Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

2003 ◽  
Vol 27 (1) ◽  
pp. 59-69 ◽  
Author(s):  
Y.N Picard ◽  
D.P Adams ◽  
M.J Vasile ◽  
M.B Ritchey
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Precision Machining ◽  
Ultra Precision

Recent Development of Focused Ion Beam System and Application

2013 ◽  
Vol 753-755 ◽  
pp. 2578-2581
Author(s):  
Yan Chen ◽  
Li Bao An ◽  
Xiao Xia Yang
Keyword(s):  
Focused Ion Beam ◽  
Semiconductor Device ◽  
Ion Beam ◽  
Ion Source ◽  
Device Fabrication ◽  
Precision Machining ◽  
Micro Machining ◽  
Precise Positioning ◽  
Beam System ◽  
Ultra Precision

Ultra-precision machining is used for many engineering applications where the traditional processes fail to work. Focused ion beam (FIB) technology is a very important part of the ultra-precision machining. It can realize the precise positioning, microscopic observation and micro machining. This paper introduces the FIB system and its application. FIB system contains ion source, focusing and scanning equipment and sample station. FIB technique has many unique and important functions. It is widely used in semiconductor device fabrication and circuit failure analysis. It can realize sample etching, imaging, thin film deposited, ion implantation and micromachining.

scholarly journals Micrometer-scale machining of metals and polymers enabled by focused ion beam sputtering

1998 ◽  
Vol 546 ◽  
Author(s):  
D. P. Adams ◽  
G. L. Benavides ◽  
M. J. vasile
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
End Mills ◽  
Ultra Precision ◽  
Tool Shank ◽  
Micrometer Scale ◽  
Tool Cutting ◽  
Micro Tools

AbstractThis work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25μm diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26–28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces

2021 ◽  
Vol 21 (9) ◽  
pp. 4735-4739
Author(s):  
Sung-Taek Jung ◽  
Hyun-Jeong Kim ◽  
Eun-Chan Wi ◽  
Jung-Shik Kong ◽  
Joo-Hyung Lee ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Diamond Tool ◽  
Ion Beam ◽  
Free Form ◽  
Fabrication Technology ◽  
Optical Components ◽  
Nano Scale ◽  
Single Crystal Diamond ◽  
Ultra Precision ◽  
Free Form Surfaces

Recently, the technology of the industry has been increasing for diffractive optical elements, holograms, optical components, and next-generation display components. The advanced high value-added industry is designing fine patterns on ultra-precision optical components and applying them to various industries. In the case of the ultra-fine pattern, a contact-type machining technique is required because it requires a precise pattern in nano-scale units. In this paper, the fabrication technology of ultra-precision diamond which is essential in the ultra-precision processing technology was suggested. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam (FEI COMPANY, system Nova 600) equipment. The back fire method was applied without metal coating in order to carry out the process study and the focused beam of 30 keV Ga+ ions were carried out processing for various fabrication of diamond cutting tools. As a result of applying the backfire method through the process experiment, the cutting edge width of the ultra-precision diamond tool was verified 275 nm.

Focused Ion Beam Nano-Precision Machining for Analyzing Photonic Structures in Butterfly

2010 ◽  
Vol 447-448 ◽  
pp. 174-177 ◽  
Author(s):  
Hou Xiao Wang ◽  
Wei Zhou ◽  
Er Ping Li
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Functional Materials ◽  
Device Fabrication ◽  
Precision Machining ◽  
Photonic Structures ◽  
Butterfly Wings ◽  
Increasing Trend ◽  
The Difference ◽  
Sub Wavelength

Nano-precision machining using focused ion beam (FIB) is widely applied in many fields. So far, FIB-based nanofabrication for specific nanoscale applications has become an interesting topic to realize more diversities for nano-construction. Through FIB machining, we can easily achieve the required nano- and micro-scale patterning, device fabrication, and preparation of experimental samples. Nowadays, there is an increasing trend to learn from nature to design novel multi-functional materials and devices. Thus, more interestingly, another advantage of FIB is that it can be conveniently used to analyze the natural photonic structures, e.g., those in the butterfly which exhibits amazing optical phenomena due to sub-wavelength structural color. Accordingly, in the present study, structural analyses for butterfly wings were carried out using FIB. It is found that the photonic structures for the backside and frontside of the butterfly wing studied differ considerably. The difference accounts for the different colors on the dorsal and ventral sides of butterfly wings.

A Study on Fabrication of Ultra-Precision Diamond Tool and Length Optimization for Improving the Stability

2018 ◽  
Vol 777 ◽  
pp. 289-293
Author(s):  
Seung Yub Baek ◽  
Jin Ho Chu ◽  
Sung Taek Jung
Keyword(s):  
Virtual Reality ◽  
Augmented Reality ◽  
Focused Ion Beam ◽  
Cutting Tool ◽  
Ion Beam ◽  
Semiconductor Industry ◽  
Precision Grinding ◽  
Micro Scale ◽  
Space Optics ◽  
Ultra Precision

A tool for fabricating micro/nanopatterns was utilized in space optics, virtual reality, augmented reality, and semiconductor industry. Nowadays, demand of manufacturing technique for ultra-precision is continuously increasing virtual reality and augmented reality industry across the board and core technique for manufacturing next generation lens is cutting tool fabricating technique with nanoscale. In particular, tools of micro/nanosize for ultra-precision machining was made by using an ultra-precision grinding, but it was difficult to fabricate tools which have under micro scale. Recently, results of studies with many researchers were pulsed laser ablation, electric discharge machining and precision grinding. However, previous studies are unsuitable in making tools of micro/nanoscale. Due to unique physical properties of diamond, it can be easily controlled by using focused ion beam. The surface properties of the diamond layer are affected because of the amorphous damage caused by the FIB gallium ions collision, implantation and these effects can make to be able to control the geometry of cutting tool. In this study, we carried out in fabricating diamond tools under micro scale by using FIB milling through various process studies and determined in order to optimize the length of unstable tool.

Nanocomposite Polyurethane Foams Via POSS Blends

2002 ◽  
Vol 733 ◽  
Author(s):  
Brock McCabe ◽  
Steven Nutt ◽  
Brent Viers ◽  
Tim Haddad
Keyword(s):  
High Temperature ◽  
Sample Preparation ◽  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Polyurethane Foams ◽  
Development Projects ◽  
Polymer Systems ◽  
Polyurethane Resin ◽  
Military Development

AbstractPolyhedral Oligomeric Silsequioxane molecules have been incorporated into a commercial polyurethane formulation to produce nanocomposite polyurethane foam. This tiny POSS silica molecule has been used successfully to enhance the performance of polymer systems using co-polymerization and blend strategies. In our investigation, we chose a high-temperature MDI Polyurethane resin foam currently used in military development projects. For the nanofiller, or “blend”, Cp7T7(OH)3 POSS was chosen. Structural characterization was accomplished by TEM and SEM to determine POSS dispersion and cell morphology, respectively. Thermal behavior was investigated by TGA. Two methods of TEM sample preparation were employed, Focused Ion Beam and Ultramicrotomy (room temperature).

An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh
Keyword(s):  
Cross Sections ◽  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Glass Substrates ◽  
Atomic Force ◽  
Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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