Thermal Imprint Process of Parylene for MEMS Applications

2007 ◽  
Vol 340-341 ◽  
pp. 931-936 ◽  
Author(s):  
Sung Won Youn ◽  
Hiroshi Goto ◽  
Masaharu Takahashi ◽  
M. Ogiwara ◽  
Ryutaro Maeda

This study investigated a thermal imprint technique to pattern parylene microstructures over an area of 2525 mm2. A nickel mold having arrays of 25 m-high, 10 m-wide and 1 mm-long lines with 10 m spacing was fabricated using the deep RIE silicon etching followed by the electroplating process. Imprint tests were then carried out under different conditions of temperature, imprint-hold time and applied pressure to investigate a thermal imprint condition for the complete filling of parylene. Good release results without damage or deformation in parylene microstructures were achieved by the help of a release agent in the imprint temperature range of 160 oC to 250oC. With increasing temperature, the depths of imprinted structures increased and their distribution came to be homogeneous. Complete filling was obtained under the imprint temperature of 250oC, applied load of 195 kgf (3 MPa) and imprint hold time of 1800 s.

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Christian Aermes ◽  
Alexander Hayn ◽  
Tony Fischer ◽  
Claudia Tanja Mierke

AbstractThe knowledge of cell mechanics is required to understand cellular processes and functions, such as the movement of cells, and the development of tissue engineering in cancer therapy. Cell mechanical properties depend on a variety of factors, such as cellular environments, and may also rely on external factors, such as the ambient temperature. The impact of temperature on cell mechanics is not clearly understood. To explore the effect of temperature on cell mechanics, we employed magnetic tweezers to apply a force of 1 nN to 4.5 µm superparamagnetic beads. The beads were coated with fibronectin and coupled to human epithelial breast cancer cells, in particular MCF-7 and MDA-MB-231 cells. Cells were measured in a temperature range between 25 and 45 °C. The creep response of both cell types followed a weak power law. At all temperatures, the MDA-MB-231 cells were pronouncedly softer compared to the MCF-7 cells, whereas their fluidity was increased. However, with increasing temperature, the cells became significantly softer and more fluid. Since mechanical properties are manifested in the cell’s cytoskeletal structure and the paramagnetic beads are coupled through cell surface receptors linked to cytoskeletal structures, such as actin and myosin filaments as well as microtubules, the cells were probed with pharmacological drugs impacting the actin filament polymerization, such as Latrunculin A, the myosin filaments, such as Blebbistatin, and the microtubules, such as Demecolcine, during the magnetic tweezer measurements in the specific temperature range. Irrespective of pharmacological interventions, the creep response of cells followed a weak power law at all temperatures. Inhibition of the actin polymerization resulted in increased softness in both cell types and decreased fluidity exclusively in MDA-MB-231 cells. Blebbistatin had an effect on the compliance of MDA-MB-231 cells at lower temperatures, which was minor on the compliance MCF-7 cells. Microtubule inhibition affected the fluidity of MCF-7 cells but did not have a significant effect on the compliance of MCF-7 and MDA-MB-231 cells. In summary, with increasing temperature, the cells became significant softer with specific differences between the investigated drugs and cell lines.


1997 ◽  
Vol 506 ◽  
Author(s):  
W. J. Cho ◽  
J. O. Lee ◽  
K. S. Chun

ABSTRACTThe hydraulic conductivities in water saturated bentonites at different densities were measured within temperature range of 20 to 80 °C. The results show that the hydraulic conductivities increase with increasing temperature. The hydraulic conductivities of bentonites at the temperature of 80 °C increase up to about 3 times as high as those at 20 °C. The measured values are in good agreement with those predicted. The change in viscosity of water with temperature contributes greatly to increase of hydraulic conductivity.


1996 ◽  
Vol 460 ◽  
Author(s):  
M. Moriwaki ◽  
K. Ito ◽  
H. Inui ◽  
M. Yamaguchi

ABSTRACTThe deformation behavior of single crystals of Mo(Si,Al)2 with the C40 structure has been studied as a function of crystal orientation and Al content in the temperature range from room temperature to 1500°C in compression. Plastic flow is possible only above 1100°C for orientations where slip along <1120> on (0001) is operative and no other slip systems are observed over whole temperature range investigated. The critical resolved shear stress for basal slip decreases rapidly with increasing temperature and the Schmid law is valid. Basal slip appears to occur through a synchroshear mechanism, in which a-dislocations (b=1/3<1120>) dissociate into two synchro-partial dislocations with the identical Burgers vector(b*1/6<1120>) and each synchro-partial further dissociates into two partials on two adjacent planes.


1977 ◽  
Vol 10 (1) ◽  
pp. 14-17 ◽  
Author(s):  
D. P. Pope ◽  
J. L. Garin

The macroscopic yield stress of Ni3Al increases rapidly with temperature, reaching a maximum at about 700°C. Such anomalous behavior has been observed in other ordered alloys which undergo partial disordering with increasing temperature, e.g. Cu3Au. The long-range order parameter, S, of stoichiometric Ni3Al powder was measured over the temperature range 25°C to 1000°C and great care was taken to ensure a fine particle size and thus avoid extinction effects. The results of this study showed that, in Ni3Al, S remains constant at about 0.93 over the entire temperature range investigated. This means that theories relating the strength of ordered alloys to S are not applicable to Ni3Al.


1991 ◽  
Vol 243 ◽  
Author(s):  
Peter Revesz ◽  
Jian Li ◽  
Nicholas Szabo ◽  
James W. Mayer ◽  
David Caudillo ◽  
...  

AbstractAnnealing behavior in oxygen ambients of the of the ferroelectric PZT on Hf and Zr electrodes has been studied in the temperature range of 500-800°C using the 3.045MeV O16(∝,∝)O16 resonance in backscattering spectrometry. Internal oxidation of the buried metal electrode was observed. Oxygen concentration of the PZT film decreases with increasing temperature. Pb loss of the PZT film occurred above 700°C.


Materials ◽  
2019 ◽  
Vol 12 (8) ◽  
pp. 1201 ◽  
Author(s):  
Yan ◽  
Mao ◽  
Zhong ◽  
Zhang ◽  
Zhang

In this research, the durability of skid resistance during the ice melting process with temperature increasing from −5 °C to 10 °C was characterized by means of a British Pendulum Skid Tester. Four types of pavement surfaces were prepared and tested. The difference between two antiskid layers prepared with bitumen emulsion was the aggregate. The detailed angularity and form 2D index of fine aggregates used for antiskid surfaces, characterized by means of the Aggregate Image Measure System (AIMS) with micro image analysis methods, were then correlated with British Pendulum Number (BPN) values. Results indicate that skid resistance has the lowest value during the ice-melting process. The investigated antiskid layers can increase the surface friction during icy seasons. In icy conditions, the skid resistance behavior first worsens until reaches the lowest value, and then increases gradually with increasing temperature. Results from ice-melting conditions on four investigated pavement surfaces give the same temperature range where there will be lowest skid resistance. That temperature range is from 3 °C to 5 °C. A thicker ice layer will result in a lower skid resistance property and smaller “lowest BPN”.


2012 ◽  
Vol 550-553 ◽  
pp. 693-698 ◽  
Author(s):  
Yan Yang ◽  
Li Yi Dai ◽  
Jin Shou Wang ◽  
Hong Yan Zhou

We herein report the cyclo-dehydration of 1,4-butanediol (BD) assisted with additives to form tetrahydrofuran (THF) in near-critical water (NCW).Three additives including Fe2(SO4)3,ZnSO4 and NaHSO4 were screened. Effects of various experimental parameters such as temperature (260-340°C), time (60-180min), reactant/water ratio (r/w, 1:10-1:40) and pressure (15-25MPa) on the yield of THF were examined. Without the presence of additives, the results showed that increasing temperature favored the cyclo-dehydration of BD to form THF. The maximum yield (52.61 wt. %) was obtained at temperature of 340°C and time of 180 min. With the presence of additives, at temperature range of 260~300°C and time range of 60~130min, all the additives selected can promote the cyclo-dehydration of BD to yield THF. However, with further increasing temperature and time, the additives would suppress the formation of THF. The catalytic activity toward the production of THF in the order of Fe2(SO4)3> ZnSO4> NaHSO4. The maximum yield of THF assisted with Fe2(SO4)3 could reach as high as 59.85 wt. % at 320°C, 120 min. Large reactant/water ratio would not benefit the yield of THF because of the dilution of additive. Increasing the pressure will slightly increase the yield of THF. Base on experimental results, a possible reaction mechanism and pathway of dehydration of BD was proposed in NCW.


1998 ◽  
Vol 512 ◽  
Author(s):  
V. Ponnambalam ◽  
U. V. Varadaraju

ABSTRACTThe intermetallic compound RuAl2 with Nowotny chimney-ladder structure is synthesized using arc melting technique. The electrical resistity and thermo electric power measurements were carried out in the temperature range 300–1000K. The resistivity increases with increasing temperature and reaches a maximum value at about 700K. Thermo electric power (TEP) of the sample is negative and the value is about -80 µV/K at RT. The value increases with increasing temperature reaching a maximum value of -140 µV/K at about 600K. The compound exhibits temperature independent power factor in the temperature range 300–550K The calculated figure of merit 1.3 × K-1 is comparable to 7 × 10-4 K-1 of Si-Ge alloys which are used as high temperature thermoelectric materials.


1951 ◽  
Vol 29 (3) ◽  
pp. 243-252 ◽  
Author(s):  
W. G. Schneider

The velocity and absorption of ultrasound (600 kc.) has been measured throughout the critical temperature region of sulphur hexafluoride. Measurements were carried out for the coexisting liquid phase and vapor phase below Tc, and for the supercritical gas, and simultaneously, observations of the meniscus behavior in the neighborhood of Tc were made. The sound velocity for both liquid and vapor phases below Tc decreased with increasing temperature and became equal at Tc, the velocity at this point being 121.5 m. per sec. In the temperature range from 0.6° below Tc to Tc the velocity in the vapor was greater than that in the liquid. A very high absorption of sound was observed, having a maximum value at Tc and extending over a temperature range of approximately 1°. In the temperature range from Tc to 0.6° below Tc, the absorption in the liquid phase was greater than that in the vapour.


1988 ◽  
Vol 66 (4) ◽  
pp. 566-569 ◽  
Author(s):  
Peter J. Gardner ◽  
Peter Pang

The thermodynamics of the vaporization of liquid zinc chloride has been studied in the temperature range 638–978 K by the modified entrainment method. Enthalpy and entropy changes for vaporization have been derived for the monomer and dimer species. These values are unchanged in a melt contaminated with water at a mole ratio of 1%. The proportion of dimer in the saturated vapour is found to decrease with increasing temperature. The vapour pressure equations for monomer and dimer vaporization, ZnCl2(l) = ZnCl2(g) and 2ZnCl2(l) = Zn2Cl4(g) are In [p10/pӨ] = −(15300 ± 60)K/T + (15.39 ± 0.06) and In [p20/pӨ] = −(11000 ± 970)K/T + (6.5 ± 1.3) for the temperature range 640–980 K.


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