An Effective and Practical Analysis Technique for Open Defect Isolation at IDD Leakage Failure by Observing Transient Photo Emission

1998 ◽  
Author(s):  
A. Nishikawa ◽  
N.I. Kato ◽  
J. Matsuzawa ◽  
K. Takagi ◽  
N. Miura
Keyword(s):  
Failure Analysis ◽  
Transient Behavior ◽  
Cross Sectional ◽  
Root Cause ◽  
Analysis Technique ◽  
Defect Isolation ◽  
Electron Image ◽  
Open Defects ◽  
Leakage Failure ◽  
Current Emission

Abstract A new analysis method using conventional emission microscopy (EMS) was developed for localizing open defects in CMOS LSIs. EMS is widely used for failure analysis of IDD (power supply current) leakage failures. The root cause of a failure is deduced by considering the emission characteristics associated with the IDD leakage current, emission shape, emission energy spectrum, and exact location on an Si die. Our new technique focuses on the observation of transient photoemission immediately after VDD application. During IDD leakage failure analysis, unique transient photoemission characteristics are observed. Immediately after VDD application, strong photoemission is briefly observed at the drain edge of an n-FET, but disappears after stabilization of the IDD current. We assumed that temporary photoemission would not be generated in transient behavior unless some kind of open defects were located at a specific conductor connected to the gate electrode. This mechanism was verified by nonbiased charge-up contrast of a conventional secondary electron image (SEI) and cross-sectional SEM observation at the defective open location. The dynamic method of observing transient photoemission proposed here is a very effective and practical way for detecting the locations of open failures in CMOS LSIs. Some examples of open mode failure analysis are described, along with cross-sectional TEM observations.

Advanced IR-OBIRCH Analysis Technique for High Isb Failure Analysis

2010 ◽  
Author(s):  
Kuo Hsiung Chen ◽  
Wen Sheng Wu ◽  
Yu Hsiang Shu ◽  
Jian Chan Lin
Keyword(s):  
Failure Analysis ◽  
Failure Mechanisms ◽  
Fault Localization ◽  
Resistance Change ◽  
The Real ◽  
Analysis Techniques ◽  
Analysis Technique ◽  
Leakage Failure ◽  
Failure Site

Abstract IR-OBIRCH (Infrared Ray – Optical Beam Induced Resistance Change) is one of the main failure analysis techniques [1] [2] [3] [4]. It is a useful tool to do fault localization on leakage failure cases such as poor Via or contact connection, FEoL or BEoL pattern bridge, and etc. But the real failure sites associated with the above failure mechanisms are not always found at the OBIRCH spot locations. Sometimes the real failure site is far away from the OBIRCH spot and it will result in inconclusive PFA Analysis. Finding the real failure site is what matters the most for fault localization detection. In this paper, we will introduce one case using deep sub-micron process generation which suffers serious high Isb current at wafer donut region. In this case study a BEoL Via poor connection is found far away from the OBIRCH spots. This implies that layout tracing skill and relation investigation among OBIRCH spots are needed for successful failure analysis.

Failure Analysis of a Qualification Unit Injector for a Satellite Thruster

1998 ◽  
Author(s):  
M. Lipschutz ◽  
R. Brannam ◽  
T. Nguyentat
Keyword(s):  
Failure Analysis ◽  
Cross Section ◽  
Combustion Products ◽  
Design Parameters ◽  
Cross Sectional ◽  
X Ray ◽  
Root Cause ◽  
Qualification Testing ◽  
Non Destructive ◽  
Unit Injector

Abstract This article details the results of a failure analysis performed on a Qualification Unit injector for a military satellite thrusters and explains that the failure was initially detected due to a shift in performance during qualification testing. Failure analysis involved non-destructive evaluation on the injector using micro-focus X-ray and scanning electron microscopy. Serial cross-sectional metallography was then performed, with each cross-section documented by optical microscopy and SEM. The failure analysis resulted in three main conclusions: (1) the root cause of the failure was attributed to multiple detonations in or around the damaged orifice; these detonations were likely caused by fuel and/or combustion products condensing in the orifice between pulses and then igniting during a subsequent pulse; (2) multiple damage mechanisms were identified in addition to the ZOT detonations; and (3) the material and platelet manufacturing process met all design parameters.

Application of B-Scan SAT Mode, an Acoustic Cross Section Technique to Analyze Packaged Components beyond Delamination

2020 ◽  
Author(s):  
Srinath Rajaram ◽  
Denise Barrientos ◽  
Nadia Ahmad ◽  
Robert Carpenter ◽  
Eric Barbian
Keyword(s):  
Failure Analysis ◽  
Integrated Circuit ◽  
Turnaround Time ◽  
Destructive Testing ◽  
Cross Sectional ◽  
Root Cause ◽  
Section Technique ◽  
Customer Returns ◽  
Tomography Method ◽  
Non Destructive

Abstract Failure Analysis labs involved in customer returns always face a greater challenge, demand from customer for a faster turnaround time to identify the root cause of the failure. Unfortunately, root cause identification in failure analysis is often performed incompletely or rushing into destructive techniques, leading to poor understanding of the failure mechanism and root-cause, customer dissatisfaction. Scanning Acoustic Tomography (SAT), also called Scanning Acoustic Microscope (SAM) has been adopted by several Failure Analysis labs because it provides reliable non-destructive imaging of package cracks and delamination. The SAM is a vital tool in the effort to analyze molded packages. This paper provides a review of non-destructive testing method used to evaluate Integrated Circuit (IC) package. The case studies discussed in this paper identifies different types of defects and the capabilities of B-Scan (cross-sectional tomography) method employed for defect detection beyond delamination.

Defect Isolation Tools Accelerate the Failure Analysis Process

2013 ◽  
Author(s):  
Adam Winterstrom ◽  
Kevin Meehan ◽  
Ralph Sanchez ◽  
Rich Ackerman
Keyword(s):  
Failure Analysis ◽  
Case Studies ◽  
Lead Time ◽  
Functional Test ◽  
Diagnostic Process ◽  
Successful Completion ◽  
Root Cause ◽  
Analysis Process ◽  
Scan Test ◽  
Defect Isolation

Abstract This paper presents case studies that highlight the use of novel scan technologies and techniques to quickly test, diagnose, localize, and isolate the root cause of the defects, demonstrating that the solution meets the rapid and constant changing demands of industry. Cases include a device that has seemingly passed the functional test, but not the scan test with emission; a device with emission requiring resolution to its location; and a device having a timing issue that does not have emission. All case studies concluded with successful completion of finding the root cause of the defect. The diagnosis time for each of the three devices was within a period of one to three days per device. The confirmation stage of the defect is the longest lead time of the diagnostic process.

Failure Analysis of Tungsten Stud Defect from the CMP Process

2000 ◽  
Author(s):  
K. Takagi ◽  
Y. Kohno ◽  
S. Nukii
Keyword(s):  
Electron Microscopy ◽  
Failure Analysis ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Characterization ◽  
Open Circuit ◽  
Physical Analysis ◽  
Metal Line ◽  
Cross Sectional ◽  
Defect Isolation

Abstract This paper describes a failure analysis that effectively combined multiple analytic techniques to find the cause of I/O leakage in a flawed chip produced for an OEM (Original Equipment Manufacturer) product. Internal probing was initially used for defect isolation and a Tungsten (W) stud open circuit flaw was isolated by electrical characterization with internal probing. SEM (Scanning Electron Microscopy), TEM (Transmission Electron Microscopy, and FE-AES (Field Emission Auger Electron Spectroscopy) analysis with FIB (Focused Ion Beam) preparation were used for physical analysis. Cross-sectional SEM and TEM observations showed a gap with foreign material (FM) between the bottom of the metal line and the top of the W stud, possibly from the W CMP (chemical mechanical polish) process. FE-AES is effective for the analysis of light materials and their chemical composition, so a flat milling FIB process was used to prepare a cross-section for FE-AES analysis of the FM and the interfaces of the open defect. The spectra showed that the FM was traceable to the W CMP process. From these analytical results and problem reproduction experiments in the W CMP process on the manufacturing line, the failure mechanism was identified.

Root Cause Finding of a Diode Leakage Failure Using Scanning Magnetic Microscopy and ToF-SIMS as Key Methods

2006 ◽  
Author(s):  
H. Preu ◽  
W. Mack ◽  
T. Kilger ◽  
B. Seidl ◽  
J. Walter ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Quantum Interference ◽  
Leakage Currents ◽  
Root Cause ◽  
Microelectronic Devices ◽  
Successful Approach ◽  
Magnetic Microscopy ◽  
Leakage Failure ◽  
Root Cause Identification

Abstract One challenge in failure analysis of microelectronic devices is the localization and root cause finding of leakage currents in passives. In this case study we present a successful approach for failure analysis of a diode leakage failure. An analytical flow will be introduced, which contains standard techniques as well as SQUID (superconducting quantum interference device) scanning magnetic microscopy and ToFSIMS as key methods for localization and root cause identification. [1]

Advanced Scan Chain Failure Analysis Using Laser Modulation Mapping and Continuous Wave Probing

2011 ◽  
Author(s):  
Steven Kasapi ◽  
William Lo ◽  
Joy Liao ◽  
Bruce Cory ◽  
Howard Marks
Keyword(s):  
Failure Analysis ◽  
Continuous Wave ◽  
Wafer Level ◽  
Root Cause ◽  
Non Invasive ◽  
Laser Probing ◽  
Volume Yield ◽  
Scan Chain ◽  
Leakage Failure ◽  
Root Cause Identification

Abstract A variety of EFA techniques have been deployed to improve scan chain failure isolation. In contrast to other laser techniques, modulation mapping (MM) does not require electrically perturbing of the device. Beginning with a review of MM and continuous-wave (CW) probing as well as shift debug using MM, this paper presents three case studies involving scan chains with subtle resistive and leakage failure mechanisms, including transition, bridge, and slow-to-rise/fall failures, using a combination of these techniques. Combining modulation mapping with laser probing has proven to be a very effective and efficient methodology for isolating shift defects, even challenging timing-related shift defects. So far, every device submitted for physical failure analysis using this workflow has led to successful root cause identification. The techniques are sufficiently non-invasive and straightforward that they can be successfully applied at wafer level for volume, yield-oriented EFA.

Vdd Leakage Analysis by a Combination of Various Failure Analysis Techniques

2008 ◽  
Author(s):  
Z. G. Song ◽  
S. B. Ippolito ◽  
P. J. McGinnis ◽  
A. Shore ◽  
B. Paulucci ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Hot Spot ◽  
Fault Isolation ◽  
Physical Analysis ◽  
Analysis Techniques ◽  
Root Cause ◽  
Defect Location ◽  
Analysis Methodology ◽  
Analysis Process ◽  
Leakage Failure

Abstract It is generally accepted that the fault isolation of Vdd short and leakage can be globally addressed by liquid crystal analysis (LCA), photoemission analysis and/or laser stimulating techniques such as OBIRCH or TIVA. However, the hot spot detected by these techniques may be a secondary effect, rather than the exact physical defect location. Further electrical probing with knowledge of the circuit schematic and layout may still be required to pinpoint the exact physical defect location, so that a suitable physical analysis methodology can be chosen to identify the root cause of the failure. This paper has described a thorough analysis process for Vdd leakage failure by a combination of various failure analysis techniques and finally the root cause of the Vdd leakage was identified.

Unique Approaches to Isolate Nanoscale Defect in Snake-Comb Test Structure

2015 ◽  
Author(s):  
Sujing Xie ◽  
Nathan Wang ◽  
Chaoying Chen ◽  
Qindi Wu
Keyword(s):  
Failure Analysis ◽  
Electrical Resistance ◽  
Test Structure ◽  
Yield Enhancement ◽  
Nanometer Scale ◽  
Cross Sectional ◽  
Root Cause ◽  
Unique Approach ◽  
Voltage Contrast ◽  
Root Cause Identification

Abstract Multiple techniques including electrical resistance measurement plus calculation, cross-sectional view of passive voltage contrast (XPVC) sequential searching, planar and cross-section STEM are successfully used to isolate a nanoscale defect, single metallic stringer in a snakecomb test structure. The defect could not be found by traditional failure analysis methods or procedures. The unique approach presented here, expands failure analysis capabilities to the detection of nanometer-scale defects and the identification of their root causes. With continuous shrinking feature sizes, the need of such techniques becomes more vital to failure analysis and root cause identification, and therefore yield enhancement in fabrication.

Cross Sectional Passive Voltage Contrast Approach for Gate Oxide Breakdown Defect Isolation and Visualization for TEM Analysis

2020 ◽  
Author(s):  
S.L. Ting ◽  
P.K. Tan ◽  
Y.L. Pan ◽  
H.H.W. Thoungh ◽  
S.Y. Thum ◽  
...  
Keyword(s):  
Complex Structure ◽  
Breakdown Point ◽  
Gate Oxide ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Oxide Breakdown ◽  
Root Cause ◽  
Polysilicon Gate ◽  
Defect Isolation ◽  
Voltage Contrast

Abstract Gate oxide breakdown has always been a critical reliability issue in Complementary Metal-Oxide-Silicon (CMOS) devices. Pinhole analysis is one of the commonly use failure analysis (FA) technique to analysis Gate oxide breakdown issue. However, in order to have a better understanding of the root cause and mechanism, a defect physically without any damaged or chemical attacked is required by the customer and process/module departments. In other words, it is crucial to have Transmission Electron Microscopy (TEM) analysis at the exact Gate oxide breakdown point. This is because TEM analysis provides details of physical evidence and insights to the root cause of the gate oxide failures. It is challenging to locate the site for TEM analysis in cases when poly gate layout is of a complex structure rather than a single line. In this paper, we developed and demonstrated the use of cross-sectional Scanning Electron Microscope (XSEM) passive voltage contrast (PVC) to isolate the defective leaky Polysilicon (PC) Gate and subsequently prepared TEM lamella in a perpendicular direction from the post-XSEM PVC sample. This technique provides an alternative approach to identify defective leaky polysilicon Gate for subsequent TEM analysis.

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