scholarly journals Experimental Study on Variation of Surface Roughness and Q Factors of Fused Silica Cylindrical Resonators with Different Grinding Speeds

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1052
Author(s):  
Libin Zeng ◽  
Yunfeng Tao ◽  
Yao Pan ◽  
Jianping Liu ◽  
Kaiyong Yang ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Low Cost ◽  
Fused Silica ◽  
Q Factor ◽  
Cylindrical Resonator ◽  
Axisymmetric Shell ◽  
Measurement Results ◽  
Q Factors ◽  
Cylindrical Resonators ◽  
Quality Factor Q

For the axisymmetric shell resonator gyroscopes, the quality factor (Q factor) of the resonator is one of the core parameters limiting their performances. Surface loss is one of the dominating losses, which is related to the subsurface damage (SSD) that is influenced by the grinding parameters. This paper experimentally studies the surface roughness and Q factor variation of six resonators ground by three different grinding speeds. The results suggest that the removal of the SSD cannot improve the Q factor continuously, and the variation of surface roughness is not the dominant reason to affect the Q factor. The measurement results indicate that an appropriate increase in the grinding speed can significantly improve the surface quality and Q factor. This study also demonstrates that a 20 million Q factor for fused silica cylindrical resonators is achievable using appropriate manufacturing processes combined with post-processing etching, which offers possibilities for developing high-precision and low-cost cylindrical resonator gyroscopes.

scholarly journals A 5.86 Million Quality Factor Cylindrical Resonator with Improved Structural Design Based on Thermoelastic Dissipation Analysis

Sensors ◽  
2020 ◽  
Vol 20 (21) ◽  
pp. 6003
Author(s):  
Libin Zeng ◽  
Yiming Luo ◽  
Yao Pan ◽  
Yonglei Jia ◽  
Jianping Liu ◽  
...  
Keyword(s):  
Quality Factor ◽  
Structural Design ◽  
Fused Silica ◽  
Q Factor ◽  
The Finite Element Method ◽  
Cylindrical Resonator ◽  
Traditional Structure ◽  
Cylindrical Resonators ◽  
Quality Factor Q ◽  
Crucial Parameter

The cylindrical resonator is the core component of cylindrical resonator gyroscopes (CRGs). The quality factor (Q factor) of the resonator is one crucial parameter that determines the performance of the gyroscope. In this paper, the finite element method is used to theoretically investigate the influence of the thermoelastic dissipation (TED) of the cylindrical resonator. The improved structure of a fused silica cylindrical resonator is then demonstrated. Compared with the traditional structure, the thermoelastic Q (QTED) of the resonator is increased by 122%. In addition, the Q factor of the improved cylindrical resonator is measured, and results illustrate that, after annealing and chemical etching, the Q factor of the resonator is significantly higher than that of the cylindrical resonators reported previously. The Q factor of the cylindrical resonator in this paper reaches 5.86 million, which is the highest value for a cylindrical resonator to date.

Research of a Novel Combined Metal-Fused Silica Resonator for Cylinder Shell Vibrating Gyroscopes

2012 ◽  
Vol 516 ◽  
pp. 443-446
Author(s):  
Yu Lie Wu ◽  
Qing Lei Luan ◽  
Hong Juan Cui ◽  
Xiao Mei Wu ◽  
Xiang Xi
Keyword(s):  
Structural Optimization ◽  
Resonance Frequency ◽  
Optimization Design ◽  
Low Cost ◽  
High Accuracy ◽  
Fused Silica ◽  
Cylinder Wall ◽  
The Novel ◽  
Q Factor ◽  
The Stability

A novel combined metal-fused silica resonator for the cylinder vibrating gyroscope is proposed in this paper. The cylinder wall of the resonator is made of fused silica, while the bottom is made of metal, and then the two parts are connected by strong glue. With this method, the manufacturing difficulty of the fused silica resonator can be reduced significantly and the performance can be retained without remarkable degeneration. In this paper, the novel metal-fused silica resonator is analyzed, including the structural optimization design and fabrication, testing of the stability of the resonance frequency and the Q factor. The preliminary experimental results show that the low-cost combined metal-fused silica resonator has potential good performance to achieve high accuracy in a cylinder shell vibrating gyroscope.

scholarly journals Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Sensors ◽  
2020 ◽  
Vol 20 (4) ◽  
pp. 1032
Author(s):  
Pengbo Xiao ◽  
Zhinan Qiu ◽  
Yiming Luo ◽  
Yao Pan ◽  
Tianliang Qu ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Temperature Variation ◽  
Fused Silica ◽  
Q Factor ◽  
Temperature Drift ◽  
Cylindrical Resonator ◽  
Influence Of Temperature ◽  
Vibratory Gyroscopes ◽  
Frequency Mismatch ◽  
Vibrational Characteristics

The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

scholarly journals High Sensitivity to Salinity-Temperature Using One-Dimensional Deformed Photonic Crystal

Coatings ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 713
Author(s):  
Naim Ben Ali ◽  
Haitham Alsaif ◽  
Youssef Trabelsi ◽  
Muhammad Tajammal Chughtai ◽  
Vigneswaran Dhasarathan ◽  
...  
Keyword(s):  
Detection Limit ◽  
Temperature Sensor ◽  
High Sensitivity ◽  
Fused Silica ◽  
Q Factor ◽  
Deformation Degree ◽  
One Dimensional ◽  
Number Of Layers ◽  
Structure Thickness ◽  
Quality Factor Q

This paper aims to theoretically study the concept of a photonic salinity and temperature sensor according to a deformed one-dimensional photonic structure. The fundamental capability of the proposed sensor is studied. Simultaneously we search to optimize the thickness of the structure and to get the maximum salinity and temperature sensitivity. The structure is constructed by alternating layers of TiO2 and fused-silica P times. In the middle of the structure, a cavity containing seawater is inserted to measure its salinity and temperature. The transfer matrix method (TMM) is used to simulate the wave-transmittance spectra. It is shown that the quality factor (Q-factor) of the resonance peaks depends on the number (P) of layers. After that, the thickness of the layers is deformed by changing the deformation degree (h). The parameters P and h are optimized to get the maximal Q-factor with the minimal number of layers and structure thickness. The best sensitivity SS of the proposed salinity sensor is 558.82 nm/RFIU with a detection limit of 0.0034 RFIU. In addition, the best sensitivity ST of the designed temperature sensor is 600 nm/RFIU with a detection limit of 0.0005 RFIU.

scholarly journals Deformed microcavities with very high Q-factors and directional farfield emission

2020 ◽  
Vol 238 ◽  
pp. 01006
Author(s):  
Arne Behrens ◽  
Martí Bosch ◽  
Martina Hentschel ◽  
Stefan Sinzinger
Keyword(s):  
Surface Roughness ◽  
State Of The Art ◽  
Whispering Gallery Mode ◽  
Q Factor ◽  
Tapered Fiber ◽  
High Q ◽  
Whispering Gallery ◽  
Q Factors ◽  
Very High

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 105

Investigation of Thermoelastic Loss Mechanism in Shell Resonators

2014 ◽  
Author(s):  
Ali Darvishian ◽  
Behrouz Shiari ◽  
Jae Yoong Cho ◽  
Tal Nagourney ◽  
Khalil Najafi
Keyword(s):  
Fused Silica ◽  
Squeeze Film ◽  
Q Factor ◽  
Loss Mechanism ◽  
Conductive Coatings ◽  
Remarkable Effect ◽  
Resonator Design ◽  
Wide Range ◽  
Improved Performance ◽  
Q Factors

Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical resonators, which are used in a wide range of applications such as gyroscopes, filters, and clocks. There are several energy loss mechanisms commonly associated with micro resonators including anchor loss through the substrate, squeeze film damping, thermoelastic dissipation (TED), and surface loss. This work focuses on the thermoelastic loss as one of the major energy dissipation mechanisms of micro shell resonators. In this article, the effects of material properties, thickness, conductive coating and operating temperature on the Q-factor of micro shell resonators are investigated. Numerical simulation shows shell resonators have higher Q-factors when they are operating at lower temperatures. Although, the magnitude of the simulated Q-factors of an uncoated bare resonator made from fused silica is more than 70 million and so it is too high to have a remarkable effect on the total Q-factor, our study shows that even a thin layer of some conductive coatings like gold on the surface of a bare shell reduces Q-factor significantly. The sensitivity of the coated shell resonator design to the TED phenomenon provides useful information for the development of new micro shell resonators with improved performance and Q-factors.

scholarly journals Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

Sensors ◽  
2020 ◽  
Vol 20 (8) ◽  
pp. 2206 ◽  
Author(s):  
Zeyad Yousif Abdoon Al-Shibaany ◽  
Pavel Penchev ◽  
John Hedley ◽  
Stefan Dimov
Keyword(s):  
Surface Roughness ◽  
Lithium Niobate ◽  
Medical Devices ◽  
Laser Micromachining ◽  
Q Factor ◽  
Optical Surface ◽  
Good Match ◽  
Resonant Sensors ◽  
Working Environments ◽  
Quality Factor Q

This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

scholarly journals Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Sensors ◽  
2020 ◽  
Vol 20 (1) ◽  
pp. 295 ◽  
Author(s):  
Pengbo Xiao ◽  
Zhinan Qiu ◽  
Yao Pan ◽  
Shaoliang Li ◽  
Tianliang Qu ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Decay Time ◽  
Great Influence ◽  
Fused Silica ◽  
Q Factor ◽  
Electrostatic Forces ◽  
Cylindrical Resonator ◽  
Vibratory Gyroscopes ◽  
Frequency Mismatch ◽  
Vibrational Characteristics

The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.

scholarly journals Optical and Electrical Method Characterizing the Dynamic Behavior of the Fused Silica Cylindrical Resonator

Sensors ◽  
2019 ◽  
Vol 19 (13) ◽  
pp. 2928 ◽  
Author(s):  
Zhinan Qiu ◽  
Tianliang Qu ◽  
Yao Pan ◽  
Yonglei Jia ◽  
Zhenfang Fan ◽  
...  
Keyword(s):  
Dynamic Behavior ◽  
Optical Method ◽  
Laser Doppler Vibrometer ◽  
Fused Silica ◽  
Optical Methods ◽  
Q Factor ◽  
Cylindrical Resonator ◽  
Electrical Method ◽  
Frequency Split ◽  
Measurement Efficiency

Fused silica cylindrical resonant gyroscope (CRG) is a novel high-precision solid-wave gyroscope, whose performance is primarily determined by the cylindrical resonator’s frequency split and quality factor (Q factor). The laser Doppler vibrometer (LDV) is extensively used to measure the dynamic behavior of fused silica cylindrical resonators. An electrical method was proposed to characterize the dynamic behavior of the cylindrical resonator to enhance the measurement efficiency and decrease the equipment cost. With the data acquisition system and the designed signal analysis program based on LabVIEW software, the dynamic behavior of the fused silica cylindrical resonator can be analyzed automatically and quickly. We compared all the electrical measurement results with the optical detection by LDV, demonstrating that the fast Fourier transform (FFT) result of the resonant frequency measured by the electrical method was 0.12 Hz higher than that with the optical method. Thus, the frequency split measured by the electrical and optical methods was the same in 0.18 Hz, and the measurement of the Q factor was basically the same in 730,000. We conducted all measurements under the same operation condition, and the optical method was used as a reference, demonstrating that the electrical method could characterize the dynamic behavior of the fused silica cylindrical resonator and enhance the measurement efficiency.

scholarly journals INVESTIGATION ON EFFECT OF SURFACE ROUGHNESS PATTERN TO DYNAMIC PERFORMANCE OF MEMS RESONATORS IN VARIOUS TYPES OF GASES AND GAS RAREFACTION

2021 ◽  
Vol 59 (5) ◽  
Author(s):  
Nguyen Chi Cuong ◽  
Lam Minh Thinh ◽  
Phan Minh Truong ◽  
Trinh Xuan Thang ◽  
Ngo Vo Ke Thanh ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Effective Viscosity ◽  
Dynamic Performance ◽  
Squeeze Film ◽  
Molecular Gas ◽  
Q Factor ◽  
Squeeze Film Damping ◽  
Mems Resonators ◽  
Quality Factor Q ◽  
Effect Of Surface

The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughness pattern in various types of gases and gas rarefaction. Then, effect of surface roughness pattern (film thickness ratio and Peklenik number) is discussed on the quality factor (Q-factor) of micro-beam resonators in various types of gases and gas rarefaction. Thus, effect of surface roughness pattern is significantly reduced as effective viscosity of gas decreases in higher mode of resonator and higher gas rarefaction.

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