Structural Reliability of SU-8 Material for MEMS Application

2005 ◽  
Author(s):  
S. B. Park ◽  
Soonwan Chung ◽  
Sandeep Makhar ◽  
Harold Ackler ◽  
Pinyen Lin
Keyword(s):  
Elastic Modulus ◽  
Structural Reliability ◽  
Applied Pressure ◽  
Strain Energy Release ◽  
Bulge Test ◽  
Membrane Thickness ◽  
Element Analysis ◽  
Interfacial Toughness ◽  
Dog Bone ◽  
The Relationship

Mechanical properties of SU-8 over the range of temperature, −50 to 250 °C, were measured. Traditional tension test is performed with the dog-bone specimens using microfabrication techniques. The bulk properties such as elastic modulus, Poisson’s ratio and tensile strength are obtained in various temperatures. Bulge test is performed using SU-8 membrane constrained by silicon wafer. Pressure is applied to the membrane, and by analyzing the deflection of membrane, the elastic modulus and residual stress of SU-8 thin film are acquired. The relationship between applied pressure and deflection is obtained by changing some geometric parameters such as membrane thickness and diameter. The interfacial fracture toughness between SU-8 and silicon will measured using the membrane structure. The interfacial toughness obtained from the experiments will be compared with the strain energy release rate from finite element analysis, and the failure analysis at the interface under the actual thermal fatigue environment will be investigated using a numerical model.

Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

2014 ◽  
Vol 806 ◽  
pp. 11-14
Author(s):  
Ruggero Anzalone ◽  
Giuseppe D'Arrigo ◽  
Massimo Camarda ◽  
Nicolo’ Piluso ◽  
Francesco La Via
Keyword(s):  
Large Deflection ◽  
Strain Tensor ◽  
Applied Pressure ◽  
Bulge Test ◽  
Phonon Modes ◽  
Breaking Strain ◽  
Test Technique ◽  
Raman Analysis ◽  
Fracture Properties ◽  
The Relationship

The following paper explores the development the bulge test technique combined with the micro-Raman analysis and a refined load-deflection model for high quality 3C-SiC squared-membranes. By the minimization of the total elastic energy, starting from the isotropic relation between the stress tensor and the strain tensor, it is possible to calculate the relationship between the maximum deflection and the applied pressure, in both regime of small and large deflection. From the measured breaking pressure through the refined model it is possible to evaluate the breaking strain of the membrane. Furthermore, the relationship between the measured shift of Raman Transverse Optical (TO) phonon modes and the total residual strain (Δa/a) within the epitaxial 3C-SiC layer was found.

scholarly journals Mechanical Properties Measurement of Polymer Films by Bulge Test and Fringe Projection

2014 ◽  
Vol 2014 ◽  
pp. 1-12 ◽  
Author(s):  
C. S. Lin ◽  
T. L. Horng ◽  
J. H. Chen ◽  
K. H. Chen ◽  
J. J. Wu ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Residual Stress ◽  
Poisson Ratio ◽  
Applied Pressure ◽  
Fringe Projection ◽  
Bulge Test ◽  
Element Analysis ◽  
Membrane Deformation ◽  
Test Film ◽  
Gas Chamber

This paper aims at determining the mechanical properties such as Poisson ratio, biaxial modulus, and residual stress of polymer membranes using the bulge test and fringe projection. Under this idea, a bulge test apparatus has been developed for robust usage, under the room temperature, in industrial environments that are usually noisy and full of all kinds of vibrations. A setup of the bulge test, consisting of single chips and digital on-off valves, was used to achieve automatic precision control of pressure application to gas chamber with a circular polyimide (PI) test film fixed on the opening of it. A deformed image was then obtained via fringe projections with a series of optical apparatuses, and a 3D membrane deformation distribution was further achieved from this deformed image by some image processes that are chiefly through wavelet transformation and phase expansion. With the measurements of maximum membrane deformation versus applied pressure and given the Young’s modulus of test membrane, we could further calculate the Poisson ration (and then biaxial modulus) and residual stress of the film. Also, the measurements were validated to be highly accurate by comparison with a finite element analysis.

Evaluation of Mechanical and Optical Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared-Membrane

2014 ◽  
Vol 778-780 ◽  
pp. 457-460 ◽  
Author(s):  
Ruggero Anzalone ◽  
Giuseppe D'Arrigo ◽  
Massimo Camarda ◽  
Nicolo’ Piluso ◽  
Francesco La Via
Keyword(s):  
Large Deflection ◽  
Strain Tensor ◽  
Applied Pressure ◽  
Raman Shift ◽  
Bulge Test ◽  
Phonon Modes ◽  
High Quality ◽  
Test Technique ◽  
Raman Analysis ◽  
The Relationship

The aim of this work is to develop the bulge test technique combined with the micro-Raman analysis and a refined load-deflection model for high quality 3C-SiC squared-membranes. By the minimization of the total elastic energy, starting from the isotropic relation between the stress tensor and the strain tensor, it is possible to calculate the relationship between the maximum deflection and the applied pressure, in both regime of small and large deflection. Furthermore, the relationship between the measured shift of Raman Transverse Optical (TO) phonon modes and the total residual strain (Δa/a) within the epitaxial 3C-SiC layer was found and in order to understand the stress distribution within the membrane, TO Raman shift maps were performed along the corner and the border of the membrane.

Analysis of magnetic force and dynamic characteristic for non-contact permanent magnet linear drive device

2020 ◽  
Vol 64 (1-4) ◽  
pp. 1337-1345
Author(s):  
Chuan Zhao ◽  
Feng Sun ◽  
Junjie Jin ◽  
Mingwei Bo ◽  
Fangchao Xu ◽  
...  
Keyword(s):  
Finite Element ◽  
Permanent Magnet ◽  
Dynamic Characteristic ◽  
Driving Force ◽  
Magnetic Circuit ◽  
Response Speed ◽  
Computation Method ◽  
Element Analysis ◽  
Element Simulation ◽  
The Relationship

This paper proposes a computation method using the equivalent magnetic circuit to analyze the driving force for the non-contact permanent magnet linear drive system. In this device, the magnetic driving force is related to the rotation angle of driving wheels. The relationship is verified by finite element analysis and measuring experiments. The result of finite element simulation is in good agreement with the model established by the equivalent magnetic circuit. Then experiments of displacement control are carried out to test the dynamic characteristic of this system. The controller of the system adopts the combination control of displacement and angle. The results indicate that the system has good performance in steady-state error and response speed, while the maximum overshoot needs to be reduced.

scholarly journals Aspects of Vibration-Based Methods for the Prestressing Estimate in Concrete Beams with Internal Bonded or Unbonded Tendons

2021 ◽  
Vol 6 (6) ◽  
pp. 83
Author(s):  
Angelo Aloisio
Keyword(s):  
Elastic Modulus ◽  
Structural Reliability ◽  
Natural Frequencies ◽  
Concrete Beams ◽  
Experimental Testing ◽  
Hybrid Approach ◽  
Reliable Estimate ◽  
Axial Deformation ◽  
Dynamic Identification ◽  
Concrete Girders

The estimate of internal prestressing in concrete beams is essential for the assessment of their structural reliability. Many scholars have tackled multiple and diverse methods to estimate the measurable effects of prestressing. Among them, many experimented with dynamics-based techniques; however, these clash with the theoretical independence of the natural frequencies of the forces of internally prestressed beams. This paper examines the feasibility of a hybrid approach based on dynamic identification and the knowledge of the elastic modulus. Specifically, the author considered the effect of the axial deformation on the beam length and the weight per unit of volume. It is questioned whether the uncertainties related to the estimate of the elastic modulus and the first natural frequency yield reasonable estimates of the internal prestressing. The experimental testing of a set of full-scale concrete girders with known design prestressing supports a discussion about its practicability. The author found that the uncertainty in estimating the natural frequencies and elastic modulus significantly undermines a reliable estimate of the prestressing state.

The equivalent method of double V-wing honeycombs on the in-plane dynamic impact

2021 ◽  
pp. 073168442199086
Author(s):  
Yunfei Qu ◽  
Dian Wang ◽  
Hongye Zhang
Keyword(s):  
Mechanical Properties ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Elastic Modulus ◽  
Energy Absorption ◽  
Width Ratio ◽  
Size Factor ◽  
Dynamic Impact ◽  
Element Analysis ◽  
Equivalent Method

The double V-wing honeycomb can be applied in many fields because of its lower mass and higher performance. In this study, the volume, in-plane elastic modulus and unit cell area of the double V-wing honeycomb were analytically derived, which became parts of the theoretical basis of the novel equivalent method. Based on mass, plateau load, in-plane elastic modulus, compression strain and energy absorption of the double V-wing honeycomb, a novel equivalent method mapping relationship between the thickness–width ratio and the basic parameters was established. The various size factor of the equivalent honeycomb model was denoted as n and constructed by the explicit finite element analysis method. The mechanical properties and energy absorption performance for equivalent honeycombs were investigated and compared with hexagonal honeycombs under dynamic impact. Numerical results showed a well coincidence for each honeycomb under dynamic impact before 0.009 s. Honeycombs with the same thickness–width ratio had similar mechanical properties and energy absorption characteristics. The equivalent method was verified by theoretical analysis, finite element analysis and experimental testing. Equivalent honeycombs exceeded the initial honeycomb in performance efficiency. Improvement of performance and weight loss reached 173.9% and 13.3% to the initial honeycomb. The double V-wing honeycomb possessed stronger impact resistance and better load-bearing capacity than the hexagonal honeycomb under impact in this study. The equivalent method could be applied to select the optimum honeycomb based on requirements and improve the efficiency of the double V-wing honeycomb.

Finite Element Analysis of the ESTELA M1 Airplane Firewall (Representative Specimen)

2011 ◽  
Author(s):  
V. Ramirez-Elias ◽  
E. Ledesma-Orozco ◽  
H. Hernandez-Moreno
Keyword(s):  
Finite Element ◽  
Federal Aviation Administration ◽  
Element Model ◽  
Maximum Load ◽  
Load Factor ◽  
Representative Specimen ◽  
Maximum Displacement ◽  
Element Analysis ◽  
Element Simulation ◽  
The Relationship

This paper shows the finite element simulation of a representative specimen from the firewall section in the AEROMARMI ESTELA M1 aircraft. This specimen is manufactured in glass and carbon / epoxy laminates. The specimen is subjected to a load which direction and magnitude are determined by a previous dynamic loads study [10], taking into account the maximum load factor allowed by the FAA (Federal Aviation Administration) for utilitarian aircrafts [11]. A representative specimen is manufactured with the same features of the firewall. Meanwhile a fix is built in order to introduce the load directions on the representative specimen. The relationship between load and displacement is plotted for this representative specimen, whence the maximum displacement at the specific load is obtained, afterwards it is compared with the finite element model, which is modified in its laminate thicknesses in order to decrease the deviation error; subsequently this features could be applied to perform the whole firewall analysis in a future model [10].

Measurement of Young's Modulus and Poisson's Ratio of Thin Film by Combination of Bulge Test and Nano-Indentation

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Applied Pressure ◽  
Indentation Test ◽  
Poisson's Ratio ◽  
Bulge Test ◽  
Nano Indentation

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.

Limit Load Analysis of Cracked Components Using the Reference Volume Method

2006 ◽  
Vol 129 (3) ◽  
pp. 391-399 ◽  
Author(s):  
R. Adibi-Asl ◽  
R. Seshadri
Keyword(s):  
Elastic Modulus ◽  
Three Dimensional ◽  
Local Limit ◽  
Limit Load ◽  
Multiple Cracks ◽  
Element Analysis ◽  
Limit Loads ◽  
Integrity Assessment ◽  
Reference Volume ◽  
Volume Method

Cracks and flaws occur in mechanical components and structures, and can lead to catastrophic failures. Therefore, integrity assessment of components with defects is carried out. This paper describes the Elastic Modulus Adjustment Procedures (EMAP) employed herein to determine the limit load of components with cracks or crack-like flaw. On the basis of linear elastic Finite Element Analysis (FEA), by specifying spatial variations in the elastic modulus, numerous sets of statically admissible and kinematically admissible distributions can be generated, to obtain lower and upper bounds limit loads. Due to the expected local plastic collapse, the reference volume concept is applied to identify the kinematically active and dead zones in the component. The Reference Volume Method is shown to yield a more accurate prediction of local limit loads. The limit load values are then compared with results obtained from inelastic FEA. The procedures are applied to a practical component with crack in order to verify their effectiveness in analyzing crack geometries. The analysis is then directed to geometries containing multiple cracks and three-dimensional defect in pressurized components.

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