A compact silicon-on-insulator gas sensor
2011 ◽
Vol 383-390
◽
pp. 3115-3120
◽
Keyword(s):
1986 ◽
Vol 44
◽
pp. 736-737
Keyword(s):
1995 ◽
Vol 53
◽
pp. 232-233
1985 ◽
Vol 43
◽
pp. 300-301
1994 ◽
Vol 52
◽
pp. 860-861
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605
1990 ◽
Vol 48
(4)
◽
pp. 576-577