Micromelting for Laser Micro Polishing of Meso/Micro Metallic Components

2007 ◽  
Author(s):  
Tyler L. Perry ◽  
Dirk Werschmoeller ◽  
Xiaochun Li ◽  
Frank E. Pfefferkorn ◽  
Neil A. Duffie
Keyword(s):  
Surface Roughness ◽  
Spatial Frequency ◽  
Surface Profile ◽  
Laser Pulses ◽  
Sample Surface ◽  
Laser Polishing ◽  
Complex Shapes ◽  
Micro Parts ◽  
Silicon Based ◽  
Underlying Processes

The relative surface accuracy (surface roughness/feature size) of meso/micro parts fabricated by emerging meso/micro manufacturing processes is generally worse than that of macro parts fabricated by conventional processes. Meso/micro parts have unique tribology issues and surface roughness strongly impacts their performance, hence there is a demand for effective polishing of their complex shapes. A laser micro polishing method based on rapid surface micromelting is described. To develop a fundamental understanding of the underlying processes, a nickel sample was fabricated using silicon-based microfabrication and electroplating techniques. Results demonstrating the effectiveness of laser polishing using a pulsed 1064 nm Nd:YAG laser are presented. These results show that brief (200–300 ns) laser pulses can significantly improve the sample surface roughness (Ra). Additionally, by examining surface profile data in the spatial frequency domain it is clear that using pulses (up to 300 ns), laser polishing can effectively remove surface roughness features greater than 200 mm−1 in spatial frequency.

Characterization of Electrical Contacts on Silicon (100) after Ablation and Sulfur Doping by Femtosecond Laser Pulses

2013 ◽  
Vol 205-206 ◽  
pp. 358-363 ◽  
Author(s):  
Philipp Saring ◽  
Anna Lena Baumann ◽  
Stefan Kontermann ◽  
Wolfgang Schade ◽  
Michael Seibt
Keyword(s):  
Surface Roughness ◽  
Femtosecond Laser ◽  
Laser Pulses ◽  
Sample Surface ◽  
Femtosecond Laser Pulses ◽  
Electrical Contacts ◽  
Single Shot ◽  
Excess Charge ◽  
Silicon Sample ◽  
Etching Depth

This paper investigates the influence of different number of laser pulses on contact behavior and conductivity of the surface layer of femtosecond laser microstructured, sulfur-doped silicon. Single shot laser processed silicon (Pink Silicon) is characterized by low surface roughness, whereas five shot laser processed silicon (Grey Silicon) has an elevated sulfur content with a surface roughness low enough to maintain good contacting. To laterally confine the laser induced pn-junction part of the Grey Silicon sample surface is etched off. The etching depth is confirmed to be sufficient to completely remove the active n-type sulfur layer. While Pink Silicon shows little or no lateral conductivity within the laser processed layer, Grey Silicon offers acceptable conductivity, just as expected by the fact of having incorporated a higher sulfur dopant content. Recombination dominates the irradiated regions of Pink Silicon and suppresses excess charge carrier collection. Grey Silicon, while showing sufficient lateral conductivity, still shows regions of lower conductivity, most likely dominated by the laser irradiation-induced formation of dislocations. According to our results, the optimum laser pulse number for electrical and structural properties is expected to be in the range between one and five laser pulses.

Examination of Selective Pulsed Laser Micropolishing on Microfabricated Nickel Samples Using Spatial Frequency Analysis

2009 ◽  
Vol 131 (2) ◽  
Author(s):  
Tyler L. Perry ◽  
Dirk Werschmoeller ◽  
Neil A. Duffie ◽  
Xiaochun Li ◽  
Frank E. Pfefferkorn
Keyword(s):  
Surface Roughness ◽  
Spatial Frequency ◽  
Critical Frequency ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Dominant Frequency ◽  
Average Surface Roughness ◽  
Experimental Conditions ◽  
Average Surface ◽  
Line Features

The precision of parts created by microfabrication processes is limited by surface roughness. Therefore, as a means of improving surface roughness, pulsed laser micropolishing on nickel was examined numerically and experimentally. A one-dimensional finite element method model was used to estimate the melt depth and duration for single 50–300 ns laser pulses. The critical frequency was introduced to predict the effectiveness of polishing in the spatial frequency domain. A 1064 nm Nd:YAG laser with 300 ns pulses was used to experimentally investigate pulsed laser polishing on microfabricated nickel samples with microscale line features. A microfabricated sample with 2.5 μm wide and 0.2 μm high lines spaced 5 μm apart and one with 5 μm wide and 0.38 μm high lines spaced 10 μm apart were polished with 300 ns long pulses of 47.2 J/cm2 and 44.1 J/cm2 fluences, respectively. The critical frequency for these experimental conditions was predicted and compared with the reduction in the average surface roughness measured for samples with two different spatial frequency contents. The average surface roughness of 5 μm and 10 μm wavelength line features were reduced from 0.112 μm to 0.015 μm and from 0.112 μm to 0.059 μm, respectively. Four regimes of pulsed laser micropolishing are identified as a function of laser fluence for a given pulse width: (1) at low fluences no polishing occurs due to insufficient melting, (2) moderate fluences allow sufficient melt time for surface wave damping and significant smoothing occurs, (3) increasing fluence reduces smoothing, and (4) high fluences cause roughening due to large recoil pressure and ablation. Significant improvements in average surface roughness can be achieved by pulsed laser micropolishing if the dominant frequency content of the original surface features is above the critical spatial frequency for polishing.

AN ADVANCED MEASUREMENT OF PADDY FIELD SURFACE ROUGHNESS BY STATIC LEVEL METHOD

2013 ◽  
Vol 83 (5) ◽  
Author(s):  
Đỗ Minh Cường ◽  
Zhu shi Hong ◽  
Nguyễn Thị Ngọc ◽  
Farman Ali Chandio
Keyword(s):  
Surface Roughness ◽  
Spatial Frequency ◽  
Paddy Field ◽  
Surface Profile ◽  
High Spatial Frequency ◽  
Roughness Coefficient ◽  
Power Spectral ◽  
Level Method ◽  
Static Level ◽  
Iso 8608

Determination of accurate paddy field surface profile has great importance to designing the paddy tractor suspension system. With this aim, a new test rig has been designed and developed to measure paddy field surface profiles using static level method (sampled interval of 200mm). The data were analyzed through Matlab/Simulink software to obtain power spectral densities (0.05-3.5c/m) of the measured profiles on a log-log scale and it was found that the amplitude variation of the power spectral density (PSD) at low spatial frequency was higher than at high spatial frequency whereas the undulation of the PSD curve was largely changed from low to high frequency with roughness coefficient of 645.06x10-6 m3/cycle and slope value of 1.2399  representing the paddy field surface roughness under class D of ISO 8608 standards. This classification has great significance in the field of tractor vibration simulation work. Keywords: Paddy field surface, Rod and Level, Static level method, ISO 8608.

Numerical and Experimental Investigation of Micromelting for Laser Micro Polishing of Meso/Micro Metallic Components

2006 ◽  
Author(s):  
Yi Qu ◽  
Hongseok Choi ◽  
Tyler Perry ◽  
Yongho Jeon ◽  
Frank Pfefferkorn ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Analytical Modeling ◽  
Relative Accuracy ◽  
High Demand ◽  
Complex Shapes ◽  
Fundamental Understanding ◽  
Micro Parts ◽  
Power Limit ◽  
And Performance ◽  
Metallic Parts

The relative accuracy (accuracy/overall dimension) of meso/micro parts (e.g. dies/molds) generally is far worse than that of macro parts fabricated by conventional manufacturing processes. Meso/micro parts have unique tribology issues, and surface roughness strongly impacts their relative accuracy and performance. There is a high demand for effective polishing of complex shapes in meso/micro engineering. A laser micro polishing method based on rapid surface micro melting is described in this paper. Fundamental understanding of pulse laser micro melting is achieved through a combination of studies of analytical modeling, numerical simulation and experimentation. It is found that a power limit window exists for laser polishing. In the experimental study, a Nd:YAG laser with a wavelength of 355 nm and a pulse of 10 ns is used to polish patterned electroplated nickel surfaces. The experiments show an improvement of surface roughness with repetitive rapid micro melting. These preliminary results show improved surface roughness can be achieved and that laser micro polishing is a viable methodology for automated polishing of 3-D meso/micro complex surfaces of metallic parts.

The Effect of Laser Pulse Duration and Feed Rate on Pulsed Laser Polishing of Microfabricated Nickel Samples

2009 ◽  
Vol 131 (3) ◽  
Author(s):  
Tyler L. Perry ◽  
Dirk Werschmoeller ◽  
Xiaochun Li ◽  
Frank E. Pfefferkorn ◽  
Neil A. Duffie
Keyword(s):  
Surface Roughness ◽  
Laser Pulse ◽  
Feed Rate ◽  
Yttrium Aluminum Garnet ◽  
Pulse Length ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Sample Surface ◽  
Workpiece Surface ◽  
A Minor

The objective of this work was to improve our understanding of pulsed laser micropolishing (PLμP) by studying the effects of laser pulse length and feed rate (pulses per millimeter) on surface roughness. PLμP experiments were conducted with a multimode neodymium-doped yttrium aluminum garnet (Nd:YAG) laser (1064 nm wavelength) that was focused down to approximately 50 μm diameter and scanned over the stationary workpiece surface. Simulation results presented here and previous work suggest that longer laser pulses result in smoother surfaces. Results on microfabricated nickel samples using laser pulse durations of 300 ns and 650 ns test this hypothesis. Polishing with 300 ns and 650 ns pulse durations results in an average surface roughness of 66 nm and 47 nm, respectively; reductions of 30% and 50% compared with the original surface. Furthermore, PLμP is shown to introduce a minor artifact on the sample surface whose spatial frequency (1/mm) is directly related to the laser feed rate (pulses/mm).

scholarly journals Mechanical Characterization and Thermodynamic Analysis of Laser-Polished Landscape Design Products Using 3D Printing

Materials ◽  
2021 ◽  
Vol 14 (10) ◽  
pp. 2601
Author(s):  
Yue Ba ◽  
Yu Wen ◽  
Shibin Wu
Keyword(s):  
Surface Roughness ◽  
3D Printing ◽  
Fused Deposition Modeling ◽  
High Surface ◽  
Landscape Design ◽  
Laser Polishing ◽  
Fused Deposition ◽  
Design Structure ◽  
3D Printed ◽  
Stability And Accuracy

Recent innovations in 3D printing technologies and processes have influenced how landscape products are designed, built, and developed. In landscape architecture, reduced-size models are 3D-printed to replicate full-size structures. However, high surface roughness usually occurs on the surfaces of such 3D-printed components, which requires additional post-treatment. In this work, we develop a new type of landscape design structure based on the fused deposition modeling (FDM) technique and present a laser polishing method for FDM-fabricated polylactic acid (PLA) mechanical components, whereby the surface roughness of the laser-polished surfaces is reduced from over Ra 15 µm to less than 0.25 µm. The detailed results of thermodynamics and microstructure evolution are further analyzed during laser polishing. The stability and accuracy of the results are evaluated based on the standard deviation. Additionally, the superior tensile and flexural properties are examined in the laser-polished layer, in which the ultimate tensile strength (UTS) is increased by up to 46.6% and the flexural strength is increased by up to 74.5% compared with the as-fabricated components. Finally, a real polished landscape model is simulated and optimized using a series of scales.

scholarly journals Investigation of Two-Dimensional Ultrasonic Surface Burnishing Process on 7075-T6 Aluminum

2021 ◽  
Vol 34 (1) ◽  
Author(s):  
Zhenyu Zhou ◽  
Qiuyang Zheng ◽  
Cong Ding ◽  
Guanglei Yu ◽  
Guangjian Peng ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Parameter Optimization ◽  
Wear Mechanism ◽  
Feed Rate ◽  
Sample Surface ◽  
Original Sample ◽  
Two Dimensional ◽  
Delamination Wear ◽  
Treated Sample ◽  
Burnishing Process

AbstractA novel two-dimensional ultrasonic surface burnishing process (2D-USBP) is proposed. 7075-T6 aluminum samples are processed by a custom-designed 2D-USBP setup. Parameter optimization of 2D-USBP is conducted to determine the best processing strategy of 7075-T6 aluminum. A uniform design method is utilized to optimize the 2D-USBP process. U13(133) and U7(72) tables are established to conduct parameter optimization. Burnishing depth, spindle speed, and feed rate are taken as the control parameters. The surface roughness and Vickers hardness are taken as the evaluation indicators. It establishes the active control models for surface quality. Dry wear tests are conducted to compare the wear-resistance of the 2D-USBP treated sample and the original sample. Results show that the machining quality of 2D-USBP is best under 0.24 mm burnishing depth, 5000 r/min spindle speed, and 25 mm/min feed rate. The surface roughness Sa of the sample is reduced from 2517.758 to 50.878 nm, and the hardness of the sample surface is improved from 167 to 252 HV. Under the lower load, the wear mechanism of the 2D-USBP treated sample is mainly abrasive wear accompanied by delamination wear, while the wear mechanism of the original sample is mainly delamination wear. Under the higher load, the accumulation of frictional heat on the sample surface transforms the wear mechanisms of the original and the 2D-USBP treated samples into thermal wear.

scholarly journals High-quality net shape geometries from additively manufactured parts using closed-loop controlled ablation with ultrashort laser pulses

2020 ◽  
Vol 9 (1-2) ◽  
pp. 101-110 ◽  
Author(s):  
Daniel Holder ◽  
Artur Leis ◽  
Matthias Buser ◽  
Rudolf Weber ◽  
Thomas Graf
Keyword(s):  
Surface Roughness ◽  
Closed Loop ◽  
High Surface ◽  
Laser Pulses ◽  
Ultrashort Laser Pulses ◽  
Minimum Thickness ◽  
High Quality ◽  
Surface Optical ◽  
The Individual ◽  
Ultrashort Laser

AbstractAdditively manufactured parts typically deviate to some extent from the targeted net shape and exhibit high surface roughness due to the size of the powder grains that determines the minimum thickness of the individual slices and due to partially molten powder grains adhering on the surface. Optical coherence tomography (OCT)-based measurements and closed-loop controlled ablation with ultrashort laser pulses were utilized for the precise positioning of the LPBF-generated aluminum parts and for post-processing by selective laser ablation of the excessive material. As a result, high-quality net shape geometries were achieved with surface roughness, and deviation from the targeted net shape geometry reduced by 67% and 63%, respectively.

Fundamental Study on Laser Interactions With Nanoparticles-Reinforced Metals—Part II: Effect of Nanoparticles on Surface Tension, Viscosity, and Laser Melting

2016 ◽  
Vol 138 (12) ◽  
Author(s):  
Chao Ma ◽  
Jingzhou Zhao ◽  
Chezheng Cao ◽  
Ting-Chiang Lin ◽  
Xiaochun Li
Keyword(s):  
Surface Tension ◽  
Surface Roughness ◽  
Thermophysical Properties ◽  
Melting Process ◽  
Laser Melting ◽  
Fundamental Study ◽  
Laser Polishing ◽  
Laser Manufacturing ◽  
Manufacturing Technologies ◽  
Laser Interactions

It is of great scientific and technical interests to conduct fundamental studies on the laser interactions with nanoparticles-reinforced metals. This part of the study presents the effects of nanoparticles on surface tension and viscosity, thus the heat transfer and fluid flow, and eventually the laser melting process. In order to determine the surface tension and viscosity of nanoparticles-reinforced metals, an innovative measurement system was developed based on the characteristics of oscillating metal melt drops after laser melting. The surface tensions of Ni/Al2O3 (4.4 vol. %) and Ni/SiC (3.6 vol. %) at ∼1500 °C were 1.39 ± 0.03 N/m and 1.57 ± 0.06 N/m, respectively, slightly lower than that of pure Ni, 1.68 ± 0.04 N/m. The viscosities of these Ni/Al2O3 and Ni/SiC MMNCs at ∼1500 °C were 13.3 ± 0.8 mPa·s and 17.3 ± 3.1 mPa·s, respectively, significantly higher than that of pure Ni, 4.8 ± 0.3 mPa·s. To understand the influences of the nanoparticles-modified thermophysical properties on laser melting, an analytical model was used to theoretically predict the melt pool flows using the newly measured material properties from both Part I and Part II. The theoretical analysis indicated that the thermocapillary flows were tremendously suppressed due to the significantly increased viscosity after the addition of nanoparticles. To test the hypothesis that laser polishing could significantly benefit from this new phenomenon, systematic laser polishing experiments at various laser pulse energies were conducted on Ni/Al2O3 (4.4 vol. %) and pure Ni for comparison. The surface roughness of the Ni/Al2O3 was reduced from 323 nm to 72 nm with optimized laser polishing parameters while that of pure Ni only from 254 nm to 107 nm. The normalized surface roughness reduced by nearly a factor of two with the help of nanoparticles, validating the feasibility to tune thermophysical properties and thus control laser-processing outcomes by nanoparticles. It is expected that the nanoparticle approach can be applied to many laser manufacturing technologies to improve the process capability and broaden the application space.

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