Wafer Cleaning Influence on the Roughness of the Si/SiO2 Interface

1995 ◽  
Vol 386 ◽  
Author(s):  
A. Munkholm ◽  
S. Brennan ◽  
Jon P. Goodbread

ABSTRACTThe roughness of the Si/SiO2 interface has a great impact on the electrical properties of the gate-oxide in integrated circuits and consequently it is a large concern for the semiconductor industry. As the thickness of the oxide is decreased, the role of the roughness becomes more critical for the device. The nature of a buried interface prohibits the use of commonly used surface techniques. By the use of crystal truncation rod (CTR) x-ray scattering, it is possible to get information on the termination of the bulk silicon in a nondestructive fashion. The authors have investigated the influence of different cleanings on interfacial roughness using synchrotron radiation-based CTR-scattering. In particular, we looked at silicon(001) wafers both before and after the growth of a 1000Å thermal oxide. The results show that the use of HF during cleaning results in a smoother interface between silicon and its native oxide. Due to smoothing of the interface during the oxidation process, the difference between the various cleaning methods becomes less significant for these thick oxides.


2022 ◽  
Vol 67 (4) ◽  
pp. 282-288
Author(s):  
Jing Zhang ◽  
Liang Dong ◽  
Shuzhen Zhang ◽  
Lei Wang

Endometriosis is an invasive but benign disease of women that develops in endometrial glands outside the endometrium and uterine muscle. It affects about 15-20% of women of childbearing age. One effective way to treat endometriosis is to use GnRH agonists, which inhibit estrogen production. However, one of the possible side effects of this treatment is obesity and BMI increasing, which is a concern for some patients. This study investigated the role of leuprolide acetate in treating overweight patients (BMI≥30) and their comparison with non-overweight patients (BMI<30) for six months. Also, the effect of this medicine was evaluated on the expression of the MIF gene, which is an effective gene in obesity. For this purpose, a clinical trial was performed on 75 women with endometriosis aged 18 to 35 years. These patients were divided into two groups. The first group consisted of 38 patients with BMI<30. The second group consisted of 37 patients with BMI≥30. Both groups were treated with leuprolide acetate at a dose of 3.75 mg/month (intramuscularly) for six months. In addition to clinical evaluations, the expression of the MIF gene was assessed by the real-time PCR technique. The results showed that treatment with leuprolide acetate during six months in both groups reduced dysmenorrhea, dyspareunia, and chronic pelvic pain (P<0.05). Although this decrease was greater in the BMI <30 group, the difference was not significant. Also, after collecting the side effects of the medication, it was found that hypoestrogenism, such as cramps and spotting, was more in the first group; Endogenous complications such as oily skin, acne, and hirsutism were also more common in the second group. The results of MIF gene expression showed that the expression level before and after the start of the experiment in the second group (BMI≥ 30) is higher than the first group (BMI <30). The results also showed that the two groups increased the expression of the MIF gene after treatment with leuprolide acetate. This increase was statistically significant in the second group (P = 0.042). Generally, it was found that this medication causes more weight gain in obese people and increases the risk of obesity-related diseases among these patients. Therefore, it is recommended that this treatment be used with caution in obese patients with endometriosis.



2003 ◽  
Vol 765 ◽  
Author(s):  
K. Choi ◽  
H. Harris ◽  
S. Gangopadhyay ◽  
H. Temkin

AbstractA cleaning process resulting in atomically smooth, hydrogen-terminated, silicon surface that would inhibit formation of native silicon oxide is needed for high-k gate dielectric deposition. Various cleaning methods thus need to be tested in terms of resistance to native oxide formation. Native oxide re-growth is studied as a function of exposure time to atmospheric ambient using ellipsometry. Hafnium dioxide film (k ~23) is deposited on the as-cleaned substrates by electron beam evaporation and subsequently annealed in hydrogen. The difference in the effective oxide thickness re-grown on surfaces treated with the conventional RCA and modified Shiraki cleaning methods, after one-hour exposure, can be as large as 2 Å. This is significant in device applications demanding equivalent oxide thickness less than 20 Å. The degree of hydrogen passivation, surface micro-roughness and organic removal capability are considered to be the main factors that explain the differences between the cleaning methods. Data derived from capacitance-voltage analysis of test capacitors verified the trend observed in the native oxide thickness measurements. An increase of 10~15 % in accumulation capacitance is observed in the samples treated by the new cleaning method.



2018 ◽  
Vol 3 (01) ◽  
pp. 54
Author(s):  
Dedy Mulyadi ◽  
Kartika .

Considering the major role of human resource in achieving the company’s goal the company should provide an operational skill or knowledge directly from manager to employee’s levels. The company should give the employees a better understanding that the training is provided not only to execute the pre-determined program smoothly, but also to increase the quality of their achievement in their own field that in turn will influence their income, performance and future career planning. Comparing the statistical scores gained by the employee before and after the training proves the significant difference. After the training the score was higher (3.87%) than before the training (3.08%), which means that the training gave good impact. Other statistical computation using t – paired samples with α = 0.005 and degree of freedom (df = 29) also proved the difference where t counted (-38.445) is bigger than t table (-1.669). The training was basically aiming at formulating the expected ability from the employees to change their behavior. Such a change was formulated in terms of behavioral change and a short-term educational program by using systemic and organized procedures, so that operative employees learn technical and skill knowledge for specific purpose.



Author(s):  
D. Saxon ◽  
R. Sims

Abstract Good adhesion of mold compounds to the die surfaces of plastic encapsulated integrated circuits is an important quality and reliability issue. A comparison was made of mold compound adhesion to the die surface under two new wafer cleaning methods after backgrind detape processes. The normal cleaning procedure was compared to a solvent-based clean and a water-based clean. Split lots were inspected using acoustic micro imaging (AMI) to measure the amount of delamination. Reliability studies were used to characterize the long term effect of the mold compound/die surface delamination.



Author(s):  
Brian Lund

This chapter explores housing politics in Scotland, Wales and Northern Ireland both before and after formal devolution. It examines the role of local authority housing in Scotland prior to devolution in relationship to Green Belts and New Towns with particular reference to Glasgow and the sectarian politics in Northern Ireland leading to the creation of the Northern Ireland Housing Executive and direct Westminster rule. Post devolution housing politics under New Labour associated with homelessness, planning, stock transfer and changes in the housing market are explored. Divergent policies between the home nations since 2010, associated with the Coalition government’s housing policies, are analysed with special reference to land, social housing, the Right to Buy, the bedroom tax, sustainable housing and the regulation of private landlords.



1997 ◽  
Vol 273 (3) ◽  
pp. R960-R966 ◽  
Author(s):  
V. L. Brooks ◽  
C. M. Kane ◽  
D. M. Van Winkle

Two studies were performed to determine whether the attenuation of baroreflex control of heart rate during late pregnancy in conscious rabbits is due to changes in parasympathetic (Para) or sympathetic (Sym) control of the heart. In the first, baroreflex relationships between arterial pressure and heart rate were generated before and after treatment with propranolol (Pro) to block Sym or with methscopolamine (Meth) to block Para. Each rabbit was studied in both the pregnant and nonpregnant state. Pregnancy decreased maximum baroreflex gain from 14.9 +/- 4.0 to 4.8 +/- 0.9 beats.min-1.mmHg-1 (P < 0.01) and decreased heart rate range from 177 +/- 6 to 143 +/- 10 beats/min (P < 0.01), primarily by increasing minimum heart rate (114 +/- 6 to 134 +/- 8 beats/min; P < 0.01). The difference between pregnant and nonpregnant rabbits in baroreflex gain was not altered by Meth but was abolished by Pro, suggesting that it is due to decreased Sym control of the heart. The elevated minimum heart rate of pregnancy persisted after Pro, but was abolished by Meth, suggesting that it is mediated by decreased Para control of the heart. In the second study, isolated buffer-perfused hearts from pregnant and nonpregnant rabbits were treated with increasing doses of isoproterenol (0.3-300 mM) or acetylcholine (0.3-10,000 microM), and the heart rate responses were determined. Hearts from pregnant rabbits were more sensitive to isoproterenol (P < 0.05), but less responsive to acetylcholine (P < 0.05). In conclusion, pregnancy-induced decreases in cardiac reflex gain and range appear to be mediated by alterations in Sym and Para, respectively. The change in Sym occurs proximal to the heart, whereas the decreased contribution of Para may be due, at least in part, to decreased sensitivity of the heart to acetylcholine.



Crustaceana ◽  
2019 ◽  
Vol 92 (11-12) ◽  
pp. 1311-1335
Author(s):  
Chun-Yang Guo ◽  
Xiao Cao ◽  
Chong-Yuan Lin ◽  
Meng-Di Liu ◽  
Shan-Liang Xu ◽  
...  

Abstract Daphnia pulex is a freshwater microcrustacean that is known for its cyclical parthenogenesis. In D. pulex, parthenogenetic reproduction switches to sexual reproduction when the living conditions worsen. However, this transformation also occurs over age under favourable living conditions. Thus, there might be a relationship between aging and reproductive conversion. We performed Illumina RNA sequencing, generating 51 712 680 and 59 854 588 raw reads from 1 day-old D. pulex and 25 day-old D. pulex, respectively. From these reads, 60 776 transcripts were assembled and 36 569 (60.15%) unigenes were annotated. A number of significantly differentially expressed genes associated with growth, aging, and reproduction were identified and Quantitative real-time PCR for six genes confirmed the transcriptome data. RNA interference (RNAi) of the caspase-3 gene (casp3) that is a key gene for growth, development, aging, and reproduction, was conducted, which achieved an 80% reduction in casp3 mRNA expression. Meanwhile, the mRNA expression of upstream genes jnk and akt, and sir2 (encoding a substrate of casp3) were also detected. The change of jnk mRNA expression before and after RNAi was not significant () and the mRNA levels of sir2 decreased, while akt increased after casp3 RNAi (). The results indicated the interrelationships of some genes in the senescence pathway and helped to identify the molecular mechanism of the aging progress in D. pulex. Overall, the difference in mRNA expression profile during aging of D. pulex forms a basis for further studies aimed at understanding the role of the transcriptional level in regulating aging and reproductive transformation.



2005 ◽  
Vol 863 ◽  
Author(s):  
F. Ciaramella ◽  
V. Jousseaume ◽  
S. Maitrejean ◽  
B. Rémiat ◽  
M. Verdier ◽  
...  

AbstractSemiconductor industry needs a continuously improvement of integrated circuits performance and an increase of integrated density on silicon. The 2004 ITRS Roadmap underlines the need of dielectric material for ILD with dielectric constant (k) lower than 3 for the 90 nm node and than 2.4 for the 45 nm node. In this work, porous films with k value lower than 2.2 were processed using a porogen approach. Firstly, a material composed of a methylsilsesquioxane (MSQ) matrix and of organic nanoparticles (called porogen) is deposited and baked. Then, this composite is thermally cured to allow the porogens degradation and matrix crosslinking. Different k values were obtained by varying the porogen loading in the composite. Mechanical properties of composite and porous films (before and after porogen removal respectively) were investigated using nanoindentation and FTIR analysis for different porogen loadings (between 0 and 40 %). The composite modulus is higher than the porous film modulus for high porogen loading. This result is interpreted in term of matrix crosslinking. Mechanical properties were also modelized using foam mechanical models. For high porosity level, the best Young modulus fitting is obtained with tetrakaidecaedric cells, which seems in good agreement with porosity morphology.



2020 ◽  
Vol 3 (2) ◽  
pp. 115
Author(s):  
Dilla Indriasari

This study examines the role of the youtube media and understanding of the family planning program, the research problem is how the role of the youtube media in enhancing the understanding of the family planning program. Family Planning is an effort to plan also to control the population through the use of contraceptive methods in an effort to create economic and social benefits for all levels of the population. By increasing community participation in the use of KB MKJP. KB counseling is expected to help fertile age cuouples in choosing the right contraception. The use of Non MKJP is very dominating, meaning that many people still do not understand the importance of KB MKJP. Because family planning counseling has not been reached at all levels of society because of the limited extension workers. YouTube media can provide family planning information and help people choose the right contraceptive method for themselves. This study aims to find out the description of the family planning program and how the use of YouTube media in enhancing the understanding of family planning in the Insan Sejahtera family planning family planning company. In this study, researchers used a descriptive method with a qualitative approach. Data collected through interviews, observation and documentation. The population of the study was 327 fertile age cuouples with a sample of 10 fertile age cuouples using Non MKJP. The results showed that youtube media was effective in increasing understanding of the family planning program, as seen from the difference between before and after the introduction of the youtube media. Understanding of the family planning program is demonstrated by community participation in the use of the MKJP.



Author(s):  
L.J. Chen ◽  
Y.F. Hsieh

One measure of the maturity of a device technology is the ease and reliability of applying contact metallurgy. Compared to metal contact of silicon, the status of GaAs metallization is still at its primitive stage. With the advent of GaAs MESFET and integrated circuits, very stringent requirements were placed on their metal contacts. During the past few years, extensive researches have been conducted in the area of Au-Ge-Ni in order to lower contact resistances and improve uniformity. In this paper, we report the results of TEM study of interfacial reactions between Ni and GaAs as part of the attempt to understand the role of nickel in Au-Ge-Ni contact of GaAs.N-type, Si-doped, (001) oriented GaAs wafers, 15 mil in thickness, were grown by gradient-freeze method. Nickel thin films, 300Å in thickness, were e-gun deposited on GaAs wafers. The samples were then annealed in dry N2 in a 3-zone diffusion furnace at temperatures 200°C - 600°C for 5-180 minutes. Thin foils for TEM examinations were prepared by chemical polishing from the GaA.s side. TEM investigations were performed with JE0L- 100B and JE0L-200CX electron microscopes.



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