◽  
Energy Harvester ◽  
Variable Cross Section ◽  
Vibration Energy ◽  
Variable Cross ◽  
Vibration Energy Harvester ◽  
Piezoelectric Vibration Energy Harvester ◽  
Piezoelectric Vibration

The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of the PVEH. However, its electromechanical model needs to be further studied. In this paper, the bidirectional coupled distributed parameter electromechanical model of the MEMS VCSCB based PVEH is constructed, analytically solved, and verified, which laid an important theoretical foundation for structural design and optimization, performance improvement, and output prediction of the PVEH. Based on the constructed model, the output performances of five kinds of VCSCB based PVEHs with different cross-sectional shapes were compared and analyzed. The results show that the PVEH with the concave quadratic beam shape has the best output due to the uniform surface stress distribution. Additionally, the influence of the main structural parameters of the MEMS trapezoidal cantilever beam (TCB) based PVEH on the output performance of the device is theoretically analyzed. Finally, a prototype of the Aluminum Nitride (AlN) TCB based PVEH is designed and developed. The peak open-circuit voltage and normalized power density of the device can reach 5.64 V and 742 μW/cm3/g2, which is in good agreement with the theoretical model value. The prototype has wide application prospects in the power supply of the wireless sensor network node such as the structural health monitoring system and the Internet of Things.

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