NEW DIRECTIONS OF MODERNIZATION OF SILICON TECHNOLOGY OF SEMICONDUCTOR PURITY
2020 ◽
Keyword(s):
In the current economic conditions, a new approach to industrial methods of obtaining polycrystalline and monocrystalline silicon of semiconductor purity is required. This is a reduction in the cost and increase in the productivity of processes while ensuring their environmental safety (optimization of the used raw materials, a closed production cycle, a decrease in energy consumption, special methods of processing and alloying single crystals to control their mechanical properties, thermal stability and radiation resistance).
2016 ◽
Vol 881
◽
pp. 383-386
◽
Keyword(s):
2021 ◽
Vol 875
(1)
◽
pp. 012056
Keyword(s):
2017 ◽
1976 ◽
Vol 190
(1)
◽
pp. 153-161
◽
Keyword(s):
Keyword(s):