High-adhesion unlayered films: physical and technological basis of their production

Using the modernized three-electrode ion-plasma sputtering method, high-adhesion Cu-films without underlayer were obtained. Films were deposited on glass-ceramic (sitall) substrates. The film thickness was ~500 nm. In this case, the calculated cooling rate reached ~ 1012–1014 K/s. The adhesion properties of Cu films were investigated by the standard method of mechanical separation of the film from the substrate – the “fungus” method. It is established that such film adhesion is more than 20 MPa. It is determined that the obtained high adhesion depends on bias potential value. Using these Cu films in strip resonators without a sublayer makes it possible to increase their Q-factor by 1.5–1.7 times and thereby significantly reduce the resulting operating noise.

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XVII Межгосударственная конференция Термоэлектрики и их применения --- 2021" (ISCTA 2021 Санкт-Петербург, 13-16 сентября, 2021 Получение и исследование омических контактов с высокой адгезией к термоэлементам

Физика и техника полупроводников ◽

10.21883/ftp.2021.12.51689.01 ◽

2021 ◽

Vol 55 (12) ◽

pp. 1097

Author(s):

М.Ю. Штерн ◽

А.О. Козлов ◽

Ю.И. Штерн ◽

М.С. Рогачев ◽

Е.П. Корчагин ◽

...

Keyword(s):

Thin Film ◽

Thermoelectric Material ◽

Adhesive Strength ◽

Limiting Factor ◽

Film Coatings ◽

Plasma Sputtering ◽

Ion Plasma ◽

High Adhesion ◽

Material Contact ◽

Thermal Stable

The factors determining the adhesive strength of film coatings are considered. The functions of contacts in thermoelements used in a wide temperature range were determined. It was established that the adhesive strength of contact is a limiting factor in the mechanical strength of a thermoelement. A method of vacuum sputtering of thin-film contacts was proposed, including the surface treatment of samples of thermoelectric materials. The presence of a transition layer in the area of the metal - thermoelectric material contact, formed during the interaction of the metal with elements of the thermoelectric material, was established. The dependence of the adhesive strength of film contact on roughness of surface on which they formed was established. Thermal stable contacts for thermoelements with low resistivity of the order of 10-9 Ohm•m2 and high adhesion strength of at least 12 MPa were obtained by ion-plasma sputtering.

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INFLUENCE OF THE COMPOSITION OF THE RADIO-FREQUENCY SPUTTERING ATMOSPHERE ON THE DENSITY OF STATES AND INTERBAND LIGHT ABSORPTION IN THIN Y2O3 FILMS

Journal of Applied Spectroscopy ◽

10.47612/0514-7506-2021-88-6-881-886 ◽

2021 ◽

Vol 88 (6) ◽

pp. 881-886

Author(s):

O. M. Bordun ◽

I. O. Bordun ◽

I. M. Kofliuk ◽

I. Yo. Kukharskyy ◽

I. I. Medvid

Keyword(s):

Absorption Band ◽

Density Of States ◽

Interband Absorption ◽

Long Wavelength ◽

Plasma Sputtering ◽

Radio Frequency Sputtering ◽

Ion Plasma ◽

Quasi Classical Approximation ◽

Heavily Doped ◽

Interband Light Absorption

The long-wavelength edge of the fundamental absorption band of thin Y2O3 films obtained by radiofrequency ion-plasma sputtering is investigated. The edge of interband absorption after annealing of the films in an atmosphere of argon, oxygen, or a mixture of these gases is shown to be approximated well by the Urbach empirical rule. Diffractograms of the obtained films were studied and a model of a heavily doped or defective semiconductor in the quasi-classical approximation was used to analyze the experimental results. This model allows determining the radius of the basic electronic state, the screening radius, and the rootmean-square potential depending on the sputtering atmosphere.

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Physical model of «substrate-coating» system structuring in complex modification processes of surface layers in working parts of dies and press molds

Science intensive technologies in mechanical engineering ◽

10.30987/article_5bd8aa8a0c2539.01565105 ◽

2018 ◽

Vol 2018 (11) ◽

pp. 35-41

Author(s):

Олег Морозов ◽

Oleg Morozov ◽

Валерий Кокорин ◽

Valeriy Kokorin ◽

Владимир Табаков ◽

...

Keyword(s):

Plastic Deformation ◽

Physical Model ◽

Cold Plastic Deformation ◽

Coating System ◽

Resistant Steel ◽

Surface Layers ◽

Heat Resistant Steel ◽

Plasma Sputtering ◽

Ion Plasma ◽

Wear Coatings

Basic methods to increase durability of die working parts including processes of cold plastic deformation at anti-wear coatings application by a method of ion-plasma sputtering are considered. A physical model of cold plastic deformation of samples made of heat-resistant steel H12M is presented.

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Применение покрытий AlN для защиты поверхности гетероструктур системы AlGaAs/GaAs от взаимодействия с атмосферным кислородом

Письма в журнал технической физики ◽

10.21883/pjtf.2020.06.49158.18088 ◽

2020 ◽

Vol 46 (6) ◽

pp. 16

Author(s):

Е.В. Фомин ◽

А.Д. Бондарев ◽

И.П. Сошников ◽

N.B. Bercu ◽

L. Giraudet ◽

...

Keyword(s):

Protective Coatings ◽

Residual Pressure ◽

Aluminum Oxynitride ◽

Effective Protection ◽

Pure Nitrogen ◽

Plasma Sputtering ◽

Laser Heterostructures ◽

Ion Plasma ◽

Thin Aluminum ◽

Film Substrate

The paper presents the results of the synthesis of thin aluminum nitride films by reactive ion-plasma sputtering and the study of their properties with the aim of using as the protective coatings for the high-power AlxGa1-xAs/GaAs semiconductor laser heterostructures. EDS studies and ellipsometry showed that at a residual pressure in the chamber of the order of ~10-5 Torr, a layer of aluminum oxynitride is formed in the films. In this case, the film-substrate heterointerface can undergo oxidation. However, AlN films with a thickness of the order of 100 nm grown in a pure nitrogen medium with a residual pressure of ~10-7 Torr apparently do not contain oxygen, and can reliably prevent its penetration into the heterointerface region. Potentially, they can serve as effective protection for oxidation sensitive heterostructures.

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Production of modiﬁed adhesive composites based on EVA and modiﬁed PE

Plasticheskie massy ◽

10.35164/0554-2901-2020-1-2-45-47 ◽

2020 ◽

pp. 45-47

Author(s):

M. D. Sizova ◽

A. N. Zelenetsky ◽

V. Ya. Ivolgin

Keyword(s):

Maleic Anhydride ◽

Polymer Matrix ◽

Morphological Changes ◽

Adhesive Properties ◽

Adhesion Properties ◽

High Adhesion

An adhesive based on EVA and LDPE is developed which can be used up to 60°C. It was modiﬁed by polyisocyanate fragments of a grafted and reticulate nature for structural and morphological changes of the polymer matrix and improvement of physical, mechanical and adhesive properties. For additional compatibilization of the components, LDPE modiﬁed with maleic anhydride (MA) was used. High adhesion properties of the obtained composites were conﬁrmed.

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Топография поверхности и оптические характеристики тонких пленок AlN на подложке GaAs (100), полученных методом реактивного ионно-плазменного распыления

Письма в журнал технической физики ◽

10.21883/pjtf.2019.05.47396.17564 ◽

2019 ◽

Vol 45 (5) ◽

pp. 38

Author(s):

Е.В. Фомин ◽

А.Д. Бондарев ◽

A.I. Rumyantseva ◽

T. Maurer ◽

Н.А. Пихтин ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Refractive Index ◽

Surface Structure ◽

Optical Characteristics ◽

Process Conditions ◽

Antireflection Coatings ◽

Force Microscopy ◽

Plasma Sputtering ◽

Atomic Force ◽

Ion Plasma

AbstractA study of the surface topography and optical characteristics of thin AlN films used as passivating and antireflection coatings deposited on n -GaAs (100) substrates by reactive ion-plasma sputtering is reported. It was found that the process conditions affect the structure and the optical characteristics of the films, which makes it possible to obtain coatings with prescribed parameters. An analysis of the results furnished by ellipsometry and atomic-force microscopy of the surface shows that the refractive index of the films is correlated with the surface structure.

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HEAT AND EROSION-RESISTANT NANOSTRUCTURED COATINGS FOR GAS TURBINE ENGINES

Aviation ◽

10.3846/16487788.2013.861225 ◽

2013 ◽

Vol 17 (4) ◽

pp. 137-144 ◽

Cited By ~ 6

Author(s):

Aleksandrs Urbahs ◽

Konstantins Savkovs ◽

Margarita Urbaha ◽

Kristine Carjova

Keyword(s):

Gas Turbine ◽

Oxidation Process ◽

Sample Surface ◽

Turbine Engines ◽

Gas Turbine Engines ◽

Functional Coatings ◽

Temperature Oxidation ◽

Plasma Sputtering ◽

Ion Plasma ◽

Basic Features

This work analyses the characteristics of functional coatings obtained by vacuum ion-plasma sputtering. These coatings have three-layer multiphase structure created as a result of condensing aluminium and titanium according to a certain programme. The article presents the results of investigation into the heat-resistance of ion-plasma coatings based on Ti-Al-N for titanium alloy parts of gas turbine engines. Analysis of the oxidation process between a sample surface and coatings within the range of 500–825 °C was carried out. The basic features of the process of coating destruction under high-temperature oxidation conditions were determined by means of scanning electron microscopy. The results of the tests made it possible to state that the coatings developed are able to operate at temperatures of 600–750 °C.

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Evaluation of the Physical and Mechanical Characteristics of Ion-Plasma Antifriction Coatings Based on Ti-Cu

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.788.59 ◽

2018 ◽

Vol 788 ◽

pp. 59-67 ◽

Cited By ~ 2

Author(s):

Alexander Urbahs ◽

Konstantins Savkovs ◽

Margarita Urbaha ◽

Darja Andrejeva

Keyword(s):

Friction Coefficient ◽

Friction And Wear ◽

Mechanical Characteristics ◽

Plasma Coating ◽

Modern Method ◽

Plasma Sputtering ◽

Ion Plasma ◽

Antifriction Coatings ◽

Nitride Coatings ◽

Physical And Mechanical Characteristics

A modern method of processing steel parts by ion-plasma sputtering in vacuum is proposed as a solution to the problem of friction and wear. An ion-plasma coating based on Ti-Cu has been developed. Such parameters as microhardness, roughness, friction coefficient of the intermetallic, conglomerate and nitride coatings have been studied

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