Atomic Layer Controlled Substitutional Doping With Lithium in ZnSe

1991 ◽  
Vol 222 ◽  
Author(s):  
Ziqiang Zhu ◽  
Mitsuo Kawashima ◽  
Takafumi Yao
Keyword(s):  
Adsorption Process ◽  
Intensity Variation ◽  
Atomic Layer ◽  
High Energy ◽  
Substitutional Doping ◽  
Dynamical Behaviors ◽  
Adsorption Processes ◽  
Li Adsorption ◽  
P Type

ABSTRACTThe detailed observation of dynamical behaviors of reflection high energy electron diffraction (RHEED) patterns during the adsorption processes of Li, Se and Zn is carried out. It is found that the RHEED intensity variation reflects the Li surface coverage during Li adsorption process on a Secovered surface. This fact enables one to control quantitatively the doping of Li “in situ”. A new method for atomic-layer controlled substitutional doping of ZnSe layers with lithium is proposed based on the RHEED investigations. The method allows the incorporation of Li dopants on Zn-sites of ZnSe by monitoring the RHEED patterns and intensities, and is expected to suppress the compensation by Li interstitials. Photoluminescence spectrum shows the growth of high quality p-type layers.

Rheed Studies of a-Axis Oriented DyBa2Cu3O7 Films Grown by All-MBE

1997 ◽  
Vol 502 ◽  
Author(s):  
Ivan Bozovic ◽  
J. N. Eckstein ◽  
Natasha Bozovic ◽  
J. O'Donnell
Keyword(s):  
Phase Transitions ◽  
Secondary Phase ◽  
Atomic Layer ◽  
High Energy ◽  
Layer By Layer ◽  
Growth Modes ◽  
Flow Surface ◽  
Surface Phase Transitions

ABSTRACTReal-time, in-situ surface monitoring by reflection high-energy electron diffraction (RHEED) has been the key enabling component of atomic-layer-by-layer molecular beam epitaxy (ALL-MBE) of complex oxides. RHEED patterns contain information on crystallographic arrangements and long range order on the surface; this can be made quantitative with help of numerical simulations. The dynamics of RHEED patterns and intensities reveal a variety of phenomena such as nucleation and dissolution of secondary-phase precipitates, switching between growth modes (layer-by-layer, step-flow), surface phase transitions (surface reconstruction, roughening, and even phase transitions induced by the electron beam itself), etc. Some of these phenomena are illustrated here, using as a case study our recent growth of atomically smooth a-axis oriented DyBa2Cu3O7 films.

Atomic Layer and Unit-Cell Layer Growth of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 Thin Films by Laser Molecular Bean Epitaxy

1991 ◽  
Vol 222 ◽  
Author(s):  
Masaki Kanai ◽  
Tomoji Kawai ◽  
Takuya Matsumoto ◽  
Shichio Kawai
Keyword(s):  
Thin Films ◽  
Diffraction Pattern ◽  
Cell Layer ◽  
Atomic Layer ◽  
High Energy ◽  
Layer Growth ◽  
Unit Cell ◽  
Layer By Layer ◽  
Diffraction Intensity

ABSTRACTThin films of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 are formed by laser molecular beam epitaxy with in-situ reflection high energy electron diffraction observation. The diffraction pattern shows that these materials are formed with layer-by-layer growth. The change of the diffraction intensity as well as the analysis of the total diffraction pattern makes It possible to control the grown of the atomic layer or the unit-cell layer.

P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping

2013 ◽  
Vol 2 (11) ◽  
pp. R249-R253 ◽  
Author(s):  
Jui-Fen Chien ◽  
Huan-Yu Shih ◽  
Hua-Yang Liao ◽  
Ray-Ming Lin ◽  
Jing-Jong Shyue ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Type Conductivity ◽  
P Type

Molecular Beam Epitaxy From Research to Manufacturing

MRS Bulletin ◽  
1995 ◽  
Vol 20 (4) ◽  
pp. 21-28 ◽  
Author(s):  
A.Y. Cho
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Grazing Angle ◽  
High Energy ◽  
Vacuum System ◽  
Semiconducting Materials ◽  
Fluorescent Screen ◽  
P Type ◽  
Atom Layer

Tonight I will talk about molecular beam epitaxy (MBE) from research to manufacturing. First I will discuss the introduction of MBE in the early 1970s and the exciting achievements made with it. I will conclude with some new directions for MBE.First let us review this technology. Through MBE, materials like semiconducting materials, metals, and insulating materials are grown, atom layer by atom layer. Figure 1 shows a stainless steel MBE chamber, pumped to a pressure of approximately 10−10 torr, with liquid-nitrogen-cooled shrouds to further condense the water vapor in the vacuum system. To grow gallium arsenide (GaAs), we mount a substrate in the center where it continuously rotates to give us the uniformity we need, and it is heated to about 580° or 600°C. The effusion cells are filled with pure Ga, pure As, and doping elements such as silicon for n-type doping, and then germanium or beryllium for p-type doping. Important in this MBE system are the in situ monitoring techniques. The system contains a reflection high energy electron diffraction (RHEED) apparatus, producing an electron beam with a grazing angle to the substrate of about one degree. The diffracted electrons are projected on a fluorescent screen. Through the diffraction pattern, we can look at the surface as it is cleaned by desorption of the oxide before we deposit and grow semiconducting materials.

Oxygen Vacancies at the γ-Al2O3/STO Heterointerface Grown by Atomic Layer Deposition

2015 ◽  
Vol 1730 ◽  
Author(s):  
Thong Q. Ngo ◽  
Martin D. McDaniel ◽  
Agham Posadas ◽  
Alexander A. Demkov ◽  
John G. Ekerdt
Keyword(s):  
Atomic Layer Deposition ◽  
Photoelectron Spectroscopy ◽  
Oxygen Vacancies ◽  
Atomic Layer ◽  
High Energy ◽  
Ex Situ ◽  
X Ray ◽  
Layer Deposition ◽  
Dimensional Electron Gas

ABSTRACTWe report the epitaxial growth of γ-Al2O3 on SrTiO3 (STO) substrates by atomic layer deposition (ALD). The ALD growth of γ-Al2O3 on STO(001) single crystal substrates was performed at a temperature of 345 °C. Trimethylaluminum and water were used as co-reactants. In-situ reflection high-energy electron diffraction and ex-situ x-ray diffraction were used to determine the crystallinity of the Al2O3 films. In-situ x-ray photoelectron spectroscopy was used to characterize the Al2O3/STO heterointerface. The formation of a Ti3+ feature is observed in the Ti 2p spectrum of STO after the first few ALD cycles of Al2O3 and even after exposure of the STO substrate to trimethylaluminum alone at 345 °C. The presence of a Ti3+ feature is a direct indication of oxygen vacancies at the Al2O3/STO heterointerface, which provide the carriers for the quasi-two dimensional electron gas at the interface.

scholarly journals Wafer-Scale Synthesis of WS2 Films with In Situ Controllable p-Type Doping by Atomic Layer Deposition

Research ◽  
2021 ◽  
Vol 2021 ◽  
pp. 1-9
Author(s):  
Hanjie Yang ◽  
Yang Wang ◽  
Xingli Zou ◽  
Rongxu Bai ◽  
Zecheng Wu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Photoelectron Spectroscopy ◽  
Hole Mobility ◽  
Atomic Layer ◽  
Cycle Number ◽  
Wafer Scale ◽  
Layer Deposition ◽  
Nb Doping ◽  
P Type

Wafer-scale synthesis of p-type TMD films is critical for its commercialization in next-generation electro/optoelectronics. In this work, wafer-scale intrinsic n-type WS2 films and in situ Nb-doped p-type WS2 films were synthesized through atomic layer deposition (ALD) on 8-inch α-Al2O3/Si wafers, 2-inch sapphire, and 1 cm2 GaN substrate pieces. The Nb doping concentration was precisely controlled by altering cycle number of Nb precursor and activated by postannealing. WS2 n-FETs and Nb-doped p-FETs with different Nb concentrations have been fabricated using CMOS-compatible processes. X-ray photoelectron spectroscopy, Raman spectroscopy, and Hall measurements confirmed the effective substitutional doping with Nb. The on/off ratio and electron mobility of WS2 n-FET are as high as 105 and 6.85 cm2 V-1 s-1, respectively. In WS2 p-FET with 15-cycle Nb doping, the on/off ratio and hole mobility are 10 and 0.016 cm2 V-1 s-1, respectively. The p-n structure based on n- and p- type WS2 films was proved with a 104 rectifying ratio. The realization of controllable in situ Nb-doped WS2 films paved a way for fabricating wafer-scale complementary WS2 FETs.

In situ TEM studies of irradiation effects for materials improvement

1991 ◽  
Vol 49 ◽  
pp. 452-453
Author(s):  
Charles W. Allen
Keyword(s):  
Nuclear Reactor ◽  
Austenitic Stainless Steels ◽  
High Energy ◽  
Point Of View ◽  
In Situ Tem ◽  
Irradiation Effects ◽  
Tem Analysis ◽  
Radiation Induced ◽  
Analytical Tools

Irradiation effects studies employing TEMs as analytical tools have been conducted for almost as many years as materials people have done TEM, motivated largely by materials needs for nuclear reactor development. Such studies have focussed on the behavior both of nuclear fuels and of materials for other reactor components which are subjected to radiation-induced degradation. Especially in the 1950s and 60s, post-irradiation TEM analysis may have been coupled to in situ (in reactor or in pile) experiments (e.g., irradiation-induced creep experiments of austenitic stainless steels). Although necessary from a technological point of view, such experiments are difficult to instrument (measure strain dynamically, e.g.) and control (temperature, e.g.) and require months or even years to perform in a nuclear reactor or in a spallation neutron source. Consequently, methods were sought for simulation of neutroninduced radiation damage of materials, the simulations employing other forms of radiation; in the case of metals and alloys, high energy electrons and high energy ions.

In situ irradiation effects studies in medium- and high-voltage TEM

1995 ◽  
Vol 53 ◽  
pp. 234-235
Author(s):  
Charles W. Allen
Keyword(s):  
Cross Section ◽  
Particle Flux ◽  
Threshold Value ◽  
High Energy ◽  
Irradiation Damage ◽  
Defect Complexes ◽  
Lattice Position ◽  
Electrons And Ions ◽  
The Masses

With respect to structural consequences within a material, energetic electrons, above a threshold value of energy characteristic of a particular material, produce vacancy-interstial pairs (Frenkel pairs) by displacement of individual atoms, as illustrated for several materials in Table 1. Ion projectiles produce cascades of Frenkel pairs. Such displacement cascades result from high energy primary knock-on atoms which produce many secondary defects. These defects rearrange to form a variety of defect complexes on the time scale of tens of picoseconds following the primary displacement. A convenient measure of the extent of irradiation damage, both for electrons and ions, is the number of displacements per atom (dpa). 1 dpa means, on average, each atom in the irradiated region of material has been displaced once from its original lattice position. Displacement rate (dpa/s) is proportional to particle flux (cm-2s-1), the proportionality factor being the “displacement cross-section” σD (cm2). The cross-section σD depends mainly on the masses of target and projectile and on the kinetic energy of the projectile particle.

In situ TEM Studies of agglomeration of sub-nanometer Ru layers in Ru/C multilayers

1992 ◽  
Vol 50 (1) ◽  
pp. 256-257
Author(s):  
Tai D. Nguyen ◽  
Ronald Gronsky ◽  
Jeffrey B. Kortright
Keyword(s):  
Layered Structure ◽  
Driving Force ◽  
High Energy ◽  
Superior Performance ◽  
In Situ Tem ◽  
Rayleigh Instability ◽  
Practical Applications ◽  
Transmission Electron ◽  
Diffraction Patterns

Nanometer period Ru/C multilayers are one of the prime candidates for normal incident reflecting mirrors at wavelengths < 10 nm. Superior performance, which requires uniform layers and smooth interfaces, and high stability of the layered structure under thermal loadings are some of the demands in practical applications. Previous studies however show that the Ru layers in the 2 nm period Ru/C multilayer agglomerate upon moderate annealing, and the layered structure is no longer retained. This agglomeration and crystallization of the Ru layers upon annealing to form almost spherical crystallites is a result of the reduction of surface or interfacial energy from die amorphous high energy non-equilibrium state of the as-prepared sample dirough diffusive arrangements of the atoms. Proposed models for mechanism of thin film agglomeration include one analogous to Rayleigh instability, and grain boundary grooving in polycrystalline films. These models however are not necessarily appropriate to explain for the agglomeration in the sub-nanometer amorphous Ru layers in Ru/C multilayers. The Ru-C phase diagram shows a wide miscible gap, which indicates the preference of phase separation between these two materials and provides an additional driving force for agglomeration. In this paper, we study the evolution of the microstructures and layered structure via in-situ Transmission Electron Microscopy (TEM), and attempt to determine the order of occurence of agglomeration and crystallization in the Ru layers by observing the diffraction patterns.

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