A Piezoelectric Micropumping Device
Keyword(s):
A dynamic micropumping device has been developed, which is based on acoustic streaming generated by a piezoelectric microtransducer actuated in d31 mode without any check valve. Piezoelectric microtransducers immersed in liquid (water) are used as actuators due to some of their unique properties such as lower noise generation and ease of miniaturization. Quantitative results of maximum local velocity are presented for different tip configuration of the same actuator for comparison. In addition, this work also demonstrates the quantitative measures of the pumping performance such as the pressure head generated as a function of different relevant parameters such as applied electrical field, AC frequency and length of the actuator.
Keyword(s):
Keyword(s):
2019 ◽
Vol 2019
◽
pp. 1-15
◽
Keyword(s):
2002 ◽
Vol 117
(20)
◽
pp. 9452-9459
◽
1996 ◽
Vol 24
(3)
◽
pp. 430S-430S
◽
Keyword(s):
1969 ◽
Vol 184
(1)
◽
pp. 593-614
◽
Keyword(s):