scholarly journals Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems

Sensor Review ◽  
2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Sudarsana Jena ◽  
Ankur Gupta

Purpose Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state-of-the-art gist to the researchers of the similar domain at one place. Design/methodology/approach Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is MEMS pressure sensor. Because of their high performance, low cost and compact in size, these sensors are extensively being adopted in numerous applications, namely, aerospace, automobile and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurement as per the application requirements. Findings The paper provides a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state of the art gist to the researchers of the similar domain at one place. Originality/value The present paper discusses the basics of MEMS pressure sensors, their working principles, different design aspects, classification, type of sensing diaphragm used and illustration of various transduction mechanisms. Moreover, this paper presents a comprehensive review on present trend of research on MEMS-based pressure sensors, its applications and the research gap observed till date along with the scope for future work, which has not been discussed in earlier reviews.

2021 ◽  
Author(s):  
Ankur Gupta

Swiftly emerging research prospects in the Micro-Electro-Mechanical System (MEMS) enable to build of complex and sophisticated microstructures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators, and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is the MEMS pressure sensor. Because of their high performance, low cost, and compact size, these sensors are extensively being adopted in numerous applications viz., aerospace, automobile, and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurements as per the application requirements. Considering its vast utility in industries, this paper presents a detailed review of MEMS-based pressure sensors and their wide area of applications, their design aspects, and challenges, to provide state of an art gist to the researchers of a similar domain in one place.


2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Erfan Rezvani Ghomi ◽  
Saeideh Kholghi Eshkalak ◽  
Sunpreet Singh ◽  
Amutha Chinnappan ◽  
Seeram Ramakrishna ◽  
...  

Purpose The potential implications of the three-dimensional printing (3DP) technology are growing enormously in the various health-care sectors, including surgical planning, manufacturing of patient-specific implants and developing anatomical models. Although a wide range of thermoplastic polymers are available as 3DP feedstock, yet obtaining biocompatible and structurally integrated biomedical devices is still challenging owing to various technical issues. Design/methodology/approach Polyether ether ketone (PEEK) is an organic and biocompatible compound material that is recently being used to fabricate complex design geometries and patient-specific implants through 3DP. However, the thermal and rheological features of PEEK make it difficult to process through the 3DP technologies, for instance, fused filament fabrication. The present review paper presents a state-of-the-art literature review of the 3DP of PEEK for potential biomedical applications. In particular, a special emphasis has been given on the existing technical hurdles and possible technological and processing solutions for improving the printability of PEEK. Findings The reviewed literature highlighted that there exist numerous scientific and technical means which can be adopted for improving the quality features of the 3D-printed PEEK-based biomedical structures. The discussed technological innovations will help the 3DP system to enhance the layer adhesion strength, structural stability, as well as enable the printing of high-performance thermoplastics. Originality/value The content of the present manuscript will motivate young scholars and senior scientists to work in exploring high-performance thermoplastics for 3DP applications.


Polymers ◽  
2021 ◽  
Vol 13 (20) ◽  
pp. 3465
Author(s):  
Jianli Cui ◽  
Xueli Nan ◽  
Guirong Shao ◽  
Huixia Sun

Researchers are showing an increasing interest in high-performance flexible pressure sensors owing to their potential uses in wearable electronics, bionic skin, and human–machine interactions, etc. However, the vast majority of these flexible pressure sensors require extensive nano-architectural design, which both complicates their manufacturing and is time-consuming. Thus, a low-cost technology which can be applied on a large scale is highly desirable for the manufacture of flexible pressure-sensitive materials that have a high sensitivity over a wide range of pressures. This work is based on the use of a three-dimensional elastic porous carbon nanotubes (CNTs) sponge as the conductive layer to fabricate a novel flexible piezoresistive sensor. The synthesis of a CNTs sponge was achieved by chemical vapor deposition, the basic underlying principle governing the sensing behavior of the CNTs sponge-based pressure sensor and was illustrated by employing in situ scanning electron microscopy. The CNTs sponge-based sensor has a quick response time of ~105 ms, a high sensitivity extending across a broad pressure range (less than 10 kPa for 809 kPa−1) and possesses an outstanding permanence over 4,000 cycles. Furthermore, a 16-pixel wireless sensor system was designed and a series of applications have been demonstrated. Its potential applications in the visualizing pressure distribution and an example of human–machine communication were also demonstrated.


Materials ◽  
2020 ◽  
Vol 14 (1) ◽  
pp. 37
Author(s):  
Mayra K. S. Monteiro ◽  
Djalma R. Da Silva ◽  
Marco A. Quiroz ◽  
Vítor J. P. Vilar ◽  
Carlos A. Martínez-Huitle ◽  
...  

This study aims to investigate the applicability of a hybrid electrochemical sensor composed of cork and graphite (Gr) for detecting caffeine in aqueous solutions. Raw cork (RAC) and regranulated cork (RGC, obtained by thermal treatment of RAC with steam at 380 °C) were tested as modifiers. The results clearly showed that the cork-graphite sensors, GrRAC and GrRGC, exhibited a linear response over a wide range of caffeine concentration (5–1000 µM), with R2 of 0.99 and 0.98, respectively. The limits of detection (LOD), estimated at 2.9 and 6.1 µM for GrRAC and GrRGC, suggest greater sensitivity and reproducibility than the unmodified conventional graphite sensor. The low-cost cork-graphite sensors were successfully applied in the determination of caffeine in soft drinks and pharmaceutical formulations, presenting well-defined current signals when analyzing real samples. When comparing electrochemical determinations and high performance liquid chromatography measurements, no significant differences were observed (mean accuracy 3.0%), highlighting the potential use of these sensors to determine caffeine in different samples.


2021 ◽  
Vol 11 (10) ◽  
pp. 4610
Author(s):  
Simone Berneschi ◽  
Giancarlo C. Righini ◽  
Stefano Pelli

Glasses, in their different forms and compositions, have special properties that are not found in other materials. The combination of transparency and hardness at room temperature, combined with a suitable mechanical strength and excellent chemical durability, makes this material indispensable for many applications in different technological fields (as, for instance, the optical fibres which constitute the physical carrier for high-speed communication networks as well as the transducer for a wide range of high-performance sensors). For its part, ion-exchange from molten salts is a well-established, low-cost technology capable of modifying the chemical-physical properties of glass. The synergy between ion-exchange and glass has always been a happy marriage, from its ancient historical background for the realisation of wonderful artefacts, to the discovery of novel and fascinating solutions for modern technology (e.g., integrated optics). Getting inspiration from some hot topics related to the application context of this technique, the goal of this critical review is to show how ion-exchange in glass, far from being an obsolete process, can still have an important impact in everyday life, both at a merely commercial level as well as at that of frontier research.


Separations ◽  
2021 ◽  
Vol 8 (2) ◽  
pp. 13
Author(s):  
Petra Ranušová ◽  
Ildikó Matušíková ◽  
Peter Nemeček

A solid-phase extraction (SPE) procedure was developed for simultaneous monitoring of sixteen different phenolics of various polarity, quantified by high-performance liquid chromatography (HPLC). The procedure allowed screening the accumulation of intermediates in different metabolic pathways that play a crucial role in plant physiology and/or are beneficial for human health. Metabolites mostly involved in phenylpropanoid, shikimate, and polyketide pathways comprise chlorogenic acid, gentisic acid, vanillic acid, caffeic acid, protocatechuic acid, ferulic acid, rutin, quercetin, epicatechin, gallic acid, sinapic acid, p-coumaric acid, o-coumaric acid, vanillin; two rarely quantified metabolites, 2,5-dimethoxybenzoic acid and 4-methoxycinnamic acid, were included as well. The procedure offered low cost, good overall efficiency, and applicability in laboratories with standard laboratory equipment. SPE recoveries were up to 99.8% at various concentration levels. The method allowed for routine analysis of compounds with a wide range of polarity within a single run, while its applicability was demonstrated for various model plant species (tobacco, wheat, and soybean), as well as different tissue types (shoots and roots).


2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Max Huber ◽  
Andreas Zienert ◽  
Perez Weigel ◽  
Martin Schüller ◽  
Hans-Reinhard Berger ◽  
...  

Purpose The purpose of this paper is to analyze and optimize synthetic jet actuators (SJAs) by means of a literature-known one-dimensional analytical model. Design/methodology/approach The model was fit to a wide range of experimental data from in-house built SJAs with different dimensions. A comprehensive parameter study was performed to identify coupling between parameters of the model and to find optimal dimensions of SJAs. Findings The coupling of two important parameters, the diaphragm resonance frequency and the cavity volume, can be described by a power law. Optimal orifice length and diameter can be calculated from cavity height in good agreement with literature. A transient oscillation correction is required to get correct simulation outcomes. Originality/value Based on these findings, SJA devices can be optimized for maximum jet velocity and, therefore, high performance.


2019 ◽  
Vol 16 (3) ◽  
pp. 117-123
Author(s):  
Tsung-Ching Huang ◽  
Ting Lei ◽  
Leilai Shao ◽  
Sridhar Sivapurapu ◽  
Madhavan Swaminathan ◽  
...  

Abstract High-performance low-cost flexible hybrid electronics (FHE) are desirable for applications such as internet of things and wearable electronics. Carbon nanotube (CNT) thin-film transistor (TFT) is a promising candidate for high-performance FHE because of its high carrier mobility, superior mechanical flexibility, and material compatibility with low-cost printing and solution processes. Flexible sensors and peripheral CNT-TFT circuits, such as decoders, drivers, and sense amplifiers, can be printed and hybrid-integrated with thinned (<50 μm) silicon chips on soft, thin, and flexible substrates for a wide range of applications, from flexible displays to wearable medical devices. Here, we report (1) a process design kit (PDK) to enable FHE design automation for large-scale FHE circuits and (2) solution process-proven intellectual property blocks for TFT circuits design, including Pseudo-Complementary Metal-Oxide-Semiconductor (Pseudo-CMOS) flexible digital logic and analog amplifiers. The FHE-PDK is fully compatible with popular silicon design tools for design and simulation of hybrid-integrated flexible circuits.


Author(s):  
Raquel Pinto ◽  
André Cardoso ◽  
Sara Ribeiro ◽  
Carlos Brandão ◽  
João Gaspar ◽  
...  

Microelectromechanical Systems (MEMS) are a fast growing technology for sensor and actuator miniaturization finding more and more commercial opportunities by having an important role in the field of Internet of Things (IoT). On the same note, Fan-out Wafer Level Packaging (FOWLP), namely WLFO technology of NANIUM, which is based on Infineon/ Intel eWLB technology, is also finding further applications, not only due to its high performance, low cost, high flexibility, but also due to its versatility to allow the integration of different types of components in the same small form-factor package. Despite its great potential it is still off limits to the more sensitive components as micro-mechanical devices and some type of sensors, which are vulnerable to temperature and pressure. In the interest of increasing FOWLP versatility and enabling the integration of MEMS, new methods of assembling and processing are continuously searched for. Dielectrics currently used for redistribution layer construction need to be cured at temperatures above 200°C, making it one of the major boundary for low temperature processing. In addition, in order to accomplish a wide range of dielectric thicknesses in the same package it is often necessary to stack very different types of dielectrics with impact on bill of materials complexity and cost. In this work, done in cooperation with the International Iberian Nanotechnology Laboratory (INL), we describe the implementation of commercially available SU-8 photoresist as a structural material in FOWLP, allowing lower processing temperature and reduced internal package stress, thus enabling the integration of components such as MEMS/MOEMS, magneto-resistive devices and micro-batteries. While SU-8 photoresist was first designed for the microelectronics industry, it is currently highly used in the fabrication of microfluidics as well as microelectromechanical systems (MEMS) and BIO-MEMS due to its high biocompatibility and wide range of available thicknesses in the same product family. Its good thermal and chemical resistance and also mechanical and rheological properties, make it suitable to be used as a structural material, and moreover it cures at 150°C, which is key for the applications targeted. Unprecedentedly, SU-8 photoresist is tested in this work as a structural dielectric for the redistribution layers on 300mm fan-out wafers. Main concerns during the evaluation of the new WLFO dielectric focused on processability quality; adhesion to multi-material substrate and metals (copper, aluminium, gold, ¦); between layers of very different thicknesses; and overall reliability. During preliminary runs, processability on 300 mm fan-out wafers was evaluated by testing different coating and soft bake conditions, exposure settings, post-exposure parameters, up to developing setup. The outputs are not only on process conditions and results but also on WLFO design rules. For the first time, a set of conditions has been defined that allows processing SU-8 on WLFO, with thickness values ranging from 1 um to 150 um. The introduction of SU-8 in WLFO is a breakthrough in this fast-growing advanced packaging technology platform as it opens vast opportunities for sensor integration in WLP technology.


Sensor Review ◽  
2016 ◽  
Vol 36 (2) ◽  
pp. 158-168 ◽  
Author(s):  
Drew van der Riet ◽  
Riaan Stopforth ◽  
Glen Bright ◽  
Olaf Diegel

Purpose This paper aims to explore the electronic design of the Touch Hand: a low-cost electrically powered prosthetic hand. The hand is equipped with an array of sensors allowing for position control and haptic sensation. Pressure sensors are used on the fingertips to detect grip force. A temperature sensor placed in the fingertip is used to measure the contact temperature of objects. Investigations are made into the use of cantilever vibration sensors to detect surface texture and object slippage. The hand is capable of performing a lateral grip of 3.7 N, a power grip of 19.5 N and to passively hold a weight of up to 8 kg with a hook grip. The hand is also tested on an amputee and used to perform basic tasks. The amputee took 30 min to learn how to operate the hands basic gripping functions. Design/methodology/approach Problems of previous prosthetic hands were investigated, followed by ways to improve or have similar capabilities, yet keeping in mind to reduce the price. The hand was then designed, simulated, developed and then tested. The hand was then displayed to public and tested with an amputee. Findings The Touch Hand’s capabilities with the usage of the low-cost materials, components and sensory system was obtained in the tests that were conducted. The results are shown in this paper to identify the appropriateness of the sensors for a usage while the costs are reduced. Furthermore, models were developed from the results obtained to take into account factors such as the non-slip material. Research limitations/implications The research was restricted to a US$1,000 budget to allow the availability of a low-cost prosthetic hand. Practical implications The Touch Hand had to have the ability to supply the amputee with haptic feedback while allowing the basic grasping of objects. The commercial value is the availability of an affordable prosthetic hand that can be used by amputees in Africa and other Lower-Income countries, yet allowing a more advanced control system compared to the pure mechanical systems currently available. Social implications The Touch Hand has the ability to give amputees affected in war situations the ability to grasp objects in a more affordable manner compared to the current available options. Feedback from amputees about the current features of the Touch Hand was very positive and it proves to be a way to improve society in Lower-Income countries in the near future. A sponsorship program is being developed to assist amputees with the costs of the Touch Hand. Originality/value The contributions of this research is a low-cost prototype system than can be commercialized to allow amputees in the Lower-Income countries to have the ability of a prosthetic hand. A sensory system in the hand is also explained which other low-cost prosthetic hands do not have, which includes temperature, force and vibration. Models of the sensors used that are developed and calibrated to the design of the hand are also described.


Sign in / Sign up

Export Citation Format

Share Document