An Enhanced Two-Dimensional Hole Gas (2DHG) C-H Diamond with Positive Surface Charge Model for Advanced Normally-Off MOSFET Devices
Abstract Though the complementary power field effect transistore (FETs), e.g., metal-oxide-semiconductor-FETs (MOSFETs) based on wide badgap materials, enable low switching losses and on-resistance, p-channel FETs are not feasible in any wide bandgap material other than diamond. In this paper, we propose the first work to investigate the impact of fixed positive surface charge density on achieving normally-off and control threshold voltage operation obtained on p-channel two-dimensional hole gas (2DHG) hydrogen-terminated diamond (C-H) FET using deep nitrogen doping in the diamond substrate. In general, a p-channel diamond C-H MOSFET demonstrates normally-on operation, but the normally-off operation is also a critical requierment of the feasible electronic power devices in terms of safety operation. The evaluation results of the characteristic of the C-H MOSFET capacitor with the two demonstrated charge sheet models using the two-dimensional Silvaco Atlas TCAD show that the fixed-Fermi level is a function of capacitance-voltage with an activation energy of 1.7 eV (donor level) at the H-diamond surface close to minimum conduction band. The maximum current density with a positive surface charge model and a nitrogen-doped layer of the Al2O3/H-diamond device is -52 mA/mm at a gate-source voltage of -42 V. Also, the gate threshold voltage is relatively high at Vth= -3 V, i.e., the positive surface charge model can achieve the normally-off operation. Moreover, we demonstrate that the obtained results correspond to the experimental work with the SiO2 layer located below the gate in C-H diamond/Al2O3 surface.