Test structure for characterizing metal thickness in damascene CMP technology

2008 ◽  
Author(s):  
Alain Toffoli ◽  
Sylvain Maitrejean ◽  
Jean Duport de Pontcharra ◽  
Francois de Crecy ◽  
David Bouchu ◽  
...  
Keyword(s):  
Test Structure ◽  
Metal Thickness

Growth of near noble metal Pd and Pt thin film silicides morphology and structure

1984 ◽  
Vol 42 ◽  
pp. 498-499
Author(s):  
E. I. Alessandrini ◽  
M. O. Aboelfotoh
Keyword(s):  
Noble Metals ◽  
Annealing Temperature ◽  
Chemical Compounds ◽  
Barrier Properties ◽  
Solid State Reactions ◽  
Transmission Electron ◽  
Stable Chemical ◽  
Metal Thickness ◽  
Amorphous Si ◽  
Si Films

Considerable interest has been generated in solid state reactions between thin films of near noble metals and silicon. These metals deposited on Si form numerous stable chemical compounds at low temperatures and have found applications as Schottky barrier contacts to silicon in VLSI devices. Since the very first phase that nucleates in contact with Si determines the barrier properties, the purpose of our study was to investigate the silicide formation of the near noble metals, Pd and Pt, at very thin thickness of the metal films on amorphous silicon.Films of Pd and Pt in the thickness range of 0.5nm to 20nm were made by room temperature evaporation on 40nm thick amorphous Si films, which were first deposited on 30nm thick amorphous Si3N4 membranes in a window configuration. The deposition rate was 0.1 to 0.5nm/sec and the pressure during deposition was 3 x 10 -7 Torr. The samples were annealed at temperatures in the range from 200° to 650°C in a furnace with helium purified by hot (950°C) Ti particles. Transmission electron microscopy and diffraction techniques were used to evaluate changes in structure and morphology of the phases formed as a function of metal thickness and annealing temperature.

Development of Test Structure for Variability Evaluation using Charge-Based Capacitance Measurement

2014 ◽  
Vol E97.C (11) ◽  
pp. 1117-1123 ◽  
Author(s):  
Katsuhiro TSUJI ◽  
Kazuo TERADA ◽  
Ryota KIKUCHI
Keyword(s):  
Test Structure ◽  
Capacitance Measurement

Precise Localization of 28 nm via Chain Resistive Defect Using EBAC and Nanoprobing

2012 ◽  
Author(s):  
P. Larré ◽  
H. Tupin ◽  
C. Charles ◽  
R.H. Newton ◽  
A. Reverdy
Keyword(s):  
Electron Beam ◽  
Failure Analysis ◽  
Test Structure ◽  
Precise Localization ◽  
Isolation Method ◽  
Accurate Detection ◽  
Conventional Methods ◽  
Technology Nodes ◽  
Tem Lamella

Abstract As technology nodes continue to shrink, resistive opens have become increasingly difficult to detect using conventional methods such as AVC and PVC. The failure isolation method, Electron Beam Absorbed Current (EBAC) Imaging has recently become the preferred method in failure analysis labs for fast and highly accurate detection of resistive opens and shorts on a number of structures. This paper presents a case study using a two nanoprobe EBAC technique on a 28nm node test structure. This technique pinpointed the fail and allowed direct TEM lamella.

Backside FIB Device Modifications Through the BOX Layer of an SOI Device

2002 ◽  
Author(s):  
Jeffery P. Huynh ◽  
Joseph P. Shannon ◽  
Richard W. Johnson ◽  
Mike Santana ◽  
Thomas Y. Chu ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Oxide Layer ◽  
Cross Section ◽  
Test Structure ◽  
Ring Oscillator ◽  
Oscillator Circuit ◽  
Entire Process ◽  
Oscillator Frequency ◽  
Polysilicon Gate ◽  
Resistance Data

Abstract Modifications directly to a transistor’s source/drain and polysilicon gate through the backside of a SOI device were made. Contact resistance data was obtained by creating contacts through the buried oxide layer of a manufactured test structure. A ring oscillator circuit was modified and the shift in oscillator frequency was measured. Finally, cross section images of the FIB created contacts were presented in the paper to illustrate the entire process.

Scientific and technological bases for creation of cold-resistant steel with a guaranteed yield strength of 315–750 MPa for the Arctic. Part 2. Technology of production, structure and properties of sheet hire performance

2019 ◽  
pp. 14-41
Author(s):  
O. V. Sych
Keyword(s):  
Yield Strength ◽  
Thermomechanical Processing ◽  
The Arctic ◽  
Accelerated Cooling ◽  
Low Alloy Steels ◽  
Hot Plastic Deformation ◽  
Metal Thickness ◽  
Alloy Steels ◽  
Technology Of Production ◽  
Technological Methods

On the basis of the conducted research, a complex of scientific and technological methods has been developed for various technological processes (thermomechanical processing with accelerated cooling, quenching from rolling and separate furnace heating with high-temperature tempering). The developed method provides the formation of the structure of acceptable heterogeneity and anisotropy according to different morphological and crystallographic parameters throughout the thickness of rolled products up to 100 mm from low alloy steels with a yield strength of at least 315–460 MPa and up to 60 mm from economically alloyed steels with a yield strength of at least 500–750 MPa. The paper presents results of the industrial implementation of hot plastic deformation and heat treatment schemes for the production of cold rolled steel sheet with yield strength of at least 315–750 MPa for the Arctic. The structure of sheet metal thickness is given, providing guaranteed characteristics of strength, ductility, cold resistance, weldability and crack resistance.

A Test Structure to Characterize Nano-Scale Ohmic Contacts in III-V MOSFETs

2014 ◽  
Vol 35 (2) ◽  
pp. 178-180 ◽  
Author(s):  
Wenjie Lu ◽  
Alex Guo ◽  
Alon Vardi ◽  
Jesus A. del Alamo
Keyword(s):  
Ohmic Contacts ◽  
Test Structure ◽  
Nano Scale

Modified sliding mode control of a seismic active mass damper system considering model uncertainties and input time delay

2016 ◽  
Vol 24 (6) ◽  
pp. 1051-1064 ◽  
Author(s):  
Mehdi Soleymani ◽  
Amir Hossein Abolmasoumi ◽  
Hasanali Bahrami ◽  
Arash Khalatbari-S ◽  
Elham Khoshbin ◽  
...  
Keyword(s):  
Structural Control ◽  
Sliding Mode ◽  
Test Structure ◽  
Dynamic State ◽  
Shake Table ◽  
Model Uncertainties ◽  
Actuator Dynamics ◽  
Active Structural Control ◽  
Mass Damper ◽  
Active Mass Damper

Model uncertainties and actuator delays are two factors that degrade the performance of active structural control systems. A new robust control system is proposed for control of an active tuned mass damper (AMD) in a high-rise building. The controller comprises a two-loop sliding model controller in conjunction with a dynamic state predictor. The sliding model controller is responsible for model uncertainties and the state predictor compensates for the time delays due to actuator dynamics and process delay. A reduced model that is validated against experimental data was constructed and equipped with an electro-mechanical AMD system mounted on the top storey. The proposed controller was implemented in the test structure and its performance under seismic disturbances was simulated using a seismic shake table. Moreover, robustness of the proposed controller was examined via variation of the test structure parameters. The shake table test results reveal the effectiveness of the proposed controller at tackling the simulated disturbances in the presence of model uncertainties and input delay.

Sign in / Sign up

Export Citation Format

Share Document