scholarly journals Analysis of the Failure and Performance Variation Mechanism of MEMS Suspended Inductors with Auxiliary Pillars under High-g Shock

Micromachines ◽  
2020 ◽  
Vol 11 (11) ◽  
pp. 957
Author(s):  
Lixin Xu ◽  
Yiyuan Li ◽  
Jianhua Li

Microelectromechanical systems (MEMS) suspended inductors have excellent radio frequency (RF) performance and they are compatible with integrated circuit (IC). They will be shocked during manufacturing, transportation, and operation; in some applications, the shock amplitude can be as high as tens of thousands of gravitational acceleration (g, 9.8 m/s2). High-g shock will lead to the inductor deformation which affects its performance or even failure of the inductor structure. However, few studies have been carried out on the inductors under high-g shock. In this study, a kind of MEMS suspended inductor with excellent RF and mechanical performance is designed and fabricated. The failure and performance variation mechanism of the inductor under high-g shock is analyzed by measuring and comparing the performance measurement results and the π model parameters extraction results of the inductors before and after air cannon shock test. The results show that the increase of energy loss caused by substrate parasitic effect and the properties variation of the coil material affected by high-g shock are the main reasons for the decrease of RF performance parameters, and the critical stress exceeding the interlayer adhesion is the main reason for the failure of the inductor.

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 353
Author(s):  
Bin Zhang ◽  
Hongsheng Liu ◽  
Dezhi Li ◽  
Jinhui Liang ◽  
Jun Gao

Energy harvesting using piezoceramic has drawn a lot of attention in recent years. Its potential usage in microelectromechanical systems is starting to become a reality thanks to the development of an integrated circuit. An accurate equivalent circuit of piezoceramic is important in energy harvesting and the sensing system. A piezoceramic is always considered to be a current source according to empirical testing, instead of the derivation from its piezoelectric characteristics, which lacks accuracy under complicated mechanical excitation situations. In this study, a new current output model is developed to accurately estimate its value under various kinds of stimulation. Considering the frequency, amplitude and preload variation imposed on a piezoceramic, the multivariate model parameters are obtained in relation to piezo coefficients. Using this model, the current output could be easily calculated without experimental testing in order to quickly estimate the output power in energy harvesting whatever its geometric shape and the various excitations.


2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.


2019 ◽  
Vol 92 (3) ◽  
pp. 481-495 ◽  
Author(s):  
Jozsef Kantor ◽  
Elizabeth A. Collister ◽  
Judit E. Puskas ◽  
Michael P. Mallamaci ◽  
Val C. Comes

ABSTRACT The mechanical performance of thermoplastic elastomeric polyurethanes (PUs) before and after hydrolysis is investigated. These new PUs were prepared with a new asymmetric polyisobutylene-diol (PIB-diol), without the use of solvents, and with short reaction times. The PUs were made with dicyclohexylmethane 4,4′-diisocyanate and 1,4-butanediol in the hard segments and poly(hexamethylene carbonate) (PC)-diol and polyisobutylene (PIB)-diol in the soft segments. The functionality of PIB-diol was verified by mass spectrometry. Optimum solventless synthesis conditions and performance were found with a mixture of 50/50 PIB-diol/PC-diol (28.9 wt% PIB in the PU). This PU had 26.03 ± 1.19 MPa tensile strength with 286.92 ± 12.17% elongation before and 16.22 ± 0.65 with 301.17 ± 15.08% elongation after American Society for Testing and Materials (ASTM) hydrolytic stability testing. Importantly, after the hydrolytic stability testing, the stress–strain plot of this PIB–PU was similar to that of the control PC–PU. The PU with 70/30 PIB-diol/PC-diol (41.2 wt% PIB in the PU) performed slightly better but needed solvent during synthesis because of the high viscosity of the mixtures.


2021 ◽  
Vol 8 ◽  
Author(s):  
Hao Liu ◽  
Man Zhao ◽  
Yufeng Zhou ◽  
Gang Liu

Crystallographic texture is related to the anisotropy or isotropy of material physical properties, including mechanical performance. The crystallographic effect in micromachining is more significant than that in macro-processing owing to that the depth of the cut and the grain size are in the same order. It is of great significance to model the crystallographic texture evolution induced by mechanical and thermal load during micro-machining to investigate the surface integrity and performance of the finished product. This study performed hot deformation experiments of Al alloy 7075 (AA7075) under various input parameters, including the temperature, temperature rate, stain rate, and strain, which was designed using the Taguchi method. Following that, crystallographic orientation of the samples before and after the deformation was tested using electron back-scattered diffraction (EBSD). Then, the crystallographic texture evolution was modeled with the parameters obtained by fitting a part of the experimental data. The crystallographic texture evolution of AA7075 under different levels of input parameters is studied and analyzed. Finally, the sensitivity of crystallographic orientation evolution to the process parameter is analyzed. The results indicate that these four input parameters have a significant impact on some crystallographic texture of the specimens. The proposed model is instructive in the future investigation of micromachining and microstructure evolution.


2011 ◽  
Vol 332-334 ◽  
pp. 1308-1311
Author(s):  
Jing Yan ◽  
Wei Min Kang

A new kind of polypropylene spun-bonded nonwovens (PSN) with excellent hydrophilic property was developed after finished with S 6237 hydrophilic agent. The infiltration time (IT) and the runoff (RO) were tested to evaluate the hydrophilicity of the finished PSN. The impacts of different agent concentrations, drying temperatures and drying time on hydrophilicity were investigated and PSN before and after finished were compared concerning softness, air penetrability, moisture regain and stretch performance. The results show that the optimum technological condition for the hydrophilicity is agent concentration: 4 %, drying time: 30s and drying temperatures: 120 °C, and the IT and the RO for the first time are 1.82s and 1.8% respectively. Softness and air penetrability of the finished PSN were improved significantly but mechanical performance was merely decrease a little.


Author(s):  
R. M. Anderson

Aluminum-copper-silicon thin films have been considered as an interconnection metallurgy for integrated circuit applications. Various schemes have been proposed to incorporate small percent-ages of silicon into films that typically contain two to five percent copper. We undertook a study of the total effect of silicon on the aluminum copper film as revealed by transmission electron microscopy, scanning electron microscopy, x-ray diffraction and ion microprobe techniques as a function of the various deposition methods.X-ray investigations noted a change in solid solution concentration as a function of Si content before and after heat-treatment. The amount of solid solution in the Al increased with heat-treatment for films with ≥2% silicon and decreased for films <2% silicon.


Author(s):  
Fenglei Du ◽  
Greg Bridges ◽  
D.J. Thomson ◽  
Rama R. Goruganthu ◽  
Shawn McBride ◽  
...  

Abstract With the ever-increasing density and performance of integrated circuits, non-invasive, accurate, and high spatial and temporal resolution electric signal measurement instruments hold the key to performing successful diagnostics and failure analysis. Sampled electrostatic force microscopy (EFM) has the potential for such applications. It provides a noninvasive approach to measuring high frequency internal integrated circuit signals. Previous EFMs operate using a repetitive single-pulse sampling approach and are inherently subject to the signal-to-noise ratio (SNR) problems when test pattern duty cycle times become large. In this paper we present an innovative technique that uses groups of pulses to improve the SNR of sampled EFM systems. The approach can easily provide more than an order-ofmagnitude improvement to the SNR. The details of the approach are presented.


2020 ◽  
Vol 96 (3s) ◽  
pp. 321-324
Author(s):  
Е.В. Ерофеев ◽  
Д.А. Шишкин ◽  
В.В. Курикалов ◽  
А.В. Когай ◽  
И.В. Федин

В данной работе представлены результаты разработки СВЧ монолитной интегральной схемы шестиразрядного фазовращателя и усилителя мощности диапазона частот 26-30 ГГц. СКО ошибки по фазе и амплитуде фазовращателя составили 1,2 град. и 0,13 дБ соответственно. Максимальная выходная мощность и КПД по добавленной мощности усилителя в точке сжатия Ку на 1 дБ составили 30 дБм и 20 % соответственно. This paper describes the design, layout, and performance of 6-bit phase shifter and power amplifier monolithic microwave integrated circuit (MMIC), 26-30 GHz band. Phase shifter MMIC has RMS phase error of 1.2 deg. And RMD amplitude error is 0.13 dB. MMIC power amplifier has output power capability of 30 dBm at 1 dB gain compression (P-1dB) and PAE of 20 %.


Author(s):  
José Capmany ◽  
Daniel Pérez

Programmable Integrated Photonics (PIP) is a new paradigm that aims at designing common integrated optical hardware configurations, which by suitable programming can implement a variety of functionalities that, in turn, can be exploited as basic operations in many application fields. Programmability enables by means of external control signals both chip reconfiguration for multifunction operation as well as chip stabilization against non-ideal operation due to fluctuations in environmental conditions and fabrication errors. Programming also allows activating parts of the chip, which are not essential for the implementation of a given functionality but can be of help in reducing noise levels through the diversion of undesired reflections. After some years where the Application Specific Photonic Integrated Circuit (ASPIC) paradigm has completely dominated the field of integrated optics, there is an increasing interest in PIP justified by the surge of a number of emerging applications that are and will be calling for true flexibility, reconfigurability as well as low-cost, compact and low-power consuming devices. This book aims to provide a comprehensive introduction to this emergent field covering aspects that range from the basic aspects of technologies and building photonic component blocks to the design alternatives and principles of complex programmable photonics circuits, their limiting factors, techniques for characterization and performance monitoring/control and their salient applications both in the classical as well as in the quantum information fields. The book concentrates and focuses mainly on the distinctive features of programmable photonics as compared to more traditional ASPIC approaches.


2021 ◽  
Vol 99 (3) ◽  
Author(s):  
Y Zhu ◽  
L J Johnston ◽  
M H Reese ◽  
E S Buchanan ◽  
J E Tallaksen ◽  
...  

Abstract This study was conducted to evaluate whether cooled floor pads combined with chilled drinking water could alleviate negative impacts of heat stress on lactating sows. Thirty sows (Landrace × Yorkshire, Parity = 1 to 6) were housed in individual farrowing stalls in two rooms with temperatures being controlled at 29.4°C (0700–1900 hours) and 23.9°C (1900–0700 hours). Sows in one room (Cool), but not in the other room (Control) were provided cooled floor pads (21–22°C) and chilled drinking water (13–15°C). Behavior of sows (15 sows/treatment) was video recorded during farrowing, and days 1, 3, 7, 14, and 21 after farrowing. Videos were viewed continuously to register the birth time of each piglet, from which total farrowing duration and birth intervals were calculated. The number of drinking bouts and the duration of each drinking bout were registered for each sow through viewing videos continuously for 2 h (1530–1730 hours) each video-recording day. Postures (lying laterally, lying ventrally, sitting, and standing) were recorded by scanning video recordings at 5-min intervals for 24 h each video-recording day, and time budget for each posture was calculated. Rectal temperature and respiration rate were measured for all sows the day before and after farrowing, and then once weekly. Sow and litter performance was recorded. Data were analyzed using the Glimmix procedure of SAS. The cooling treatment did not affect sow behavior or litter performance. Sows in the Cool room had lower rectal temperature (P = 0.03) and lower respiration rate (P &lt; 0.001), consumed more feed (P = 0.03), tended to have reduced weight loss (P = 0.07), and backfat loss (P = 0.07) during lactation than sows in the Control room. As lactation progressed, sows increased drinking frequency (P &lt; 0.001) and time spent lying ventrally (P &lt; 0.0001), standing (P &lt; 0.001), and sitting (P &lt; 0.0001), and decreased time spent lying laterally (P &lt; 0.0001) in both Cool and Control rooms. While cooled floor pads combined with chilled drinking water did not affect sow behavior, they did alleviate heat stress partially, as indicated by decreased rectal temperature, respiration rate, weight, and backfat loss, and increased feed intake in lactating sows.


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