Surface Roughness and Wettability Correlation on Etched Platinum Using Reactive Ion Ecthing

2014 ◽  
Vol 487 ◽  
pp. 263-266 ◽  
Author(s):  
Zaliman Sauli ◽  
Vithyacharan Retnasamy ◽  
Aaron Koay Terr Yeow ◽  
Goh Siew Chui ◽  
K. Anwar ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Contact Angle ◽  
Integrated Circuits ◽  
Inductively Couple Plasma ◽  
Great Influence ◽  
Wire Bonding ◽  
Thermal Coefficient ◽  
High Temperature And Pressure ◽  
Temperature And Pressure

As the world of semiconductor is moving towards smaller and high-end applications, the quality of the bonding adhesion for wire bonding is very critical. Although aluminium has been the metallization of choice in integrated circuits, it can be easily oxidized during high temperature and pressure. On the other hand, Platinum metallization layer has high thermal coefficient resistance and inert to oxygen. This paper reports the correlation between surface roughness and the wettability in the form of contact angle for Platinum deposited wafer etched using Inductively Couple Plasma-Reactive Ion Etching (ICP-RIE). Surface roughness was measured using AFM while contact angle was obtained via droplet test. The results clearly suggested that both surface roughness and wettabily, calculated by its contact angle value has the same trend. Surface roughness is directly proportional to the contact angle. This indicates that surface roughness have great influence on the surface wettability. Therefore, the adhesion for wire bonding process on platinum metallization which can be used in high end applications can be controlled by its surface roughness and wettability.

Surface Roughness Scrutinizaton with RIE CF4+Argon Gaseous on Platinum Deposited Wafer

2014 ◽  
Vol 487 ◽  
pp. 71-74
Author(s):  
Zaliman Sauli ◽  
Vithyacharan Retnasamy ◽  
Aaron Koay Terr Yeow ◽  
Goh Siew Chui ◽  
K. Anwar ◽  
...  
Keyword(s):  
Surface Roughness ◽  
High Temperature ◽  
Influential Factor ◽  
Process Variables ◽  
Negative Effects ◽  
Working Pressure ◽  
Bias Power ◽  
High Temperature And Pressure ◽  
Temperature And Pressure ◽  
Controllable Process

Aluminium metallization has a disadvantage when it comes to high-end applications as it cannot withstand the high temperature and pressure. This paper studies the factors that affect the surface roughness on a Platinum deposited wafer after reactive ion etching (RIE) using a combination of CF4and Argon gaseous. A total of three controllable process variables, with 8 sets of experiments were scrutinized using a systematically designed design of experiment (DOE). The three variables in the investigation are ICP power, Bias power, and working pressure. The estimate of the effect calculated for ICP power, Bias power, and working pressure are-6.3608, -3.2858, and-5.394 respectively. All three factors gave negative effects. This implies that the surface roughness decreases when ICP power, Bias power, and working pressure is high. The ICP Power is the most influential factor followed by working pressure, and bias power.

An Approach to the Influence of Flotative Abrasive Balls on Polishing Process

2006 ◽  
Vol 532-533 ◽  
pp. 393-396 ◽  
Author(s):  
Yong Dai ◽  
Qian Fa Deng ◽  
Xun Lv ◽  
Ju Long Yuan ◽  
Xun Jie Yu
Keyword(s):  
Surface Roughness ◽  
Grain Size ◽  
Removal Rate ◽  
Great Influence ◽  
Work Piece ◽  
Polishing Process ◽  
Soft Contact ◽  
Ball Diameter ◽  
Experiment Device

Polishing with Flotative Abrasive Balls(FABs) is a kind of soft contact polishing means， and the conventional polishing plate and pad are not needed in this case. The pressure of polishing is the flotage which is the upward force that a fluid exerts on the FABs, but the movement of work piece is similar to that in conventional polishing, the removal rate and quality of polishing is influenced by FAB and its flotage. An experiment device is built up and two kinds of FAB are designed and produced. Some primary experiments are carried out in order to investigate the influences of the size of FABs on the removal rate and surface roughness in polishing with FABs. It is found from the experiments that the grain size and the layers of FAB may have great influence on the removal rate of polishing; the surface roughness is mainly decided by the ball diameter and the layers of FAB. The results of experiments are discussed and analyzed, it indicates that the efficiency and quality depend on flotage and the number of active grains when the velocity of workpiece is assigned.

Operation of Silicon Carbide Integrated Circuits under High Temperature and Pressure

2017 ◽  
Vol 2017 (1) ◽  
pp. 000526-000530
Author(s):  
M. Barlow ◽  
A. M. Francis ◽  
J. Holmes
Keyword(s):  
Silicon Carbide ◽  
High Pressure ◽  
High Temperature ◽  
Integrated Circuits ◽  
Integrated Circuit ◽  
Leading Edge ◽  
Limited Information ◽  
High Temperature And Pressure ◽  
Temperature And Pressure

Abstract Silicon carbide integrated circuits have demonstrated the ability to function at temperatures as high as 600 °C for extended periods of time. Many environments where high temperature in-situ electronics are desired also have large pressures as well. While some validation has been done for high pressure environments, limited information on the parametric impact of pressure on SiC integrated circuits is available. This paper takes two leading-edge SiC integrated circuit processes using two different classes of devices (JFET and CMOS), and measures the performance through temperature and pressure variation. Circuit functionality was verified at high temperature (475 °C) as well as high pressure (1700 psig).

scholarly journals Kualitas Ikan Cakalang (Katsuwonus pelamis) Presto pada Beberapa Hari Penyimpanan

Jurnal MIPA ◽  
2015 ◽  
Vol 4 (1) ◽  
pp. 57
Author(s):  
Christiviany A. Lalompoh
Keyword(s):  
Protein Content ◽  
Water Content ◽  
Storage Time ◽  
Plate Count ◽  
Katsuwonus Pelamis ◽  
High Temperature And Pressure ◽  
Total Plate Count ◽  
Mda Content ◽  
Temperature And Pressure

Telah dilakukan penelitian tentang kualitas ikan Cakalang (Katsuwonus pelamis) melalui proses presto pada beberapa hari penyimpanan. Ikan presto merupakan ikan yang direbus pada suhu dan tekanan tinggi sehingga menghasilkan ikan dengan duri yang lunak dan mudah untuk dikonsumsi. Pengolahan ikan dilakukan dengan menggunakan bumbu dan tanpa bumbu. Lama penyimpanan bergantung pada kerusakan ikan. Kualitas ikan yang diukur adalah kadar protein, kadar air, kadar malondialdehid (MDA), dan Total Plate Count (TPC). Hasil penelitian menunjukkan bahwa kadar protein ikan cakalang presto pada semua perlakuan, mengalami peningkatan setelah melalui proses presto. Kadar air dan nilai TPC pada semua perlakuan dan kadar MDA pada pemberian bumbu, belum melewati batas mutu, sedangkan kadar MDA ikan Cakalang presto tanpa pemberian bumbu, sudah melewati batas mutu yang ada.Studies about the quality of Cakalang fish (Katsuwonus pelamis) through presto process on several days storage has been carried out. Presto fish is a fish boiled at high temperature and pressure to produces spines fish that soft and easily consumed. Fish processed by using seasoning and without seasoning. The storage time depends on the desstruction of fish. Fish quality that measured are protein content, water content, malondialdehid (MDA) content, and Total Plate Count (TPC). The results showed that the protein content of Cakalang presto of all treatmens increased through the presto process. Water content and TPC value of all treatments and MDA content of seasoning treatment yet to pass the quality line, while MDA content of Cakalang presto without seasoning treatment has passed the existing quality line.

scholarly journals Investigation of the Effect of Vibration Characteristics on the Grinding Performance of Aero-Engine Blade Tip

2021 ◽  
Author(s):  
Wei Li ◽  
Qidi Chen ◽  
Jian Wu ◽  
Mingjia Liu ◽  
Yinghui Ren ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
Great Influence ◽  
Grinding Wheel ◽  
Grinding Process ◽  
Aero Engine ◽  
Engine Blade ◽  
Blade Tip ◽  
The Difference

Abstract The machining quality of the blade tip has a great influence on the service performance and life of the aero-engine blade. The recent paper investigates the effect of vibration during the grinding process of the GH4169 nickel-based superalloy blade tip. Moreover, this paper proposes a theoretical model to link the unbalance of the grinding wheel, the vibration, and the surface topography characteristics of the blade. The results show that the blade vibration during grinding and the resulting non-linear change of the grinding depth could reduce the surface quality of the blade tip, and lead to differences in the surface quality of the blade tip in different areas, where the surface roughness in the entry area zone I is the largest, in the exit area zone III is the second largest, and the intermediate area zone III is the smallest. Grinding depth has a greater impact on the difference of the surface quality in the blade tip grinding process, especially when the grinding depth is greater than 4 μm, the difference of surface roughness increases significantly. On the other hand, the feed rate has little effect on the difference in surface quality. Adding damping block can reduce the surface roughness of the blade tip, however, it does not reduce the difference in surface quality.

Experimental Study of the Corner of Hardened Steel Mould in High Speed Milling with Micro-End Mill

2014 ◽  
Vol 800-801 ◽  
pp. 9-14
Author(s):  
Bang Xi Dong ◽  
Ying Ning Hu ◽  
Shan Shan Hu ◽  
Xi Huang
Keyword(s):  
Surface Roughness ◽  
Cutting Forces ◽  
High Speed ◽  
Great Influence ◽  
Cutting Speed ◽  
Cutting Parameters ◽  
Hardened Steel ◽  
Micro End Mill ◽  
Steel Mould

High speed machining of the corner of hardened steel mould has a great influence to the entire product performance of the mould. In this paper, with the single factor experiments, the influence of feed per tooth, cutting speed and angle of the corner to the cutting forces, the vibration value and the surface roughness were analyzed. And the cutting parameters were optimized. The cutting forces, vibration value and surface roughness value of the corner of the mould reached the minimum value when the cutting speed was 80 m/min and the feed per tooth was 0.006 mm/z in the experiment. The surface quality of corner with angle of 90o was better than the corner with angle of 60o and 120o with various milling parameters.

The Research of Gypsum Investment Mould Used as Forming Micro-Castings

2014 ◽  
Vol 609-610 ◽  
pp. 557-564
Author(s):  
Guo Tian Wang ◽  
Ming Xing Ren ◽  
Bang Sheng Li ◽  
Heng Zhi Fu
Keyword(s):  
Surface Roughness ◽  
Grain Size ◽  
Bending Strength ◽  
Sintering Temperature ◽  
Processing Parameters ◽  
Chemical Compositions ◽  
High Temperature And Pressure ◽  
Gypsum Content ◽  
Different Temperatures ◽  
Temperature And Pressure

By applying ultrasonic solidification, gypsum based micro casting mold with different chemical compositions were sintered at different temperatures. The influence of processing parameters and sintering temperature on the microstructure and surface roughness were investigated. Meanwhile, the effect of sintering temperature on the bending strength was studied. The result showed that the nucleation rate of gypsum can be significantly improved under high temperature and pressure, which was caused by the effect of ultrasonic cavitation. Under the frequency of 100 KHz and the power of 200 W, 20 min, the morphology of gypsum transfers from flake and needle into near spherical after 20 min, and the grain size can be refined to around 500 nm. The value node of surface roughness occurs at the sintering temperature of 600 °C. The surface roughness is the lowest when the gypsum content is 60% and under the sintering temperature of 600 °C, which can reach Ra ~ 0.22 um. The bending strength of mold roughly increased with the increase of content of gypsum. There is no obvious rule for the mold strength with the change of sintering temperature. The mold strength reaches the highest value when the sintering temperature is 600°C.

Experimental Study for the Influencing Factors of Electrograining Quality of PS Plate

2012 ◽  
Vol 200 ◽  
pp. 734-738
Author(s):  
Yi Wen Ma
Keyword(s):  
Experimental Study ◽  
Surface Roughness ◽  
Quality Control ◽  
Current Density ◽  
Electrolyte Concentration ◽  
Great Influence ◽  
The Other ◽  
Electrolysis Time ◽  
Orthogonal Experiments

Aiming at quality control of grain of PS plate，the orthogonal experiments on electrolyte concentration, current density, electrolysis temperature and time in the process of electrograining have done by surface roughometer, metalloscope, etc. Experimental results indicate that the electrolyte concentration has great influence on the amplitude parameters of surface roughness, the other factors influence the amplitude parameters and the spacing parameters significantly; the interactions of current density with electrolyte concentration or electrolysis time have not significance.

scholarly journals The blade surface performance and its robotic machining

2020 ◽  
Vol 17 (2) ◽  
pp. 172988142091409
Author(s):  
Lei Qiu ◽  
Liangtao Qi ◽  
Lanlan Liu ◽  
Zhu Zhang ◽  
Jianwei Xu
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
Great Influence ◽  
Blade Surface ◽  
Core Content ◽  
Negative Effect ◽  
Surface Performance ◽  
Different Characteristics ◽  
Positive Effect

Through numerical calculations, it could be found that when the blade surface quality reaches a certain level, the surface quality of the blade was continuously improved, and the guarantee effect on its performance would be weakened. Under this circumstance, continuing to improve the surface quality of the blade had no positive effect on the performance of the blade. Studies had shown that when the blade surface equivalent grit roughness Ks reaches 4.96 (about R a = 0.8 µm), the blade performance was close to the smooth surface of the blade, and no further processing was required to improve the surface roughness. When the surface equivalent grit Ks was greater than 4.96 µm, the surface roughness had a great influence on the blade performance. When Ks was larger than 40 µm, the negative effect is significantly increased. For the different characteristics of the blade and different processing conditions, four kinds of robot-based blade surface grinding schemes were proposed, of which the core content was the robot layout. Based on the robot group’s fitting to the spatial surface and the path planning, the experimental verification was carried out.

The Design and Dynamic Analysis of High Frequency Ultrasonic Transducer for Wire Bonding Application

2012 ◽  
Vol 226-228 ◽  
pp. 199-202
Author(s):  
Zhen Zhang ◽  
Tian Hong Yan ◽  
Xue Dong Chen ◽  
Bo He ◽  
Xin Sheng Xu
Keyword(s):  
High Frequency ◽  
Experimental Testing ◽  
Ultrasonic Transducer ◽  
Mechanical Vibration ◽  
Great Influence ◽  
Electrical Energy ◽  
Wire Bonding ◽  
Axial Mode ◽  
Bonding Quality

The ultrasonic transducer converts electrical energy into mechanical vibration, and its vibration characteristics have a great effect on the bonding quality. Bond grid arrays (BGA) application and the ability to decrease the temperature of the wire bonding process urgently demand higher bonding frequencies. The ultrasonic transducer working at 135 KHz has been designed, simulated and tested. Based on electromechanical equivalent circuit theory, the dimensions of the transducer were designed. Through finite element method (FEM), the dynamic characteristics of the transducer were investigated. The 5th order axial mode of the transducer resonating at 133 KHz is the working mode. The undesirable modes near the working mode have a great influence on the quality of bonding and must be considered carefully in system design. At last, the experimental testing was conducted for verifying the design and simulation results of the transducer.

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