scholarly journals Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition

2015 ◽  
Vol 2015 ◽  
pp. 1-9
Author(s):  
Xiaoqiang Liu ◽  
Junying Hao ◽  
Hu Yang ◽  
Xiuzhou Lin ◽  
Xianguang Zeng

Hydrogenated amorphous carbon films codoped with Si and Al ((Si, Al)/a-C:H) were deposited through radio frequency (RF, 13.56 MHz) magnetron sputtering on Si (100) substrate at different temperatures. The composition and structure of the films were investigated by means of X-ray photoelectron spectroscopy (XPS), TEM, and Raman spectra, respectively. The substrate temperature effect on microstructure and mechanical and tribological properties of the films was studied. A structural transition of the films from nanoparticle containing to fullerene-like was observed. Correspondingly, the mechanical properties of the films also had obvious transition. The tribological results in ambient air showed that high substrate temperature (>573 K) was disadvantage of wear resistance of the films albeit in favor of formation of ordering carbon clusters. Particularly, the film deposited at temperature of 423 K had an ultralow friction coefficient of about 0.01 and high wear resistance.

1998 ◽  
Vol 526 ◽  
Author(s):  
R.J. Narayan ◽  
Q. Wei ◽  
A.K. Sharma ◽  
J.J. Cuomo ◽  
J. Narayan

AbstractWe have deposited diamondlike carbon, carbon nitride, and titanium nitride biocompatible coatings using pulsed laser deposition and magnetron sputtering on metallic (cobalt-chromium and titanium- 6% aluminum- 4% vanadium) and polymeric (high-density polyethylene) substrates commonly used in human prosthetic devices. A major advantage of the magnetron sputtering deposition technique is that it provides conformal coverage of large-area films. The coatings were characterized by electron diffraction and imaging, Raman spectroscopy, X- ray photoelectron spectroscopy, and electron- energy loss spectroscopy, and nanoindenter hardness measurements. The physical properties (especially hardness) of the diamondlike carbon films were controlled using carbide and noncarbide forming elements. By varying the doping concentration as a function of thickness, functionally gradient materials with superior tribological and mechanical properties can be created. The implications of these results are discussed in the context of biomedical applications.


2019 ◽  
Vol 688 ◽  
pp. 137353 ◽  
Author(s):  
Behnam Akhavan ◽  
Rajesh Ganesan ◽  
Michael Stueber ◽  
Sven Ulrich ◽  
David R. McKenzie ◽  
...  

Coatings ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 787
Author(s):  
Weiqi Wang ◽  
Xiaoming Ling ◽  
Rui Wang ◽  
Wenhao Nie ◽  
Li Ji ◽  
...  

The spontaneously self-organizing multilayered graphite-like carbon (denoted as GLC) /TiC films with various bilayer periods in the range of 13.3–17.5 nm were deposited on silicon and 1Cr18Mn8Ni5N stainless steel substrates using closed field magnetron sputtering deposition facility. The microstructures and chemical compositions of the prepared multilayered films were characterized by scanning electron microscopy, high resolution transmission electron microscopy, X-ray diffraction and X-ray photoelectron spectroscopy respectively. The self-organizing multilayered structures in all of the films consisted of titanium carbide layers and sp2-rich carbon layers periodically alternate arrangement. The TiC contents and bilayer periods of the multilayered films can be controlled by means of adjusting of sputtering current of graphite target. Furthermore, the mechanical and tribological performances of the prepared films were appraised by nano-indentor, scratch measures, and ball-on-plate tribometer respectively. The results indicated that multilayer structure endowed the as-deposited TiC/GLC films outstanding mechanical and tribological properties, especially the multilayer film with 15.9 nm bilayer period deposited at 10 A sputtering current showed the excellent adhesion strength and hardness; Simultaneously it also exhibited the lowest average friction coefficient in the humid environment owing to its high content of sp2 hybrid carbon.


Author(s):  
J Li ◽  
L Q Zhang

The main objective of this article is to develop a high wear resistance carbon fibre (CF)-reinforced polyether ether ketone composite with the addition of multi-wall carbon nano-tubes (MWCNT). These compounds were well mixed in a Haake batch mixer and compounded polymers were fabricated into sheets of known thickness by compression moulding. Samples were tested for wear resistance with respect to different concentrations of fillers. Wear resistance of a composite with 20 wt% of CF increases when MWCNT was introduced. The worn surface features have been examined using a scanning electron microscope (SEM). Photomicrographs of the worn surfaces revealed higher wear resistance with the addition of carbon nanotubes. Also better interfacial adhesion between carbon and vinyl ester in a carbon-reinforced vinyl ester composite was observed.


2013 ◽  
Vol 662 ◽  
pp. 505-510 ◽  
Author(s):  
Jium Fang ◽  
Maw Tyan Sheen ◽  
Ming Der Jean

A new approach with adaptive network-based fuzzy inference systems (ANFIS) based on experimental designs was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by a magnetron sputtering system. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). In this study, a group of highly developed hillock-like textures appeared and a lower wear volume loss became visible in the DLC films. Furthermore, the predicted values and experimental results, in which the ANFIS effectively predicts the tribological behaviors of the DLC films, are similar. It was experimentally confirmed the ANFIS predictions agreed with the experiments. Therefore, the experimental results demonstrate the tribological properties on DLC multilayer films are accurately predicted by ANFIS, thereby justifying the reliability and feasibility of the approach.


2015 ◽  
Vol 642 ◽  
pp. 184-189
Author(s):  
Yan Liang Su ◽  
Yueh Feng Lin

W(100-x)%Cx% coatings with different tungsten and carbon contents were deposited by unbalanced magnetron sputtering. The microstructures and mechanical properties of the W(100-x)%C x% coatings was characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), nanoindentation and adhesion testing techniques. The tribological performance of the coatings was investigated using a pin-on-disc trobometer under dry conditions. Experimental results indicated that coating microstructure, mechanical properties and wear resistance varied according to the tungsten and carbon contents of the coatings. The W72%C28% coating had the highest hardness/elastic modulus (H/E) ratio. In the ball-on-disc wear tests, it was found that the W72%C28% coating exhibited the best wear resistance.


2014 ◽  
Vol 998-999 ◽  
pp. 120-123
Author(s):  
Jun Du ◽  
Xiao Ying Zhu ◽  
Yan Zang ◽  
Lei Guo

sp2 rich carbon films were produced by using magnetron sputtering deposition. The hardness, friction coefficient and wear volume were elevated by Knoop micro-hardness and pin-on-disk tester; The composition and microstructure of the carbon films have been characterized in detail by combining the techniques of Rutherford Backscattering Spectrum (RBS), X-Ray Photoelectron Spectrum (XPS) and X-Ray Diffraction (XRD); the electrical resistivity was measured by Four Probe Methods (FPM). It is found that: the films hardness are 11~17GPa (HK0.05), the friction coefficients are 0.1-0.2, the wear rate is 10-15m3/Nm; The maximum intensity position in the C1s indicates the chemical bonds are mainly sp2; the electrical resistivity is 1~2×10-4Ω·m. XRD proves these carbon films are amorphous.


2016 ◽  
Vol 674 ◽  
pp. 239-243
Author(s):  
Gai Zhao ◽  
Qi Hua Wang ◽  
Irina Hussainova ◽  
Qing Jun Ding

Polyimide (PI) composites have been widely used in a space science due to extraordinary properties, such as excellent mechanical and electrical properties, good thermal stability and chemical inertness, as well as high wear resistance. However, atomic oxygen (AO), as one of the main radiated constituents in low earth orbit, had an important influence on the structrural and tribological properties of the polyimide matrix. To investigate the mechanism of AO erosion on polyimide, MoS2/Al2O3/PI composites were fabricated by means of a hot-press molding technique and irradiated by AO in a ground-based simulation system. The chemical composition change of the irradiated surface was examined by X-ray photoelectron spectroscopy (XPS). Then, the friction and sliding wear behavior against GCr15 steel balls were evaluated in a ground-based simulation facility using ball-on-disk tribology test rig. The worn morphologies and radiated surfaces of the materials were observed by Scanning electron microscope (SEM) to reveal the wear mechanism. Experimental analysis indicated that oxidation induced by AO irradiation and degradation of PI molecular chains on the composite’ surface results in change in chemical composition and formation of “carpet-like” structures. Affected layer, gradually formed during the process of irradiation, plays an important role for wear performance of the materials increasing friction coefficient and wear rate. Incorporation of Al2O3 nanofibers and MoS2 nanoparticles is shown to be favourable for AO resistance, which is helpful for improvement in wear resistance of the PI.


2013 ◽  
Vol 385-386 ◽  
pp. 3-6
Author(s):  
Jing Xu

LaB6 films are deposited by magnetron sputtering deposition. ZrO2 glass is used as substrate. Bias voltage and substrate temperature are adjusted. Morphology of films that deposited at different parameters is characterized by AFM. Results of AFM shows that grains diameter on surface of LaB6 films is nanoscale, and roughness of the surface is less than 20nm. LaB6 crystallites are seen to cover substrate surface entirely. Structure of films is smooth and compactness, and there is no obviously default is found. Bias-voltage influences morphologies of films more obviously than substrate. The best bias voltage is-100V. Structure of film that deposited at 450°C is more compactness than others, and roughness of the film is least.


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