Failure Analysis Methodology on Resistive Open Defects

2014 ◽  
Author(s):  
A.C.T. Quah ◽  
G.B. Ang ◽  
D. Nagalingam ◽  
C.Q. Chen ◽  
H.P. Ng ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Case Studies ◽  
Photon Emission ◽  
Analysis Methodology ◽  
Failure Path ◽  
Open Defect ◽  
Emission Microscopy ◽  
Open Defects ◽  
Logic Array ◽  
Failure Site

Abstract This paper describes the observation of photoemissions from saturated transistors along a connecting path with open defect in the logic array. By exploiting this characteristic phenomenon to distinguish open related issues, we described with 2 case studies using Photon Emission Microscopy, CAD navigation and layout tracing to identify the ‘open’ failure path. Further layout and EBAC analysis are then employed to effectively localize the failure site.

Enhanced Static Fault Localization Methodology on Resistive Open Defects Using Photon Emission Microscopy and Layout Defect Prediction

2016 ◽  
Author(s):  
A.C.T. Quah ◽  
D. Nagalingam ◽  
G.B. Ang ◽  
C.Q. Chen ◽  
H.H. Ma ◽  
...  
Keyword(s):  
Logic Gate ◽  
Photon Emission ◽  
Floating Gate ◽  
Advanced Technology ◽  
Great Success ◽  
Failure Path ◽  
Novel Method ◽  
Open Defect ◽  
Open Defects ◽  
Technology Nodes

Abstract In this paper, the effects of an open defect resulting in floating gate on combinational logic gate structures are studied. From this study, a novel method is derived to predict and narrow down the potential open defect location from a long failure path that is driving multiple branches of input nodes, into a much smaller segment without EBAC analysis. This method is applied with great success to localize open defects on actual low yield cases from advanced technology nodes with significant reduction in FA cycle time.

Analysis of Delta Iddq Soft Fails on Pass Chips

2006 ◽  
Author(s):  
I. Österreicher ◽  
S. Eckl ◽  
B. Tippelt ◽  
S. Döring ◽  
R. Prang ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Failure Mode ◽  
Photon Emission ◽  
Complete Analysis ◽  
Functional Tests ◽  
Analysis Techniques ◽  
Atomic Force ◽  
Current Consumption ◽  
Emission Microscopy ◽  
Failure Localization

Abstract Depending on the field of application the ICs have to meet requirements that differ strongly from product to product, although they may be manufactured with similar technologies. In this paper a study of a failure mode is presented that occurs on chips which have passed all functional tests. Small differences in current consumption depending on the state of an applied pattern (delta Iddq measurement) are analyzed, although these differences are clearly within the usual specs. The challenge to apply the existing failure analysis techniques to these new fail modes is explained. The complete analysis flow from electrical test and Global Failure Localization to visualization is shown. The failure is localized by means of photon emission microscopy, further analyzed by Atomic Force Probing, and then visualized by SEM and TEM imaging.

Device Selection for Failure Analysis of Chain Fails Using Diagnosis Driven Yield Analysis

2011 ◽  
Author(s):  
Chris Schuermyer ◽  
Brady Benware ◽  
Graham Rhodes ◽  
Davide Appello ◽  
Vincenzo Tancorre ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Case Studies ◽  
Yield Analysis ◽  
Analysis Methodology ◽  
Device Selection ◽  
Selection For ◽  
Random Defects

Abstract This work presents the first application of a diagnosis driven approach for identifying systematic chain fail defects in order to reduce the time spent in failure analysis. The zonal analysis methodology that is applied separates devices into systematic and random populations of chain fails in order to prevent submitting random defects for failure analysis. Two silicon case studies are presented to validate the production worthiness of diagnosis driven yield analysis for chain fails. The defects uncovered in these case studies are very subtle and would be difficult to identify with any other methodology.

Failure Analysis of SOI Bipolar Device Using Photon Emission Microscopy

2004 ◽  
Author(s):  
Todd M. Simons ◽  
Bob Davis
Keyword(s):  
Failure Analysis ◽  
Failure Mechanism ◽  
Photon Emission ◽  
Silicon On Insulator ◽  
The Other ◽  
No Emission ◽  
Analysis Process ◽  
Soi Devices ◽  
Emission Microscopy ◽  
Optical Paths

Abstract Photon emission microscopy (PEM) provides a valuable first step in the failure analysis process. An analysis of a mixed signal bipolar/CMOS silicon on insulator (SOI) device revealed an abnormal emission site that appeared to emanate from the oxide isolation ring. Subsequent mechanical probing of the emitting bipolar transistor revealed node voltages nearly identical to a known good reference unit that had no emission site at the affected transistor. This article analyzes the reasons for the emission site on one transistor and not the other even though the node voltages were the same. It was observed that while the node voltages were nearly identical, the available current paths were not. The different paths directly related to the amount of available carriers for recombination in the base. The construction of the SOI device creates unique optical paths for emission sites not observed in non-SOI devices. It can be concluded that the failure mechanism does not always reside at the abnormal PEM site.

Failure Analysis of Sub-Micron Semiconductor Integrated Circuit Using Backside Photon Emission Microscopy

1999 ◽  
Author(s):  
Soon Lim ◽  
Jian Hua Bi ◽  
Lian Choo Goh ◽  
Soh Ping Neo ◽  
Sudhindra Tatti
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
Integrated Circuit ◽  
Flip Chip ◽  
Photon Emission ◽  
Fault Isolation ◽  
Integrated Circuit Fabrication ◽  
Circuit Fabrication ◽  
Emission Microscopy ◽  
On Chip

Abstract The progress of modern day integrated circuit fabrication technology and packaging has made fault isolation using conventional emission microscopy via the top of the integrated circuit more difficult, if not impossible. This is primarily due to the use of increased levels and density of metal-interconnect, and the advent of new packaging technology, e.g. flip-chip, ball-grid array and lead-on-chip, etc. Backside photon emission microscopy, i.e. performing photon emission microscopy through the bulk of the silicon via the back of the integrated circuit is a solution to this problem. This paper outlines the failure analysis of sub-micron silicon integrated circuits using backside photon emission microscopy. Sample preparation, practical difficulties encountered and case histories will be discussed.

Effectiveness of Emission Microscopy in the Failure Analysis of CMOS ASIC Devices

1997 ◽  
Author(s):  
K. H. Parekh ◽  
R. Milburn
Keyword(s):  
Failure Analysis ◽  
Failure Mechanisms ◽  
Photon Emission ◽  
Reliability Test ◽  
Input Output ◽  
End User ◽  
Final Test ◽  
Leakage Currents ◽  
Emission Microscopy ◽  
Scanning Electron

Abstract In the last several years emission microscopy has become an essential tool for failure analysis, specifically for VLSI devices. This paper describes various die related failure mechanisms in CMOS ASIC devices which were detected by emission microscopy. The failure analysis results discussed in this paper are primarily of the devices which were analyzed over the period of the last three years, 1994 - 1996. These devices were from a broad spectrum of final test failures, qualification and reliability test failures, special evaluation failures, testing and assembly failures at customer sites, and end user field failures. In addition to the failure mechanism statistic scanning electron micrographic illustrations of some of the failure mechanisms and associated damage are presented in this paper. The data presented in this paper clearly show the effectiveness of photon emission microscopy. The value of emission microscopy really lies in quick detection of failure locations on the die which failed functionally or due to excessive static IOD, functional IOD, or input/output leakage currents. It has certainly impacted tum around time of the analysis as significant reduction in analysis time has been achieved. In some cases same day turn around was possible.

Failure Analysis for Inter-Level Short in Nanometer Semiconductor Technologies

2018 ◽  
Author(s):  
Zhigang Song
Keyword(s):  
Failure Analysis ◽  
Failure Mechanism ◽  
Case Studies ◽  
Process Variation ◽  
Failure Mechanisms ◽  
Semiconductor Technology ◽  
New Materials ◽  
Analysis Methodology ◽  
Scaling Down ◽  
Nanometer Regime

Abstract As semiconductor technology keeps scaling down, plus new structures of transistor and new materials introduction, not only are new failure mechanisms introduced, but also old classic failure mechanisms get evolved. The obvious example of failure mechanism evolution is short defect. In the previous technologies, although short defects can happen in different layers and appear in different forms, they always happens at intra-level. As semiconductor technology advanced into nanometer regime, short defect no longer only happened in intra-level, but also more and more often happened in interlevel. Failure analysis on the inter-level short defects is much more challenging because they are usually due to interaction of two processes, such as process variation in two process steps at the same location, and often hide in the bottom of tapered and dense patterns. The conventional PFA (Physical Failure Analysis) methodology often misses discovering the defect and then the defect will be removed by subsequent polishing. This paper has demonstrated some methods to tackle the challenges with three case studies of such inter-level short defects in nanometer semiconductor technologies.

Yield Enhancement Using a Combination of Wafer Level Failure Analysis and Defect Isolation Software: Case Studies

2008 ◽  
Author(s):  
Pierre Simon ◽  
Michel Thétiot ◽  
Bernard Picart ◽  
Cathy Kardach ◽  
Herve Deslandes ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Real Time ◽  
Case Studies ◽  
Thermal Emission ◽  
Yield Enhancement ◽  
Wafer Level ◽  
Software Suite ◽  
Time Resolved ◽  
Defect Isolation ◽  
Emission Microscopy

Abstract Yield enhancement has always been an important topic but even more when processes are moving towards smaller geometries. Today, latest FA flow intends to check wafer quality to monitor production in real-time. The purpose is to adjust any derivation coming from the process as fast as possible. The Atmel-CIMPACA laboratory located in Rousset, France, can do Failure Analysis on wafer, thanks to its wafer prober designed to work on DCG systems equipment and integrated CAD software (Meridian, Emiscope, NEXS software suite). Wafer level yield analysis typically requires long setup and multiple dies analysis. Each of the die can be studied with a set a failure analysis (FA) techniques (photo or thermal) emission microscopy [1], laser stimulation techniques [2] or even dynamic probing using time resolved emission [3],[4] or laser based techniques, for the most common ones [5].

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