Structural and Optical Properties of SnO2 Films Grown on 6H-SiC by MOCVD
2009 ◽
Vol 79-82
◽
pp. 1539-1542
Keyword(s):
SnO2 thin films have been deposited on 6H-SiC(0001) substrates by metalorganic chemical vapor deposition (MOCVD) system. The structural and optical properties of SnO2 films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and spectrophotometry. The XRD analysis revealed that the prepared samples were SnO2 epitaxial films of rutile structure with a clear relationship of SnO2(100)// 6H-SiC(0001). The average transmittance for the deposited SnO2 samples in the visible range was about 60%.
2000 ◽
Vol 5
(S1)
◽
pp. 977-983
2013 ◽
Vol 746
◽
pp. 369-373
◽
2009 ◽
Vol 79-82
◽
pp. 1535-1538
Keyword(s):