scholarly journals Patterning Defect Study for Process Integration Engineering Using Pattern Fidelity Monitoring with Review SEM Images

2019 ◽  
Vol 2 (2) ◽  
pp. 1-6
Author(s):  
Yu Zhang ◽  
◽  
Abhishek Vikram ◽  
Ming Tian ◽  
Tianpeng Guan ◽  
...  
Author(s):  
M. D. Coutts ◽  
E. R. Levin

On tilting samples in an SEM, the image contrast between two elements, x and y often decreases to zero at θε, which we call the no-contrast angle. At angles above θε the contrast is reversed, θ being the angle between the specimen normal and the incident beam. The available contrast between two elements, x and y, in the SEM can be defined as,(1)where ix and iy are the total number of reflected and secondary electrons, leaving x and y respectively. It can easily be shown that for the element x,(2)where ib is the beam current, isp the specimen absorbed current, δo the secondary emission at normal incidence, k is a constant, and m the reflected electron coefficient.


Author(s):  
J.D. Geller ◽  
C.R. Herrington

The minimum magnification for which an image can be acquired is determined by the design and implementation of the electron optical column and the scanning and display electronics. It is also a function of the working distance and, possibly, the accelerating voltage. For secondary and backscattered electron images there are usually no other limiting factors. However, for x-ray maps there are further considerations. The energy-dispersive x-ray spectrometers (EDS) have a much larger solid angle of detection that for WDS. They also do not suffer from Bragg’s Law focusing effects which limit the angular range and focusing distance from the diffracting crystal. In practical terms EDS maps can be acquired at the lowest magnification of the SEM, assuming the collimator does not cutoff the x-ray signal. For WDS the focusing properties of the crystal limits the angular range of acceptance of the incident x-radiation. The range is dependent upon the 2d spacing of the crystal, with the acceptance angle increasing with 2d spacing. The natural line width of the x-ray also plays a role. For the metal layered crystals used to diffract soft x-rays, such as Be - O, the minimum magnification is approximately 100X. In the worst case, for the LEF crystal which diffracts Ti - Zn, ˜1000X is the minimum.


Author(s):  
M.A. Cuadros ◽  
M.J. Martinez-Guerrero ◽  
A. Rios

In the chick embryo retina (days 3-4 of incubation), coinciding with an increase in cell death, specialized phagocytes characterized by intense acid phosphatase activity have been described. In these preparations, all free cells in the vitreal humor (vitreal cells) were strongly labeled. Conventional TEM and SEM techniques were used to characterize them and attempt to determine their relationship with retinal phagocytes.Two types of vitreal cells were distinguished. The first are located at some distance from the basement membrane of the neuroepithelium, and are rounded, with numerous vacuoles and thin cytoplasmic prolongations. Images of exo- and or endocytosis were frequent; the cells showed a well-developed Golgi apparatus (Fig. 1) In SEM images, the cells was covered with short cellular processes (Fig. 3). Cells lying parallel to or alongside the basement membrane are elongated. The plasma membrane is frequently in intimate contact with the basement membrane. These cells have generally a large cytoplasmic expansion (Fig. 5).


Author(s):  
C. A. Callender ◽  
Wm. C. Dawson ◽  
J. J. Funk

The geometric structure of pore space in some carbonate rocks can be correlated with petrophysical measurements by quantitatively analyzing binaries generated from SEM images. Reservoirs with similar porosities can have markedly different permeabilities. Image analysis identifies which characteristics of a rock are responsible for the permeability differences. Imaging data can explain unusual fluid flow patterns which, in turn, can improve production simulation models.Analytical SchemeOur sample suite consists of 30 Middle East carbonates having porosities ranging from 21 to 28% and permeabilities from 92 to 2153 md. Engineering tests reveal the lack of a consistent (predictable) relationship between porosity and permeability (Fig. 1). Finely polished thin sections were studied petrographically to determine rock texture. The studied thin sections represent four petrographically distinct carbonate rock types ranging from compacted, poorly-sorted, dolomitized, intraclastic grainstones to well-sorted, foraminiferal,ooid, peloidal grainstones. The samples were analyzed for pore structure by a Tracor Northern 5500 IPP 5B/80 image analyzer and a 80386 microprocessor-based imaging system. Between 30 and 50 SEM-generated backscattered electron images (frames) were collected per thin section. Binaries were created from the gray level that represents the pore space. Calculated values were averaged and the data analyzed to determine which geological pore structure characteristics actually affect permeability.


Author(s):  
H. Sh. Hammood ◽  
S. S. Irhayyim ◽  
A. Y. Awad ◽  
H. A. Abdulhadi

Multiwall Carbon nanotubes (MWCNTs) are frequently attractive due to their novel physical and chemical characteristics, as well as their larger aspect ratio and higher conductivity. Therefore, MWCNTs can allow tremendous possibilities for the improvement of the necessarily unique composite materials system. The present work deals with the fabrication of Cu-Fe/CNTs hybrid composites manufactured by powder metallurgy techniques. Copper powder with 10 vol. % of iron powder and different volume fractions of Multi-Wall Carbon Nanotubes (MWCNTs) were mixed to get hybrid composites. The hybrid composites were fabricated by adding 0.3, 0.6, 0.9, and 1.2 vol.% of MWCNTs to Cu- 10% Fe mixture using a mechanical mixer. The samples were compressed under a load of 700 MPa using a hydraulic press to compact the samples. Sintering was done at 900°C for 2 h at 5ºC/min heating rate. The microscopic structure was studied using a Scanning Electron Microscope (SEM). The effect of CNTs on the mechanical and wear properties, such as micro-hardness, dry sliding wear, density, and porosity were studied in detail. The wear tests were carried out at a fixed time of 20 minutes while the applied loads were varied (5, 10, 15, and 20 N). SEM images revealed that CNTs were uniformly distributed with relative agglomeration within the Cu/Fe matrix. The results showed that the hardness, density, and wear rates decreased while the percentage of porosity increased with increasing the CNT volume fraction. Furthermore, the wear rate for all the CNTs contents increased with the applied load.


MRS Bulletin ◽  
1997 ◽  
Vol 22 (10) ◽  
pp. 49-54 ◽  
Author(s):  
E. Todd Ryan ◽  
Andrew J. McKerrow ◽  
Jihperng Leu ◽  
Paul S. Ho

Continuing improvement in device density and performance has significantly affected the dimensions and complexity of the wiring structure for on-chip interconnects. These enhancements have led to a reduction in the wiring pitch and an increase in the number of wiring levels to fulfill demands for density and performance improvements. As device dimensions shrink to less than 0.25 μm, the propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance (RC) coupling become significant. Accordingly the interconnect delay now constitutes a major fraction of the total delay limiting the overall chip performance. Equally important is the processing complexity due to an increase in the number of wiring levels. This inevitably drives cost up by lowering the manufacturing yield due to an increase in defects and processing complexity.To address these problems, new materials for use as metal lines and interlayer dielectrics (ILDs) and alternative architectures have surfaced to replace the current Al(Cu)/SiO2 interconnect technology. These alternative architectures will require the introduction of low-dielectric-constant k materials as the interlayer dielectrics and/or low-resistivity conductors such as copper. The electrical and thermomechanical properties of SiO2 are ideal for ILD applications, and a change to material with different properties has important process-integration implications. To facilitate the choice of an alternative ILD, it is necessary to establish general criterion for evaluating thin-film properties of candidate low-k materials, which can be later correlated with process-integration problems.


Author(s):  
Ahmad Almehmadi

Abstract The re-use of healing abutments (HAs) has become common practice in implant dentistry for economic concerns and the aim of this in-vitro study was to assess the effect of sodium hypochlorite (NaOCl) in decontamination of HAs. 122 HAs (Used and sterilized n=107; New n=15) were procured from 3 centers, of which 3 samples were discarded due to perforation in sterilization pouch.  For sterility assessment, the used HAs (n=80) were cultured in Brain Heart Infusion Broth (BHI) and Potato Dextrose Agar (PDA), bacterial isolates were identified in 7 samples. Also, 24 used HAs were stained with Phloxine B, photographed and compared to new HAs (n=5). Scanning electron microscope (SEM) assessed the differences between the two sets of HAs, following which the 7 contaminated HAs along with 24 used HAs from staining experiment (Total=31) were subsequently treated with sodium hypochlorite (NaOCl) and SEM images were observed. About 8.75% of HAs tested positive in bacterial culture; Streptococcus sanguis, Dermabacter hominis, Staphylococcus haemolyticus, and Aspergillus species were isolated. Phloxine B staining was positive for used and sterilized HAs when compared to controls. The SEM images revealed deposits in the used HAs and although treatment with NaOCl eliminated the contamination of cultured HAs, the SEM showed visible debris in the HA thread region. This in-vitro study concluded that SEM images showed debris in used HAs at screw-hole and thread regions even though they tested negative in bacterial culture. The treatment with NaOCl of used HAs showed no bacterial contamination but the debris was observed in SEM images. Future studies on the chemical composition, biological implications, and clinical influence is warranted before considering the reuse of HAs.


2020 ◽  
Vol 45 (4) ◽  
pp. 826-832
Author(s):  
Lamarck Rocha ◽  
Maria Mercedes Arbo

Abstract—Turnera macrosperma, a new species from the Brazilian Cerrado, is described and illustrated. The new species belongs to the series Turnera and can be characterized by the white petals with dark blue/violet basal spot and large seeds with papillose aril. SEM images, distribution map, and comments on taxonomy and morphology are presented.


2020 ◽  
Vol 16 (4) ◽  
pp. 600-612
Author(s):  
L.F. Nikulin ◽  
V.V. Velikorossov ◽  
S.A. Filin ◽  
A.B. Lanchakov

Subject. The article discusses how management transforms as artificial intelligence gets more important in governance, production and social life. Objectives. We identify and substantiate trends in management transformation as artificial intelligence evolves and gets more important in governance, production and social life. The article also provides our suggestions for management and training of managers dealing with artificial intelligence. Methods. The study employs methods of logic research, analysis and synthesis through the systems and creative approach, methodology of technological waves. Results. We analyzed the scope of management as is and found that threats and global challenges escalate due to the advent of artificial intelligence. We provide the rationale for recognizing the strategic culture as the self-organizing system of business process integration. We suggest and substantiate the concept of soft power with reference to strategic culture, which should be raised, inter alia, through the scientific school of conflict studies. We give our recommendations on how management and training of managers should be improved in dealing with artificial intelligence as it evolves. The novelty hereof is that we trace trends in management transformation as the role of artificial intelligence evolves and growth in governance, production and social life. Conclusions and Relevance. Generic solutions are not very effective for the Russian management practice during the transition to the sixth and seventh waves of innovation. Any programming product represents artificial intelligence, which simulates a personality very well, though unable to substitute a manager in motivating, governing and interacting with people.


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