Multi-Stacked Flip Chips with Copper Plated Through Silicon Vias and Re-distribution for 3D System-in-Package Integration

2006 ◽  
Vol 970 ◽  
Author(s):  
Shi-Wei Ricky Lee ◽  
Ronald Hon
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Back Side ◽  
Wafer Level ◽  
Flip Chips ◽  
Electrical Interconnection ◽  
Solder Balls ◽  
Original Size ◽  
Structure Lead ◽  
Silicon Vias

ABSTRACTThe study is a prototype design and fabrication of multi-stacked flip chip three dimensional packaging (3DP) with TSVs for interconnection. Three chips are stacked together to make a 3DP with solder bumped flip chips. TSVs are fabricated and distributed along the periphery of the middle chip. The TSVs are formed by dry etching, deep reactive ions etching (DRIE), with dimensions of 150 × 100 microns. The TSVs are plugged by copper plating. The filled TSVs are connected to the solder pads by extended pad patterns surrounding the top and the bottom of TSVs on both sides of the wafer for the middle chip. After pad patterning passivation and solder bumping, the wafer is sawed into chips for subsequent 3D stacked die assembly. Because the TSVs are located at the periphery of the middle chips and stretch across the saw street between adjacent chips, they will be sawed through their center to form two open TSVs (with half of the original size) for electrical interconnection between the front side and the back side of the middle chip. The top chip is made by the conventional solder bumped flip chip processes and the bottom chip is a carrier with some routing patterns. The three middle chips and top chip are stacked by a flip chip bonder and the solder balls are reflowed to form the 3DP structure. Lead-free soldering and wafer thinning are also implemented in this prototype. In addition to the conceptual design, all wafer level fabrication processes are described and the subsequent die stacking assembly is also presented.

Effect of Design Parameters on Drop Test Performance of Wafer Level Chip Scale Packages (WLCSP)

2011 ◽  
Author(s):  
Pushkraj Tumne ◽  
Vikram Venkatadri ◽  
Santosh Kudtarkar ◽  
Michael Delaus ◽  
Daryl Santos ◽  
...  
Keyword(s):  
Flip Chip ◽  
Bulk Solder ◽  
Consumer Electronics ◽  
Drop Test ◽  
Design Parameters ◽  
Mechanical Shock ◽  
Wafer Level ◽  
Cross Sectional ◽  
Right Censored Data ◽  
Solder Balls

Today’s consumer market demands electronics that are smaller, faster and cheaper. To cater to these demands, novel materials, new designs, and new packaging technologies are introduced frequently. Wafer Level Chip Scale Package (WLCSP) is one of the emerging package technologies that have the key advantages of reduced cost and smaller footprint. The portable consumer electronics are frequently dropped; hence the emphasis of reliability is shifting towards study of effects of mechanical shock loading increasingly. Mechanical loading typically induces brittle fractures (also known as intermetallic failures) between the solder bumps and bond pads at the silicon die side. This type of failure mechanism is typically characterized by the board level drop test. WLCSP is a variant of the flip-chip interconnection technique. In WLCSPs, the active side of the die is inverted and connected to the PCB by solder balls. The size of these solder balls is typically large enough (300μm pre-reflow for 0.5mm pitch and 250μm pre-reflow for 0.4mm pitch) to avoid use of underfill that is required for the flip-chip interconnects. Several variations are incorporated in the package design parameters to meet the performance, reliability, and footprint requirements of the package assembly. The design parameters investigated in this effort are solder ball compositions with different Silver (Ag) content, backside lamination with different thickness, WLCSP type –Direct and Re-Distribution Layer (RDL), bond pad thickness, and sputtered versus electroplated Under Bump Metallurgy (UBM) deposition methods for 8×8, 9×9, and 10×10 array sizes. The test vehicles built using these design parameters were drop tested using JEDEC recommended test boards and conditions as per JESD22-B11. Cross sectional analysis was used to identify, confirm, and classify the intermetallic, and bulk solder failures. The objective of this research was to quantify the effects and interactions of WLCSP design parameters through drop test. The drop test data was collected and treated as a right censored data. Further, it was analyzed by fitting empirical distributions using the grouped and un-grouped data approach. Data analysis showed that design parameters had a significant effect on the drop performance and played a vital role in influencing the package reliability.

Evaluation of Low Stress Photo-Sensitive Spin On Dielectric Layers for Through Silicon Via (TSV) Copper Redistribution Layers

2011 ◽  
Vol 2011 (DPC) ◽  
pp. 000666-000698
Author(s):  
Christopher Jahnes ◽  
Eric Huenger ◽  
Scott Kisting
Keyword(s):  
Power Distribution ◽  
Flip Chip ◽  
Dielectric Materials ◽  
Back Side ◽  
Thermal Reliability ◽  
Dielectric Layers ◽  
Chip Size ◽  
Package Density ◽  
Silicon Vias ◽  
Wafer Thinning

To increase performance of semiconductor devices advances in packaging such as chip stacking (3D) and silicon carrier technologies (SoC) are being developed. Adaptation of these packaging fabrication methods offers the ability to incorporate functionality as well as provide memory and power distribution on one IC with increased signal bandwidth. An enabling element in both the stacking and silicon carrier technologies is through silicon vias (TSV) which electrically connect dies to a silicon carrier or via stacked chips (1). Creation of TSV involves via fabrication, wafer thinning and back side wafer finishing, to name a few, some of which are relatively new to semiconductor processing. Furthermore, because the wafer backside is accessible it can now be utilized to route wiring to further increase package density. The focus of this research was to evaluate photo-sensitive spin on dielectric materials (SOD) that can be used as the backside wiring levels, commonly referred to as redistribution layers (RDL) in TSV technologies. The two materials evaluated are; the epoxy based Dow INTERVIA™ 8023 Dielectric and the Benzocyclobutene (BCB) polymer, Dow CYCLOTENE™ 4000 product series. These dielectric materials have low stress and provide good planarization (2). Test vehicles with a chip size of 3.7 cm x 2.26 cm were fabricated with a 6 um wide copper RDL layer using the SOD materials of interest as well as conventional PECVD SiO2/SiN dielectric layers. The large chip size accommodated parallel Cu lines running 1.8 cm long with a spacing of 3 m and represented an aggressive shorting test for the SOD materials. It also enhances chip distortion after thinning and is evaluated for all three test vehicles. Chips were then electrically tested through simulated 260° C reflow cycles (for flip chip joining) and accelerated thermal reliability tests from −55° C to 125° C for 1000 cycles.

Development of 3D System-in-Package with TSV Technology

2014 ◽  
Vol 2014 (1) ◽  
pp. 000612-000617 ◽  
Author(s):  
Shota Miki ◽  
Takaharu Yamano ◽  
Sumihiro Ichikawa ◽  
Masaki Sanada ◽  
Masato Tanaka
Keyword(s):  
High Performance ◽  
Flip Chip ◽  
Organic Substrate ◽  
Back Side ◽  
Final Thickness ◽  
Chip Technology ◽  
Type Semiconductor ◽  
Interconnect Reliability ◽  
Solder Balls ◽  
Carrier Wafer

In recent years, products such as smart phones, tablets, and wearable devices, are becoming miniaturized and high performance. 3D-type semiconductor structures are advancing as the demand for high-density assembly increases. We studied a fabrication process using a SoC die and a memory die for 3D-SiP (System in Package) with TSV technology. Our fabrication is comprised of two processes. One is called MEOL (Middle End of Line) for exposing and completing the TSV's in the SoC die, and the other is assembling the SoC and memory dice in a 3D stack. The TSV completion in MEOL was achieved by SoC wafer back-side processing. Because its final thickness will be a thin 50μm (typical), the SoC wafer (300 mm diameter) is temporarily attached face-down onto a carrier-wafer. Careful back-side grinding reveals the “blind vias” and fully opens them into TSV's. A passivation layer is then grown on the back of the wafer. With planarization techniques, the via metal is accessed and TSV pads are built by electro-less plating without photolithography. After the carrier-wafer is de-bonded, the thin wafer is sawed into dice. For assembling the 3D die stack, flip-chip technology by thermo-compression bonding was the method chosen. First, the SoC die with copper pillar bumps is assembled to the conventional organic substrate. Next the micro-bumps on the memory die are bonded to the TSV pads of the SoC die. Finally, the finished assembly is encapsulated and solder balls (BGA) are attached. The 3D-SiP has passed both package-level reliability and board-level reliability testing. These results show we achieved fabricating a 3D-SiP with high interconnect reliability.

Underfill Dispensing for 3D Die Stacking with Through Silicon Vias

2012 ◽  
Vol 2012 (1) ◽  
pp. 000548-000553 ◽  
Author(s):  
Fuliang Le ◽  
S. W. Ricky Lee ◽  
Jingshen Wu ◽  
Matthew M. F. Yuen
Keyword(s):  
Flip Chip ◽  
Through Silicon Vias ◽  
Flip Chips ◽  
Solder Bumps ◽  
Die Stacking ◽  
Chip Carrier ◽  
On Chip ◽  
Silicon Vias ◽  
3D Package

In this paper, a 3D stacked-die package is developed for the miniaturization and integration of electronic devices. The developed package has a stacked flip-chip-on-chip structure and eight flip chips are arranged in four vertical layers using four silicon chip carriers with through silicon vias (TSVs). In each layer, two flip chips are mounted on the silicon chip carrier with 100 um solder bumps, and multiple TSVs are fabricated in each silicon chip carrier for underfill dispensing purpose. The 3D module with four stacked layers is sequentially assembled by the standard surface mount reflow process and finally mounted to a substrate. In the underfill process, conventional I-pass underfill is used to fill up the gaps of the bottom two layers as it has relatively fast spreading speed. For the top two chip carriers, underfill is dispensed through TSVs to fill the gaps. Unlike the conventional underfill process, the encapsulant in this case would not flow in the gaps by the capillary effect unless the dispensed materials can obtain enough kinetic energy to overcome the surface tension at the end of TSVs, and thus, smooth sidewall, proper dispensing settings and optimized TSV pattern are needed. After underfill, detailed inspections are performed to verify the quality of encapsulation. The results show that the combined I-pass/TSV underfill process gives void-free encapsulation and perfect fillets for the stacked 3D package.

Package Thickness - Ultrathin WLFO (Wafer-Level Fan-Out)

2016 ◽  
Vol 2016 (1) ◽  
pp. 000305-000308
Author(s):  
Eoin O'Toole ◽  
Steffen Kroehnert ◽  
José Campos ◽  
Virgilio Barbosa ◽  
Leonor Dias
Keyword(s):  
System Integration ◽  
Dimensional Space ◽  
Three Dimensional ◽  
Battery Life ◽  
Wafer Level ◽  
Display Area ◽  
Solder Balls ◽  
Bga Package ◽  
Wafer Processing ◽  
Semiconductor Packages

Abstract NANIUM's Fan-Out Wafer-Level Packaging technology WLFO (Wafer-Level Fan-Out) is based on embedded Wafer-Level Ball Grid Array technology eWLB of Infineon Technologies [1]. Since it′s invention almost 10 years ago, it became the leading technology for Fan-Out Wafer-Level packages. The WLFO technology is based upon the reconstitution of KGD (known good die) from incoming device wafer, independent of wafer diameter and material, to recon wafer format of active semiconductor dies or other active/passive components separated by mold compound applied through compression molding on a temporary mold carrier. The resulting recon wafer can be processed in standard wafer processing equipment. One of the challenges for the future of semiconductor packaging is reduction of the board level volume real estate occupied by each component. With the drive towards lower profile end user devices incorporating large display area and battery life the three dimensional space available for semiconductor packages is diminishing. It is well known that WLFO single die packaging but even more significant system integration enables the shrinkage of the XY footprint of the package through flexible very dense heterogeneous system-in-package integration [2]. But one of the disruptive advantages of the substrate-less WLFO technology is to also permit significant reduction of the overall package height (Z). A total package height for a BGA package including solder balls <500um and for a LGA package with solder land pads only <300um is achievable today, and further development towards even thinner packages is on the way.

Wafer Level Assembly Technique Development for Fine Pitch Flip Chip 3D Die-to-Wafer Integration

2010 ◽  
Vol 2010 (1) ◽  
pp. 000548-000553
Author(s):  
Zhaozhi Li ◽  
Brian J. Lewis ◽  
Paul N. Houston ◽  
Daniel F. Baldwin ◽  
Eugene A. Stout ◽  
...  
Keyword(s):  
Flip Chip ◽  
Low Cost ◽  
Three Dimensional ◽  
Cost Effective ◽  
Market Demand ◽  
Wafer Level ◽  
Packaging Technology ◽  
Fine Pitch ◽  
3D Packaging ◽  
Assembly Technique

Three Dimensional (3D) Packaging has become an industry obsession as the market demand continues to grow toward higher packaging densities and smaller form factor. In the meanwhile, the 3D die-to-wafer (D2W) packaging structure is gaining popularity due to its high manufacturing throughput and low cost per package. In this paper, the development of the assembly process for a 3D die-to-wafer packaging technology, that leverages the wafer level assembly technique and flip chip process, is introduced. Research efforts were focused on the high-density flip chip wafer level assembly techniques, as well as the challenges, innovations and solutions associated with this type of 3D packaging technology. Processing challenges and innovations addressed include flip chip fluxing methods for very fine-pitch and small bump sizes; wafer level flip chip assembly program creation and yield improvements; and set up of the Pb-free reflow profile for the assembled wafer. 100% yield was achieved on the test vehicle wafer that has totally 1,876 flip chip dies assembled on it. This work has demonstrated that the flip chip 3D die-to-wafer packaging architecture can be processed with robust yield and high manufacturing throughput, and thus to be a cost effective, rapid time to market alternative to emerging 3D wafer level integration methodologies.

Wafer Level Solder Bumping and Flip Chip Assembly with Solder Balls Down to 30μm

2011 ◽  
Vol 2011 (1) ◽  
pp. 000953-000960 ◽  
Author(s):  
Thomas Oppert ◽  
Rainer Dohle ◽  
Jörg Franke ◽  
Stefan Härter
Keyword(s):  
Solder Ball ◽  
Flip Chip ◽  
Temperature Cycling ◽  
Solder Paste ◽  
Wafer Level ◽  
Solder Alloys ◽  
Flip Chips ◽  
Fine Pitch ◽  
Solder Bumps ◽  
Cost Efficient

The most important technology driver in the electronics industry is miniaturization mainly driven by size reduction on wafer level and cost. One of the interconnection technologies for fine pitch applications with the potential for highest integration and cost savings is Flip Chip technology. The commonly used method of generating fine pitch solder bumps is by electroplating the solder. This process is difficult to control or even impossible if it comes to ternary or quaternary alloys. The work described in this study addresses the limitations of existing bumping technologies by enabling low-cost, fine pitch bumping and the use of a very large variety of solder alloys. This flexibility in the selection of the solder materials and UBM stacks is a large advantage if it is essential to improve temperature cycling resistance, drop test resistance, or to increase electromigration lifetime. The technology allows rapid changeover between different low melting solder alloys. Tighter bump pitches and a better bump quality (no flux entrapment) are achievable than with screen printing of solder paste. Because no solder material is wasted, the material costs for precious metal alloys like Au80Sn20 are much lower than with other bumping processes. Solder bumps with a diameter between to date 30 μm and 500 μm as well as small and large batches can be manufactured with one cost efficient process. To explore this potential, cost-efficient solder bumping and automated assembly technologies for the processing of Flip Chips have been developed and qualified. Flip Chips used in this study are 10 mm by 10 mm in size, have a pitch of 100 μm and a solder ball diameter of 30 μm, 40 μm or 50μm, respectively. Wafer level solder application has been done using wafer level solder sphere transfer process or solder sphere jetting technology, respectively. The latter tool has been used for many years in the wafer level packaging industry for both Flip Chip and chip scale packaging applications. It is commonly known in the industry as a solder ball bumping equipment. For the described work the process was scaled down for processing solder spheres with a diameter of 30 μm what was never done before that way worldwide. The research has shown that the underfill process is one of the most crucial factors when it comes to Flip Chip miniaturization for high reliability applications. Therefore, high performance underfill material was qualified initially [1]. Final long term reliability testing has been done according to MIL-STD883G, method 1010.8, condition B up to thirteen thousand cycles with excellent performance of the highly miniaturized solder joints. SEM/EDX and other analysis techniques will be presented. Additionally, an analysis of the failure mechanism will be given and recommendations for key applications and further miniaturization will be outlined.

No Flow Underfill Process Development for Fine Pitch Flip Chip Silicon to Silicon Wafer Level Integration

2010 ◽  
Vol 2010 (DPC) ◽  
pp. 000708-000735 ◽  
Author(s):  
Zhaozhi Li ◽  
John L. Evans ◽  
Paul N. Houston ◽  
Brian J. Lewis ◽  
Daniel F. Baldwin ◽  
...  
Keyword(s):  
High Performance ◽  
Flip Chip ◽  
Process Development ◽  
Low Cost ◽  
Three Dimensional ◽  
High Yield ◽  
Process Time ◽  
Assembly Process ◽  
Wafer Level ◽  
Fine Pitch

The industry has witnessed the adoption of flip chip for its low cost, small form factor, high performance and great I/O flexibility. As the Three Dimensional (3D) packaging technology moves to the forefront, the flip chip to wafer integration, which is also a silicon to silicon assembly, is gaining more and more popularity. Most flip chip packages require underfill to overcome the CTE mismatch between the die and substrate. Although the flip chip to wafer assembly is a silicon to silicon integration, the underfill is necessary to overcome the Z-axis thermal expansion as well as the mechanical impact stresses that occur during shipping and handling. No flow underfill is of special interest for the wafer level flip chip assembly as it can dramatically reduce the process time as well as bring down the average package cost since there is a reduction in the number of process steps and the dispenser and cure oven that would be necessary for the standard capillary underfill process. Chip floating and underfill outgassing are the most problematic issues that are associated with no flow underfill applications. The chip floating is normally associated with the size/thickness of the die and volume of the underfill dispensed. The outgassing of the no flow underfill is often induced by the reflow profile used to form the solder joint. In this paper, both issues will be addressed. A very thin, fine pitch flip chip and 2x2 Wafer Level CSP tiles are used to mimic the assembly process at the wafer level. A chip floating model will be developed in this application to understand the chip floating mechanism and define the optimal no flow underfill volume needed for the process. Different reflow profiles will be studied to reduce the underfill voiding as well as improve the processing yield. The no flow assembly process developed in this paper will help the industry understand better the chip floating and voiding issues regarding the no flow underfill applications. A stable, high yield, fine pitch flip chip no flow underfill assembly process that will be developed will be a very promising wafer level assembly technique in terms of reducing the assembly cost and improving the throughput.

Reduction of Thermal Stress - Part II: Passivation Thickness Optimization of FLATPV Surface Bump Design

2017 ◽  
Vol 2017 (1) ◽  
pp. 000508-000512
Author(s):  
Raj Sekar Sethu ◽  
Salil Hari Kulkarni ◽  
How Ung Ha ◽  
Kok Heng Soon
Keyword(s):  
Flip Chip ◽  
Coefficient Of Thermal Expansion ◽  
Passivation Layer ◽  
Fracture Rate ◽  
Thickness Optimization ◽  
Wafer Level ◽  
Passivation Layers ◽  
Solder Balls ◽  
Interaction Stress ◽  
Underfill Material

Abstract Surface undulations on semiconductor devices can increase chip package interaction stress that leads to possible passivation cracking. This is especially so for flip chip interconnects which have solder balls that are in contact with the passivation layer. The solder balls have a larger Coefficient of Thermal Expansion (CTE) compared to the passivation layers and this can lead to increase in fracture rate especially during reflow cooling. The other factor is the underfill material. The flat passivation design can reduce the chip package interaction for underfill material but it needed to be evaluated numerically for wafer level stress before being touted as a solution towards reducing passivation cracks. In Part II of this series of papers, the flat passivation layer thicknesses were numerically simulated and modified using response surface methodology design of experiments (RSM DOE) techniques. The optimized passivation layer thickness showed decreased stress which was validated using a simulation confirmation run.

Three-Dimensional Integration Technology for Advanced Focal Planes

2008 ◽  
Vol 1112 ◽  
Author(s):  
Craig Lewis Keast ◽  
Brian Aull ◽  
James Burns ◽  
Chenson Chen ◽  
Jeff Knecht ◽  
...  
Keyword(s):  
Focal Plane ◽  
Three Dimensional ◽  
Focal Plane Arrays ◽  
Silicon On Insulator ◽  
Wafer Level ◽  
Integration Technology ◽  
Electrical Interconnection ◽  
Circuit Integration ◽  
Micrometer Scale ◽  
Soi Technology

AbstractWe have developed a three-dimensional (3D) circuit integration technology that exploits the advantages of silicon-on-insulator (SOI) technology to enable wafer-level stacking and micrometer-scale electrical interconnection of fully fabricated circuit wafers. This paper describes the 3D technology and discusses some of the advanced focal plane arrays that have been built using it.

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