A New Ultra-Low K ILD Material Based On Organic-Inorganic Hybrid Resins

2002 ◽  
Vol 716 ◽  
Author(s):  
Ben Zhong ◽  
Herman Meynen ◽  
Francesca Iocopi ◽  
Ken Weidner ◽  
Stephane Mailhouitre ◽  
...  

AbstractA ULK material based on a siloxane resin has been developed that can be processed using spin-coating and thermal cure to yield porous low-k films. The chemical bonds between the resin and porogen groups prevent the phase separation of the porogen from the resin during curing and lead to extremely small pores. The highly hydrophobic thin films made from this material displayed dielectric constant of 1.8, breakdown voltage of 4 MV/cm, a cohesive strength > 60 MPa, excellent crack resistance, and an average pore size of 2.2 nm by Positron Annihilation Lifetime Spectroscopy (PALS) and 2.5-3.0 nm by Ellipsometric Porosimetry (EP). In this paper, our strategy for designing low-k materials, the material properties and initial integration results for this new material will be discussed.

2012 ◽  
Vol 1451 ◽  
pp. 125-130
Author(s):  
Matthew M. Marchese ◽  
Rosario A. Gerhardt

ABSTRACTThe use of super acids such as chlorosulfonic acid (CSA) has proven to be extremely effective at exfoliating different forms of graphite in high concentrations without covalently functionalizing the surface of the graphene. Once quenched, the acid solutions can then be vacuum filtered through acid resistant polypropylene filter paper with an average pore size of 0.2 μm to collect the exfoliated carbon into a free standing retentate film. These films can then be easily washed, removed, and redispersed into solution by sonicating the films in a surfactant solution. Films were deposited onto various substrates using a range of spin coating parameters. This study has found that exfoliated CNTs provide the best conductivity out of the four types of chemically exfoliated carbon structures studied. CNTs have also proven to be the easiest type of exfoliated carbon to disperse and are able to stay in solution with less than 1%wt surfactant. The findings have shown that the electrical conductivity of the spin coated films actually increases with RPM and is inversely proportional to the film thickness. It is possible to achieve electrical conductivities as high as 10,507 ± 3728.64 [S/m] while still maintaining the transparency of the thin films. The initial spin coating step is more efficient at low ramp rates around 100 rpm/s and results in very smooth films. High spin speeds of 1800 rpm during the casting stage are found to play a large role in improving the conductivity of the films. Lastly, drying the samples on a hot plate for 5 min. on high has significantly improved the films electrical properties and virtually eliminated the need for tedious and expensive plasma cleaning treatments.


2005 ◽  
Vol 863 ◽  
Author(s):  
P.M. Capani ◽  
P.D. Matz ◽  
D.W. Mueller ◽  
M.J. Kim ◽  
E.R. Walter ◽  
...  

AbstractWater adsorption by porous low-k silica films results in increased dielectric constants and is often due to silanol groups on the pore surfaces. Reacting the silanols with silylating agents (e.g., hexamethyldisilazane (HMDS) and trimethylchlorosilane (TMCS)) in supercritical CO2 (SC-CO2) can increase film hydrophobicity and can remove adsorbed water. In porous methylsilsesquioxane (MSQ) films (average pore size ∼ 3-4nm), it has been determined that supercritical silylation reactions do not substantially penetrate beyond the film surface.1,2 In this work we have examined the supercritical penetration behavior of silylating agents in low-k films with larger pore sizes (5-10nm). The depth and extent of reactants was determined by in situ infrared spectroscopy (FTIR), and surface hydrophobicity was examined by contact angle experiments.


2001 ◽  
Vol 714 ◽  
Author(s):  
Hae-Jeong Lee ◽  
Eric K. Lin ◽  
Howard Wang ◽  
Wen-Li Wu ◽  
Wei Chen ◽  
...  

ABSTRACTA novel methodology using a combination of ion scattering, x-ray reflectivity (SXR), and small angle neutron scattering was used to characterize the structure and properties of a hydrogen silsesquioxane (HSQ) based porous low-k dielectric films after varying process conditions. The dielectric constant and the remaining Si-H fraction (degree of cure) of the samples were varied from 1.5 to 2.2 and from 30 % to 52 %, respectively, by controlling the mass ratio of the solvent and the HSQ resin in the initial solutions and the wet ammonia treatment time. We determined the density depth profile, average mass density, wall density, porosity, average pore size, average wall thickness, pore connectivity and atomic composition. The chemical bond structures were also measured using Fourier transform infrared (FTIR) spectroscopy. The density profile of each porous low-k film was uniform and only two layers were required to fit the experimental SXR data. Higher dielectric constant films show significantly higher wall densities and lower porosities and pore sizes. The measured increases in the wall density with lower Si-H fractions are consistent with the FTIR results.


2012 ◽  
Vol 733 ◽  
pp. 107-110 ◽  
Author(s):  
Barbora Sláviková ◽  
M. Miklošovičová ◽  
E. Illeková ◽  
V. Majerník ◽  
O. Šauša ◽  
...  

This work deals with the use of positron annihilation lifetime spectroscopy (PALS) for the study of hexadecane confined in SiO2 aerogel. The temperature dependencies of the o-Ps lifetime and intensity for this material were compared with values of hexadecane confined in silicagel with a similar average pore size. The results of differential scanning calorimetry (DSC) for both these materials will be discussed.


2017 ◽  
Vol 54 (3) ◽  
pp. 181-201
Author(s):  
Rebecca Johnson ◽  
Mark Longman ◽  
Brian Ruskin

The Three Forks Formation, which is about 230 ft thick along the southern Nesson Anticline (McKenzie County, ND), has four “benches” with distinct petrographic and petrophysical characteristics that impact reservoir quality. These relatively clean benches are separated by slightly more illitic (higher gamma-ray) intervals that range in thickness from 10 to 20 ft. Here we compare pore sizes observed in scanning electron microscope (SEM) images of the benches to the total porosity calculated from binned precession decay times from a suite of 13 nuclear magnetic resonance (NMR) logs in the study area as well as the logarithmic mean of the relaxation decay time (T2 Log Mean) from these NMR logs. The results show that the NMR log is a valid tool for quantifying pore sizes and pore size distributions in the Three Forks Formation and that the T2 Log Mean can be correlated to a range of pore sizes within each bench of the Three Forks Formation. The first (shallowest) bench of the Three Forks is about 35 ft thick and consists of tan to green silty and shaly laminated dolomite mudstones. It has good reservoir characteristics in part because it was affected by organic acids and received the highest oil charge from the overlying lower Bakken black shale source rocks. The 13 NMR logs from the study area show that it has an average of 7.5% total porosity (compared to 8% measured core porosity), and ranges from 5% to 10%. SEM study shows that both intercrystalline pores and secondary moldic pores formed by selective partial dissolution of some grains are present. The intercrystalline pores are typically triangular and occur between euhedral dolomite rhombs that range in size from 10 to 20 microns. The dolomite crystals have distinct iron-rich (ferroan) rims. Many of the intercrystalline pores are partly filled with fibrous authigenic illite, but overall pore size typically ranges from 1 to 5 microns. As expected, the first bench has the highest oil saturations in the Three Forks Formation, averaging 50% with a range from 30% to 70%. The second bench is also about 35 ft thick and consists of silty and shaly dolomite mudstones and rip-up clast breccias with euhedral dolomite crystals that range in size from 10 to 25 microns. Its color is quite variable, ranging from green to tan to red. The reservoir quality of the second bench data set appears to change based on proximity to the Nesson anticline. In the wells off the southeast flank of the Nesson anticline, the water saturation averages 75%, ranging from 64% to 91%. On the crest of the Nesson anticline, the water saturation averages 55%, ranging from 40% to 70%. NMR porosity is consistent across the entire area of interest - averaging 7.3% and ranging from 5% to 9%. Porosity observed from samples collected on the southeast flank of the Nesson Anticline is mainly as intercrystalline pores that have been extensively filled with chlorite clay platelets. In the water saturated southeastern Nesson Anticline, this bench contains few or no secondary pores and the iron-rich rims on the dolomite crystals are less developed than those in the first bench. The chlorite platelets in the intercrystalline pores reduce average pore size to 500 to 800 nanometers. The third bench is about 55 ft thick and is the most calcareous of the Three Forks benches with 20 to 40% calcite and a proportionate reduction in dolomite content near its top. It is also quite silty and shaly with a distinct reddish color. Its dolomite crystals are 20 to 50 microns in size and partly abraded and dissolved. Ferroan dolomite rims are absent. This interval averages 7.1% porosity and ranges from 5% to 9%, but the pores average just 200 nanometers in size and occur mainly as microinterparticle pores between illite flakes in intracrystalline pores in the dolomite crystals. This interval has little or no oil saturation on the southern Nesson Anticline. Unlike other porosity tools, the NMR tool is a lithology independent measurement. The alignment of hydrogen nuclei to the applied magnetic field and the subsequent return to incoherence are described by two decay time constants, longitudinal relaxation time (T1) and transverse relaxation time (T2). T2 is essentially the rate at which hydrogen nuclei lose alignment to the external magnetic field. The logarithmic mean of T2 (T2 Log Mean) has been correlated to pore-size distribution. In this study, we show that the assumption that T2 Log Mean can be used as a proxy for pore-size distribution changes is valid in the Three Forks Formation. While the NMR total porosity from T2 remains relatively consistent in the three benches of the Three Forks, there are significant changes in the T2 Log Mean from bench to bench. There is a positive correlation between changes in T2 Log Mean and average pore size measured on SEM samples. Study of a “type” well, QEP’s Ernie 7-2-11 BHD (Sec. 11, T149N, R95W, McKenzie County), shows that the 1- to 5-micron pores in the first bench have a T2 Log Mean relaxation time of 10.2 msec, whereas the 500- to 800-nanometer pores in the chlorite-filled intercrystalline pores in the second bench have a T2 Log Mean of 4.96 msec. This compares with a T2 Log Mean of 2.86 msec in 3rd bench where pores average just 200 nanometers in size. These data suggest that the NMR log is a useful tool for quantifying average pore size in the various benches of the Three Forks Formation.


Impact ◽  
2020 ◽  
Vol 2020 (2) ◽  
pp. 52-53
Author(s):  
Lucy Sharp

Materials technology is a constantly evolving discipline, with new materials leading to novel applications. For example, new material properties arise from combining different materials into composites. Researching materials can help solve societal challenges, with the creation of innovative materials resulting in breakthroughs in overcoming hurdles facing humankind, including energy challenges and medical problems. Innovative materials breathe new life into industries and spur on scientific and technological discovery.


2006 ◽  
Vol 514-516 ◽  
pp. 1005-1009 ◽  
Author(s):  
José V. Araújo ◽  
J.A. Lopes da Silva ◽  
Margarida M. Almeida ◽  
Maria Elisabete V. Costa

Porous chitosan/brushite composite scaffolds were prepared by a freeze-drying technique, starting from brushite suspensions in chitosan solutions. The obtained scaffolds showed a regular macroporous and interconnected structure with brushite particles uniformly distributed in the chitosan matrix. The variation of the brushite concentration affected the microstructure of the final freeze-dried scaffold, in particular, its porosity and its average pore size. The yield strengths of the composite scaffolds could also be improved by the increase of the brushite content.


2021 ◽  
Vol 13 (14) ◽  
pp. 7593
Author(s):  
Farooq Khan Niazi ◽  
Malik Adeel Umer ◽  
Ashfaq Ahmed ◽  
Muhammad Arslan Hafeez ◽  
Zafar Khan ◽  
...  

Ultrafiltration membranes offer a progressive and efficient means to filter out various process fluids. The prime factor influencing ultrafiltration to a great extent is the porosity of the membranes employed. Regarding membrane development, alumina membranes are extensively studied due to their uniform porosity and mechanical strength. The present research work is specifically aimed towards the investigation of nanoporous alumina membranes, as a function of sintering parameters, on ultrafiltration performance. Alumina membranes are fabricated by sintering at various temperatures ranging from 1200–1300 °C for different holding times between 5–15 h. The morphological analysis, conducted using Scanning electron microscopy (SEM), revealed a homogeneous distribution of pores throughout the surface and cross-section of the membranes developed. It was observed that an increase in the sintering temperature and time resulted in a gradual decrease in the average pore size. A sample with an optimal pore size of 73.65 nm achieved after sintering at 1250 °C for 15 h, was used for the evaluation of ultrafiltration performance. However, the best mechanical strength and highest stress-bearing ability were exhibited by the sample sintered at 1300 °C for 5 h, whereas the sample sintered at 1250 °C for 5 h displayed the highest strain in terms of compression. The selected alumina membrane sample demonstrated excellent performance in the ultrafiltration of sugarcane juice, compared to the other process liquids.


Molecules ◽  
2021 ◽  
Vol 26 (2) ◽  
pp. 257
Author(s):  
Jie Ren ◽  
Nanwei Chen ◽  
Li Wan ◽  
Guojian Li ◽  
Tao Chen ◽  
...  

In this study, a new method for economical utilization of coffee grounds was developed and tested. The resulting materials were characterized by proximate and elemental analyses, thermogravimetric analysis (TGA), Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), and N2 adsorption–desorption at 77 K. The experimental data show bio-oil yields reaching 42.3%. The optimal activated carbon was obtained under vacuum pyrolysis self-activation at an operating temperature of 450 °C, an activation temperature of 600 °C, an activation time of 30 min, and an impregnation ratio with phosphoric acid of 150 wt.%. Under these conditions, the yield of activated carbon reached 27.4% with a BET surface area of 1420 m2·g−1, an average pore size of 2.1 nm, a total pore volume of 0.747 cm3·g−1, and a t-Plot micropore volume of 0.428 cm3·g−1. In addition, the surface of activated carbon looked relatively rough, containing mesopores and micropores with large amounts of corrosion pits.


2005 ◽  
Vol 885 ◽  
Author(s):  
Krithi Shetty ◽  
Shihuai Zhao ◽  
Wei Cao ◽  
Naidu V. Seetala ◽  
Debasish Kuila

ABSTRACTThe goal of this research is to investigate the activities of a non-noble nano-catalyst (Ni/SiO2) using Si-microreactors for steam reforming of methanol to produce hydrogen for fuel cells. The supported catalyst was synthesized by sol-gel method using Ni (II) salts and Si(C2H5O)4 as starting materials. EDX results indicate that the actual loading of Ni (5-6%) is lower than the intended loading of 12 %. The specific surface area of the silica sol-gel encapsulated Ni nano-catalyst is 452 m2/g with an average pore size of ∼ 3 nm. Steam reforming reactions have been carried out in a microreactor with 50 µm channels in the temperature range of 180-240 °C and atmospheric pressure. Results show 53% conversion of methanol with a selectivity of 74 % to hydrogen at 5 l/min and 200 °C. The magnetic properties of the catalysts were performed using a Vibrating Sample Magnetometer (VSM) to study the activity of the catalysts before and after the steam reforming reactions. The VSM results indicate much higher activity in the microreactor compared to macro-reactor and Ni forms non-ferromagnetic species faster in the microreactor.


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