A review of principles of MEMS pressure sensing with its aerospace applications

Sensor Review ◽  
2019 ◽  
Vol 39 (5) ◽  
pp. 652-664 ◽  
Author(s):  
Yaser Javed ◽  
Mohtashim Mansoor ◽  
Irtiza Ali Shah
Keyword(s):  
Turbulent Flow ◽  
Flow Control ◽  
Aerospace Industry ◽  
Pressure Sensors ◽  
Mems Sensors ◽  
Pressure Sensing ◽  
Content Type ◽  
Cost Constraints ◽  
Micro Flow ◽  
Mems Pressure Sensors

Purpose Pressure, being one of the key variables investigated in scientific and engineering research, requires critical and accurate measurement techniques. With the advancements in materials and machining technologies, there is a large leap in the measurement techniques including the development of micro electromechanical systems (MEMS) sensors. These sensors are one to two orders smaller in magnitude than traditional sensors and combine electrical and mechanical components that are fabricated using integrated circuit batch-processing technologies. MEMS are finding enormous applications in many industrial fields ranging from medical to automotive, communication to electronics, chemical to aviation and many more with a potential market of billions of dollars. MEMS pressure sensors are now widely used devices owing to their intrinsic properties of small size, light weight, low cost, ease of batch fabrication and integration with an electronic circuit. This paper aims to identify and analyze the common pressure sensing techniques and discuss their uses and advantages. As per our understanding, usage of MEMS pressure sensors in the aerospace industry is quite limited due to cost constraints and indirect measurement approaches owing to the inability to locate sensors in harsh environments. The purpose of this study is to summarize the published literature for application of MEMS pressure sensors in the said field. Five broad application areas have been investigated including: propulsion/turbomachinery applications, turbulent flow diagnosis, experimentalaerodynamics, micro-flow control and unmanned aerial vehicle (UAV)/micro aerial vehicle (MAV) applications. Design/methodology/approach The first part of the paper deals with an introduction to MEMS pressure sensors and mathematical relations for its fabrication. The second part covers pressure sensing principles followed by the application of MEMS pressure sensors in five major fields of aerospace industry. Findings In this paper, various pressure sensing principles in MEMS and applications of MEMS technology in the aerospace industry have been reviewed. Five application fields have been investigated including: Propulsion/Turbomachinery applications, turbulent flow diagnosis, experimental aerodynamics, micro-flow control and UAV/MAV applications. Applications of MEMS sensors in the aerospace industry are quite limited due to requirements of very high accuracy, high reliability and harsh environment survivability. However, the potential for growth of this technology is foreseen due to inherent features of MEMS sensors’ being light weight, low cost, ease of batch fabrication and capability of integration with electric circuits. All these advantages are very relevant to the aerospace industry. This work is an endeavor to present a comprehensive review of such MEMS pressure sensors, which are used in the aerospace industry and have been reported in recent literature. Originality/value As per the author’s understanding, usage of MEMS pressure sensors in the aerospace industry is quite limited due to cost constraints and indirect measurement approaches owing to the inability to locate sensors in harsh environments. Present work is a prime effort in summarizing the published literature for application of MEMS pressure sensors in the said field. Five broad application areas have been investigated including: propulsion/turbomachinery applications, turbulent flow diagnosis, experimental aerodynamics, micro-flow control and UAV/MAV applications.

Internal and external factors effect on the mobile pressure sensors’ performance

Sensor Review ◽  
2016 ◽  
Vol 36 (4) ◽  
pp. 405-413 ◽  
Author(s):  
Semih Dalgin ◽  
Ahmet Özgür Dogru
Keyword(s):  
Pressure Sensor ◽  
Mobile Applications ◽  
Pressure Sensors ◽  
External Factors ◽  
Sensor Data ◽  
High Tech ◽  
Internal Factors ◽  
Content Type ◽  
Internal And External Factors ◽  
Mems Pressure Sensors

Purpose The purpose of this study is to investigate the effect of internal and external factors on the accuracy and consistency of the data provided by mobile-embedded micro-electromechanical system (MEMS) pressure sensors based on smartphones currently in use. Design/methodology/approach For this purpose, sensor type and smartphone model have been regarded as internal factors, whereas temperature, location and usage habits have been considered as external factors. These factors have been investigated by examining data sets provided by sensors from 14 different smartphones. In this context, internal factors have been analyzed by implementing accuracy assessment processes for three different smartphone models, whereas external factors have been evaluated by analyzing the line charts which present timely pressure changes. Findings The study outlined that the sensor data at different sources have different characteristics due to the affecting parameters. Even if the pressure sensors are used under similar circumstances, data of these sensors have inconsistencies because of the sensor drift originated by internal factors. This study concluded that it was not applicable to provide a common correction coefficient for pressure sensor data of each smartphone model. Therefore, relative data (pressure differences) should be taken into consideration rather than absolute data (pressure values) when developing mobile applications using sensor data. Research limitations/implications Results of this study can be used as the guideline for developing mobile applications using MEMS pressure sensors. One of the main finding of this paper is promoting the use of relative data (pressure differences) rather than absolute data (pressure values) when developing mobile applications using smartphone-embedded sensor data. This significant result was proved by examinations applied with in the study and can be applied by future research studies. Originality/value Existing studies mostly evaluate the use of MEMS pressure sensor data obtained from limited number of smartphone models. As each smartphone model has a specific technology, factors affecting the sensor performances should be identified and analyzed precisely in terms of smartphone models for providing extensive results. In this study, five smartphone models were used fractionally. In this context, they were used for examining the common effects of the factors, and detailed accuracy assessments were applied by using two high-tech smartphones in the market.

MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

2020 ◽  
Vol 37 (3) ◽  
pp. 147-153
Author(s):  
Zoheir Kordrostami ◽  
Kourosh Hassanli ◽  
Amir Akbarian
Keyword(s):  
Pressure Sensor ◽  
Design Methodology ◽  
Pressure Sensors ◽  
Mems Sensors ◽  
Sensors And Actuators ◽  
Content Type ◽  
Sensor Performance ◽  
Piezoresistive Pressure Sensor ◽  
Piezoelectric Pressure Sensor ◽  
First Time

Purpose The purpose of this study is to find a new design that can increase the sensitivity of the sensor without sacrificing the linearity. A novel and very efficient method for increasing the sensitivity of MEMS pressure sensor has been proposed for the first time. Rather than perforation, we propose patterned thinning of the diaphragm so that specific regions on it are thinner. This method allows the diaphragm to deflect more in response with regard to the pressure. The best excavation depth has been calculated and a pressure sensor with an optimal pattern for thinned regions has been designed. Compared to the perforated diaphragm with the same pattern, larger output voltage is achieved for the proposed sensor. Unlike the perforations that have to be near the edges of the diaphragm, it is possible for the thin regions to be placed around the center of the diaphragm. This significantly increases the sensitivity of the sensor. In our designation, we have reached a 60 per cent thinning (of the diaphragm area) while perforations larger than 40 per cent degrade the operation of the sensor. The proposed method is applicable to other MEMS sensors and actuators and improves their ultimate performance. Design/methodology/approach Instead of perforating the diaphragm, we propose a patterned thinning scheme which improves the sensor performance. Findings By using thinned regions on the diaphragm rather than perforations, the sensitivity of the sensor was improved. The simulation results show that the proposed design provides larger membrane deflections and higher output voltages compared to the pressure sensors with a normal or perforated diaphragm. Originality/value The proposed MEMS piezoelectric pressure sensor for the first time takes advantage of thinned diaphragm with optimum pattern of thinned regions, larger outputs and larger sensitivity compared with the simple or perforated diaphragm pressure sensors.

Hermetic capacitive pressure sensors for biomedical applications

2016 ◽  
Vol 33 (2) ◽  
pp. 79-86 ◽  
Author(s):  
Daniela Diaz-Alonso ◽  
Mario Moreno-Moreno ◽  
Carlos Zuñiga ◽  
Joel Molina ◽  
Wilfrido Calleja ◽  
...  
Keyword(s):  
Biomedical Applications ◽  
Pressure Sensors ◽  
Polyimide Film ◽  
Composite Model ◽  
Internal Cavity ◽  
Capacitive Pressure Sensor ◽  
Pressure Sensing ◽  
Content Type ◽  
Aluminum Films ◽  
Rigid Frame

Purpose This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications. Design/methodology/approach This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5 μm-thick polyimide film. Findings The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability. Originality/value The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.

Design of biomimetic human-skin-like tactile flexible sensor

Sensor Review ◽  
2019 ◽  
Vol 39 (3) ◽  
pp. 397-406
Author(s):  
Xiaozhou Lu ◽  
Xi Xie ◽  
Qiaobo Gao ◽  
Hanlun Hu ◽  
Jiayi Yang ◽  
...  
Keyword(s):  
Human Skin ◽  
Pressure Sensor ◽  
Material Selection ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Structure Design ◽  
Design Parameters ◽  
Lower Electrode ◽  
Pressure Sensing ◽  
Content Type

Purpose The hands of intelligent robots perceive external stimuli and respond effectively according to tactile or pressure sensors. However, the traditional tactile and pressure sensors cannot perform human-skin-like intelligent properties of high sensitivity, large measurement range, multi-function and flexibility simultaneously. The purpose of this paper is to present a flexible tactile-pressure sensor based on hyper-elastics polydimethylsiloxane and plate capacitance. Design/methodology/approach With regard to this problem, this paper presents a flexible tactile-pressure sensor based on hyper-elastics PDMS and plate capacitance. The sensor has a size of 10 mm × 10 mm × 1.3 mm and is composed of four upper electrodes, one middle driving electrode and one lower electrode. The authors first analyzed the structure and the tactile-pressure sensing principle of human skin to obtain the design parameters of the sensor. Then they presented the working principle, material selection and mechanical structure design and fabrication process of the sensor. The authors also fabricated several sample devices of the sensor and carried out experiments to establish the relationship between the sensor output and the pressure. Findings The results show that the tactile part of the sensor can measure a range of 0.05-1N/mm2 micro pressure with a sensitivity of 2.93 per cent/N and a linearity of 0.03 per cent. The pressure part of the sensor can measure a range of 1-30N/mm2 pressure with a sensitivity of 0.08 per cent/N and a linearity of 0.07 per cent. Originality/value This paper analyzes the tactile and pressure sensing principles of human skin and develop an intelligent sensitive human-skin-like tactile-pressure sensor for intelligent robot perception systems. The sensor can achieve to imitate the tactile and pressure function simultaneously with a measurement resolution of 0.01 N and a spatial resolution of 2 mm.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

scholarly journals Dynamic flight load measurements with MEMS pressure sensors

2021 ◽  
Author(s):  
Christian Raab ◽  
Kai Rohde-Brandenburger
Keyword(s):  
Pressure Distribution ◽  
Pressure Sensors ◽  
Flow Characteristics ◽  
Flight Test ◽  
Measurement Technology ◽  
Test Program ◽  
Aerodynamic Pressure ◽  
Pressure Distributions ◽  
Time Histories ◽  
Mems Pressure Sensors

AbstractThe determination of structural loads plays an important role in the certification process of new aircraft. Strain gauges are usually used to measure and monitor the structural loads encountered during the flight test program. However, a time-consuming wiring and calibration process is required to determine the forces and moments from the measured strains. Sensors based on MEMS provide an alternative way to determine loads from the measured aerodynamic pressure distribution around the structural component. Flight tests were performed with a research glider aircraft to investigate the flight loads determined with the strain based and the pressure based measurement technology. A wing glove equipped with 64 MEMS pressure sensors was developed for measuring the pressure distribution around a selected wing section. The wing shear force determined with both load determination methods were compared to each other. Several flight maneuvers with varying loads were performed during the flight test program. This paper concentrates on the evaluation of dynamic flight maneuvers including Stalls and Pull-Up Push-Over maneuvers. The effects of changes in the aerodynamic flow characteristics during the maneuver could be detected directly with the pressure sensors based on MEMS. Time histories of the measured pressure distributions and the wing shear forces are presented and discussed.

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

Flexible pressure sensing film based on ultra-sensitive SWCNT/PDMS spheres for monitoring human pulse signals

2015 ◽  
Vol 3 (27) ◽  
pp. 5436-5441 ◽  
Author(s):  
Yan-Long Tai ◽  
Zhen-Guo Yang
Keyword(s):  
Pressure Sensors ◽  
Pressure Sensing ◽  
Prosthetic Limbs ◽  
Electronic Skin ◽  
Essential Components ◽  
Biomedical Diagnostics ◽  
Healthcare Monitoring ◽  
Flexible Pressure Sensors ◽  
Human Healthcare

Flexible pressure sensors are essential components of an electronic skin for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics to robotic skins to prosthetic limbs.

Multi length scale hierarchical architecture overcoming pressure sensing range-speed tradeoff for flexible pressure sensors

2021 ◽  
Author(s):  
Qiong Tian ◽  
Wenrong Yan ◽  
Tianding CHEN ◽  
Derek Ho
Keyword(s):  
Biomedical Applications ◽  
Pressure Sensors ◽  
Human Machine Interface ◽  
Hierarchical Architecture ◽  
Soft Robotics ◽  
Length Scale ◽  
Pressure Sensing ◽  
Sensing Range ◽  
Machine Interface ◽  
Flexible Pressure Sensors

Pressure sensing electronics have gained great attention in human-machine interface, soft robotics, and wearable biomedical applications. However, existing sensor architectures are inadequate in overcoming the classic tradeoff between sensing range,...

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