IIIB- Nitride Semiconductors for High Temperature Electronic Applications
Keyword(s):
X Ray
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ABSTRACTThin films of ScN and YN were grown on silicon, quartz and sapphire using metal evaporation and an RF atomic nitrogen source. YN decomposes on contact with water vapor, and only AlN capped films could be stabilized. ScN is stable in air and water, and thin films of this material deposited at temperatures between 300 and 900 °C show a substrate-dependent film texture. Typical growth rates were ∼ 0.1 nm/second with a 300W N discharge at about 0.1 mTorr Nitrogen pressure. Structural characterization by x-ray diffraction, infrared transmission spectroscopy and Hall effect measurements on n-type ScN and the fabrication of p-n junctions of n- type ScN with silicon are presented.