A One-Micrometer Channel Length α-Si Thin-Film Field-Effect Transistor
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ABSTRACTA new method of fabricating short channel α-Si TFTs has been developed. One-micrometer channel length α-Si thin-film field effect transistors have been fabricated and tested. Threshold voltages as low as 1.9V and field-effect mobilities as high as 1 cm 2/V-sec are reported. These devices were fabricated by techniques compatible with the production of large area liquid crystal displays.
2011 ◽
Vol 181-182
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pp. 343-348
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2008 ◽
Vol 80
(11)
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pp. 2231-2240
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1971 ◽
Vol 14
(12)
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pp. 1307-1317
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