scholarly journals Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Molecules ◽  
2021 ◽  
Vol 26 (18) ◽  
pp. 5621
Author(s):  
Racim Radjef ◽  
Karyn L. Jarvis ◽  
Colin Hall ◽  
Andrew Ang ◽  
Bronwyn L. Fox ◽  
...  

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical properties make them attractive as energy adsorbing layers for a range of applications, including carbon fibre composites. In this study, a new radio frequency (RF) plasma-enhanced chemical vapour deposition (PECVD) plasma reactor was designed with the capability to coat fibres with an energy adsorbing film. A key characterisation step for the system was establishing how the properties of the TMDSO films could be modified and compared with those deposited using a well-characterized microwave (MW) PECVD reactor. Film thickness and chemistry were determined with ellipsometry and X-ray photoelectron spectroscopy, respectively. The mechanical properties were investigated by nanoindentation and atomic force microscopy with peak-force quantitative nanomechanical mapping. The RF PECVD films had a greater range of Young’s modulus and hardness values than the MW PECVD films, with values as high as 56.4 GPa and 7.5 GPa, respectively. These results demonstrated the varied properties of TMDSO films that could in turn be deposited onto carbon fibres using a custom-built RF PECVD reactor.

Coatings ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 234 ◽  
Author(s):  
Žiga Gosar ◽  
Janez Kovač ◽  
Miran Mozetič ◽  
Gregor Primc ◽  
Alenka Vesel ◽  
...  

The deposition of protective coatings on aluminised polymer substrates by a plasma enhanced chemical vapour deposition PECVD technique in a plasma reactor with a volume of 5 m3 was studied. HMDSO was used as a precursor. Plasma was sustained in a capacitively coupled radiofrequency (RF) discharge powered by an RF generator operating at 40 kHz and having an adjustable output power up to 8 kW. Gaseous plasma was characterised by residual gas mass spectrometry and optical emission spectroscopy. Polymer samples with an average roughness of approximately 5 nm were mounted into the plasma reactor and subjected to a protocol for activation, metallisation and deposition of the protective coating. After depositing the protective coating, the samples were characterised by secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS). The combination of various techniques for plasma and coating characterisation provided insight into the complex gas-phase and surface reactions upon deposition of the protective coatings in the industrial-size plasma reactor.


Coatings ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 510
Author(s):  
Yongqiang Pan ◽  
Huan Liu ◽  
Zhuoman Wang ◽  
Jinmei Jia ◽  
Jijie Zhao

SiO2 thin films are deposited by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) technique using SiH4 and N2O as precursor gases. The stoichiometry of SiO2 thin films is determined by the X-ray photoelectron spectroscopy (XPS), and the optical constant n and k are obtained by using variable angle spectroscopic ellipsometer (VASE) in the spectral range 380–1600 nm. The refractive index and extinction coefficient of the deposited SiO2 thin films at 500 nm are 1.464 and 0.0069, respectively. The deposition rate of SiO2 thin films is controlled by changing the reaction pressure. The effects of deposition rate, film thickness, and microstructure size on the conformality of SiO2 thin films are studied. The conformality of SiO2 thin films increases from 0.68 to 0.91, with the increase of deposition rate of the SiO2 thin film from 20.84 to 41.92 nm/min. The conformality of SiO2 thin films decreases with the increase of film thickness, and the higher the step height, the smaller the conformality of SiO2 thin films.


Author(s):  
Tianlei Ma ◽  
Marek Nikiel ◽  
Andrew G. Thomas ◽  
Mohamed Missous ◽  
David J. Lewis

AbstractIn this report, we prepared transparent and conducting undoped and molybdenum-doped tin oxide (Mo–SnO2) thin films by aerosol-assisted chemical vapour deposition (AACVD). The relationship between the precursor concentration in the feed and in the resulting films was studied by energy-dispersive X-ray spectroscopy, suggesting that the efficiency of doping is quantitative and that this method could potentially impart exquisite control over dopant levels. All SnO2 films were in tetragonal structure as confirmed by powder X-ray diffraction measurements. X-ray photoelectron spectroscopy characterisation indicated for the first time that Mo ions were in mixed valence states of Mo(VI) and Mo(V) on the surface. Incorporation of Mo6+ resulted in the lowest resistivity of $$7.3 \times 10^{{ - 3}} \Omega \,{\text{cm}}$$ 7.3 × 10 - 3 Ω cm , compared to pure SnO2 films with resistivities of $$4.3\left( 0 \right) \times 10^{{ - 2}} \Omega \,{\text{cm}}$$ 4.3 0 × 10 - 2 Ω cm . Meanwhile, a high transmittance of 83% in the visible light range was also acquired. This work presents a comprehensive investigation into impact of Mo doping on SnO2 films synthesised by AACVD for the first time and establishes the potential for scalable deposition of SnO2:Mo thin films in TCO manufacturing. Graphical abstract


2014 ◽  
Vol 32 ◽  
pp. 1460342
Author(s):  
Si Ci Ong ◽  
Usman Ilyas ◽  
Rajdeep Singh Rawat

Zinc oxide, ZnO , a popular semiconductor material with a wide band gap (3.37 eV) and high binding energy of the exciton (60 meV), has numerous applications such as in optoelectronics, chemical/biological sensors, and drug delivery. This project aims to (i) optimize the operating conditions for growth of ZnO nanostructures using the chemical vapor deposition (CVD) method, and (ii) investigate the effects of coupling radiofrequency (RF) plasma to the CVD method on the quality of ZnO nanostructures. First, ZnO nanowires were synthesized using a home-made reaction setup on gold-coated and non-coated Si (100) substrates at 950 °C. XRD, SEM, EDX, and PL measurements were used for characterizations and it was found that a deposition duration of 10 minutes produced the most well-defined ZnO nanowires. SEM analysis revealed that the nanowires had diameters ranging from 30-100 mm and lengths ranging from 1-4 µm. In addition, PL analysis showed strong UV emission at 380 nm, making it suitable for UV lasing. Next, RF plasma was introduced for 30 minutes. Both remote and in situ RF plasma produced less satisfactory ZnO nanostructures with poorer crystalline structure, surface morphology, and optical properties due to etching effect of energetic ions produced from plasma. However, a reduction in plasma discharge duration to 10 minutes produced thicker and shorter ZnO nanostructures. Based on experimentation conducted, it is insufficient to conclude that RF plasma cannot aid in producing well-defined ZnO nanostructures. It can be deduced that the etching effect of energetic ions outweighed the increased oxygen radical production in RF plasma nanofabrication.


Polymers ◽  
2021 ◽  
Vol 13 (16) ◽  
pp. 2588
Author(s):  
Mansuri M. Tosif ◽  
Agnieszka Najda ◽  
Aarti Bains ◽  
Grażyna Zawiślak ◽  
Grzegorz Maj ◽  
...  

In recent years, scientists have focused on research to replace petroleum-based components plastics, in an eco-friendly and cost-effective manner, with plant-derived biopolymers offering suitable mechanical properties. Moreover, due to high environmental pollution, global warming, and the foreseen shortage of oil supplies, the quest for the formulation of biobased, non-toxic, biocompatible, and biodegradable polymer films is still emerging. Several biopolymers from varied natural resources such as starch, cellulose, gums, agar, milk, cereal, and legume proteins have been used as eco-friendly packaging materials for the substitute of non-biodegradable petroleum-based plastic-based packaging materials. Among all biopolymers, starch is an edible carbohydrate complex, composed of a linear polymer, amylose, and amylopectin. They have usually been considered as a favorite choice of material for food packaging applications due to their excellent forming ability, low cost, and environmental compatibility. Although the film prepared from bio-polymer materials improves the shelf life of commodities by protecting them against interior and exterior factors, suitable barrier properties are impossible to attain with single polymeric packaging material. Therefore, the properties of edible films can be modified based on the hydrophobic–hydrophilic qualities of biomolecules. Certain chemical modifications of starch have been performed; however, the chemical residues may impart toxicity in the food commodity. Therefore, in such cases, several plant-derived polymeric combinations could be used as an effective binary blend of the polymer to improve the mechanical and barrier properties of packaging film. Recently, scientists have shown their great interest in underutilized plant-derived mucilage to synthesize biodegradable packaging material with desirable properties. Mucilage has a great potential to produce a stable polymeric network that confines starch granules that delay the release of amylose, improving the mechanical property of films. Therefore, the proposed review article is emphasized on the utilization of a blend of source and plant-derived mucilage for the synthesis of biodegradable packaging film. Herein, the synthesis process, characterization, mechanical properties, functional properties, and application of starch and mucilage-based film are discussed in detail.


Membranes ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 373
Author(s):  
Wen-Yen Lin ◽  
Feng-Tsun Chien ◽  
Hsien-Chin Chiu ◽  
Jinn-Kong Sheu ◽  
Kuang-Po Hsueh

Zirconium-doped MgxZn1−xO (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO2 (75/20/5 wt%) target. Hall measurement, X-ray diffraction (XRD), transmittance, and X-ray photoelectron spectroscopy (XPS) data were obtained. The lowest sheet resistance, highest mobility, and highest concentration were 1.30 × 103 Ω/sq, 4.46 cm2/Vs, and 7.28 × 1019 cm−3, respectively. The XRD spectra of the as-grown and annealed Zr-doped MZO films contained MgxZn1−xO(002) and ZrO2(200) coupled with Mg(OH)2(101) at 34.49°, 34.88°, and 38.017°, respectively. The intensity of the XRD peak near 34.88° decreased with temperature because the films that segregated Zr4+ from ZrO2(200) increased. The absorption edges of the films were at approximately 348 nm under 80% transmittance because of the Mg content. XPS revealed that the amount of Zr4+ increased with the annealing temperature. Zr is a potentially promising double donor, providing up to two extra free electrons per ion when used in place of Zn2+.


2021 ◽  
pp. 002199832199945
Author(s):  
Jong H Eun ◽  
Bo K Choi ◽  
Sun M Sung ◽  
Min S Kim ◽  
Joon S Lee

In this study, carbon/epoxy composites were manufactured by coating with a polyamide at different weight percentages (5 wt.%, 10 wt.%, 15 wt.%, and 20 wt.%) to improve their impact resistance and fracture toughness. The chemical reaction between the polyamide and epoxy resin were examined by fourier transform infrared spectroscopy, differential scanning calorimetry and X-ray photoelectron spectroscopy. The mechanical properties and fracture toughness of the carbon/epoxy composites were analyzed. The mechanical properties of the carbon/epoxy composites, such as transverse flexural tests, longitudinal flexural tests, and impact tests, were investigated. After the impact tests, an ultrasonic C-scan was performed to reveal the internal damage area. The interlaminar fracture toughness of the carbon/epoxy composites was measured using a mode I test. The critical energy release rates were increased by 77% compared to the virgin carbon/epoxy composites. The surface morphology of the fractured surface was observed. The toughening mechanism of the carbon/epoxy composites was suggested based on the confirmed experimental data.


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