scholarly journals Study of DC Magnetron Sputtered Nb Films

Crystals ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 31
Author(s):  
He Gao ◽  
Shijian Wang ◽  
Da Xu ◽  
Xueshen Wang ◽  
Qing Zhong ◽  
...  

As Nb films are widely used as superconducting electrodes of Josephson junctions, it is important to investigate the properties of Nb films in order to fabricate high-quality Josephson junctions. In this work, we conducted a comprehensive analysis of the relationships among the properties of DC magnetron sputtered Nb films with a constant power fabricated at the National Institute of Metrology (China). The film properties, including superconductivity, stress, lattice constant, and surface roughness, were investigated. It was found that in the case of constant power and Ar pressure, the stress and other parameters of the Nb films can maintain a relatively stable state during the continuous consumption of the target material.

Electricity is critical to enabling India’s economic growth and providing a better future for its citizens. In spite of several decades of reform, the Indian electricity sector is unable to provide high-quality and affordable electricity for all, and grapples with the challenge of poor financial and operational performance. To understand why, Mapping Power provides the most comprehensive analysis of the political economy of electricity in India’s states. With chapters on fifteen states by scholars of state politics and electricity, this volume maps the political and economic forces that constrain and shape decisions in electricity distribute on. Contrary to conventional wisdom, it concludes that attempts to depoliticize the sector are misplaced and could worsen outcomes. Instead, it suggests that a historically grounded political economy analysis helps understand the past and devise reforms to simultaneously improve sectoral outcomes and generate political rewards. These arguments have implications for the challenges facing India’s electricity future, including providing electricity to all, implementing government reform schemes, and successfully managing the rise of renewable energy.


2020 ◽  
Vol 9 (1-2) ◽  
pp. 101-110 ◽  
Author(s):  
Daniel Holder ◽  
Artur Leis ◽  
Matthias Buser ◽  
Rudolf Weber ◽  
Thomas Graf

AbstractAdditively manufactured parts typically deviate to some extent from the targeted net shape and exhibit high surface roughness due to the size of the powder grains that determines the minimum thickness of the individual slices and due to partially molten powder grains adhering on the surface. Optical coherence tomography (OCT)-based measurements and closed-loop controlled ablation with ultrashort laser pulses were utilized for the precise positioning of the LPBF-generated aluminum parts and for post-processing by selective laser ablation of the excessive material. As a result, high-quality net shape geometries were achieved with surface roughness, and deviation from the targeted net shape geometry reduced by 67% and 63%, respectively.


2012 ◽  
Vol 576 ◽  
pp. 41-45
Author(s):  
A.K.M. Nurul Amin ◽  
M.A. Mahmud ◽  
M.D. Arif

The majority of semiconductor devices are made up of silicon wafers. Manufacturing of high-quality silicon wafers includes numerous machining processes, including end milling. In order to end mill silicon to a nano-meteric surface finish, it is crucial to determine the effect of machining parameters, which influence the machining transition from brittle to ductile mode. Thus, this paper presents a novel experimental technique to study the effects of machining parameters in high speed end milling of silicon. The application of compressed air, in order to blow away the chips formed, is also investigated. The machining parameters’ ranges which facilitate the transition from brittle to ductile mode cutting as well as enable the attainment of high quality surface finish and integrity are identified. Mathematical model of the response parameter, the average surface roughness (Ra) is subsequently developed using RSM in terms of the machining parameters. The model was determined, by Analysis of Variance (ANOVA), to have a confidence level of 95%. The experimental results show that the developed mathematical model can effectively describe the performance indicators within the controlled limits of the factors that are being considered.


2012 ◽  
Vol 516 ◽  
pp. 516-521
Author(s):  
Chung Chieh Cheng ◽  
Dong Yea Sheu

This study describes a novel process to drill small holes in brittle materials such as glass, silicon and ceramic using a self-elastic polycrystalline diamond (PCD) drilling tool. In order to improve the surface roughness and reduce crack of the small holes, a new type of self-elastic PCD drilling tool equipped with vibration absorbing materials inside the housing was developed to fabricate small holes in glass in this study. The self-elastic PCD drilling tools could absorb the mechanical force by the vibration absorbing materials while the PCD tool penetrates into the small holes. Compared to conventional PCD drilling tools, the experimental results show that high-quality small holes drilled in glass can be achieved with cracking as small as 0.02mm on the outlet surface using the self-elastic PCD drilling tool.


2010 ◽  
Vol 24 (15n16) ◽  
pp. 3005-3010 ◽  
Author(s):  
KAZUTOSHI KATAHIRA ◽  
HITOSHI OHMORI ◽  
MASAYOSHI MIZUTANI ◽  
JUN KOMOTORI

To investigate the possibility of developing a new surface modification method by the combined process of ELID grinding and high-temperature oxidization, we treated ELID finished specimens and polished specimens by high-temperature oxidization in the atmosphere and performed detailed analysis to determine how the treatment would change the specimen surfaces. The ELID-series showed high quality surface roughness and excellent tribological characteristics as compared with the polished-series. The improved surface properties of the ELID-series seem to result from formation of fine, uniform structures of spinel-type multiple oxides FeCr 2 O 4 and Cr 2 O 3 on the surface by high-temperature oxidization.


2014 ◽  
Vol 609-610 ◽  
pp. 64-67
Author(s):  
Xiao Ni Ma ◽  
Li Hua Zhang ◽  
Li Xue Zheng ◽  
Zhan Hua Yang ◽  
Qing Gao ◽  
...  

Anodic spark deposition (ASD) is a novel technique to deposit bioceramic films on the surface of titanium (Ti) and its alloys, and the films prepared with nano/micro scale pores are characterized by high-quality performance for dental implant. Among the process parameters, electrolyte provides a leading role owing to its vital influence not only on the films chemistry but also on the electrical conductivity of the circuit, which affects the film properties. In this study, titania porous films were synthesized by ASD and the effect of electrolytic temperature on microstructure and chemical composition of the films was studied. The results show that the electrolytic temperature could significantly influence the surface topography, thickness and chemical composition of the oxidation films produced by ASD and, therefore, determined the layered hydroapatite (HA) deposition as the other process parameters were fixed.


1990 ◽  
Vol 187 ◽  
Author(s):  
C. S. Chang ◽  
J. C. Wang ◽  
L. C. Kuo

AbstractAn electron beam evaporation method has been used to prepare tin doped indium oxide (ITO) films with 95 wt.% In2O3 and 5 wt.% SnO2 in an oxygen atmosphere. It was found that the deposition rate and oxygen pressure strongly influence the film properties when the substrate temperature was lower than 200°C. In an optimal condition, highly transparent (transmittance ˜ 90% at wavelength 570 nm) and conductive (resistivity – 3×10−4Ω-cm) films of thickness around 2000 Å at substrate temperature as low as 180°C can be obtained.


2013 ◽  
Vol 797 ◽  
pp. 444-449 ◽  
Author(s):  
Kai Ping Feng ◽  
Zhao Zhong Zhou ◽  
Bing Hai Lv ◽  
Ju Long Yuan

This paper represents a dual-plane polishing method for ceramics ball. Compared with traditional ball polishing method, its upper and lower plate are all flat and easy to use soft pad to polish, so it can largely reduce the surface mechanical damage and obtain high quality processing surface. This paper analyzes surface polishing trajectory by calculation and simulation to test the polishing trajectory uniformity. A mathematics model of polishing process is established to disintegrate the process of a balls movement. Experiment is operated in dual-plane planetary polishing machine. The result shows that perfect polishing surface and spherical error can be obtained under the proper process parameters, the surface roughness achieves 4nm and the spherical error can reach 0.217μm.


1996 ◽  
Vol 446 ◽  
Author(s):  
Tingkai Li ◽  
Pete Zawadzkp ◽  
Richard A. Stall ◽  
Yongfei Zhu ◽  
Seshu B. Desu

AbstractNanoscale oxide thin films such as Ba1‐xSrxTiO3 (BST), SrBi2Ta2O9 (SBT), and PbZr1‐xTixO3 (PZT) that have a high dielectric constant and excellent ferroelectric properties have been receiving greatly increased attention, especially for high density memories in next generation integrated circuits. However, with increasing deposition temperature the surface roughness of the films increases, which results in high leakage current, and when the thickness of oxide films is decreased, the apparent bulk‐like properties of thin films tend to worsen due to the increased influence of the interface. To solve these problems, novel MOCVD techniques, plasma enhanced deposition, and a two step process, were developed for high quality oxide thin films.


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