Evaluation of Young's Modulus and Yield Strength of Thin Film Structural Material Using Nanoindentation Technique

1999 ◽  
Vol 562 ◽  
Author(s):  
Dongil Son ◽  
Yun-Hee Lee ◽  
Jeong-Hoon Ahn ◽  
Dongil Kwon
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Yield Strength ◽  
Film Thickness ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Surface Condition ◽  
Sensors And Actuators ◽  
Elastic Range ◽  
Silicon Bulk

ABSTRACTAluminum films have wide applications in micromechanical devices such as micro sensors and actuators. Therefore, their mechanical properties are very important for reliability evaluation. However, there is no standardized method to evaluate the mechanical properties of the materials used in MEMS(microelectromechanical system) devices since the measured mechanical properties are influenced by many factors such as the surface condition of materials, intrinsic limit of the measurement device, etc. Hence, it was intended to evaluate the mechanical properties of thin film, which is important in its mechanical operation. Because MEMS devices are usually operated in the elastic range, Young's modulus and yield strength were evaluated by using a microcantilever beam technique. First, A1 cantilever beams were fabricated using the silicon bulk micromachining technology to have various film thicknesses. The load-displacement curves during beam bending by nanoindentation method were then obtained. The linear relationship of the curve in elastic range was utilized in deriving Young's modulus of the A1 film, which gave reproducible results regardless of film thickness. In the high load range, the deviation from the linear relation was detected, so that yield strength of A1 film could be evaluated. It was found that the yield strength increases with decreasing film thickness. By applying the misfit dislocation theory and the Hall-Petch relationship, the theoretical estimation could predict the trend of yield strength.

Measurement of Young's Modulus and Poisson's Ratio of Thin Film by Combination of Bulge Test and Nano-Indentation

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Applied Pressure ◽  
Indentation Test ◽  
Poisson's Ratio ◽  
Bulge Test ◽  
Nano Indentation

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.

Determination of Mechanical Properties of Thin Film on Silicon Wafer

2003 ◽  
Author(s):  
Enboa Wu ◽  
Albert J. D. Yang ◽  
Ching-An Shao ◽  
C. S. Yen
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Thermal Expansion ◽  
Young’S Modulus ◽  
Silicon Wafer ◽  
Coefficient Of Thermal Expansion ◽  
Young's Modulus ◽  
Poisson Ratio ◽  
Bulk State

Nondestructive determination of Young’s modulus, coefficient of thermal expansion, Poisson ratio, and thickness of a thin film has long been a difficult but important issue as the film of micrometer order thick might behave differently from that in the bulk state. In this paper, we have successfully demonstrated the capability of determining all these four parameters at one time. This novel method includes use of the digital phase-shifting reflection moire´ (DPRM) technique to record the slope of wafer warpage under temperature drop condition. In the experiment, 1-um thick aluminum was sputtered on a 6-in silicon wafer. The convolution relationship between the measured data and the mechanical properties was constructed numerically using the conventional 3D finite element code. The genetic algorithm (GA) was adopted as the searching tool for search of the optimal mechanical properties of the film. It was found that the determined data for Young’s modulus (E), Coefficient of Thermal Expansion (CTE), Poisson ratio (ν), and thickness (h) of the 1.00 um thick aluminum film were 104.2Gpa, 38.0 ppm/°C, 0.38, and 0.98 um, respectively, whereas that in the bulk state were measured to be E=71.4 Gpa, CTE=23.0 ppm/°C, and ν=0.34. The significantly larger values on the Young’s modulus and the coefficient of thermal expansion determined by this method might be attributed to the smaller dislocation density due to the thin dimension and formation of the 5-nm layer of Al2O3 formed on top of the 1-um thick sputtered film. The Young’s Modulus and the Poisson ratio of this nano-scale Al2O3 film were then determined. Their values are consistent with the physical intuition of the microstructure.

Influence of annealing on microstructure & molecular orientation, thermal behaviour, mechanical properties and their correlations of uniaxially drawn iPP thin film

e-Polymers ◽  
2008 ◽  
Vol 8 (1) ◽  
Author(s):  
Sayant Saengsuwan
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Tensile Strength ◽  
Young’S Modulus ◽  
Thermal Behaviour ◽  
Annealing Time ◽  
Molecular Orientation ◽  
Young's Modulus ◽  
Crystal Thickness ◽  
Scanning Calorimetry

AbstractThe influence of annealing on the microstructure and molecular orientation, thermal behaviour and mechanical properties of uniaxially drawn iPP thin film was studied by wide-angle X-ray diffraction, differential scanning calorimetry and tensile testing, respectively. The correlations of mechanical and microstructural properties of annealed films were also examined. The transformation of smectic phase of iPP to the α-form was more pronounced with increasing annealing time and temperature. The true and apparent crystallinities and crystal thickness were strongly enhanced with annealing time and temperature. The relative molecular orientation tended to increase with annealing time. These results caused the significant improvement of modulus and tensile strength of the annealed films in both machine (MD) and transverse (TD) directions. The increases in MD-Young’s modulus and MD-tensile strength were well correlated with the increase in true crystallinity obtained in equatorial scans. Some relationship between the increase in crystal thickness and the increase in Young’s modulus in both MD and TD directions was also found.

Local Mechanical Properties of Highly Porous Si3N4 for Trabecular Bone Replacement

2015 ◽  
Vol 662 ◽  
pp. 142-146
Author(s):  
Zuzana Pramuková Vilčeková ◽  
Monika Kašiarová ◽  
Magdaléna Precnerová Domanická ◽  
Miroslav Hnatko ◽  
Pavol Šajgalík
Keyword(s):  
Mechanical Properties ◽  
Silicon Nitride ◽  
Yield Strength ◽  
Trabecular Bone ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Polyurethane Foams ◽  
Strength Increase ◽  
Bone Replacement ◽  
Highly Porous

The study deals with the development of highly porous undegradable ceramics based on silicon nitride as potential replacement of trabecular bone. These materials were produced using replication method with polyurethane foams as pore-forming agents to achieve similar porous structure to trabecular bone. Prepared porous ceramics had a bimodal pore structure with macro-pores larger than 200 μm and micro-pores smaller than 1 μm in diameter, which are necessary for tissue ingrowths, cell adhesion, adsorption of biological metabolites and nutrition delivery in organism. The microstructure and local mechanical properties (Young’s modulus and Yield strength) were evaluated and compared with human trabecular bone. Results showed that studied porous materials have satisfactory porosity and pore sizes for trabecular bone replacement. Young’s modulus of bone was 12.6 ± 2.23 GPa and porous silicon nitride samples ranged from 10.9 ± 3.38 GPa to 12.9 ± 1.13 GPa. The values of Yield strength of trabecular bone was determined as 493 ± 30.7 MPa and the values of porous samples varied from 250 ± 19.3 MPa to 558 ± 36.5 MPa. Young’s modulus and Yield strength increase with increasing of the pre-sintering temperature and multiple infiltrations.

scholarly journals Determination of the Tensile Properties and Biodegradability of Cornstarch-Based Biopolymers Plasticized with Sorbitol and Glycerol

Polymers ◽  
2021 ◽  
Vol 13 (21) ◽  
pp. 3709
Author(s):  
M. M. Harussani ◽  
S. M. Sapuan ◽  
A. H. M. Firdaus ◽  
Yaser A. El-Badry ◽  
Enas E. Hussein ◽  
...  
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Tensile Strength ◽  
Young’S Modulus ◽  
Food Packaging ◽  
Young's Modulus ◽  
Casting Process ◽  
Biodegradable Materials ◽  
And Performance

In this study, the effects of various quantities of sorbitol and glycerol plasticizers (0%, 30%, 45%, and 60%) on cornstarch-based film were examined to develop a novel polymer for usage with biodegradable materials. The film was prepared using the casting process. According to the test findings, the application of the plasticizer concentrations affected the thickness, moisture content, and water absorption of the film. When plasticizer concentrations were increased to 60%, the tensile stress and Young’s modulus of plasticized films dropped regardless of plasticizer type. However, the thin film with addition of 30% sorbitol plasticizer demonstrated a steady value of Young’s modulus (60.17 MPa) with an increase in tensile strength (13.61 MPa) of 46%, while the lowest combination of tensile strength and Young’s modulus is the film that was plasticized with 60% glycerol, with 2.33 MPa and 16.23 MPa, respectively. In summary, the properties and performance of cornstarch-based film were greatly influenced by plasticizer types and concentrations. The finest set of features in this research appeared in the film plasticized with 30% sorbitol, which achieved the best mechanical properties for food packaging applications.

The Mechanical Properties of Electroplated Cu Thin Films Measured by means of the Bulge Test Technique

2001 ◽  
Vol 695 ◽  
Author(s):  
Yong Xiang ◽  
Xi Chen ◽  
Joost J. Vlassak
Keyword(s):  
Mechanical Properties ◽  
Film Thickness ◽  
Yield Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Bulge Test ◽  
X Ray Diffraction ◽  
Test Technique ◽  
Cu Films ◽  
Analytical Formulae

ABSTRACTThe mechanical properties of freestanding electroplated Cu films were determined by measuring the deflection of Si-framed, pressurized membranes. The films were deformed under plane-strain conditions. The pressure-deflection data are converted into stress-strain curves by means of simple analytical formulae. The microstructure of the Cu films was characterized using scanning electron microscopy and x-ray diffraction. The yield stress, Young's modulus, and residual stress were determined as a function of film thickness and microstructure. Both yield stress and Young's modulus increase with decreasing film thickness and correlate well with changes in the microstructure and texture of the films.

Nanoindentation Measurements on Low-k Porous Silica Thin Films Spin Coated on Silicon Substrates

2003 ◽  
Vol 125 (4) ◽  
pp. 361-367 ◽  
Author(s):  
Xiaoqin Huang ◽  
Assimina A. Pelegri
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Microelectromechanical Systems ◽  
Young's Modulus ◽  
Porous Silica ◽  
Silicon Substrates ◽  
Silica Thin Films ◽  
Low K

MEMS (MicroElectroMechanical Systems) are composed of thin films and composite nanomaterials. Although the mechanical properties of their constituent materials play an important role in controlling their quality, reliability, and lifetime, they are often found to be different from their bulk counterparts. In this paper, low-k porous silica thin films spin coated on silicon substrates are studied. The roughness of spin-on coated porous silica films is analyzed with in-situ imaging and their mechanical properties are determined using nanoindentation. A Berkovich type nanoindenter, of a 142.3 deg total included angle, is used and continuous measurements of force and displacements are acquired. It is shown, that the measured results of hardness and Young’s modulus of these films depend on penetration depth. Furthermore, the film’s mechanical properties are influenced by the properties of the substrate, and the reproduction of the force versus displacement curves depends on the quality of the thin film. The hardness of the studied low-k spin coated silica thin film is measured as 0.35∼0.41 GPa and the Young’s modulus is determined as 2.74∼2.94 GPa.

Effects of the Substrate on the Determination of SEBS Thin Film Mechanical Properties by Nanoindentation

2006 ◽  
Vol 315-316 ◽  
pp. 766-769
Author(s):  
Yong Zhi Cao ◽  
Ying Chun Liang ◽  
Shen Dong ◽  
T. Sun ◽  
Bo Wang
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Polymer Film ◽  
Young’S Modulus ◽  
Penetration Depth ◽  
Young's Modulus ◽  
Polymer Film Substrate ◽  
Film Substrate ◽  
Composite Hardness

In order to investigate nanoindentation data of polymer film-substrate systems and to learn more about the mechanical properties of polymer film-substrate systems, SEBS (styreneethylene/ butylene-styrene) triblock copolymer thin film on different substrate systems have been tested with a systematic variation in penetration depth and substrate characteristics. Nanoindentation experiments were performed using a Hysitron TriboIndenter with a Berkvoich tip. The resulting data were analyzed in terms of load-displacement curves and various comparative parameters, such as hardness and Young’s modulus. The results obtained by the Oliver and Pharr method show how the composite hardness and Young’s modulus are different for different substrates and different penetration depth.

scholarly journals On the Grain Microstructure–Mechanical Properties Relationships in Aluminium Alloy Parts Fabricated by Laser Powder Bed Fusion

Metals ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 1175
Author(s):  
Pavel A. Somov ◽  
Eugene S. Statnik ◽  
Yuliya V. Malakhova ◽  
Kirill V. Nyaza ◽  
Alexey I. Salimon ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Yield Strength ◽  
Aluminium Alloy ◽  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Grain Morphology ◽  
Tensile Tests ◽  
Grain Structure ◽  
Surface Finishing

Recent years witnessed progressive broadening of the practical use of 3D-printed aluminium alloy parts, in particular for specific aerospace applications where weight saving is of great importance. Selective laser melting (SLM) is an intrinsically multi-parametric fabrication technology that offers multiple means of controlling mechanical properties (elastic moduli, yield strength, and ductility) through the control over grains size, shape, and orientation. Targeted control over mechanical properties is achieved through the tuning of 3D-printing parameters and may even obviate the need of heat treatment or mechanical post-processing. Systematic studies of grain structure for different printing orientations with the help of EBSD techniques in combination with mechanical testing at different dimensional levels are the necessary first steps to implement this agenda. Samples of 3D-printable Al-Mg-Si RS-333 alloy were fabricated in three orientations with respect to the principal build direction and the fast laser beam scanning direction. Sample structure and proper-ties were investigated using a number of techniques, including EBSD, in situ SEM tensile testing, roughness measurements, and nanoindentation. The as-printed samples were found to display strong variation in Young’s modulus values from nanoindentation (from 43 to 66 GPa) and tensile tests (from 54 to 75 GPa), yield stress and ultimate tensile strength (100–195 and 130–220 MPa) in different printing orientations, and almost constant hardness of about 0.8 GPa. A further preliminary study was conducted to assess the effect of surface finishing on the mechanical performance. Surface polishing was seen to reduce Young’s modulus and yield strength but improves ductility, whereas the influence of sandblasting was found to be more controversial. The experimental results are discussed in connection with the grain morphology and orientation.

scholarly journals Modelling of Nanoindentation of TiAlN and TiN Thin Film Coatings for Automotive Bearing

2019 ◽  
Vol 8 (3) ◽  
pp. 7194-7199
Keyword(s):  
Mechanical Properties ◽  
Finite Element Method ◽  
Finite Element ◽  
Yield Strength ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Poisson's Ratio ◽  
The Finite Element Method ◽  
Element Method

Bearings are critical components for the transmission of motion in machines. Automotive components, especially bearings, will wear out over a certain period of time because they are constantly subjected to high levels of stress and friction. Studies have proven that coatings can extend the lifespan of bearings. Hence, it is necessary to conduct studies on coatings for bearings, particularly the mechanical and wear properties of the coating material. This detailed study focused on the mechanical properties of single-coatings of TiN and TiAIN using the finite element method (FEM). The mechanical properties that can be obtained from nano-indentation experiments are confined to just the Young’s modulus and hardness. Therefore, nanoindentation simulations were conducted together with the finite element method to obtain more comprehensive mechanical properties such as the yield strength and Poisson’s ratio. In addition, various coating materials could be examined by means of these nanoindentation simulations, as well the effects of those parameters that could not be controlled experimentally, such as the geometry of the indenter and the bonding between the coating and the substrate. The simulations were carried out using the ANSYS Mechanical APDL software. The mechanical properties such as the Young’s modulus, yield strength, Poisson’s ratio and tangent modulus were 370 GPa, 19 GPa, 0.21 and 10 GPa, respectively for the TiAlN coating and 460 GPa, 14 GPa, 0.25 and 8 GPa, respectively for the TiN coating. The difference between the mechanical properties obtained from the simulations and experiments was less than 5 %.

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