scholarly journals Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1263
Author(s):  
Nicola Pio Belfiore ◽  
Alvise Bagolini ◽  
Andrea Rossi ◽  
Gabriele Bocchetta ◽  
Federica Vurchio ◽  
...  
Keyword(s):  
Final Stage ◽  
Hard Metal ◽  
Silicon On Insulator ◽  
Experimental Results ◽  
Design Parameters ◽  
Flexure Hinge ◽  
Deep Reactive Ion Etching ◽  
Simulation Tools ◽  
Comb Drives ◽  
Four Bar Linkage

This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under study, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.

A SOI-MEMS-Based Single Axis Active Probe for Cellular Force Sensing and Cell Manipulation

2010 ◽  
Author(s):  
Li Zhang ◽  
Jingyan Dong
Keyword(s):  
Stage Structure ◽  
Silicon On Insulator ◽  
Cell Manipulation ◽  
Force Sensing ◽  
Deep Reactive Ion Etching ◽  
Active Probing ◽  
Comb Drives ◽  
Active Probe ◽  
Fabrication And Characterization

This paper presents the design, analysis, fabrication, and characterization of an electrostatically driven single axis active probing device for cellular force sensing and cell manipulation applications. The active probe is actuated by linear comb driver to create the motion in the probing direction. Both actuation and sensing comb drives are designed for the probing stage. The sensing comb structures enable us to sense the probe displacement when it is actuated, which enables application of force balanced sensing. The designed active probing device has an overall size of 5 mm × 4.5 mm, is fabricated on a silicon-on-insulator (SOI) substrate through surface micromachining technologies and deep reactive-ion etching (DRIE) process. The probe stage structure is fabricated on the 10-μm-thick device layer of SOI wafer. The handle layer beneath probe stage is etched away by DRIE process to decrease the film damping between the stage and the handle wafer thus achieving high quality factor. The proposed single axis probe is aimed at sensing cellular force which ranges from pN to μN and cell manipulation applications.

scholarly journals A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 382
Author(s):  
Chao Xiang ◽  
Yulan Lu ◽  
Chao Cheng ◽  
Junbo Wang ◽  
Deyong Chen ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Measurement Range ◽  
Silicon On Insulator ◽  
Anodic Bonding ◽  
Pressure Measurements ◽  
Quality Factors ◽  
Deep Reactive Ion Etching ◽  
Wide Range ◽  
Form Pressure ◽  
Silicon Islands

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range of pressure measurements, silicon islands were deployed on the device layer of the SOI wafer to enhance equivalent stiffness and structural stability of the pressure-sensitive diaphragm. Moreover, a cylindrical vacuum cavity was deployed on the SOG cap with the purpose to decrease the stresses generated during the silicon-to-glass contact during pressure measurements. The fabrication processes mainly contained photolithography, deep reactive ion etching (DRIE), chemical mechanical planarization (CMP) and anodic bonding. According to the characterization experiments, the quality factors of the resonators were higher than 15,000 with pressure sensitivities of 0.51 Hz/kPa (resonator I), −1.75 Hz/kPa (resonator II) and temperature coefficients of frequency of 1.92 Hz/°C (resonator I), 1.98 Hz/°C (resonator II). Following temperature compensation, the fitting error of the microsensor was within the range of 0.006% FS and the measurement accuracy was as high as 0.017% FS in the pressure range of 200 ~ 7000 kPa and the temperature range of −40 °C to 80 °C.

Research of Sewage Marine Discharge Diffusion Effect under Deep Water

2013 ◽  
Vol 726-731 ◽  
pp. 1027-1031
Author(s):  
Hang Yu ◽  
Jing Feng Bai ◽  
Xin Hai Wang ◽  
Hong Xin Zhao
Keyword(s):  
Model Test ◽  
Deep Water ◽  
Near Field ◽  
Large Angle ◽  
Hydraulic Model ◽  
Experimental Results ◽  
Premature Convergence ◽  
Design Parameters ◽  
Diffusion Effect ◽  
Horizontal Angle

The sewage diffusion effect under deep water was carried out between different diffuser design parameters based on the hydraulic model test, and Huizhou Dayawan sewage marine disposal project was taken as an example. The experimental results show that the design parameters are significant for sewage diffusion at the near field. For Dayawan project, jet angle was controlled to be 20 degree, and horizontal angle was controlled to be 90 degree. It not only can ensure that sewage fully diluted mixed, also can avoid the premature convergence and sewage lifting. It is feasible for selecting large angle nozzle under deep water and there are some technical bases have been provided for other sewage marine disposal project.

scholarly journals Hydraulic optimization of corrugated stilling basin with adverse slope

2018 ◽  
Vol 19 (1) ◽  
pp. 313-322 ◽  
Author(s):  
Tooraj Honar ◽  
Nafiseh Khoramshokooh ◽  
Mohammad Reza Nikoo
Keyword(s):  
Optimization Model ◽  
Hydraulic Jump ◽  
Experimental Results ◽  
Data Driven ◽  
Design Parameters ◽  
Algorithm Optimization ◽  
Stilling Basin ◽  
Design Variables ◽  
Bed Slope ◽  
Mlp Model

Abstract In this paper, perhaps for the first time, a data-driven simulation–optimization model is developed based on experimental results to find the effects of state and decision variables on the optimum characteristics of a stilling basin with adverse slope and corrugated bed. The optimal design parameters of the stilling basin are investigated to minimize the length of the hydraulic jump and ratio of the sequent depths of the jump while the relative amount of energy loss is maximized. In order to model the relationship between design variables of the bed, the experimental results are converted to a data-driven simulation model on the basis of a multilayer perceptron (MLP) neural network. Then, the validated MLP model is used in a genetic algorithm optimization model in order to determine the optimum characteristics of the bed under the hydraulic jump considering the interaction between the bed design variables and the hydraulic parameters of the flow. Results indicate that the optimum values of bed slope and the diameter of the corrugated roughness (2r) can be considered as −0.02 and 20 millimetres, respectively.

Code Simulation of Quenching of a High Temperature Debris Bed: Model Improvement and Validation With Experimental Results

2012 ◽  
Author(s):  
A. Bachrata ◽  
F. Fichot ◽  
G. Repetto ◽  
M. Quintard ◽  
J. Fleurot
Keyword(s):  
Late Phase ◽  
Reactor Core ◽  
Injection Rate ◽  
Mitigation Strategies ◽  
Experimental Results ◽  
Severe Accident ◽  
Simulation Tools ◽  
Variation Of Parameters ◽  
Model Improvement ◽  
Accident Sequences

The loss of coolant accidents with core degradation e.g. TMI-2 and Fukushima demonstrated that the nuclear safety analysis has to cover accident sequences involving a late reflood activation in order to develop appropriate and reliable mitigation strategies for both, existing and advanced reactors. The reflood (injection of water) is possible if one or several water sources become available during the accident. In a late phase of accident, no well-defined coolant paths would exist and a large part of the core would resemble to a debris bed e.g. particles with characteristic length-scale: 1 to 5 mm, as observed in TMI-2. The French “Institut de Radioprotection et de Sûreté Nucléaire” (IRSN) is developing experimental programs (PEARL and PRELUDE) and simulation tools (ICARE-CATHARE and ASTEC) to study and optimize the severe accident management strategy and to assess the probabilities to stop the progress of in-vessel core degradation at a late stage of an accident. The purpose of this paper is to propose a consistent thermo-hydraulic model of reflood of severely damaged reactor core for ICARE-CATHARE code. The comparison of the calculations with PRELUDE experimental results is presented. It is shown that the quench front exhibits either a 1D behavior or a 2D one, depending on injection rate or bed characteristics. The PRELUDE data cover a rather large range of variation of parameters for which the developed model appears to be quite predictive.

Thermal Analysis of MEMS Actuator Performance

2007 ◽  
Author(s):  
Harita Machiraju ◽  
Bill Infantolino ◽  
Bahgat Sammakia ◽  
Michael Deeds
Keyword(s):  
Power Reduction ◽  
Silicon On Insulator ◽  
Design Parameters ◽  
Experimental Measurements ◽  
Device Layer ◽  
Conduction Path ◽  
Element Analysis ◽  
Parametric Studies ◽  
Actuator Performance ◽  
Good Agreement

A MEMS based device consisting of microactuators was modeled using finite element analysis. The temperature profile of the complete package was obtained and compared to experimental measurements. Good agreement was found between the modeling and measurements. Parametric studies of potential design parameters of the chip package to decrease the power requirements to the actuators have been studied. Increasing the gap between the handle layer and the device layer of the SOI (silicon on insulator) chip from 2 to 3 microns resulted in a reduction of 10% (0.2 Watts) per beam of the actuator. A glass top chip proved to be better at reducing the power requirements for the actuators when compared to a silicon top chip. Modeling shows that relief cuts in the substrate had a larger effect on the power reduction compared to those on the top chip since the heat conduction path to the substrate is a lower resistance path. The power reduction was as high as 50% (1.1 Watts) per beam of the actuator, when the relief cut in the substrate was 50 microns.

scholarly journals Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper

Micromachines ◽  
2019 ◽  
Vol 10 (6) ◽  
pp. 376 ◽  
Author(s):  
Matteo Verotti ◽  
Alvise Bagolini ◽  
Pierluigi Bellutti ◽  
Nicola Pio Belfiore
Keyword(s):  
Finite Element Analysis ◽  
Rigid Body ◽  
Compliant Mechanism ◽  
Silicon On Insulator ◽  
Element Analysis ◽  
Deep Reactive Ion Etching ◽  
Theoretical Simulation ◽  
Body Model ◽  
Replacement Method ◽  
Rigid Body Model

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl over the stage. As a result, the optimal configuration to grasp the micro-object can be reached. Classical algorithms of kinematic analysis have been used to study the rigid-body model of the mobile platform. Then, the rigid-body replacement method has been implemented to design the corresponding compliant mechanism, whose geometry can be transferred onto the etch mask. Deep-reactive ion etching (DRIE) is suggested to fabricate the whole system. The main contributions of this investigation consist of (i) the achievement of a relative motion between the supporting platform and the microgrippers, and of (ii) the design of a process flow for the simultaneous fabrication of the stage and the microgrippers, starting from a single silicon-on-insulator (SOI) wafer. Functionality is validated via theoretical simulation and finite element analysis, whereas fabrication feasibility is granted by preliminary tests performed on some parts of the microsystem.

Anthropometric Design of A Personal Hygiene Center

1981 ◽  
Vol 25 (1) ◽  
pp. 488-491 ◽  
Author(s):  
Don A. Zabcik
Keyword(s):  
Human Factors ◽  
General Public ◽  
Random Order ◽  
Design Analysis ◽  
Experimental Results ◽  
Personal Hygiene ◽  
Design Parameters ◽  
Physical Parameters ◽  
Optimum Level ◽  
Functional Abilities

A study was conducted to investigate the dimensional design of the personal hygiene center: the bathtub. The study determined an optimum level of four basic bathtub parameters, consisting of the bathtub basin length, the rim width, the rim height, and the backrest angle. The objective of this study was to evaluate the effects of these four physical parameters on safe bathtub usage for the general public. Sixty-four volunteer subjects participated in the study. Each subject was presented four bathtub configurations in random order. Anthropometric dimensions and subjective questionnaires were compiled and evaluated for all subjects. Known anthropometry requirements and functional abilities were combined with the experimental results to arrive at a proposed bathtub design. Analysis revealed preferred dimension for the four parameters, as a function of age, weight, and height. Bimodal preferences supported a proposed bathtub design that would accommodate various methods of bathtub ingress and egress. Finally, incorporating various human factors principles, design parameters were recommended for designing future bathtub structures.

Planar integrated plasmonic mid-IR spectrometer

2013 ◽  
Vol 1510 ◽  
Author(s):  
Farnood K. Rezaie ◽  
Chris J. Fredericksen ◽  
Walter R. Buchwald ◽  
Justin W. Cleary ◽  
Evan M. Smith ◽  
...  
Keyword(s):  
Molecular Interaction ◽  
Broad Band ◽  
Interaction Region ◽  
Silicon On Insulator ◽  
Optical Methods ◽  
Ring Resonators ◽  
Design Parameters ◽  
Dynamic Simulations ◽  
Waveguide Modes ◽  
Resonator Design

ABSTRACTA compact spectrometer-on-a-chip featuring a plasmonic molecular interaction region has been conceived, designed, modeled, and partially fabricated. The silicon-on-insulator (SOI) system is the chosen platform for the integration. The low loss of both silicon and SiO2 between 3 and 4 μm wavelengths enables silicon waveguides on SiO2 as the basis for molecular sensors at these wavelengths. Important characteristic molecular vibrations occur in this range, namely the bond stretching modes C-H (Alkynes), O-H (monomeric alcohols, phenols) and N-H (Amines), as well as CO double bonds, NH2, and CN. The device consists of a broad-band infrared LED, photonic waveguides, photon-to-plasmon transformers, a molecular interaction region, dispersive structures, and detectors. Photonic waveguide modes are adiabatically converted into SPPs on a neighboring metal surface by a tapered waveguide. The plasmonic interaction region enhances optical intensity, which allows a reduction of the overall device size without a reduction of the interaction length, in comparison to ordinary optical methods. After the SPPs propagate through the interaction region, they are converted back into photonic waveguide modes by a second taper. The dispersing region consists of a series of micro-ring resonators with photodetectors coupled to each resonator. Design parameters were optimized via electro-dynamic simulations. Fabrication was performed using a combination of photo- and electron-beam-lithography together with standard silicon processing techniques.

Design and Analysis of a Piezoelectric Vibration Energy Harvester Using Rolling Mechanism

2016 ◽  
Vol 138 (5) ◽  
Author(s):  
Hong-Xiang Zou ◽  
Wen-Ming Zhang ◽  
Ke-Xiang Wei ◽  
Wen-Bo Li ◽  
Zhi-Ke Peng ◽  
...  
Keyword(s):  
Energy Harvester ◽  
Rolling Force ◽  
Experimental Results ◽  
Design Parameters ◽  
Vibration Energy ◽  
Resistive Load ◽  
Vibration Energy Harvester ◽  
Rolling Mechanism ◽  
Piezoelectric Vibration Energy Harvester ◽  
Piezoelectric Vibration

In this paper, a novel piezoelectric vibration energy harvester using rolling mechanism is presented, with the advantage of harvesting more vibration energy and reducing the impact forces caused by the oscillation. The design utilizes an array arrangement of balls rolling the piezoelectric units, and a piezoelectric unit consists of a piezoceramic (PZT) layer and two raised metal layers bonded to both sides of the PZT layer. The rolling mechanism converts the irregular reciprocating vibration into the regular unidirectional rolling motion, which can generate high and relatively stable rolling force applied to the piezoelectric units. A theoretical model is developed to characterize the rolling mechanism of a ball rolling on a piezoelectric unit. And based on the model, the effects of structural design parameters on the performances of the vibration energy harvester are analyzed. The experimental results show that the rolling-based vibration energy harvester under random vibration can generate stable amplitude direct current (DC) voltage, which can be stored more conveniently than the alternating current (AC) voltage. The experimental results also demonstrate that the vibration energy harvester can generate the power about 1.5 μW at resistive load 3.3 MΩ while the maximal rolling force is about 6.5 N. Due to the function of mechanical motion rectification and compact structure, the rolling mechanism can be suitable for integrating into a variety of devices, harvesting energy from uncertain vibration source and supplying electric energy to some devices requiring specific voltage value.

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