Radiation Damage in 4H-SiC and its Effect on Power Device Characteristics

2015 ◽  
Vol 242 ◽  
pp. 421-426 ◽  
Author(s):  
Pavel Hazdra ◽  
Stanislav Popelka ◽  
Vít Záhlava ◽  
Jan Vobecký

The effect of neutron, electron and ion irradiation on electrical characteristics of unipolar 1700V SiC power devices (JBS diodes, JFETs and MESFETs) was investigated. DLTS investigation showed that above mentioned projectiles introduce similar deep acceptor levels (electron traps) in the SiC bandgap which compensate nitrogen shallow donors and cause majority carrier (electron) removal. The key degradation effect occurring in irradiated devices is the increase of the ON-state resistance which is caused by compensation of the low doped n-type epilayer and simultaneous lowering of electron mobility. In the case of SiC power switches (JFET, MOSFET), these effects are accompanied by the shift of the threshold voltage. Radiation defects introduced in SiC power devices is unstable and some defects anneal out already at operation temperatures (below 175°C). However, this does not have significant effect on device characteristics.

2015 ◽  
Vol 821-823 ◽  
pp. 785-788 ◽  
Author(s):  
Pavel Hazdra ◽  
Stanislav Popelka ◽  
Vít Zahlava

Commercial 1200V and 1700V MPS diodes and 1700V vertical JFETs produced on 4H-SiC n-type epilayers were neutron irradiated with fluences up to 4x1014 cm-2 (1 MeV neutron equivalent Si). Radiation defects and their effect on carrier removal were investigated by capacitance deep-level transient spectroscopy, I-V and C-V measurement. Results show that neutron irradiation introduces different point defects giving rise to deep acceptor levels which compensate nitrogen doping of the epilayer. The carrier removal rate increases linearly with nitrogen doping. Introduced defects deteriorate ON-state characteristics of irradiated devices while their effect on blocking characteristics is negligible. The effect of neutron irradiation can be simulated by TCAD tools using a simple model accounting for introduction of one dominant deep level (Z1/Z2 centre).


2018 ◽  
Vol 924 ◽  
pp. 137-142 ◽  
Author(s):  
Edward van Brunt ◽  
Albert Burk ◽  
Daniel J. Lichtenwalner ◽  
Robert Leonard ◽  
Shadi Sabri ◽  
...  

This work explores the effects of extended epitaxial defects on 4H-SiC power devices. Advanced defect mapping techniques were used on large quantities of power device wafers, and data was aggregated to correlate device electrical characteristics to defect content. 1200 V class Junction Barrier Schottky (JBS) diodes and MOSFETs were examined in this manner; higher voltage 3.3 kV class devices were examined as well. 3C inclusions and triangular defects, as well as heavily decorated substrate scratches, were found to be device killing defects. Other defects were found to have negligible impacts on device yield, even in the case of extremely high threading dislocation content. Defect impacts on device reliability was explored on MOS-gate structures, as well as long-term device blocking tests on both MOSFETs and JBS diodes. Devices that passed on-wafer electrical parametric tests were found to operate reliably in these tests, regardless of defect content.


2008 ◽  
Vol 600-603 ◽  
pp. 895-900 ◽  
Author(s):  
Anant K. Agarwal ◽  
Albert A. Burk ◽  
Robert Callanan ◽  
Craig Capell ◽  
Mrinal K. Das ◽  
...  

In this paper, we review the state of the art of SiC switches and the technical issues which remain. Specifically, we will review the progress and remaining challenges associated with SiC power MOSFETs and BJTs. The most difficult issue when fabricating MOSFETs has been an excessive variation in threshold voltage from batch to batch. This difficulty arises due to the fact that the threshold voltage is determined by the difference between two large numbers, namely, a large fixed oxide charge and a large negative charge in the interface traps. There may also be some significant charge captured in the bulk traps in SiC and SiO2. The effect of recombination-induced stacking faults (SFs) on majority carrier mobility has been confirmed with 10 kV Merged PN Schottky (MPS) diodes and MOSFETs. The same SFs have been found to be responsible for degradation of BJTs.


2013 ◽  
Vol 205-206 ◽  
pp. 451-456 ◽  
Author(s):  
Pavel Hazdra ◽  
Vít Záhlava ◽  
Jan Vobecký

Electronic properties of radiation damage produced in 4H-SiC by electron irradiation and its effect on electrical parameters of Junction Barrier Schottky (JBS) diodes were investigated. 4H‑SiC N‑epilayers, which formed the low‑doped N-base of JBS power diodes, were irradiated with 4.5 MeV electrons with fluences ranging from 1.5x1014 to 5x1015 cm-2. Radiation defects were then characterized by capacitance deep-level transient spectroscopy and C-V measurement. Results show that electron irradiation introduces two defect centers giving rise to acceptor levels at EC‑0.39 and EC‑0.60 eV. Introduction rate of these centers is 0.24 and 0.65 cm‑1, respectively. These radiation defects have a negligible effect on blocking and dynamic characteristics of irradiated diodes, however, the acceptor character of introduced deep levels and their high introduction rates deteriorate diode’s ON-state resistance already at fluences higher than 1x1015 cm‑2.


Author(s):  
Yousif Atalla ◽  
Yasir Hashim ◽  
Abdul Nasir Abd. Ghafar

<span>This paper studies the impact of fin width of channel on temperature and electrical characteristics of fin field-effect transistor (FinFET). The simulation tool multi-gate field effect transistor (MuGFET) has been used to examine the FinFET characteristics. Transfer characteristics with various temperatures and channel fin width (W<sub>F</sub>=5, 10, 20, 40, and 80 nm) are at first simulated in this study. The results show that the increasing of environmental temperature tends to increase threshold voltage, while the subthreshold swing (SS) and drain-induced barrier lowering (DIBL) rise with rising working temperature. Also, the threshold voltage decreases with increasing channel fin width of transistor, while the SS and DIBL increase with increasing channel fin width of transistor, at minimum channel fin width, the SS is very near to the best and ideal then its value grows and going far from the ideal value with increasing channel fin width. So, according to these conditions, the minimum value as possible of fin width is the preferable one for FinFET with better electrical characteristics.</span>


1997 ◽  
Vol 483 ◽  
Author(s):  
T. P. Chow ◽  
N. Ramungul ◽  
M. Ghezzo

AbstractThe present status of high-voltage power semiconductor switching devices is reviewed. The choice and design of device structures are presented. The simulated performance of the key devices in 4H-SiC is described. The progress in high-voltage power device experimental demonstration is described. The material and process technology issues that need to be addressed for device commercialization are discussed.


2020 ◽  
Vol 2020 (1) ◽  
pp. 000078-000084
Author(s):  
Hao Zhuang ◽  
Robert Bauer ◽  
Markus Dinkel

Abstract In the power semiconductor industry, there is continuous development towards higher maximum current capability of devices while device dimensions shrink. This leads to an increase in current density which the devices have to handle, and raises the question if electromigration (EM) is a critical issue here. Generally, an EM failure can be described by the Black’s equation with temperature and current density as the main influencing factors. Normally, the current that the power packages need to handle lies in the range of 100 A. However, it should be noted that power devices exhibit asymmetric sizes of drain and source contacts. This may lead to higher current density at the source leads (area ratio drain/source: ~8x for QFN 5×6). Nevertheless, the source lead area is still much larger than that of the flip chip bumps (i.e., 28 times larger compared to a 100 μm micro-bump). This typically enhances the safety of the power device with respect to EM. However, with regard to future development towards higher maximum current capability, we intended to investigate further on the EM of power devices. In the present work, we focused on the PQFN 5×6 package to study the EM behavior of a power device soldered on a Printed Circuit Board (PCB). We employed the highest current (120 A) and temperature (150 °C) that the stress test system could handle to study EM in accelerated mode. First fails occurred after ~1200 h, which was much earlier than expected from previous flip-chip investigations. In addition, we found separation gaps in the solder joint between drain contact and PCB, which experienced the lowest current density in the whole test. Contradictorily, we observed only minor solder degradation at the source interface, regardless of the higher current density there. Nevertheless, the separating metal interfaces still correlated well with the current direction. Thermal simulations revealed that due to the self-heating of the device by the high current applied, both the drain and source leads were exposed to much higher temperatures (Tmax = 168 °C) than the PCB board which was kept under temperature control at 150 °C. This temperature difference resulted in a thermal gradient between the device and PCB which, in turn, triggered thermal migration (TM) in addition to EM. As TM for the drain contact occurred in the same direction as EM, it enhanced the degradation effect and therefore led to a shorter time-to-failure at the drain. In contrast to this, such an enhanced effect did not occur at the source side. As a result, we observed higher solder degradation at the drain side, which we did confirm by switching the current direction in the test. To minimize the TM effect, a special EM test vehicle, which used a Cu plate instead of the MOSFET chip, was designed and fabricated. Thermal simulation verified that the device operated at similar temperatures as the PCB board. Using this setup, it was possible to study EM in an accelerated mode and, thus, investigate the pure EM behavior of the power device.


2015 ◽  
Vol 821-823 ◽  
pp. 681-684
Author(s):  
Dean Hamilton ◽  
M. Jennings ◽  
Stephen York ◽  
Steven A. Hindmarsh ◽  
Y. Sharma ◽  
...  

In this paper, we demonstrate the degradation of commercially available 1.2kV SiC MOSFET bare dies subjected to long periods of isothermal heating at 300°C in air. Periodic electrical measurements indicated an increase in on-state resistance to different extents for three different vendor designs, and the discovery of a progressive rectifying type forward characteristic at low drain-source voltages. Subsequent investigations to determine the cause of the degraded electrical characteristics including sectioning and SEM/TEM analysis revealed some mechanical degradation within the device gate-source cross-sections and backside drain contact metal layers. While one vendor device was severely degraded after approximately 24 hours of heating, another vendor device was only just beginning to degrade after 100 hours, indicating that these devices may be used successfully in real applications at 300°C junction temperatures for relatively long periods.


2014 ◽  
Vol 778-780 ◽  
pp. 1122-1125 ◽  
Author(s):  
Thibaut Chailloux ◽  
Cyril Calvez ◽  
Nicolas Thierry-Jebali ◽  
Dominique Planson ◽  
Dominique Tournier

The aim of this study consists in comparing the effects of temperature on various SiC power devices. Electrical characteristics have been measured for temperatures from 100K to 525K. All devices are suitable for high temperature. However, SiC MOSFETs are not a good choice for cryogenic temperature, while SiC BJTs are less affected by temperature than other components, especially for cryogenic temperature.


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