Electrical activation of arsenic implanted in silicon on insulator (SOI)
2007 ◽
Vol 40
(17)
◽
pp. 5227-5231
◽
2004 ◽
Vol 114-115
◽
pp. 260-263
◽
Keyword(s):
1986 ◽
Vol 44
◽
pp. 736-737
Keyword(s):
1995 ◽
Vol 53
◽
pp. 232-233
1985 ◽
Vol 43
◽
pp. 300-301
1994 ◽
Vol 52
◽
pp. 860-861
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605
1990 ◽
Vol 48
(4)
◽
pp. 576-577
Keyword(s):