scholarly journals Low voltage operation electrostatic comb drive micro-mirror for laser scanning display

2012 ◽  
Vol 34 (4) ◽  
pp. 237-245
Author(s):  
Hoang Manh Chu ◽  
Hung Vu Ngoc ◽  
Kazuhiro Hane
Keyword(s):  
Resonant Frequency ◽  
Laser Scanning ◽  
Rotation Angle ◽  
Low Voltage ◽  
Comb Drive ◽  
Large Rotation ◽  
Low Voltage Operation ◽  
Recent Developments ◽  
High Resonant Frequency ◽  
Anchor Loss

Electrostatic comb drive micro-mirror has limitation of high operation voltage, which has limited its practice use. Recent developments in decreasing operation voltage are promising for mobile micro-mirror. Especially, the operation voltage is decreased substantially by removing the air friction of comb-drive micro-mirror at a high resonant frequency when the mirror is operated at low pressure. Removing simultaneously the air friction and anchor loss, electrostatic comb-drive micro-mirror operating at a few voltages at a high resonant frequency becomes possible. This paper presents our recent developments as well as emerging techniques introduced in literature for decreasing the operation voltage of electrostatic comb drive micro-mirror. Methods for decreasing the operation voltage at large rotation angle and high scan frequency for application in the laser scanning display are focused to discuss in this paper.

Current State of Biological High-Resolution Scanning Electron Microscopy

1988 ◽  
Vol 46 ◽  
pp. 180-181 ◽  
Author(s):  
Klaus-Ruediger Peters
Keyword(s):  
High Performance ◽  
Low Voltage ◽  
Backscattered Electrons ◽  
Lens Position ◽  
Low Voltage Operation ◽  
Signal Collection ◽  
Probe Size ◽  
Electron Microscopes ◽  
Scanning Electron Microscopes ◽  
Scanning Electron

A new generation of high performance field emission scanning electron microscopes (FSEM) is now commercially available (JEOL 890, Hitachi S 900, ISI OS 130-F) characterized by an "in lens" position of the specimen where probe diameters are reduced and signal collection improved. Additionally, low voltage operation is extended to 1 kV. Compared to the first generation of FSEM (JE0L JSM 30, Hitachi S 800), which utilized a specimen position below the final lens, specimen size had to be reduced but useful magnification could be impressively increased in both low (1-4 kV) and high (5-40 kV) voltage operation, i.e. from 50,000 to 200,000 and 250,000 to 1,000,000 x respectively.At high accelerating voltage and magnification, contrasts on biological specimens are well characterized1 and are produced by the entering probe electrons in the outmost surface layer within -vl nm depth. Backscattered electrons produce only a background signal. Under these conditions (FIG. 1) image quality is similar to conventional TEM (FIG. 2) and only limited at magnifications >1,000,000 x by probe size (0.5 nm) or non-localization effects (%0.5 nm).

High resolution at low voltage: A new approach

1989 ◽  
Vol 47 ◽  
pp. 76-77
Author(s):  
Arthur V. Jones
Keyword(s):  
Low Voltage ◽  
Emission Sources ◽  
New Approach ◽  
Design Concepts ◽  
Probe Diameter ◽  
Low Voltage Operation ◽  
Sufficient Intensity ◽  
Electron Microscopes ◽  
Scanning Electron Microscopes ◽  
Immersion Type

With the introduction of field-emission sources and “immersion-type” objective lenses, the resolution obtainable with modern scanning electron microscopes is approaching that obtainable in STEM and TEM-but only with specific types of specimens. Bulk specimens still suffer from the restrictions imposed by internal scattering and the need to be conducting. Advances in coating techniques have largely overcome these problems but for a sizeable body of specimens, the restrictions imposed by coating are unacceptable.For such specimens, low voltage operation, with its low beam penetration and freedom from charging artifacts, is the method of choice.Unfortunately the technical dificulties in producing an electron beam sufficiently small and of sufficient intensity are considerably greater at low beam energies — so much so that a radical reevaluation of convential design concepts is needed.The probe diameter is usually given by

Recent developments in low-voltage SEM of polymers

1993 ◽  
Vol 51 ◽  
pp. 866-867
Author(s):  
S.J. Krause ◽  
W.W. Adams
Keyword(s):  
Low Voltage ◽  
Chromatic Aberration ◽  
Thermal Electron ◽  
Analytical Technique ◽  
Recent Developments ◽  
Beam Currents ◽  
New Generation ◽  
First Time ◽  
Voltage Scanning ◽  
Beam Damage

Over the past decade low voltage scanning electron microscopy (LVSEM) of polymers has evolved from an interesting curiosity to a powerful analytical technique. This development has been driven by improved instrumentation and in particular, reliable field emission gun (FEG) SEMs. The usefulness of LVSEM has also grown because of an improved theoretical and experimental understanding of sample-beam interactions and by advances in sample preparation and operating techniques. This paper will review progress in polymer LVSEM and present recent results and developments in the field.In the early 1980s a new generation of SEMs produced beam currents that were sufficient to allow imaging at low voltages from 5keV to 0.5 keV. Thus, for the first time, it became possible to routinely image uncoated polymers at voltages below their negative charging threshold, the "second crossover", E2 (Fig. 1). LVSEM also improved contrast and reduced beam damage in sputter metal coated polymers. Unfortunately, resolution was limited to a few tenths of a micron due to the low brightness and chromatic aberration of thermal electron emission sources.

scholarly journals Analytical Investigation on Torque of Three-Degree-of-Freedom Electromagnetic Actuator for Image Stabilization

2021 ◽  
Vol 11 (15) ◽  
pp. 6872
Author(s):  
Chien-Sheng Liu ◽  
Yi-Hsuan Lin ◽  
Chiu-Nung Yeh
Keyword(s):  
Power Efficiency ◽  
Rotation Angle ◽  
Analytical Investigation ◽  
Degree Of Freedom ◽  
Electromagnetic Actuator ◽  
3D Fem ◽  
Image Stabilization ◽  
Large Rotation ◽  
Spherical Motor ◽  
Three Degree Of Freedom

In keeping with consumers’ preferences for electromagnetic motors of ever smaller power consumption, it is necessary to improve the power efficiency of the electromagnetic motors used in unmanned aerial vehicles and robots without sacrificing their performance. Three-degree-of-freedom (3-DOF) spherical motors have been developed for these applications. Accordingly, this study modifies the 3-DOF spherical motor proposed by Hirata’s group in a previous study (Heya, A.; Hirata, K.; Niguchi, N., Dynamic modeling and control of three-degree-of-freedom electromagnetic actuator for image stabilization, IEEE Transactions on Magnetics 2018, 54, 8207905.) to accomplish a 3-DOF spherical motor for camera module with higher torque output in the large rotation angle. The main contribution of this study is to improve the static torque in the X- and Y-axes with an improved electromagnetic structure and a particular controlling strategy. In the structural design, eight symmetrical coils with specific coil combination are used instead of conventional four symmetrical coils. In this study, the development of the proposed 3-DOF spherical motor was constructed and verified by using a 3D finite-element method (3D FEM). The simulation results show that the proposed 3-DOF spherical motor has higher torque output in the large rotation angle when compared to the original 3-DOF spherical motor.

Low-voltage operation of the organic thin film transistor with a diagonal configuration

2003 ◽  
Author(s):  
Toshihide Kamata ◽  
Manabu Yoshida ◽  
Sei Uemura ◽  
Satoshi Hoshino ◽  
Noriyuki Takada ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Voltage ◽  
Thin Film Transistor ◽  
Organic Thin Film ◽  
Organic Thin Film Transistor ◽  
Low Voltage Operation
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