Bed of Nails: Fine Pitch Wafer-level Packaging Interconnects for High Performance Nano Devices

2006 ◽  
Author(s):  
Vempati Srinivasa Rao ◽  
V. Kripesh ◽  
Seung Wook Yoon ◽  
D. Witarsa ◽  
A.A.O. Tay
Keyword(s):  
High Performance ◽  
Wafer Level ◽  
Wafer Level Packaging ◽  
Fine Pitch

Fine Pitch(40μm) Integration Platform for Flexible Hybrid Electronics using Fan-Out Wafer-level Packaging

2018 ◽  
Vol 2018 (1) ◽  
pp. 000064-000068
Author(s):  
Amir Hanna ◽  
Arsalan Alam ◽  
G. Ezhilarasu ◽  
Subramanian S. Iyer
Keyword(s):  
High Performance ◽  
Metal Films ◽  
Heterogeneous Integration ◽  
Wafer Level ◽  
Integration Platform ◽  
Wafer Level Packaging ◽  
Fine Pitch ◽  
Mechanical Bending

Abstract A flexible fan-out wafer-level packaging (FOWLP) process for heterogeneous integration of high performance dies in a flexible and biocompatible elastomeric package (FlexTrateTM) was used to assemble 625 dies with co-planarity and tilt <1μm, average die-shift of 3.28 μm with σ < 2.23 μm. Fine pitch interconnects (40μm pitch) were defined using a novel corrugated topography to mitigate the buckling phenomenon of metal films deposited on elastomeric substrates. Corrugated interconnects were then used to interconnect 200 dies, and then tested for cyclic mechanical bending reliability and have shown less than 7% change in resistance after bending down to 1 mm radius for 1,000 cycles.

Ultra Fine Pitch RDL Development in Multi-layer eWLB (embedded Wafer Level BGA) Packages

2016 ◽  
Vol 2016 (DPC) ◽  
pp. 000809-000825
Author(s):  
Bernard Adams ◽  
Won Kyung Choi ◽  
Duk Ju Na ◽  
Andy Yong ◽  
Seung Wook Yoon ◽  
...  
Keyword(s):  
Line Width ◽  
High Performance ◽  
Process Development ◽  
Data Access ◽  
Electrical Performance ◽  
Logic Device ◽  
Wafer Level ◽  
Component Level ◽  
Wafer Level Packaging ◽  
Fine Pitch

The market for portable and mobile data access devices connected to a virtual cloud access point is exploding and driving increased functional convergence as well as increased packaging complexity and sophistication. This is creating unprecedented demand for higher input/output (I/O) density, higher bandwidths and low power consumption in smaller package sizes. There are exciting interconnect technologies in wafer level packaging such as eWLB (embedded Wafer Level Ball Grid Array), 2.5D interposers, thin PoP (Package-on-Package) and TSV (Through Silicon Via) interposer solutions to meet these needs. eWLB technologies with the ability to extend the package size beyond the area of the chip are leading the way to the next level of high density, thin packaging capability. eWLB provides a robust packaging platform supporting very dense interconnection and routing of multiple die in very reliable, low profile, low warpage 2.5D and 3D solutions. The use of these embedded eWLB packages in a side-by-side configuration to replace a stacked package configuration is critical to enable a more cost effective mobile market capability. Combining the analog or memory device with digital logic device in a semiconductor package can provide an optimum solution for achieving the best performance in thin, multiple-die integration aimed at very high performance. One of the greatest challenges facing wafer level packaging at present is the availability of routing and interconnecting high I/O fine pitch area array. RDL (redistribution layer) allows signal and supply I/O's to be redistributed to a footprint larger than the chip footprint in eWLB . Required line widths and spacing of 2/2 μm for eWLB applications support the bump pitch of less than 40um. Finer line width and spacing are critical for further design flexibility as well as electrical performance improvement. This paper highlights the rapidly moving trend towards eWLB packaging technologies with ultra fine 2/2um line width and line spacing and multi-layer RDL. A package design study, process development and optimization, and mechanical characterization will be discussed as well as test vehicle preparation. JEDEC component level reliability test results will also be presented.

Residual Stress in Silicon Caused by Cu-Sn Wafer-Level Packaging

2013 ◽  
Author(s):  
Maaike M. V. Taklo ◽  
Astrid-Sofie Vardøy ◽  
Ingrid De Wolf ◽  
Veerle Simons ◽  
H. J. van de Wiel ◽  
...  
Keyword(s):  
Residual Stress ◽  
Integrated Circuit ◽  
High Performance ◽  
White Light Interferometry ◽  
Wafer Level ◽  
Noticeable Effect ◽  
Micro Raman Spectroscopy ◽  
Wafer Level Packaging ◽  
Mems Device ◽  
Specific Technology

The level of stress in silicon as a result of applying Cu-Sn SLID wafer level bonding to hermetically encapsulate a high-performance infrared bolometer device was studied. Transistors are present in the read out integrated circuit (ROIC) of the device and some are located below the bond frame. Test vehicles were assembled using Cu-Sn SLID bonding and micro-Raman spectroscopy was applied on cross sectioned samples to measure stress in the silicon near the bond frame. The test vehicles contained cavities and the bulging of the structures was studied using white light interferometry. The test vehicles were thermally stressed to study possible effects of the treatments on the level of stress in the silicon. Finite element modeling was performed to support the understanding of the various observations. The measurements indicated levels of stress in the silicon that can affect transistors in regions up to 15 μm below the bond frame. The observed levels of stress corresponded well with the performed modeling. However, no noticeable effect was found for the ROIC used in this work. The specific technology used for the fabrication of the ROIC of a MEMS device is thus decisive. The level of stress did not appear to change as a result of the imposed thermal stress. The level of stress caused by the bond frame can be expected to stay constant throughout the lifetime of a device.

A 3‐dB Quadrature WLP Coupler for 60 GHz Applications

2012 ◽  
Vol 1427 ◽  
Author(s):  
Hamid Kiumarsi ◽  
Hiroyuki Ito ◽  
Noboru Ishihara ◽  
Kenichi Okada ◽  
Yusuke Uemichi ◽  
...  
Keyword(s):  
Insertion Loss ◽  
High Performance ◽  
Low Cost ◽  
Phase Error ◽  
Superior Performance ◽  
60 Ghz ◽  
Wafer Level ◽  
Chip Area ◽  
Wafer Level Packaging ◽  
Coupled Lines

ABSTRACTA 60 GHz tandem coupler using offset broadside coupled lines is proposed in a WLP (Wafer Level Packaging) technology. The fabricated coupler has a core chip area of 750 μm × 385 μm (0.288 mm2). The measured results show an insertion loss of 0.44 dB, an amplitude imbalance of 0.03 dB and a phase difference of 87.6° at 60 GHz. Also the measurement shows an insertion loss of less than 0.67 dB, an amplitude imbalance of less than 0.31 dB, a phase error of less than 3.7°, an isolation of more than 29.7 dB and a return loss of more than 27.9 dB at the input ant coupled ports and more than 14.3 dB at the direct and isolated ports over the frequency band of 57-66 GHz, covering 60 GHz band both in Japan and US. To the best of our knowledge the proposed coupler achieves the lowest ever reported insertion loss and amplitude imbalance for a 3-dB coupler on a silicon substrate. With its superior performance and lower cost compared to the CMOS counterparts, the proposed coupler is a suitable candidate for low-cost high-performance millimeter-wave systems.

SiP(System in Package) Solutions with Wafer Level Packaging Technology

2011 ◽  
Vol 2011 (DPC) ◽  
pp. 002226-002253 ◽  
Author(s):  
In Soo Kang ◽  
Jong Heon (Jay) Kim
Keyword(s):  
Embedded System ◽  
High Performance ◽  
Low Cost ◽  
Wafer Level ◽  
Molding Compound ◽  
Wafer Level Packaging ◽  
Ic Packaging ◽  
Chip Size ◽  
Bonding Technology ◽  
Small Form Factor

In mobile application, the WLP technology has been developing to make whole package size almost same as chip size. However, the I/O per chip unit area has increased so that it gets difficult to realize ideal pad pitch for better reliability. Recently, to achieve the thin and small size, high performance and low cost semiconductor package, Embedding Die and Fanout Technologies have been suggested and developed based on wafer level processing. In this work, as a solution of system in package, wafer level embedded package and fanout technology will be reviewed. Firstly, Wafer level embedded System in Package (WL-eSiP) which has daughter chip (small chip) embedded inside mother chip (bigger chip) without any special substrate has been suggested and developed. To realize wafer level embedded system in package (WL-eSiP), wafer level based new processes like wafer level molding for underfilling and encapsulation by molding compound without any special substrate have been applied and developed, including high aspect ratio Cu bumping, mold thinning and chip-to-wafer flipchip bonding. Secondly, Fan-out Package is considered as alternative package structure which means merged package structure of WLCSP (wafer level chip size package) and PCB process. We can make IC packaging widen area for SIP(System in Package) or 3D package. In addition, TSV and IPD are key enabling technology to meet market demands because TSV interconnection can provide wider bandwidth and high transmission speed due to vertical one compared to wire bonding technology and IPD can provide higher performance, more area saving to be assembled and small form factor compared to discrete passive components.

Ultra Fine Pitch RDL Development in Multi-layer eWLB (embedded Wafer Level BGA) Packages

2015 ◽  
Vol 2015 (1) ◽  
pp. 000822-000826 ◽  
Author(s):  
Won Kyoung Choi ◽  
Duk Ju Na ◽  
Kyaw Oo Aung ◽  
Andy Yong ◽  
Jaesik Lee ◽  
...  
Keyword(s):  
High Performance ◽  
Process Development ◽  
Cost Effective ◽  
Access Point ◽  
Data Access ◽  
Memory Device ◽  
Logic Device ◽  
Wafer Level ◽  
Component Level ◽  
Fine Pitch

The market for portable and mobile data access devices connected to a virtual cloud access point is exploding and driving increased functional convergence as well as increased packaging complexity and sophistication. This is creating unprecedented demand for higher input/output (I/O) density, higher bandwidths and low power consumption in smaller package sizes. There are exciting interconnect technologies in wafer level packaging such as eWLB (embedded Wafer Level Ball Grid Array), 2.5D interposers, thin PoP (Package-on-Package) and TSV (Through Silicon Via) interposer solutions to meet these needs. eWLB technologies with the ability to extend the package size beyond the area of the chip are leading the way to the next level of high density, thin packaging capability. eWLB provides a robust packaging platform supporting very dense interconnection and routing of multiple die in very reliable, low profile, low warpage 2.5D and 3D solutions. The use of these embedded eWLB packages in a side-by-side configuration to replace a stacked package configuration is critical to enable a more cost effective mobile market capability. Combining the analog or memory device with digital logic device in a semiconductor package can provide an optimum solution for achieving the best performance in thin, multiple-die integration aimed at very high performance. This paper highlights the rapidly moving trend towards eWLB packaging technologies with ultra fine 2/2μm line width and line spacing and multi-layer RDL. A package design study, process development and optimization, and mechanical characterization will be discussed as well as test vehicle preparation. JEDEC component level reliability test results will also be presented.

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