Electroless Plating of Copper Interconnections on Ion Beam Catalyzed Polyimide

1989 ◽  
Vol 167 ◽  
Author(s):  
T. Flottmann ◽  
A. Tulke ◽  
E. Esper ◽  
W. Lohmann
Keyword(s):  
Electroless Plating ◽  
Surface Composition ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Plating Bath ◽  
Chemical Surface ◽  
Polyimide Substrate ◽  
Palladium Acetylacetonate ◽  
Catalytic Sites

AbstractDecomposition of a palladium compound by ion irradiation has been used to catalyze electroless plating on polyimide. First, palladium-acetylacetonate or -acetate is spin-coated on a polyimide substrate. The thin resist film is then irradiated through a mask with He or Ar ions of 100 keV energy. After washing off the film parts which were not exposed to the ion beam, copper is deposited on the catalyzed polyimide substrate in an alkaline electroless plating bath. When using alkaline resistant polyimide, copper lines several microns thick can be plated. The chemical surface composition of the Pd-compounds after ion beam exposure has been investigated with ESCA. It has been found that the Pd is partially reduced. Pd-acetate is more effective to form catalytic sites than Pd-acetylacetonate.

Electron and ion irradiation-induced dissolution of mechanical twins in the intermetalic U3Si: An in situ HVEM study

1989 ◽  
Vol 47 ◽  
pp. 652-653
Author(s):  
Charles W. Allen ◽  
Robert C. Birtcher
Keyword(s):  
Elevated Temperatures ◽  
Ion Irradiation ◽  
Ion Beam ◽  
National Laboratory ◽  
Argonne National Laboratory ◽  
Heavy Ion ◽  
High Energy ◽  
Mechanical Twinning ◽  
In Situ Experiments

The uranium silicides, including U3Si, are under study as candidate low enrichment nuclear fuels. Ion beam simulations of the in-reactor behavior of such materials are performed because a similar damage structure can be produced in hours by energetic heavy ions which requires years in actual reactor tests. This contribution treats one aspect of the microstructural behavior of U3Si under high energy electron irradiation and low dose energetic heavy ion irradiation and is based on in situ experiments, performed at the HVEM-Tandem User Facility at Argonne National Laboratory. This Facility interfaces a 2 MV Tandem ion accelerator and a 0.6 MV ion implanter to a 1.2 MeV AEI high voltage electron microscope, which allows a wide variety of in situ ion beam experiments to be performed with simultaneous irradiation and electron microscopy or diffraction.At elevated temperatures, U3Si exhibits the ordered AuCu3 structure. On cooling below 1058 K, the intermetallic transforms, evidently martensitically, to a body-centered tetragonal structure (alternatively, the structure may be described as face-centered tetragonal, which would be fcc except for a 1 pet tetragonal distortion). Mechanical twinning accompanies the transformation; however, diferences between electron diffraction patterns from twinned and non-twinned martensite plates could not be distinguished.

scholarly journals Comparison of short-range order in irradiated dysprosium titanates

2021 ◽  
Vol 5 (1) ◽  
Author(s):  
Roman Sherrod ◽  
Eric C. O’Quinn ◽  
Igor M. Gussev ◽  
Cale Overstreet ◽  
Joerg Neuefeind ◽  
...  
Keyword(s):  
Long Range ◽  
Short Range ◽  
Structural Model ◽  
Ion Irradiation ◽  
Function Analysis ◽  
Ion Beam ◽  
Structural Response ◽  
Heavy Ion ◽  
Range Order ◽  
Radiation Resistant

AbstractThe structural response of Dy2TiO5 oxide under swift heavy ion irradiation (2.2 GeV Au ions) was studied over a range of structural length scales utilizing neutron total scattering experiments. Refinement of diffraction data confirms that the long-range orthorhombic structure is susceptible to ion beam-induced amorphization with limited crystalline fraction remaining after irradiation to 8 × 1012 ions/cm2. In contrast, the local atomic arrangement, examined through pair distribution function analysis, shows only subtle changes after irradiation and is still described best by the original orthorhombic structural model. A comparison to Dy2Ti2O7 pyrochlore oxide under the same irradiation conditions reveals a different behavior: while the dysprosium titanate pyrochlore is more radiation resistant over the long-range with smaller degree of amorphization as compared to Dy2TiO5, the former involves more local atomic rearrangements, best described by a pyrochlore-to-weberite-type transformation. These results highlight the importance of short-range and medium-range order analysis for a comprehensive description of radiation behavior.

scholarly journals Crystallization of TiO2-MoS2 Hybrid Material under Hydrothermal Treatment and Its Electrochemical Performance

Materials ◽  
2020 ◽  
Vol 13 (12) ◽  
pp. 2706
Author(s):  
Katarzyna Siwińska-Ciesielczyk ◽  
Beata Kurc ◽  
Dominika Rymarowicz ◽  
Adam Kubiak ◽  
Adam Piasecki ◽  
...  
Keyword(s):  
Hydrothermal Treatment ◽  
Surface Composition ◽  
Specific Capacity ◽  
Diffraction Method ◽  
Lithium Ion ◽  
Surface Concentration ◽  
Molar Ratio ◽  
Storage Device ◽  
X Ray ◽  
Chemical Surface

Hydrothermal crystallization was used to synthesize an advanced hybrid system containing titania and molybdenum disulfide (with a TiO2:MoS2 molar ratio of 1:1). The way in which the conditions of hydrothermal treatment (180 and 200 °C) and thermal treatment (500 °C) affect the physicochemical properties of the products was determined. A physicochemical analysis of the fabricated materials included the determination of the microstructure and morphology (scanning and transmission electron microscopy—SEM and TEM), crystalline structure (X-ray diffraction method—XRD), chemical surface composition (energy dispersive X-ray spectroscopy—EDS) and parameters of the porous structure (low-temperature N2 sorption), as well as the chemical surface concentration (X-ray photoelectron spectroscop—XPS). It is well known that lithium-ion batteries (LIBs) represent a renewable energy source and a type of energy storage device. The increased demand for energy means that new materials with higher energy and power densities continue to be the subject of investigation. The objective of this research was to obtain a new electrode (anode) component characterized by high work efficiency and good electrochemical properties. The synthesized TiO2-MoS2 material exhibited much better electrochemical stability than pure MoS2 (commercial), but with a specific capacity ca. 630 mAh/g at a current density of 100 mA/g.

SPUTTERING WITH GAS CLUSTER-ION BEAMS

1996 ◽  
Vol 03 (01) ◽  
pp. 1017-1021 ◽  
Author(s):  
J. MATSUO ◽  
M. AKIZUKI ◽  
J. NORTHBY ◽  
G.H. TAKAOKA ◽  
I. YAMADA
Keyword(s):  
Ion Irradiation ◽  
Removal Rate ◽  
Ion Beam ◽  
Solid Surfaces ◽  
Silicon Surfaces ◽  
Cluster Ions ◽  
Mass Filter ◽  
Cluster Bombardment ◽  
Cluster Ion Beams ◽  
Cluster Ion

A high-current (~100 nA) cluster-ion-beam equipment with a new mass filter has been developed to study the energetic cluster-bombardment effects on solid surfaces. A dramatic reduction of Cu concentration on silicon surfaces has been achieved by 20-keV Ar cluster (N~3000) ion bombardment. The removal rate of Cu with cluster ions is two orders of magnitude higher than that with monomer ions. A significantly higher sputtering yield is expected for cluster-ion irradiation. An energetic cluster-ion beam is quite suitable for removal of metal.

Growth of Cu-Oxide Protrusion by Ar Ion Irradiation

2007 ◽  
Vol 558-559 ◽  
pp. 1359-1362 ◽  
Author(s):  
Hiroyuki Tanaka ◽  
Shunichiro Tanaka
Keyword(s):  
Ion Irradiation ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Residual Oxygen ◽  
Irradiation Angle ◽  
Oxygen Atoms

Cu2O conical micron-scale protrusions have been grown on a preoxidized Cu surface by the Ar ion beam irradiation at 9 kV for 5-20 min in the low vacuum. This Ar ion irradiation is based on the ‘Transcription Method’ which has been originated by B.-S. Xu and S.-I. Tanaka in 1996 to form nanoparticles. Ar ion irradiation induced needle-like nanostructures composed of Cu2O and CuO which were randomly nucleated on Cu surface by the oxidation at 623 K for 10 min in the air. The obtained Cu2O conical protrusions have a controllable length of up to 14.6 μm with diameter in the range of 0.8 μm by changing the Ar ion irradiation angle to the surface. The mechanism of the formation of the conical protrusions is proposed that Cu atoms on the Cu surface activated and sputtered by the Ar ion irradiation diffuse on the surface of needle-like oxide as nuclei along the Ar ion track and react with residual oxygen atoms to grow the conical Cu2O protrusions.

The influence of the chemical surface composition on the drying process of milk droplets

2016 ◽  
Vol 27 (6) ◽  
pp. 2324-2334 ◽  
Author(s):  
Martin Foerster ◽  
Thomas Gengenbach ◽  
Meng Wai Woo ◽  
Cordelia Selomulya
Keyword(s):  
Surface Composition ◽  
Drying Process ◽  
Chemical Surface

Photon and Ion Beam-Induced Chemistry of Palladium Acetate Films

1986 ◽  
Vol 75 ◽  
Author(s):  
M. E. Gross ◽  
W. L. Brown ◽  
J. Linnros ◽  
L. R. Harriott ◽  
K. D. Cummings ◽  
...  
Keyword(s):  
Continuous Wave ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Decomposition Reaction ◽  
Palladium Acetate ◽  
Metallic Silver ◽  
Electrically Conducting ◽  
Reaction Fronts ◽  
Explosive Reaction ◽  
Palladium Particles

AbstractElectrically conducting palladium features have been produced by laser and ion beam irradiation of thin palladium acetate films. The photothermal reaction induced by scanned continuous wave Ar+ laser irradiation leads to metal lines that may exhibit periodic structure. This results from repeated propagation of “explosive” reaction fronts generated by coupling of the heat from the absorbed laser radiation with the heat of the decomposition reaction of the film. In contrast, 2 MeV He+ ion irradiation produces smooth metallic-looking features that contain up to 20% of the original carbon and 5% of the original oxygen content of the film. Films irradiated with 2 MeV Ne+ ions contain slightly lower amounts of carbon and oxygen residues, but fully exposed thick films (0.90 μm) appear black rather than metallic silver. In addition to having significantly higher purity, the laser-written features have lower resistivities than the ion beam-irradiated features. Infrared spectroscopy of the ion beam-irradiated films as a function of dose indicates a progressive loss in intensity of the characteristics acetate (COO-) vibrations. This occurs at doses lower than those associated with major C and O loss from the films. Partially ion-exposed films continue to decompose to metallic-looking material over a period of weeks after irradiation. Metallic palladium particles apparently catalyze this process.

Influence of morphology and chemical surface composition on electrical conductivity of SiC microspheres

2022 ◽  
Vol 715 ◽  
pp. 121942
Author(s):  
Ilona Pleșa ◽  
Simone Radl ◽  
Uwe Schichler ◽  
Franz Ramsauer ◽  
Werner Ladstätter ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Surface Composition ◽  
Chemical Surface

scholarly journals Effect of Ion Irradiation on Nanoindentation Fracture and Deformation in Silicon Carbide

JOM ◽  
2021 ◽  
Author(s):  
Alexander J. Leide ◽  
Richard I. Todd ◽  
David E. J. Armstrong
Keyword(s):  
Mechanical Properties ◽  
Silicon Carbide ◽  
Residual Stresses ◽  
Focused Ion Beam ◽  
Electron Backscatter Diffraction ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Resolution Electron ◽  
Radiation Induced ◽  
Compressive Residual Stresses

AbstractSilicon carbide is desirable for many nuclear applications, making it necessary to understand how it deforms after irradiation. Ion implantation combined with nanoindentation is commonly used to measure radiation-induced changes to mechanical properties; hardness and modulus can be calculated from load–displacement curves, and fracture toughness can be estimated from surface crack lengths. Further insight into indentation deformation and fracture is required to understand the observed changes to mechanical properties caused by irradiation. This paper investigates indentation deformation using high-resolution electron backscatter diffraction (HR-EBSD) and Raman spectroscopy. Significant differences exist after irradiation: fracture is suppressed by swelling-induced compressive residual stresses, and the plastically deformed region extends further from the indentation. During focused ion beam cross-sectioning, indentation cracks grow, and residual stresses are modified. The results clarify the mechanisms responsible for the modification of apparent hardness and apparent indentation toughness values caused by the compressive residual stresses in ion-implanted specimens.

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